JPS5942671Y2 - double monochromator - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a double monochromator, and particularly to a slit mechanism in a double monochromator.

A double monochromator has slit mechanisms for an entrance slit, an intermediate slit, and an exit slit at the entrance, middle, and exit, respectively, but if the width of each of these slits is controlled to always be the same width, errors in the optical system may occur. However, due to the curvature of the spectral image, there is a loss of light quantity and a decrease in resolution, and the double monochromator is not fully utilized.

The present invention aims to prevent the above drawbacks by giving the intermediate slit a different slit width from other slits using a simple mechanism, and controlling all slit mechanisms in conjunction with each other. , each slit mechanism of the exit slit, an interlocking drive mechanism for each of these slit mechanisms, and a slit opening adjustment mechanism provided in at least one of the slit mechanisms, and the slit opening adjustment mechanism is controlled by the interlocking drive mechanism. The slit width can be adjusted in a superimposed manner with respect to the slit width driving, and the slit width can be controlled in conjunction with the slit width so that it is always different from other slit widths by a constant width.

The present invention will be explained below according to the embodiments shown in the drawings.

FIG. 1 shows a known carry-type double monochromator, in which light incident from an entrance slit 11 is converged by a collimating mirror 12 and guided to a dispersion element 13, where the dispersed light is transmitted to a cameramin-14. The light is focused by the camera mirror 18, enters the collimating mirror 16 through the intermediate slit 15, becomes a parallel light beam, and is guided to the dispersion element 17.
The light is focused and taken out to the outside of the monochromator chamber 20.

In this double monochromator, it is necessary to adjust the slit width according to the wavelength.
If the widths of each emission slit are always controlled in the same way, the amount of light will be lost due to the curvature of the spectral image as described above, resulting in a decrease in resolution.

FIG. 2 shows an embodiment of the slit mechanism of the present invention which can be used in a double monochromator as described above, and the same reference numerals as in FIG. 1 indicate corresponding elements.

In the figure, two slit blades forming the entrance slit 11, intermediate slit 15, and exit slit 19! One is supported by a support frame 21, and the other is supported by a support frame 22, as shown.

However, one slit blade of the intermediate slit 15 is attached to the support frame 2.
It is fixed to a sliding table 23 which is slidably attached to the top of the holder 2.

These frames 21.22 each have springs 24.2 in opposite directions.
5, and the slit is normally closed as shown in the figure.

26 is a cam for driving the slit mechanism, and this cam 26 is
6 Tentacle 2 on arm 21°28 extending from frame 21, 22
9, so that when this cam 26 is rotated by the shaft 30, the support frame 21.22 is in contact with the spring 24.2.
11, 15, and 19 are opened and closed.

This slit opening/closing operation applies uniformly to all slits,
Therefore, if all the slits are closed when the cam 26 does not rotate, all the slits will open uniformly at the same ratio when the cam rotates.

In other words, the relationship is 1:1:1. However, if the slit blade of the intermediate slit 15 is shifted in advance by means of the slide table 230 to give an opening of ΔW, the cam 26
With 0 rotation, the ratio of each slit width is l:1:1+ΔW
becomes.

That is, the relationship between the slit widths of the entrance slit and the exit slit and the slit width of the intermediate slit is such that the width of the intermediate slit is always widened by a constant width ΔW, resulting in a linear relationship as shown by the solid line in the graph of FIG.

Note that the dotted line indicates the relationship when the slit widths of all slits are equal.

In the configuration shown in Fig. 2, each slit is 11°15.1
9 is operated by an interlocking drive mechanism of the support frames 21, 22 and a slit mechanism such as a cam 26, and the sliding table 23 provided in the slit 15 is operated as a slit opening adjustment mechanism for driving the slit width by the interlocking drive mechanism. The slit width can be adjusted in a superimposed manner.

Next, FIG. 4 shows another embodiment in which the slits are not arranged linearly as shown in FIG. 2, but can be arranged at a certain degree of freedom.

In the figure, reference numerals 40 and 41 indicate a pair of rotating shafts, and slit blades 42 and 43 are fixed to one end of each of the rotating shafts to form a slit between them.

On the other hand, a pair of rotating levers 44,45 are respectively fixed to the other ends of the rotating shafts 40,41.
．． 45 are provided with rotating disks 46, 47, which are always in contact and serve as spacers so that the spacing between the rotating levers 44, 45 does not change.

48 is a cam for driving the lever, and this cam plate 48
The lever 44 is rotated via a slit scale plate 49 coaxially provided above the cam 48.
．． 45 rotates the shaft 40.41, as a result of which the slitting blades 42.43 move in mutually opposite directions about the rotational shaft 40.41, and the slit width becomes larger or smaller.

In addition, 50 is a roller that is provided on one lever and slides on the cam 48 to move the lever along the cam surface shape to the shaft 40.
．． 41 as the center.

Further, 51 is a spring for biasing the lever toward the cam.

Such a slit mechanism is provided at each part of the double monochromator's entrance slit, intermediate slit, and exit slit,
By interlocking the slit scale plate 49 or cam 48 of this slit mechanism in each part with an interlocking drive mechanism (not shown), for example, a mechanism composed of gears or belts,
Each slit can be adjusted and driven to have the same slit width at the same time.

Since the interlocking drive mechanism can be constructed from gears, belts, etc. in this manner, the slits can be arranged at appropriate positions quite freely, unlike the arrangement of the slits as shown in FIG.

In other words, freedom of optical arrangement exists in this type of device.

In the configuration of this embodiment, the row of the intermediate slit mechanism,
By replacing 7-50 with a roller smaller than the other entrance and exit slit mechanism rollers, the intermediate slit width can always be made wider by a certain width than the other slit widths, as in the embodiment shown in FIG. becomes possible.

In this embodiment, when the cam position is opposite to the lever, a roller larger than the rollers of other slit mechanisms is used.

It is also possible to use a combination of the slit mechanism having the configuration shown in FIG. 4 and the slit mechanism having the configuration shown in FIG. 2.

In this case, by transmitting the movement of the shaft 30 in FIG. 2 to the cam 48 in FIG. 4 through appropriate means, the slit mechanism configured as shown in FIG. 4 can be used as an intermediate slit, for example. .

As described above, in the present invention, for example, it is possible to easily realize a double monochromator with very little stray light while having no freedom in the optical arrangement of the medium M slit, and the interlocking of the three slits can be performed with a simple mechanism. The time required for this adjustment can be greatly reduced.

In addition, the slit width can be achieved with any precision required for the device.
For example, in a prism grating spectrometer, the intermediate slit is made wider by a certain width than the entrance and exit slits to prevent deterioration in performance due to loss of light amount caused by curvature of the spectral image, etc. It is possible to obtain a double monochromator that has high performance in terms of light intensity and less stray light and aberrations.

In addition, in the above embodiment, a configuration in which the intermediate slit width is wider than other slit widths by a certain width has been described, but using the same means as the intermediate slit mechanism, other slits, e.g. It is also possible to configure the entrance slit width to be wider than the other slit widths by a certain amount.

Further, although FIG. 1 shows an embodiment in which a diffraction grating is used as a dispersion element in a triple monochromator, the present invention can also be sufficiently applied to an apparatus in which a prism is used as a dispersion element.

Furthermore, in the above embodiment, a configuration was described in which interlocking control can be performed in a state where the slit width is always different by a constant width, but by changing the slit opening adjustment mechanism to another configuration, this constant width can be It can have not only width but also variable width.

For convenience of explanation, each slit width is 1:1:1 in the above example.
Although it has been explained that continuous drive control is performed as +ΔW, the ratio of the width of each slit can be changed in conjunction with the ratio other than 1:1:1+ΔW depending on the shape of the cam, as in the past.

[Brief explanation of drawings]

Figure 1 is a schematic diagram of an example of a general double monochromator.
Fig. 2 is a diagram showing the slit configuration of the present invention, Fig. 3 is a diagram explaining the relationship between the widths of the incident, intermediate, and exit slits according to the present invention, and Fig. 4 is a diagram showing another slit configuration of the present invention. . 11.15,19...slit, 21. 22
...Support frame, 23 ...Slide, 26
...Cam, 42.43...Slit blade, 44,45...Lever 48...
Cam, 50...Roller.

Claims (1)

[Scope of utility model registration request] In a combination of two monochromators in series, each slit mechanism of an entrance slit, an intermediate slit, and an exit slit, an interlocking drive mechanism for each of these slit mechanisms, and a slit opening degree adjustment provided in at least one slit mechanism In addition, this slit opening adjustment mechanism can adjust the slit width in a superimposed manner with respect to the driving of the slit width by the interlocking drive mechanism, and the slit width is always different from other slit widths by a constant width. A double monochromator that can be controlled in conjunction with each other.