JPS5947494B2 - surface acoustic wave filter - Google Patents

surface acoustic wave filter

Info

Publication number
JPS5947494B2
JPS5947494B2 JP772077A JP772077A JPS5947494B2 JP S5947494 B2 JPS5947494 B2 JP S5947494B2 JP 772077 A JP772077 A JP 772077A JP 772077 A JP772077 A JP 772077A JP S5947494 B2 JPS5947494 B2 JP S5947494B2
Authority
JP
Japan
Prior art keywords
frequency
delay time
amplitude
group delay
surface acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP772077A
Other languages
Japanese (ja)
Other versions
JPS5394155A (en
Inventor
剛 間
純 山田
仁 柳原
良彦 野呂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP772077A priority Critical patent/JPS5947494B2/en
Publication of JPS5394155A publication Critical patent/JPS5394155A/en
Publication of JPS5947494B2 publication Critical patent/JPS5947494B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves

Description

【発明の詳細な説明】 本発明は、群遅延特性を改善して小型化をはかった弾性
表面波フィルタに関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface acoustic wave filter that has improved group delay characteristics and is miniaturized.

電子回路部品の一要素であるフィルタは、種々な物理的
、化学的現象を利用して種々のものが開発され実用化さ
れているが、一般に主要な二種類の特性が重要視される
Various types of filters, which are elements of electronic circuit components, have been developed and put into practical use by utilizing various physical and chemical phenomena, but two main types of characteristics are generally considered important.

その一つは振幅の周波数特性であり、その二つは群遅延
時間の周波数特性であり、それらの要求仕様に合致する
ように個々の特性を決めて実用に供している。
One of these is the frequency characteristic of amplitude, and the second is the frequency characteristic of group delay time, and each characteristic is determined to meet the required specifications and put into practical use.

従来使用されて来たフィルタとして、例えば個体フィル
タをとっても、上記両方の特性を全く自由に制御して最
も好しいフィルタ特性を得るには、その利用する物理的
化学的現象の本質に起因した困難性を伴うことが多く、
自由にならない場合が多い。
Even with conventionally used filters, such as solid filters, it is difficult to control both of the above characteristics completely and obtain the most preferable filter characteristics due to the nature of the physical and chemical phenomena used. Often accompanied by sex,
In many cases, it is not possible to be free.

これに対して圧電物質の表面を伝播する弾性表面波を利
用した、いわゆる弾性表面波フィルタには、その特徴の
一つとして、上記の両特性が比較的独立に制御できる利
点を有しており、例えば、振幅の周波数特性が非常に複
雑に変化するフィルタで、かつ群遅延時間の周波数特性
が非常に平坦なものも原理的に得やすい。
On the other hand, so-called surface acoustic wave filters that utilize surface acoustic waves propagating on the surface of piezoelectric materials have the advantage that both of the above characteristics can be controlled relatively independently. For example, in principle, it is easy to obtain a filter in which the frequency characteristic of amplitude changes in a very complex manner, and the frequency characteristic of group delay time is very flat.

しかしながら、さらに解明して行くと振幅の周波数特性
が複雑に変化するフィルタで、群遅延時間の周波数特性
を全周波数帯域にわたって平坦に保つように設計すると
、弾性表面波フィルタの入力端乃至出力端を構成する、
いわゆるインターディジタル・トランスジューサc以下
IDTと略記する。
However, further investigation reveals that if a filter is designed to keep the frequency characteristics of the group delay time flat over the entire frequency band in a filter whose amplitude frequency characteristics change in a complex manner, the surface acoustic wave filter's input end or output end Configure,
The so-called interdigital transducer c is abbreviated as IDT.

)の電極対数を非常に多く必要とし、種々の不要な2次
効果が増大するばかりでなく、フィルタ形状の小型化も
はかれないという欠点を有する。
) requires a very large number of electrode pairs, which not only increases various unnecessary secondary effects, but also has the disadvantage that it is not possible to reduce the size of the filter.

具体例としてテレビ受信機の中間周波フィルタをとりあ
げ、図面にしたがって説明すると、第1図は従来のフィ
ルタの振幅の周波数特性1(以下振幅特性と略称する)
と群遅延時間の周波数特性2(以下遅延時間特性と略称
)とを示すもので、図かられかるように群遅延時間の周
波数特性2は平坦である。
Taking an intermediate frequency filter for a television receiver as a specific example, and explaining it according to the drawings, Fig. 1 shows the amplitude frequency characteristic 1 (hereinafter abbreviated as amplitude characteristic) of a conventional filter.
and the frequency characteristic 2 of the group delay time (hereinafter abbreviated as delay time characteristic).As can be seen from the figure, the frequency characteristic 2 of the group delay time is flat.

テレビ受信機の中間周波数フィルタの振幅特性1は、音
声キャリア周波数f8付近で第1図の曲線Aに示すごと
く中心周波数f。
The amplitude characteristic 1 of the intermediate frequency filter of the television receiver has a center frequency f as shown by curve A in FIG. 1 near the audio carrier frequency f8.

に関して非対称振幅特性であることが望ましいが、その
ためには重み付けされる入力側IDTの電極対数(最大
電極番号の半分に等しい)は70対程度必要である。
It is desirable to have an asymmetric amplitude characteristic with respect to the input voltage, but for this purpose, the number of electrode pairs of the input side IDT to be weighted (equal to half the maximum electrode number) is required to be about 70 pairs.

この場合出力IDTの電極は正規形で15対数とした。In this case, the electrodes of the output IDT were normal and 15 logarithmic.

さらに、入力側IDTの電極対数を50対とした場合に
は第1図図示の振幅特性1は曲線Bに示すごとくなり、
中心周波数f。
Furthermore, when the number of electrode pairs of the input side IDT is 50, the amplitude characteristic 1 shown in FIG. 1 becomes as shown by curve B,
Center frequency f.

に関して対称に近くなり、単純に電極対数を削減しただ
けでは所望の振幅特性を得ることは困難である。
It is difficult to obtain desired amplitude characteristics by simply reducing the number of electrode pairs.

すなわち、第1図の曲線Aに示すごとき複雑な振幅特性
を実現するためには入力側IDTとして70対程度電極
対を設ける必要があり弾性表面波フィルタの小型化がは
かれない。
That is, in order to realize a complex amplitude characteristic as shown by curve A in FIG. 1, it is necessary to provide about 70 pairs of electrodes as the input side IDT, which makes it impossible to downsize the surface acoustic wave filter.

本発明の目的は、上記した従来技術の欠点をなくし、小
型化に適した弾性表面波フィルタを提供するにある。
An object of the present invention is to eliminate the drawbacks of the prior art described above and to provide a surface acoustic wave filter suitable for miniaturization.

本発明は、弾性表面波フィルタの群遅延時間の周波数特
性が振幅の周波数特性と独立に決められることを利用し
、振幅の周波数特性で振幅の3dB低下帯域幅内では平
坦な群遅延時間の周波数特性をもち、振幅の20dB低
下している周波数の上側領域および下側領域のうち、少
なくとも一方における群遅延時間が上記平坦領域の値に
くらべて群遅延時間差として、100+1秒以上を進ま
せるかまたは遅れさせるべく、相互にさし込んだ櫛状電
極の交叉幅の分布において主周波数波動に対応する交叉
幅分布成分の最大交叉幅位置と主な副周波数波動に対応
する交叉幅分布成分の最大交叉幅位置との間隔が上記群
遅延時間差の100nsと弾性表面波速度との積に略等
しい間隔以上に分離して合成した交叉幅分布をなすよう
にすることにより、残余の周波数帯域内での群遅延時間
の周波数特性を落とし、その負担分をIDTの電極対数
の削減として実現するものである。
The present invention utilizes the fact that the frequency characteristic of the group delay time of a surface acoustic wave filter is determined independently of the frequency characteristic of the amplitude. The group delay time in at least one of the upper and lower frequency regions where the amplitude is reduced by 20 dB is advanced by 100+1 seconds or more as a group delay time difference compared to the value in the flat region, or In order to delay, in the distribution of the intersection widths of the comb-shaped electrodes inserted into each other, the maximum intersection width position of the intersection width distribution component corresponding to the main frequency wave and the maximum intersection of the intersection width distribution component corresponding to the main sub-frequency wave. By creating a cross-width distribution that is separated and synthesized by an interval at least equal to the product of the group delay time difference of 100 ns and the surface acoustic wave velocity, the group within the remaining frequency band is This reduces the frequency characteristics of the delay time and realizes the burden by reducing the number of electrode pairs of the IDT.

以下その原理を図面を用いて簡単に説明する。The principle will be briefly explained below using the drawings.

第2図は説明の便宜上想定した振幅の周波数特性と群遅
延時間の周波数特性とのモデル特性を同一座標軸上に示
した説明図である。
FIG. 2 is an explanatory diagram showing model characteristics of the frequency characteristics of amplitude and the frequency characteristics of group delay time, which are assumed for convenience of explanation, on the same coordinate axis.

図中1は振幅特性、鼻は群遅延時間特性を示し、第3図
a、b、cは第2図図示のモデル特性を周波数帯域毎に
振幅31.32,33と群遅延時間41.42.43と
に分割して成分特性として示したもので、後述の数学的
表現に内在する積分定理からその可能性は容易に示され
る。
In the figure, 1 shows the amplitude characteristics, and the nose shows the group delay time characteristics, and Fig. 3 a, b, and c show the model characteristics shown in Fig. 2 for each frequency band with amplitudes of 31.32, 33 and group delay times of 41.42. This possibility is easily shown from the integral theorem inherent in the mathematical expression described below.

さて、一般にある回路の周波数特性を知るには、その回
路にあらゆる周波数成分を含む信号、すなわちインパル
スを加え、そのレスポンスの周波数成分、すなわちフー
リエ変換を見ればよい。
Now, generally speaking, to know the frequency characteristics of a certain circuit, it is sufficient to apply a signal containing all frequency components, that is, an impulse, to the circuit, and then look at the frequency components of the response, that is, the Fourier transform.

逆に振幅特性2位相特性(群遅延時間の周波数特性が与
えられていれば、群遅延時間の周波数による積分で示さ
れる)をもつような回路を得るには、フーリエ変換の逆
変換を求め、そのインパルス・レスポンスをもつように
回路を設計すればよいことは明らかである。
Conversely, in order to obtain a circuit with amplitude characteristics and two-phase characteristics (if the frequency characteristics of the group delay time are given, it can be expressed as the integral of the group delay time over the frequency), find the inverse transform of the Fourier transform, It is clear that the circuit can be designed to have that impulse response.

そこで、上記の各成分特性毎にインパルス・レスポンス
関数を得るためのフーリエ逆変換をほどこすと、その結
果得られるインパルス・レスポンス関数は第2図のモデ
ル特性に関して、群遅延時間t1を有し、かつ振幅がa
および1に対応する第1および第2の波動の2つ(それ
ぞれ第3図a。
Therefore, when an inverse Fourier transform is applied to obtain an impulse response function for each of the above component characteristics, the resulting impulse response function has a group delay time t1 with respect to the model characteristics shown in FIG. and the amplitude is a
and two of the first and second waves corresponding to 1 (respectively Fig. 3a).

bの右側に示す)と群遅延時間t2を有し、かつ振幅が
1に対応する第3の波動(第3図Cの右側に示す)の一
次結合で示されることがわかる。
(shown on the right side of FIG. 3C) and a third wave (shown on the right side of FIG. 3C) having group delay time t2 and having an amplitude of 1.

さらに各項の波動の特徴を列記すると、第1の波動はt
=t1で最大振幅をもつ波束であり、第2波動はt=t
1で最大振幅をもつ波束である。
Further listing the wave characteristics of each term, the first wave is t
= wave packet with maximum amplitude at t1, and the second wave is at t = t
1 is the wave packet with the maximum amplitude.

第3波動は略t=t2で最大振幅をもつ波束である。The third wave is a wave packet having a maximum amplitude at approximately t=t2.

それ故に第2の波動を主周波数波動とし、第1および第
3の波動を副周波数波動としたとき、群遅延時間t1に
対して同t2が大きい影響を有するのは第3の波動であ
り、上記したごと〈群遅延時間差路t2−t□が実動的
な影響を有するものであることがわかる。
Therefore, when the second wave is a main frequency wave and the first and third waves are sub-frequency waves, it is the third wave that has a large influence on the group delay time t1, as t2 has a large effect, As described above, it can be seen that the group delay time difference path t2-t□ has a practical influence.

一方インパルス・レスポンス(分布)は弾性表面波フィ
ルタの櫛状電極の交叉幅(分布)と比例関係にあるので
、上記のように振幅と群遅延時間との周波数特性が決ま
ると、弾性表面波フィルタの電極の規模(大きさ)が求
められる。
On the other hand, the impulse response (distribution) is proportional to the intersection width (distribution) of the comb-shaped electrodes of the surface acoustic wave filter, so once the frequency characteristics of the amplitude and group delay time are determined as above, the surface acoustic wave filter The scale (size) of the electrode is required.

このことは、必要な群遅延時間の周波数帯域はそのま\
にし、他の周波数帯域については群遅延時間差を利用し
て電極規模を小さくするために変化させる。
This means that the frequency band of the necessary group delay time remains the same.
The other frequency bands are changed in order to reduce the electrode size using the group delay time difference.

換言すれば群遅延時間差を目的に適するように適当に決
めて電極規模を小型化するために交差幅分布の裾部を削
除することができることを示している。
In other words, it is shown that it is possible to appropriately determine the group delay time difference to suit the purpose and eliminate the tail of the cross width distribution in order to downsize the electrode scale.

以上述べたことは第2図に示したモデル特性に関してで
あるが、実用に供される弾性表面波フィルタの要求特性
に対しても同様にこ\で述べた基本的な技術的思想は本
質的に適用されるものであることは容易に理解されるこ
とであろう。
What has been described above is related to the model characteristics shown in Figure 2, but the basic technical ideas described here are also essential for the required characteristics of surface acoustic wave filters used in practical applications. It will be easily understood that this applies to

以下に本発明による実施例を図面を用いて説明する。Embodiments according to the present invention will be described below with reference to the drawings.

第4図はa、bは本発明による実施例である入力側ID
Tの形状寸法を示すもので、第4図aは電極番号に対す
るIDT交叉幅(任意スケール)の関係を示し、第4図
すは電極番号に対する電極ピッチの関係を示すものであ
る。
In Fig. 4, a and b are input side IDs which are embodiments according to the present invention.
FIG. 4A shows the relationship between the IDT crossover width (arbitrary scale) and the electrode number, and FIG. 4A shows the relationship between the electrode pitch and the electrode number.

電極対数はIDT番号の最大の1/2であるから50対
である。
The number of electrode pairs is 50, which is 1/2 of the maximum IDT number.

この場合、出力側IDTは正規形、電極対数が15対で
ある。
In this case, the output side IDT is a normal type, and the number of electrode pairs is 15.

第5図は第4図図示の形状寸法を有するものの振幅特性
5および群遅延時間特性6を示すもので、同図から明ら
かな如く振幅特性5で3dB低下周波数帯域幅における
群遅延時間は平坦で、20dB低下周波数の低周波数側
帯域および高周波数側帯域における群遅延時間は上記平
坦領域に比較して約100ns遅れる弾性表面波フィル
タであり、同時に中心波数f。
FIG. 5 shows the amplitude characteristic 5 and group delay time characteristic 6 of a device having the shape and dimensions shown in FIG. , the group delay time in the low frequency side band and the high frequency side band of the 20 dB lower frequency is a surface acoustic wave filter that is delayed by about 100 ns compared to the above-mentioned flat region, and at the same time, the center wave number f.

に関して非対称振幅特性5を有している。It has an asymmetric amplitude characteristic 5 with respect to

電極対数が30チ弱減っており、実質30チの小型化が
達成されている。
The number of electrode pairs has been reduced by a little less than 30 inches, and the size has actually been reduced by 30 inches.

第6図は、本発明の他の実施例によるもので、入力側I
DTは50対の電極対数を有し、出力側IDTは正規形
15対の構成である場合の振幅特性7と群遅延時間特性
8を示す特性図である。
FIG. 6 shows another embodiment of the invention, in which the input side I
FIG. 7 is a characteristic diagram showing amplitude characteristics 7 and group delay time characteristics 8 when the DT has 50 pairs of electrodes and the output side IDT has a configuration of 15 normal pairs.

すなわち、振幅特性の3dB低下周波数帯域幅における
群遅延時間は平坦であり、20dB低下周波数の低周波
数帯域での群遅延時間は平坦領域にくらべて約750n
s進む弾性表面波フィルタであり、同時に中心周波数f
In other words, the group delay time in the frequency bandwidth where the amplitude characteristic is reduced by 3 dB is flat, and the group delay time in the low frequency band where the frequency is reduced by 20 dB is approximately 750n compared to the flat region.
It is a surface acoustic wave filter that advances by s, and at the same time has a center frequency f
.

に関して非対称振幅特性7を有していることがわかる。It can be seen that it has an asymmetric amplitude characteristic 7 with respect to FIG.

また、前実施例同様30%弱の小型化がはかられている
Further, as in the previous embodiment, the size is reduced by about 30%.

したがって、フィルタ設計における群遅延時間特性に関
する従来の技術的思想に根本的な検討を加え、その結果
を用いて弾性表面波フィルタに関する強い要求である非
対称振幅特性とIDT電極対数の削減、すなわち小型化
とを同時に実現できたものである。
Therefore, we conducted a fundamental study on the conventional technical ideas regarding group delay time characteristics in filter design, and used the results to address the strong requirements for surface acoustic wave filters, such as asymmetric amplitude characteristics and a reduction in the number of IDT electrode pairs, i.e., miniaturization. This was achieved at the same time.

なお以上述べたことは、入力側IDTと出力側IDTと
を交換してもその両方向性から同様の結果をうるように
できることはあらためて述べるまでもないことである。
It goes without saying that even if the input side IDT and the output side IDT are exchanged, the same result can be obtained due to their bidirectional nature.

以上述べたことでも明らかな如く、従来のフィルタ設計
における技術的思想に根本的な検討を加え、その知見を
もとにして二次的効果の影響をおさえ、かつ非対称な振
幅特性を有して小型化をはかったものであり、さらに具
体的には群遅延時間を必要な周波数帯域でのみ平坦にし
、それの不必要な周波数帯域では平坦な群遅延時間値よ
りも適宜大きくし、あるいは小さくして、群遅延時間を
全周波数帯域にわたり一定、すなわち平坦にしたフィル
タよりも電極対数を減少して小型化をはかり、かつ所望
の複雑な振幅特性を得たものであり、今後ますます実用
化が進むであろう弾性表面波フィルタの設計技術、ひい
ては利用技術の発展に対する寄与には太きいものがある
As is clear from the above, we have made a fundamental study of the technical ideas in conventional filter design, and based on that knowledge, we have created a filter that suppresses the influence of secondary effects and has asymmetric amplitude characteristics. This is aimed at miniaturization, and more specifically, the group delay time is made flat only in the necessary frequency band, and in unnecessary frequency bands, the group delay time value is made larger or smaller as appropriate than the flat group delay time value. The number of electrode pairs is reduced compared to a filter with a constant group delay time over the entire frequency band, that is, a flat filter, which reduces the number of electrode pairs and achieves the desired complex amplitude characteristics. There are significant contributions to be made to the advancement of surface acoustic wave filter design technology and, ultimately, to the development of usage technology.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の中間周波フィルタの振幅の周波数特性と
群遅延時間の周波数特性表示図、第2図は本発明の原理
説明のために用いた振幅および群遅延時間のモデル周波
数特性表示図、第3図ab、cは第2図図示のモデル特
性を振幅および群遅延時間に関して周波数帯域成分に分
割した特性説明図とその各周波数帯域成分毎に予測され
る弾性表面波波動模型図、第4図a、bはそれぞれ本発
明による実施例の弾性表面波フィルタの電極番号とその
交叉幅、およびピッチの設計寸法図、第5図は第4図図
示の設計寸法を有する実施例の振幅および群遅延時間の
周波数特性図、第6図は他の実施例の同様の周波数特性
図である。 1.3,5.7・・・・・・振幅の周波数特性、2.土
。 6.8・・・・・・群遅延時間の周波数特性、31,3
2゜33・・・・・・振幅の周波数特性lの周波数帯域
成分毎の振幅特性、41.42.43・・・・・・群遅
延時間の周波数特性図の周波数帯域成分毎の群遅延時間
特性、A・・・・・・非対称振幅特性の特徴部、B・・
・・・・や\i 対称な振幅特性の特徴部。
FIG. 1 is a frequency characteristic diagram of the amplitude and group delay time of a conventional intermediate frequency filter, and FIG. 2 is a model frequency characteristic diagram of the amplitude and group delay time used to explain the principle of the present invention. Figures 3 ab and 3 c are explanatory diagrams of the model characteristics shown in Figure 2 divided into frequency band components with respect to amplitude and group delay time, and surface acoustic wave wave model diagrams predicted for each frequency band component. Figures a and b are design dimension diagrams of electrode numbers, their intersection widths, and pitches, respectively, of surface acoustic wave filters according to embodiments of the present invention, and Figure 5 is amplitude and group diagrams of embodiments having the design dimensions shown in Figure 4. A frequency characteristic diagram of delay time, FIG. 6 is a similar frequency characteristic diagram of another embodiment. 1.3, 5.7... Frequency characteristics of amplitude, 2. soil. 6.8... Frequency characteristics of group delay time, 31,3
2゜33...Amplitude characteristic for each frequency band component of frequency characteristic l of amplitude, 41.42.43......Group delay time for each frequency band component of frequency characteristic diagram of group delay time Characteristics, A... Features of asymmetric amplitude characteristics, B...
・・・・\i Features of symmetrical amplitude characteristics.

Claims (1)

【特許請求の範囲】[Claims] 1 圧電体基板と、圧電体基板上に設けられた入力側イ
ンターディジタル・トランスジューサと出力側インター
ディジタル・トランスジューサとからなり、振幅減衰が
3d似内の第1周波数領域と、第1周波数領域をはさみ
、振幅減衰が20dB以上の第2.第3周波数領域とか
らなる振幅波数特性を呈する弾性表面波フィルタにおい
て、第1周波数領域の群遅延時間と第2.第3周波数領
域の少なくとも一方の領域の群遅延時間との差が100
±1秒以上となるようにインターディジタル・トランス
ジューサの電極が構成されることを特徴とする弾性表面
波フィルタ。
1 Consists of a piezoelectric substrate, an input-side interdigital transducer, and an output-side interdigital transducer provided on the piezoelectric substrate, and sandwiching the first frequency region and the first frequency region in which the amplitude attenuation is within 3D. , the second one with an amplitude attenuation of 20 dB or more. A surface acoustic wave filter exhibiting an amplitude wavenumber characteristic consisting of a group delay time in the first frequency domain and a second frequency domain. The difference between the group delay time of at least one of the third frequency regions is 100
A surface acoustic wave filter characterized in that electrodes of an interdigital transducer are configured to have a time difference of ±1 second or more.
JP772077A 1977-01-28 1977-01-28 surface acoustic wave filter Expired JPS5947494B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP772077A JPS5947494B2 (en) 1977-01-28 1977-01-28 surface acoustic wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP772077A JPS5947494B2 (en) 1977-01-28 1977-01-28 surface acoustic wave filter

Publications (2)

Publication Number Publication Date
JPS5394155A JPS5394155A (en) 1978-08-17
JPS5947494B2 true JPS5947494B2 (en) 1984-11-19

Family

ID=11673555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP772077A Expired JPS5947494B2 (en) 1977-01-28 1977-01-28 surface acoustic wave filter

Country Status (1)

Country Link
JP (1) JPS5947494B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10955309B2 (en) 2017-02-13 2021-03-23 Nidec Copal Electronics Corporation Torque sensor
US11041557B2 (en) 2017-02-17 2021-06-22 Nidec-Shimpo Corporation Speed reducer with electric motor

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648708A (en) * 1979-09-28 1981-05-02 Hitachi Ltd Surface elastic wave filter
JPS641793Y2 (en) * 1979-11-02 1989-01-17
JPS5844808A (en) * 1981-09-11 1983-03-15 Toshiba Corp Surface acoustic wave device
GB2157522B (en) * 1984-04-09 1987-08-19 Philips Electronic Associated Electrical filter comprising an acoustic surface wave device, and method of manufacturing such a filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10955309B2 (en) 2017-02-13 2021-03-23 Nidec Copal Electronics Corporation Torque sensor
US11041557B2 (en) 2017-02-17 2021-06-22 Nidec-Shimpo Corporation Speed reducer with electric motor

Also Published As

Publication number Publication date
JPS5394155A (en) 1978-08-17

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