JPS5943622A - Longitudinal vibration type piezoelectric vibrator - Google Patents
Longitudinal vibration type piezoelectric vibratorInfo
- Publication number
- JPS5943622A JPS5943622A JP15378082A JP15378082A JPS5943622A JP S5943622 A JPS5943622 A JP S5943622A JP 15378082 A JP15378082 A JP 15378082A JP 15378082 A JP15378082 A JP 15378082A JP S5943622 A JPS5943622 A JP S5943622A
- Authority
- JP
- Japan
- Prior art keywords
- section
- main
- frequency
- vibration
- type piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 10
- 238000001259 photo etching Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
水元［ＪＩ］は縦振！！＋ｂをする主振動部と音叉形状
の支持体部をフォトエツチング加工により一体に形成し
て成る縦振動型圧電振動子に関する。[Detailed description of the invention] Mizumoto [JI] is vertically swinging! ! The present invention relates to a longitudinally vibrating piezoelectric vibrator in which a main vibrating part that exhibits +b and a tuning fork-shaped support part are integrally formed by photo-etching.
本発明の目的は、周波数調整が容易で安価な細。An object of the present invention is to provide a frequency adjustment device that is easy to adjust and is inexpensive.
振動型圧電振動子全提供することにある。We provide all types of vibrating piezoelectric vibrators.
従来より数ＩＱＱ ＫＨｚ〜ＩＭＩ匂伺近の周波数帯の
月−電振動子として第１図に示すような縦振動型圧電振
動子が用いられている。第１１゜′、Ｊ、目、ｉ ｇｅ
ｌ視１．Ｔｈであり、発振片１の表裏面には’ｆＬ＋、
極２．Ｓ）が形成され、＋ｆｆ１ｌい吊９線４，４′に
よυ該発振片１の１長心部分を仝（′Ｈ］付けで支持し
ている構成を示す。該圧電振動子の周波数調聚は、発振
片１の先端部をダイヤモンドブローヂ等で削る方法が一
般的である。該圧電振動子は、
１、吊９線に発振片を固定支持する位置精度や半田開の
バラツキによＪ、ＣＩ値、振動漏れ等のバラツキが太き
い、
２゜吊シ線と発振片との固定支持作業は熟練を要し、製
造コストが高くなる、
３゜吊シ線と発振片の接続強度が弱いため、耐衝撃性が
低い、
４゜吊シ線の形状から容器が大きくなる、５、周波数調
整が機械加工のため、手間がかかリ、精度も悪い。Conventionally, a longitudinal vibration type piezoelectric vibrator as shown in FIG. 1 has been used as a lunar electric vibrator in a frequency band of several IQQ KHz to approximately IMI. 11th ゜', J, eye, i ge
l vision 1. Th, and 'fL+,
Extreme 2. S) is formed, and one long center portion of the oscillating piece 1 is supported by +ff1l hanging wires 4, 4' with ('H) attached.The frequency adjustment of the piezoelectric vibrator is Generally, the tip of the oscillating piece 1 is shaved with a diamond blower, etc.The piezoelectric vibrator is manufactured by: Large variations in J, CI values, vibration leakage, etc., fixing and supporting work between the 2° hanging wire and the oscillating piece requires skill and manufacturing costs are high, and the connection strength between the 3° hanging wire and the oscillating piece. 4. The container becomes large due to the shape of the hanging wire. 5. Frequency adjustment is done by machining, which is time consuming and has poor accuracy.
などの欠点を有している。It has drawbacks such as:
その他の縦振動型圧電振ムわｈ子の従来例を第２図に斜
視図で示す。同図に２いて、本例の縦振動型圧電振動子
は、縦振動する主振動部５と連結部６．６１と支持部７
，７＋がフォトエツチング加工により一体で形成されて
おり、さらに音叉形状の刷部（（の固定部９で支持され
ている。周波数調整は、千振ｊｉｉｌ〕部５の先端部分
に設けられた周波数調整部８ 、８’（二点鎖線で示す
）に金属膜を付与するか、あるいは予め伺Ｊｉさノ１．
ている金属膜をレーザー照射により除去する方法が使わ
り、る。Another conventional example of a vertically vibrating piezoelectric wave element is shown in a perspective view in FIG. 2 in the same figure, the longitudinally vibrating piezoelectric vibrator of this example has a main vibrating part 5 that vibrates longitudinally, a connecting part 6, 61, and a supporting part 7.
, 7+ are integrally formed by photo-etching process, and are further supported by a fixed part 9 of a tuning fork-shaped printing part ((. A metal film is applied to the parts 8 and 8' (indicated by two-dot chain lines), or a metal film is coated in advance.
A method is used in which the metal film that is present is removed by laser irradiation.
゛まだ、第３図は縦振動型圧電振動子のその他の（ｊｒ
ｌ来例を余Ｉ視図で示す。同図において、本例の縦］ｊ
Ｉ（両型圧電振動子は、主振動部［（〕、二重の枠１１
゜１２およびそれらを連結する連結部１：（、１３’
、 １４ 、１４’がフォトエツチング加工により一体
に形成されている。周波数調整部１．５ 、１５’は主
振動部ＪＯの先端部分に形成されて卦シ、前記第２図の
例と同様の方法により周波数調整される。しかし、第２
図、第３図のいずれの例においても振動エネルギーのｉ
’Ｍ１ｉ洩を抑制するという点で十分ではなく、小型化
。゛However, Fig. 3 shows other longitudinal vibration type piezoelectric vibrators (jr
The following example is shown in a perspective view. In the figure, the length of this example]j
I (both types of piezoelectric vibrators have a main vibrating part [(), a double frame 11
゜12 and connecting part 1 that connects them: (, 13'
, 14, and 14' are integrally formed by photo-etching. The frequency adjusting sections 1.5 and 15' are formed at the tip of the main vibrating section JO, and the frequency is adjusted by the same method as in the example shown in FIG. 2 above. However, the second
In both the examples shown in Fig. 3, the vibrational energy i
'It's not enough to suppress M1i leakage, but it's smaller.
低コスト化の点でも難がある。There are also difficulties in reducing costs.
と力、ら従来例を改善するものとしで、本１１１／〜（
（１人は第４図に示す縦振１１１１Ｊ型圧電振動子全先
頻している。第４図ＩＡＩは斜視図であり、縦振動−２
する主振動部１６と、該主振動部１６の振動変位の最も
小さくなる位置に該主振動部１６のｒｌＪ方向１１’４
設けらＪした連結部１７ 、１７’と、該連結部１７
、１７’の両に・；ＩＡから前記主振動部Ｊ６の一方と
平行に支持部１８ 、１８’を延長し、前ム１−〕主振
動部１６を除く支持体部が音叉形状を（′＋１−１′成
するように基部１９を設υづた構成である。本例のおに
振動型圧電振動子は、主振動部１６を支持している連結
部１７ 、１７’と支持部１８ 、１８’と基部１９と
からなる支持体部が音叉形状となっているため４１１−
Ｍ動エネルギーの漏洩を効果的に抑制できるという４−
′Ｊ外性上利点と、小型・低価格化にコ１メするという
頼ｉ造上の利点とを有している。第４図ｉＢｌは第４図
ＩＡＩのＩ）−ｐｌにおける断面図であシ、該圧電振動
子は同図に示すように水晶板の２板をＸ軸回シに−５°
〜→−５゜の範囲で回転させた水晶ウェハーから主振動
部１６の巾方向をＸ軸、長さ方向をｉｌｂ、厚み方向を
２輔となるようフォトエツチング加工によ）形成する。and force, which improves the conventional example, Book 111/~(
(One person is using the vertical vibration 1111J type piezoelectric vibrator shown in Fig. 4. IAI in Fig. 4 is a perspective view.
The main vibrating part 16 is located at the position where the vibration displacement of the main vibrating part 16 is the smallest, and the rlJ direction 11'4 of the main vibrating part 16 is
The connecting portions 17 and 17' provided with J and the connecting portion 17
, 17'. Support parts 18 and 18' are extended from IA in parallel with one of the main vibrating parts J6, and the support part excluding the main vibrating part 16 has a tuning fork shape (' The configuration is such that the base 19 is set so as to form a +1-1' configuration. , 18' and the base 19 have a tuning fork shape, so 411-
4- It is said that the leakage of M dynamic energy can be effectively suppressed.
It has external advantages and structural advantages of being smaller and cheaper. FIG. 4 iBl is a cross-sectional view taken along I)-pl of FIG.
A main vibrating part 16 is formed from a crystal wafer rotated in the range of -→-5 degrees by photo-etching so that the width direction is the X axis, the length direction is ILB, and the thickness direction is IB.
主電極２１ 、２２は主振動部１６の側面に形成され、
主振動部１．６ ｉｑＪ、Ｘ方向すなわち巾方向の電界
によりＹ方向すなわち長さ方向のＦａ ４Ｆａ動が励起
されるものである。本例の構成において、電界全効果的
に働かせＣ１値を小さくするためには主撮動部１６のｒ
ｂＷｔ’ｌｒ−小さくすることが必要と々す、一方厚さ
Ｔ１は大きくすることが必要となる。丑だ、主撮動部１
６の才、ｙ振動に伺随して生ずる巾方向の短辺振動の変
位を倖力小さくして、支持部１８ 、１８’への振動エ
ネルギーの（１１％洩を抑制するためにも主振動部」６
のｌ’ｔＪ Ｗ ｓ ’Ｇ：小さくすることが必要とな
る。しだがって、本例にふ・ける縦振動型圧電振動子に
おいては主振動部１６のΔ［１面面積が小さいため、第
２図、第３［シ１に示した従来例のごとく平面部に周波
数調整部２０９２０’を設けることは、
１、所定膜厚に対する周波数変化率が小さく、周波数調
整に多量の金属膜を必要とするため、効率が悪い。The main electrodes 21 and 22 are formed on the side surface of the main vibrating section 16,
Main vibration part 1.6 iqJ, Fa 4Fa motion in the Y direction, that is, the length direction, is excited by an electric field in the X direction, that is, the width direction. In the configuration of this example, in order to make the electric field fully effective and reduce the C1 value, the r
bWt'lr - needs to be reduced, while thickness T1 needs to be increased. It's ox, main camera section 1
In order to reduce the displacement of the short side vibration in the width direction that occurs along with the Y vibration, and to suppress leakage of vibration energy (11%) to the support parts 18 and 18', the main vibration Part” 6
l'tJWs'G: It is necessary to make it smaller. Therefore, in the longitudinal vibration type piezoelectric vibrator according to this example, since the main vibrating part 16 has a small surface area Δ Providing the frequency adjustment section 20920' in the section has the following advantages: 1. The rate of frequency change with respect to a predetermined film thickness is small, and a large amount of metal film is required for frequency adjustment, which is inefficient.
２゜膜強度の点から付与できる膜厚に限度があるため、
調整可能な周波教師、囲が狭くな遵、歩留シが低下する
、
という欠点を有する。2゜There is a limit to the film thickness that can be applied due to film strength.
It has the disadvantages of adjustable frequency control, narrow range, and reduced yield.
本発明は主振動部の側面に周波数調整部を設け、上記の
欠点を解決しようとするものである。第５図は本発明の
実施例を示す斜視図であり、本例においては外形形状は
第４図と同一であるが、周波数調整部２．３が、連結部
１７ 、１７’と支持部１８ 、 ｉｌ、８’（！：基
部１９で構成される支持体部に四重れていない側の主振
！１！を部１６の先端部分の側面に形成さ〕Ｌでいる。The present invention attempts to solve the above-mentioned drawbacks by providing a frequency adjustment section on the side surface of the main vibration section. FIG. 5 is a perspective view showing an embodiment of the present invention. In this embodiment, the external shape is the same as that in FIG. , il, 8' (!: The main oscillation !1! on the side that is not overlapped with the support portion constituted by the base portion 19 is formed on the side surface of the tip portion of the portion 16).
該周波数調整部２３に金属膜全伺与するか、あるいは予
め付与さり、ている金属膜をレーザー照射によシ除去し
て周波数調整することができる。本例においては、
■。主振動部の側面は十分大きい面積を有するため、所
定膜厚に対する周波数変化率が大きく、少量の金属膜で
周波数調整でき、効率が良い、２、付与できる膜厚の範
囲で前工程における周波数バラツギ全カバーできるため
、歩留りが向上する、
という利点を有する。The frequency can be adjusted by applying the entire metal film to the frequency adjustment section 23, or by removing the metal film that is previously applied and removed by laser irradiation. In this example, ■. Since the side surface of the main vibrating part has a sufficiently large area, the frequency change rate for a given film thickness is large, and the frequency can be adjusted with a small amount of metal film, resulting in good efficiency.2. It has the advantage of improving yield because it can cover the entire area.
１だ、第５図においては周波数調整部ｚ３は主振動部１
６のｌ１面の片側のみに設けであるが、両側に設ければ
さらに効果的である。1. In Fig. 5, the frequency adjustment section z3 is the main vibration section 1.
Although it is provided only on one side of the l1 surface of 6, it will be more effective if it is provided on both sides.
第６図、第７図、第８図は本発明の他の実施例であり、
周波数調整部のある主振動部の先端部分の展開図を示す
。第６図において、本例は主振動部２４の側面の両側に
形成した周波数ＨＨ７３）輪部２７ 、２８が電４ｉＤ
２５ 、２６と接続している構成金子す。一方、主Ｊ
’ｆｒ４動部２４の側面に金属膜を伺有して周波数に！
”Ｉ整する場合、主振動部２，１の平面にも金属膜があ
る程度回り込み、２個の電極５，２６の絶ば；抵抗が悪
くなることがある。第７図は周波数調整部２９ 、３０
のある先端部のみ平面電極を取９除いた構成により、ま
た、第８図は周波数ルリ」形部３］ 、 ３２のある先
端部を同じ極性の電椅膜で形成した構成によシ、絶縁抵
抗不良を防１−Ｈする構造とした本発明のその他の実施
例である。以上、第６図〜第８図の実施例ばいずれも主
振動部２・１の側面の両側に周波数調整部を設けである
が、その片側のみを利用して周波数調整しても構わない
。また、片側のみに周波数Ｈ＋、５整部を形部ても構わ
ない。壕だ、本発明の実施例は水晶のＺ板を使用した縦
振動型圧電振動子について述べてきたが、他の圧電物質
、他のカットアングルの縦振動型圧電振動子にっｂでも
、主振動部の厚さが巾より大きい構成であれば適用可能
である。6, 7, and 8 are other embodiments of the present invention,
A developed view of the tip of the main vibrating section where the frequency adjustment section is located is shown. In FIG. 6, in this example, the frequency HH73) rings 27 and 28 formed on both sides of the main vibrating section 24 are
25 and 26 are connected to each other. On the other hand, Lord J.
'Fr4 There is a metal film on the side of the moving part 24 and the frequency!
In the case of adjustment, the metal film wraps around the plane of the main vibrating parts 2, 1 to some extent, and the resistance between the two electrodes 5, 26 may deteriorate. FIG. 30
The insulation resistance can be increased by removing the planar electrode from only a certain tip (9), and by forming the tip part (32) with the same polarity in FIG. This is another embodiment of the present invention having a structure to prevent defects. In the embodiments shown in FIGS. 6 to 8, frequency adjustment sections are provided on both sides of the main vibrating section 2, 1, but only one side of the frequency adjustment sections may be used for frequency adjustment. Further, it is also possible to form a frequency H+, 5-regular part only on one side. Although the embodiments of the present invention have been described with respect to a vertically vibrating piezoelectric vibrator using a quartz crystal Z plate, it is also possible to use other piezoelectric materials and other cut angle longitudinal vibrating piezoelectric vibrators. It is applicable if the thickness of the vibrating part is larger than the width.
第１図〜第３図はボ〆１１．、動型圧正振動子の従来例
を示す斜視図、
第４図ＦＡＩ ｉＥｌは水出ハＣ）人の光斑ｌになるね
′振握１型圧１？ｉ振１ＪｉＩＩ子の実施例、
第５図は本発明の実施例を示す斜視図、第６図〜第８図
は本発明の応用例を示す展開図１は発振片 ２，３は電
極 ４ｒｆＪ、吊り斜１５は主振動部 ６は連結部 ７
は支掲部８は周波数調整部 ９は固定部 １（）は土掘
Ｂｉｂ ！Ｂ１１ 、１２は枠 １３ 、１４は連結部
１５は周波数調整部 １６は主振動部 】７（佳ｊ屯結
ｆｉｔ（１８は支持部 １９は基部 ２０は周波数調整
１Ｂ２１ 、２２は電極 ２３は周波数調整部２４は主
振動部 ５，２６は電極
２７ 、２８ 、２９ 、３０ 、３１ 、３２は周波
数調整部以 上
出願人 松島工業株式会Ｕ
代理人 弁理士最 上 務
９−
１０３
４・１図
」′２図
１′ｑ 名
］−５固
ｆｂ図
オ″７園
オフ図Figures 1 to 3 are at the bottom 11. , a perspective view showing a conventional example of a dynamic pressure oscillator. Example of i-oscillator 1JiII element, FIG. 5 is a perspective view showing an example of the present invention, and FIGS. 6 to 8 are developed views showing applied examples of the present invention. 1 is an oscillating piece 2 and 3 are electrodes 4rfJ The hanging slope 15 is the main vibration part 6 is the connecting part 7
The supporting part 8 is the frequency adjustment part, 9 is the fixed part, and 1 () is the earth digging Bib! B11, 12 are frames 13, 14 are connection parts 15 are frequency adjustment parts 16 are main vibration parts] 7 Part 24 is the main vibration part 5, 26 is the electrode 27, 28, 29, 30, 31, 32 is the frequency adjustment part.Applicant Matsushima Kogyo Co., Ltd. '2 Figure 1'q name]-5 solid fb figure O'7 garden off figure
Claims (1)
支持する音叉形状の支持体部に？フォトエツチング加工
により一体で形成し、主振動部は厚さがｒｊｊよｐ犬で
ある縦振動型圧電４辰硝子において、該主振動部の、支
持体部に囲まｈ−ていない側の先端部分のｆｌｌｌｌ而
に周波数調整部を設けたことを！特徴とする縦振動型圧
電振）ＩＩＩＩ−Ｔ−８ ２・ 周θ（４数調整１１１＼に金属膜を付与したこと
を特徴とする特許請求のｉｉ） ｍＡ Ｍ′１．１項記
載の縦振動型圧電振動子。[Scope of Claims] 1.411 (A main vibrating part that moves and a tuning fork-shaped support part that supports the main moving part are integrally formed by photo-etching, and the main vibrating part has a thickness. In the vertical vibration type piezoelectric 4-pin glass that is used in RJJ, we have provided a frequency adjustment section at the tip of the main vibration section on the side that is not surrounded by the support section! (longitudinal vibration type piezoelectric vibration) III-T-8 2. Perimeter θ (claim ii) characterized in that a metal film is provided to the 4-number adjustment 111\) mA M'Longitudinal vibration described in section 1.1 type piezoelectric vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15378082A JPS5943622A (en) | 1982-09-03 | 1982-09-03 | Longitudinal vibration type piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15378082A JPS5943622A (en) | 1982-09-03 | 1982-09-03 | Longitudinal vibration type piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5943622A true JPS5943622A (en) | 1984-03-10 |
Family
ID=15569972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15378082A Pending JPS5943622A (en) | 1982-09-03 | 1982-09-03 | Longitudinal vibration type piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5943622A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62100011A (en) * | 1985-10-26 | 1987-05-09 | Seiko Electronic Components Ltd | Long side longitudinal vibration type piezoelectric vibrator |
| JPH03158015A (en) * | 1989-11-15 | 1991-07-08 | Seiko Electronic Components Ltd | Vertical crystal resonator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5236954A (en) * | 1975-09-18 | 1977-03-22 | Ebauches Sa | Piezooelectric microwave resonator |
| JPS52119197A (en) * | 1976-03-31 | 1977-10-06 | Seiko Instr & Electronics Ltd | Thin board piezo-resonator |
| JPS5466794A (en) * | 1977-11-08 | 1979-05-29 | Seiko Epson Corp | Electrode construction of piezoelectric oscillator |
| JPS55140313A (en) * | 1979-04-18 | 1980-11-01 | Seiko Instr & Electronics Ltd | Small-size piezoelectric vibrator of outline vibration mode |
-
1982
- 1982-09-03 JP JP15378082A patent/JPS5943622A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5236954A (en) * | 1975-09-18 | 1977-03-22 | Ebauches Sa | Piezooelectric microwave resonator |
| JPS52119197A (en) * | 1976-03-31 | 1977-10-06 | Seiko Instr & Electronics Ltd | Thin board piezo-resonator |
| JPS5466794A (en) * | 1977-11-08 | 1979-05-29 | Seiko Epson Corp | Electrode construction of piezoelectric oscillator |
| JPS55140313A (en) * | 1979-04-18 | 1980-11-01 | Seiko Instr & Electronics Ltd | Small-size piezoelectric vibrator of outline vibration mode |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62100011A (en) * | 1985-10-26 | 1987-05-09 | Seiko Electronic Components Ltd | Long side longitudinal vibration type piezoelectric vibrator |
| JPH03158015A (en) * | 1989-11-15 | 1991-07-08 | Seiko Electronic Components Ltd | Vertical crystal resonator |
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