JPS5946113A - Sealing method of gas treating apparatus - Google Patents

Sealing method of gas treating apparatus

Info

Publication number
JPS5946113A
JPS5946113A JP57155057A JP15505782A JPS5946113A JP S5946113 A JPS5946113 A JP S5946113A JP 57155057 A JP57155057 A JP 57155057A JP 15505782 A JP15505782 A JP 15505782A JP S5946113 A JPS5946113 A JP S5946113A
Authority
JP
Japan
Prior art keywords
water
solid content
solid
liquid
adsorbent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57155057A
Other languages
Japanese (ja)
Inventor
Setsuo Omoto
節男 大本
Yoshibumi Ito
義文 伊藤
Masakazu Onizuka
鬼塚 雅和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP57155057A priority Critical patent/JPS5946113A/en
Publication of JPS5946113A publication Critical patent/JPS5946113A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the corrosion or the like of a water sealing apparatus member, by adjusting the pH and the solid content of water used in sealing water provided in exhaust gas line. CONSTITUTION:A part of recirculated water is withdrawn from the emitting side of a recirculation pump 11 in order to adjust the pH and the solid content of said recirculated water and the withdrawn liquid is supplied to a solid-liquid separator 14 to separate and remove solid components such as fly ash, an adsorbent powder or the like while the solid components after separation are discharged out of the system and the liquid is sent to a pH adjusting tank 15. The liquid in the pH adjusting tank 15 is neutralized by an alkali solution corresponding to the acidic gas dissolved in sealing water from exchaust gas D to return the pH to neutral and, herein, moisture and steam discharged out of system along with the solid components separated by the solid-liquid separator 14 are replenished. Because the sealing water made neutral in the pH adjusting tank 15 can be repeatedly used, it is returned to a sealing water holding tank 10.

Description

【発明の詳細な説明】[Detailed description of the invention]

ある,1 本件出願人がすでに提案したカス処゛理装置を第1.2
図により説明すると.(、、1か重1白l1曲. (1
+)か同垂直IIil+ ta)に軸受(0を介して1
目目]ムii能に111!イJけた回転台板,(d)か
同台板(lI)を回転of能に支持する支持ローラ,(
e)か同台板(I+)の外周部に41切vt.nを介し
て円環状に配設した複秒の吸着剤充填室,(g+)(g
2)  が同吸着剤充j(i室(C・)の中央部の内外
面に設けたバンヂブしー)・、 (h)がLijL 7
”1板(1))を矢印(x)方向に間歇的に駆動する駆
動装置171(Δ)が吸着ノーン. (+1)が脱着ノ
ーン.+(iが冷却ノーン.い)が脱着ゾーン(13)
を他のIQnノーノーΔ)及び冷却ノーン(C)から仕
切る仕切”j< 、(、il (10 (+1 (Il
l)か流体通路部材、 (、、)が」ユニ仕切壁い)に
設けたー・−ル装置、 (、、)が上3己流体通路部イ
イfkill側に設けたシール装置、 (11+ (V
+ (lvl (X) (、ylがカス処理装置内のり
lカスと外気とのシールをするノール釣菌、 (P)が
上記脱着ゾーン(13)の上方に設けた新設着剤装入装
置で、同装入装置(IIIは、ホノ”(pl)と同ホッ
パ(pl)の下部抽出口に設けたバルブ(p2)とンユ
−1−(p3)と伸縮バイブ(P4)と同伸縮ツマイブ
(P4)を伸縮させるシリンタ(P5)とを有している
。また(9)が」二組脱着ゾーン(I3)の下方に設+
jだ旧吸着剤取出装館で、同取出装置fq+は、二段の
ホノi<(qlXq2)  を具えている。また(1)
が前記吸着剤充填室(e)の下部に設けたロータリノく
ルブ、(S)がロータリバルブ用駆動装置、(
Yes, 1. The waste processing device already proposed by the applicant is described in Section 1.2.
Let me explain with a diagram. (,, 1 or heavy 1 white l1 song. (1
+) or the same vertical IIil + ta) bearing (1 through 0)
[Meme] 111 in Muii Noh! (d) or support rollers that rotatably support the same base plate (lI), (
e) or 41 cuts vt. on the outer periphery of the base plate (I+). A multi-second adsorbent filling chamber arranged in an annular manner via n, (g+)(g
2) is filled with the same adsorbent (a bandage installed on the inner and outer surfaces of the central part of chamber i (C)), (h) is LijL 7
The drive device 171 (Δ) that intermittently drives the plate (1) in the direction of the arrow (x) is the adsorption zone. (+1) is the desorption zone. + (i is the cooling zone) is the desorption zone (13). )
from other IQn no no Δ) and cooling noon (C) ``j< , (, il (10 (+1 (Il
(11+ V
+ (lvl (X) (, yl is the noll fishing bacteria that seals the glue scum in the scum processing device and the outside air, (P) is the newly installed adhesive charging device installed above the desorption zone (13), The charging device (III) consists of a valve (p2) installed at the lower extraction port of the hopper (pl), a telescopic vibrator (P4), a valve (p2) installed at the lower extraction port of the hopper (pl), a telescopic vibrator (P4), and a telescopic tube (P4). ) and a cylinder (P5) that expands and contracts the
In the former adsorbent extraction building, the extraction device fq+ is equipped with two stages of honoi<(qlXq2). Also (1)
is a rotary valve provided at the bottom of the adsorbent filling chamber (e), (S) is a rotary valve drive device, (

【)が前
記吸着剤充填室(c)の最下部に設けた気体気密ノ〈ル
ブで、シール装置(rl)(o)を充填室(e)側か°
ら晧して充填室(e)側を回転可能にし1次いで駆動装
置(1])を作動し。 充填室(el側を矢印(,1方向に回転して、−いまま
で吸着ゾーンFA)に位置していた充填室(C)の1つ
を脱着ノーン(「3)に、脱着シーツ(1))にイ\’
L ii”lシていた充填室((・)を冷却シーツ(C
) iこ、冷ノ、11ノー−((”)にイri島”して
いた充j]°(室fe)を1ν、l/若ソノ−2割に、
とい・)ように移動させ9次いで−・−ルpl; F/
置++) (++)を充IL’i室((・)側に接触さ
せて、夕)部との間をノールする。 又、カス処β1!装置内のi11カスIJパノ1−ター
ノールf、、+ fv) 0)・) fx) (y)に
水を簡だすことにJ: 11 、外気とノール遮断され
ている。θ(いてIII、47; )’ −7(Δ)で
は、硫黄酸化物を含む+ 30 ′C前移のJJlカス
(1))を充Jj’i室(1) ニt’l流すせ−(+
 tJl力y、 (1+) 中o、+ L’l(,1,
Z’ fr化物を吸着剤に吸着させる。また展:j 7
+”)−ノ(11)では、ロータリバルブ(r)を1駆
動するとともに気体気密バルブ(盲)を開いて、充kf
i室((・)1・部の++uvk着剤を取出装置fql
にす1゛出する。また11+1 眉1・;ハイーノ(P
4)を延はして充填室(Lり内に挿入するとともにバル
ブ(p2)を聞いて、ホッパ(pl)内の新1乃若剤を
充填室(elに装入し9次いで500 <; +)il
後のスチーム(B])を充填室(、j内にr1流させて
吸着剤を加熱することにより、吸着剤に付若し−Cいる
硫黄酸化物を離脱させ1次いで300℃前後のスチーl
−(1(2)を充填室te+にf!1通させて1次の移
動時まで吸着剤を300′’Ciir後の温度に保持す
る。 また冷却シーツfc)では、130℃前後のクリーンな
排カス(1・゛)を充1+i室(c)に貫流させて、吸
着剤を300℃→l 30 ”Cに冷却するようになっ
ている。 前記カス処理装置では、カス処理装置内の抽カスと外気
を遮断するウォーターノール”J W (u)tv) 
(wl (x) (y)のノール水中に酸性カス(亜硫
酸カス。 塩化水素カス、弗化水素カス等)の溶(j込みや粉Q、
(フライアッノユ、吸着剤粉)の装入か生じ、特にカス
未処理側では■】硫酸カス濃度か500〜6o O11
2Mと高< 、 SO2+120系の平衡だけでも、シ
ール水中のI31+は3以下となりウォーターノール装
置部材の腐蝕が徴しく、腐蝕が進むと1部材に穴があき
、シiル水のカス処理装置内への池水及び排カスの外気
への洩れ出し等の問題があった。 本発明は前記の問題に対処するもので各水槽中の水を循
環しながら酸1′1カス、固e物の?11′、人指に見
合った水舅を一部系外に抜き出しIJ15NI系外でl
’ It及び固形物を処理し、処理1輪の1111水を
再び循環系に繰り返し使用し、 j11カッ中に設りら
れたウォーターシール水中の1゛11及び固形分温度を
調整することを、特徴とするカス処理4.々置に係り、
その[二1的とするところは、つ4−クーノール装置部
材の扁蝕秀’e l第1l−c−さる改J′↓されタカ
ス処即装置を提(f4するこL −Q J)る、次に本
発明のカス処用1装置へ・第317.1に小す−・実施
例により説明すると、(1)は矢印(x)方向に回位回
転する垂面軸、(2)か複数の吸71剤充11’j室で
あり、(3)が硫黄酸化物を含むり1カス(1))の(
il、給側通路部材、(4)が同排カス(I))の抽出
側〕1n1部材である。また(5) (6) (ハ(8
) (9)は、す1カ又と外気とを遮断するウォーター
ノール装置であり、(5)かり1カス 凹 流 Δ二 
f′A81こ 設 け ら れ た 供 給 rll’
i  f’Jlツノ  フ 乏 υ1 出 側排カス及
び排出側す(カスと外気をe11′i「する水槽(6)
がtllカスrj流下流下膜けられた供給側り1カスと
外気を遮断する水It”i 、 (7)が排カスV↓流
−ト部に設けられた杖出側υ1ツJスと外気を遮断する
水槽(8)か吸着剤1ノl出部外側に設けられた充jJ
’i層F部0)t11カスと外気を遮断する水槽、 (
!l)か吸着剤C11出部内側に設けられた充填層下部
の抽カスと外気を遮断する水槽でJ)る。(+(lはウ
ォーターノール装置r;と別に設けられたノール水のホ
ールトクックであり、(1υはノール水循環ポンプ、Q
2Ltンール水供給側配情でJ)し、0ふはノール水戻
()側配管でありホールドタンク(10)へ循環するよ
うにな−)でいる。又(14)は、フィルター等の固液
分離装置であり、(10は液のI)11を調整するタン
ク。 OQは処理後の液をノール水ホールドタック00)に戻
すポンプである。 θ(に前記カス処理装置のノール水循環及び処理方法に
ついて説明する。排カス(I))の供給側部材(3)と
外気との間は水槽(5) ((i)により、排出側部材
(4)と外気との間は水槽(7)により、又吸着剤排出
部材と外気との間は水+t”i (8) (!りに、I
−り常に気密に遮断されている。ノール水は;1−ル)
・り/り([(多、しり、シール水循環ポノーノ(II
) V−,1: +)ノール水供給側配貨(IJを介し
て名水!1”Iに流1)[調゛j;゛シl、 −C(I
I給され、供給分は各々ノール水1+”+υ)オーバー
ノロ−配悄Jり集結L −Cオー ルl、’/ > り
(lf+) (Ci11’i I’;’jする。この循
環ノール水中には、(11カフ、(1))中の酸+6カ
スの溶解外及びフライアノノ、y+ 町6ii 人に、
よる固形分か含まれ1月−ルトクー2叫と各水槽(5)
 (fi) (7)(8) (!l) ’e Wi E
f t ル。ココ”C−717,1’、”j 水中CI
J’ I’ll及び固形分(SS)濃度を調整するため
イエζ’: ;I’ノブ(11)の吐出側より、循環水
の一部を抜き出し。 その抜き出し液を固液分1lti機(14ンに、1−リ
、 −) ’> 4アノツユ、吸谷剤扮等の固形分を分
離除去17゜外脚1F後の固形分は系外−\すl出し、
液はI’ I+調整タンク0υへ送る。+)o 、ar
、1整クンク0つて(:i jJlカス(1))中より
ノール水中に溶解した酔(’lカスに相゛1′1するア
ルカリ溶液(Na01L C++CO,el、c )で
中和することによりl’ IIを中性に戻し、又ここで
は固液分離機04)により固形分に伴ない系外に排出さ
れtコ水分及び蒸発水をT0n給する。1゛11調整ク
ンク0υで中性にされたノール水は繰り返し便用するた
め、ノール水ホールトクック00)に戻す。以上のよう
にウォーターノール水を循環しながらその一部を抜き出
し、ノール水中へ混入した酸慴カスや固形分を中和、除
去した後、液をrI′1水として循環系に戻すことによ
り、ウォーターノール装置の腐蝕が防止できるだけに限
らずノール水の経済的使用が可能となる。 第3図に示したフローノー!・で(14成されるυI煙
処理装置に石炭・重油混焼ホイラー排カス30.0OO
Nrnン11を(3fj給しノール水を循環しなから一
部を処理した結果を次に示す。 入ロυIカス条件 結果 ノール水循環流2H1,0m’/If (仝ノール水2
0 m” )処理液流f、ij    0.05 m’
/II供給側液I’側波   6.07 戻り側波pH(i、04 Na011所要f7’(+(、44mg/II (補給
水1. O/l’/11 )固形分濃度   0241
〜・1,3ら(R111j−、i、、 + 20 g、
’II )
[) is a gas-tight valve provided at the bottom of the adsorbent filling chamber (c), and the sealing device (rl) (o) is connected to the filling chamber (e) side.
Then, the filling chamber (e) side was made rotatable and the drive device (1) was then activated. Filling chamber (el side with arrow (, rotate in 1 direction - until now adsorption zone FA) One of the filling chambers (C) located in the desorption zone (3), and desorption sheet (1) ) ni \'
The filling chamber ((・), which had been closed, was replaced with a cooling sheet (C).
) iko, cold, 11 no-((") had been in charge") °(room fe) to 1ν, l/wakasono-20%,
9 then ---le pl; F/
Place ++) (++) in contact with the full IL'i chamber ((・) side, and connect between it and the evening) part. Also, scum β1! In order to drain the water into the i11 gas IJ pano 1-turnol f,, + fv) 0), fx) (y) in the device, it is cut off from the outside air. At θ(III, 47; )' -7 (Δ), fill the JJl sludge containing sulfur oxides at +30'C (1)) and let it flow into the Jj'i chamber (1). (+
tJl force y, (1+) medium o, + L'l(,1,
The Z′ fr compound is adsorbed onto an adsorbent. Also exhibition: j 7
In (11), the rotary valve (r) is driven once and the gas-tight valve (blind) is opened to charge the kf.
Room i ((・) 1 part of ++uvk adhesive removal device fql
Take out 1 Nisu. Also 11+1 eyebrows 1・; Haino (P
4) Extend and insert into the filling chamber (L), listen to the valve (p2), and charge the new 1 or 100mg in the hopper (pl) into the filling chamber (el). +)il
The subsequent steam (B) is allowed to flow through the filling chamber (1) to heat the adsorbent, thereby removing the sulfur oxides attached to the adsorbent and then heating the steel at around 300°C.
- (1 (2) is passed f!1 through the filling chamber te+ to maintain the adsorbent at a temperature after 300''Ciir until the first transfer. Also, in the cooling sheet fc), a clean temperature of around 130℃ is used. The waste sludge (1.゛) is allowed to flow through the 1+i chamber (c), and the adsorbent is cooled from 300°C to l 30 ''C. Water Kol that blocks out dirt and outside air "J W (u) tv)
(wl (x) Dissolution of acidic scum (sulfite scum, hydrogen chloride scum, hydrogen fluoride scum, etc.) in the nord water of (y) (including j and powder Q,
(Flyer powder, adsorbent powder) is charged, especially on the untreated side ■] Sulfuric acid scum concentration is 500 to 6o O11
Even if the SO2 + 120 system is in equilibrium, the I31+ in the seal water will be less than 3, indicating corrosion of the Waternol equipment components. As the corrosion progresses, a hole will form in one of the parts, and the inside of the seal water sludge treatment equipment will be destroyed. There were problems such as leakage of pond water and waste scum into the outside air. The present invention deals with the above-mentioned problem, and circulates the water in each aquarium to remove acid 1'1 scum and solid e. 11', I took out a part of the mizuko that was suitable for the index finger and placed it outside the IJ15NI system.
' It is characterized by treating it and solids, repeatedly using the treated 1111 water in the circulation system again, and adjusting the temperature of 1111 and solids in the water seal water installed in the j11 cup. Waste treatment 4. Regarding the location,
The 21st point is that 4-Erosion of Kunorr device parts 'e l 1st l-c-Saru modification J'↓ and the Takasu treatment equipment is presented (f4 Sukko L -Q J) , Next, to the waste treatment device 1 of the present invention - No. 317.1 - To explain with an example, (1) is a vertical shaft that rotates in the direction of the arrow (x), (2) It is a chamber filled with a plurality of 71 adsorbents, and (3) contains sulfur oxides.
il is the feed side passage member, and (4) is the extraction side]1n1 member for the same discharged waste (I). Also (5) (6) (ha(8)
) (9) is a water-kol device that shuts off the air and the outside air, and (5)
f'A81 Established supply rll'
i f'Jl horn fu υ1 Output side waste and discharge side (water tank (6) that collects waste and outside air)
tll sludge rj flow downstream downstream of the supply side 1 sludge and the water that blocks the outside air It''i, (7) is the waste sludge V Water tank (8) to shut off
'i layer F part 0) t11 A water tank that blocks off the dregs and the outside air, (
! l) A water tank is provided inside the outlet of the adsorbent C11 to shut off the scum at the bottom of the packed bed and the outside air. (+(l is the water knoll device r; and the knoll water halt cook installed separately, (1υ is the knoll water circulation pump, Q
The 2Lt water supply side is connected to J), and the 0F is the Nord water return () side piping, which circulates to the hold tank (10). Further, (14) is a solid-liquid separator such as a filter, and (10 is a liquid I) a tank for adjusting 11. OQ is a pump that returns the treated liquid to the Nord water hold tack 00). The noll water circulation and treatment method of the waste treatment device will be explained in θ(. 4) and the outside air by a water tank (7), and between the adsorbent discharge member and the outside air by water+t”i (8) (!
- always kept airtight. Nord water is; 1-l)
・Ri/Ri([(Target, Shiri, Seal Water Circulation Ponono (II
) V-, 1: +) Nord water supply side distribution (flow to famous water! 1"I via IJ 1) [control ゛j;
The supply amount is 1+"+υ) overflow, and the concentration L-C all l, '/ > ri(lf+) (Ci11'i I';'j. In the water, (11 cuffs, (1)) acid + 6 scum dissolved outside and fly anono, y + town 6ii people,
Contains solid content in January - Lutku 2 and each tank (5)
(fi) (7) (8) (!l) 'e Wi E
f t le. Coco"C-717,1',"j Underwater CI
In order to adjust the J'I'll and solid content (SS) concentration, a part of the circulating water is extracted from the discharge side of the I' knob (11). The extracted liquid is separated and removed by a solid-liquid 1lti machine (14 inches, 1-li, -)'> 4 solids such as suction agent are separated and removed.The solids after 1F of the outer leg are removed from the system. Slut out,
The liquid is sent to I' I+ adjustment tank 0υ. +) o, ar
, by neutralizing with an alkaline solution (Na01L C++CO, el, c) corresponding to the alcoholic acid ('1'1) dissolved in nord water from the 1-seikunku0tsu (: i jJl Kass (1)). l'II is returned to neutrality, and water and evaporated water T0n are supplied to the solid-liquid separator 04), which discharges the water and evaporated water to the outside of the system along with the solid content. 1゛11 Adjustment The Knoll water made neutral with 0υ is returned to the Knoll water hold cook 00) for repeated toilet use. As mentioned above, by circulating the Waternol water and extracting a part of it, neutralizing and removing the acid scum and solid content mixed into the Nord water, the liquid is returned to the circulation system as rI'1 water. This not only prevents corrosion of the Waternol equipment, but also allows economical use of the Waternol water. Flow no! shown in Figure 3!・The coal/heavy oil mixed combustion wheeler waste 30.0 OO
The results of partially treating Nrnn11 (3fj) and circulating the Nord water are shown below.
0 m'') Processing liquid flow f, ij 0.05 m'
/II Supply side liquid I' side wave 6.07 Return side wave pH (i, 04 Na011 required f7' (+(, 44 mg/II (Makeup water 1. O/l'/11) Solid content concentration 0241
~・1,3 et al. (R111j-, i,, + 20 g,
'II)

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はすでに提案されているカフ処理装置の一部横断
平面図、第2図は第1図り、視11−ロ線に治う縦断側
面図、第3図は本発明に係るカス処理装置の実施例を示
す説明図(−y u −L−I・)である。 10:ノール水ボールドタンク、11:ノール水循環ポ
ンプ、12:ノール水(」1相側配’IT +13:ノ
ール水戻り側配管、14:固液分閏11梱] 5 :P
 II調整タンク、16”j)11調1;に槽;1′ノ
ブ。
FIG. 1 is a partial cross-sectional plan view of a cuff treatment device that has already been proposed, FIG. 2 is a vertical cross-sectional side view of the first view taken along line 11-B, and FIG. 3 is a waste treatment device according to the present invention. It is an explanatory diagram (-yu-L-I) showing an example of. 10: Nord water bold tank, 11: Nord water circulation pump, 12: Nord water (1 phase side connection 'IT + 13: Nord water return side piping, 14: Solid-liquid separator 11 bales) 5: P
II adjustment tank, 16”j) 11th tone 1; tank; 1′ knob.

Claims (1)

【特許請求の範囲】[Claims] 内外筒を回転台板の外周部に間隔をおいて対設し同内外
筒の門を半径方向の仕切壁により仕切りさらに多孔板を
同内外筒の下部間に設けて複数の吸着剤充填室を構成す
るとともに同各充填室に吸着剤を充填してこの中に流体
を貫流させるようにした回転円筒体の」ニガ及び下方に
流体通路部材を設け、上方に位置する同流体通路部材と
前記充填室との間、及び下方に位置する同流体通路部材
と前記充填室との間にウォーターノール装置を設けてな
るものにわいて、各ウォーターノール装置からオーバー
フローするシール水を集結して循環使用せしめながらそ
の一部を系外に抜き出し固形分を分離除去するとともに
ノール水中に溶解した酸性ガスに相当するアルカリ性の
溶液と固形分に伴ない系外に排出された水分及び蒸発水
に相当するY′!またjc水を補給して再度循環水中に
戻すことに、I、ってソール水中の固形分濃度及びl’
 I+を調整することを!I11徴とするガス処理装置
と、0)ノールプJ法。
The inner and outer cylinders are arranged oppositely at intervals on the outer periphery of the rotary table plate, the gates of the inner and outer cylinders are partitioned by a radial partition wall, and a perforated plate is provided between the lower parts of the inner and outer cylinders to form a plurality of adsorbent filling chambers. A rotating cylindrical body is constructed of a rotary cylindrical body, each of which is filled with an adsorbent, and a fluid is allowed to flow through it. In the case where a Waternol device is provided between the filling chamber and the fluid passage member located below and the filling chamber, seal water overflowing from each Waternol device is collected and used for circulation. However, a part of it is taken out of the system and the solid content is separated and removed, and an alkaline solution corresponding to the acidic gas dissolved in the nord water and Y' corresponding to the moisture discharged outside the system and evaporated water along with the solid content are extracted. ! In addition, when replenishing the jc water and returning it to the circulating water, I is the solid content concentration in the sole water and l'
Adjust I+! A gas treatment device with I11 characteristics and 0) Knollp J method.
JP57155057A 1982-09-06 1982-09-06 Sealing method of gas treating apparatus Pending JPS5946113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57155057A JPS5946113A (en) 1982-09-06 1982-09-06 Sealing method of gas treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57155057A JPS5946113A (en) 1982-09-06 1982-09-06 Sealing method of gas treating apparatus

Publications (1)

Publication Number Publication Date
JPS5946113A true JPS5946113A (en) 1984-03-15

Family

ID=15597724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57155057A Pending JPS5946113A (en) 1982-09-06 1982-09-06 Sealing method of gas treating apparatus

Country Status (1)

Country Link
JP (1) JPS5946113A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114287A (en) * 1986-10-31 1988-05-19 Seiko Epson Corp Semiconductor laser device and manufacture thereof
US4946479A (en) * 1987-10-28 1990-08-07 Daikin Industries, Ltd. Apparatus for solvent recovery
US5171706A (en) * 1990-08-01 1992-12-15 Sharp Kabushiki Kaisha Method for the production of a semiconductor laser device
JPH081269U (en) * 1993-04-20 1996-08-13 株式会社三和精機 Cutting device
EP2166260A1 (en) * 2008-08-27 2010-03-24 NGRID Intellectual Property Limited Gas container corrosion protection

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114287A (en) * 1986-10-31 1988-05-19 Seiko Epson Corp Semiconductor laser device and manufacture thereof
US4946479A (en) * 1987-10-28 1990-08-07 Daikin Industries, Ltd. Apparatus for solvent recovery
US5171706A (en) * 1990-08-01 1992-12-15 Sharp Kabushiki Kaisha Method for the production of a semiconductor laser device
JPH081269U (en) * 1993-04-20 1996-08-13 株式会社三和精機 Cutting device
EP2166260A1 (en) * 2008-08-27 2010-03-24 NGRID Intellectual Property Limited Gas container corrosion protection

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