JPS59458U - 電子ビ−ム形蒸着装置 - Google Patents

電子ビ−ム形蒸着装置

Info

Publication number
JPS59458U
JPS59458U JP9336682U JP9336682U JPS59458U JP S59458 U JPS59458 U JP S59458U JP 9336682 U JP9336682 U JP 9336682U JP 9336682 U JP9336682 U JP 9336682U JP S59458 U JPS59458 U JP S59458U
Authority
JP
Japan
Prior art keywords
electron beam
hearth
vapor deposition
deposition equipment
beam vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9336682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS621226Y2 (cs
Inventor
薫 西村
花坂　孝雄
繁信 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP9336682U priority Critical patent/JPS59458U/ja
Publication of JPS59458U publication Critical patent/JPS59458U/ja
Application granted granted Critical
Publication of JPS621226Y2 publication Critical patent/JPS621226Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9336682U 1982-06-21 1982-06-21 電子ビ−ム形蒸着装置 Granted JPS59458U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9336682U JPS59458U (ja) 1982-06-21 1982-06-21 電子ビ−ム形蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9336682U JPS59458U (ja) 1982-06-21 1982-06-21 電子ビ−ム形蒸着装置

Publications (2)

Publication Number Publication Date
JPS59458U true JPS59458U (ja) 1984-01-05
JPS621226Y2 JPS621226Y2 (cs) 1987-01-13

Family

ID=30224147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9336682U Granted JPS59458U (ja) 1982-06-21 1982-06-21 電子ビ−ム形蒸着装置

Country Status (1)

Country Link
JP (1) JPS59458U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169393U (cs) * 1984-10-13 1986-05-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169393U (cs) * 1984-10-13 1986-05-12

Also Published As

Publication number Publication date
JPS621226Y2 (cs) 1987-01-13

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