JPS5941882A - Magnetism sensitive element - Google Patents
Magnetism sensitive elementInfo
- Publication number
- JPS5941882A JPS5941882A JP57153043A JP15304382A JPS5941882A JP S5941882 A JPS5941882 A JP S5941882A JP 57153043 A JP57153043 A JP 57153043A JP 15304382 A JP15304382 A JP 15304382A JP S5941882 A JPS5941882 A JP S5941882A
- Authority
- JP
- Japan
- Prior art keywords
- units
- different
- signals
- polygonal line
- line patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Landscapes
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は感磁素子、特に強磁性金属薄膜の磁気抵抗効果
?利用した磁気抵抗素子の改良VC関する。[Detailed Description of the Invention] Industrial Field of Application The present invention relates to a magnetically sensitive element, particularly the magnetoresistive effect of a ferromagnetic metal thin film? This invention relates to an improved VC using a magnetoresistive element.
背景技術とその問題点
従来の感磁素子としては、例えばホール素子があり、第
1図に示す・ようなブラシレスモータのロータ位置検出
等のために広く用いられている。同図において、ホール
素子1〜3はモータ外壁4に互いにを間約に120°異
なる角度位置に配置されており、モータ軸5に取付けら
れているマグネット60回転に応じて120°位相の異
なる電気信号が各ホール素子から得られる。これら3棟
類の信号からロータの位置とその回転方向を検出する訳
けであるが、このような従来の感磁素子ケ用いるとすれ
ば、ホール素子馨3個(最少でても2個)用いなければ
ならず、コスト高となるのは避は難い。BACKGROUND ART AND PROBLEMS There is a Hall element, for example, as a conventional magnetic sensing element, which is widely used for detecting the rotor position of a brushless motor as shown in FIG. In the same figure, Hall elements 1 to 3 are arranged on the motor outer wall 4 at angular positions that differ by about 120 degrees from each other, and the electric currents differing in phase by 120 degrees according to the rotation of the magnet 60 attached to the motor shaft 5. A signal is obtained from each Hall element. The position of the rotor and its rotational direction are detected from the signals of these three types, but if such conventional magnetic sensing elements are used, three Hall elements (at least two) are required. It is inevitable that the cost will be high.
しかも各ホール素子の取付精度がその素子出力の位相の
精度となる定め、非常に厳しいJ1′y、付精度が要求
される。更にモータ外壁が小さくなると、その中に複数
個のホール素子2組み込むことは技術的にかなり困難な
問題ケ伴なうことになる。Moreover, the mounting accuracy of each Hall element is determined to be the precision of the phase of the element output, and very strict J1'y and mounting accuracy are required. Furthermore, as the outer wall of the motor becomes smaller, incorporating a plurality of Hall elements 2 into it becomes technically quite difficult.
従来の感磁素子としては上記ホール素子の外に、Ni
−Co或いはNi−Feの強磁性金属薄膜の磁気抵抗効
果?利用した磁気抵抗素子として、例えば第2図に示す
ような折線パターン?有する3端子構造の強磁性金属薄
膜磁気抵抗素子が公知である。In addition to the above-mentioned Hall element, conventional magnetic sensing elements include Ni
-Magnetoresistance effect of ferromagnetic metal thin film of Co or Ni-Fe? As the magnetoresistive element used, for example, a broken line pattern as shown in Fig. 2? A ferromagnetic metal thin film magnetoresistive element having a three-terminal structure is known.
この素子は周知の如く磁界Hの172回転毎にグえ=■
o=基二十KVCC5in2θなる電圧出力?発生する
。As is well known, this element generates vibrations every 172 rotations of the magnetic field H =■
o=base 20KVCC5in2θ voltage output? Occur.
しかしこの素子も位置検出等の用途において前記ポール
素子と同様の問題点ケ有している。However, this element also has the same problems as the pole element in applications such as position detection.
発明の目的
本発明の目的はかかる従来技術の問題点ン解決して回転
体の位置検出等の用途に好適な感磁素子ケ提供するにあ
る。OBJECTS OF THE INVENTION An object of the present invention is to solve the problems of the prior art and provide a magnetic sensing element suitable for use in detecting the position of a rotating body, etc.
発明の概要
本発明の感磁素子は上記目的χ達成するため、線対称又
は点対称な複数のユニットに分割された強磁性金属薄膜
磁気抵抗素子から成り、各ユニット間の磁気抵抗素子?
構成する隣接する折線パターンが所定角度ケ以て配列さ
れていること馨特徴とする。Summary of the Invention In order to achieve the above-mentioned object, the magnetic sensing element of the present invention consists of a ferromagnetic metal thin film magnetoresistive element divided into a plurality of line-symmetric or point-symmetric units, and the magnetoresistive element between each unit.
A key feature is that the adjacent broken line patterns forming the structure are arranged at a predetermined angle.
実施例
以下図面に示す実施例〉参照して本発明馨説明すると、
第3図圧おいて、A〜1]は対称に8等分された強磁性
金回磁気抵抗素子ユニットで、各ユニット間の磁気抵抗
素子ケ構成する隣接する折線パターンPA、 pHは図
示の如く父互に30’、 60”の角度ン以て配列さ
れている。EXAMPLES The present invention will be explained with reference to the following examples shown in the drawings.
In Fig. 3, A~1] are ferromagnetic magnetoresistive element units divided into eight symmetrical units, and adjacent broken line patterns PA and pH that constitute the magnetoresistive elements between each unit are as shown in the figure. They are arranged at angles of 30' and 60'' from each other.
0[JT1〜0tJT 4は出力端子、■及びGは電圧
印加端子及び接地端子であり、例えば出方端子0[JT
1間及び(JUT 4間?ジャンパーm J 1及びJ
4で接続し、ブリッジ構成とする。0[JT1 to 0tJT 4 is an output terminal, ■ and G are voltage application terminals and ground terminals, for example, output terminal 0[JT
1 and (JUT 4? Jumper m J 1 and J
4 to create a bridge configuration.
第4甲は第3図の感磁素子の等価回路であり、各端子の
出力電圧vV1〜■4とすれば該素子に対する印加磁界
の/2回回転釦第5図に示す如くl B = VI
V2 = K’V((s in 29及びme −V3
−V4= K’VCos in (2e −/3 yr
)なる互いに120’位相の異なる2相出力馨得るこ
とができる。従ってこれら2つの信号〆By j’o
から回路的に更に互いに12♂位相の異なる信号2作る
ことは容易であり、かくして1個の感磁素子から3相の
位1歳検出信号乞得ることができる。4A is an equivalent circuit of the magnetically sensitive element shown in Fig. 3, and if the output voltage of each terminal is vV1 to 4, the magnetic field applied to the element is /2 rotation button as shown in Fig. 5, l B = VI
V2 = K'V((s in 29 and me -V3
−V4= K'VCos in (2e −/3 yr
) can be obtained with two phase outputs having a phase difference of 120' from each other. Therefore, these two signals 〆By j'o
It is easy to generate signals 2 having a phase difference of 12♂ from each other using a circuit, and thus three phase detection signals can be obtained from one magneto-sensitive element.
第6図は本発明の他の実施列で、各ユニット間の隣接す
る折線パターンが図示の如< 45”の角度ン以て配列
されでいる。この素子も第7図に示す如くブリッジに構
成して出方v5〜■81¥取り出すとすれば、
s、= V5− V6=KVo、 5inzeの如<
90位相の異なる2相出カ’DP’Kを得ることができ
る。FIG. 6 shows another embodiment of the invention in which the adjacent fold pattern between each unit is arranged at an angle of <45" as shown. This element is also configured in a bridge as shown in FIG. If you take out v5 ~ ■81 yen, then s, = V5 - V6 = KVo, 5inze <
Two-phase output 'DP'K with 90 different phases can be obtained.
なお磁気抵抗素子ユニットの配列に関しては第8図に示
す如く正昆角形?8等分してもよく、またユニット分割
数は8に限定されるものではなくユニット間の折線パタ
ーンの角度もITI的に応じて任意にとることができる
。Regarding the arrangement of the magnetoresistive element units, as shown in Fig. 8, it is a regular square shape. It may be divided into eight equal parts, and the number of unit divisions is not limited to eight, and the angle of the fold line pattern between units can be arbitrarily set according to the ITI.
発明の効果
以上散切したように本発明によれば、素子ユニットが対
称形馨なしているので、各ユニットに均一な磁場が作用
し、従って均一な各相の出方ゲ得ることができる。As described above, according to the present invention, since the element units are symmetrical, a uniform magnetic field acts on each unit, and therefore uniform output of each phase can be obtained.
また多(のユニットを1個のチンプに集約することによ
り容易に小型化ケ計ることができ、その配線処理も楽に
なる。Furthermore, by consolidating multiple units into one chimp, it can be easily downsized and the wiring process becomes easier.
更に各相出力として歪の少ない正弦波馨イ□ることがで
き、しかも2相出カの配?り Kh度は良好であり、飽
和磁界を印加しておけば素子の配性は従来のような高精
度ケ必要としない。Furthermore, each phase output can be a sine wave with little distortion, and it also has a two-phase output arrangement. The Kh degree is good, and if a saturation magnetic field is applied, the arrangement of the elements does not need to be as precise as in the past.
なお各素子ユニットの出方はブリッジ構成とする必要は
ないが、ブリッジに構成″1−れば零基準の出力が得ら
れるので、位置検出等の用途には特に有効である。Although it is not necessary for each element unit to be arranged in a bridge configuration, if the bridge configuration is used, a zero-based output can be obtained, which is particularly effective for applications such as position detection.
第1図は従来のホール素子?用いた位置検出装置の−g
AJ乞示す概略図、第2図は従来の磁気抵抗素子の一例
ケ示す概略図、第3図(a)、 (b)は本発明の一実
施例を示す概略図、第4図は該実が1例の等価回路図、
第5図はその出方波形図、第6図(a)。
(b)は本発明の他の実hlq列馨示す概略図、第7図
は七の等価回路図、第8図は本発明の更に他の実施例?
示す概略図である。
A−H・・・磁気抵抗素子ユニット、PA ” pi・
・・折線パターン、0tJT1〜01JT4・・・出力
端子、■・・・電圧印加端子、G・・・接地端子。
第1図
−387−
第4図
第5図
(0)
第6図
(b)
第8図
手続補正書(方式)
1、事件の表示
昭和57年特許願 第153043号
2、発明の名称
感磁素子
3、 補正をする者
事件との関係 特許出願人
住所
名称(21B)ソニー株式会社
4、代理人〒105
住 所 東京都港区芝3丁目2番14号芝三丁目ビル
昭和57年11月30日(発送日)
な説明1図面の簡単な説明の欄及び(87図面7、補正
の内容
(IJ 別紙の通り
(2+ +、 本願8A細書第5頁第1J行1の如
く」を「の第9図に示すような」に補正する。
11 同書第7頁第2行Y「レリン示す概略図、第9
図は第6図の実施例の出力波形図である。」に補正する
。
(3)別紙第9図を追加する。
389−Is Figure 1 a conventional Hall element? -g of the position detection device used
FIG. 2 is a schematic diagram showing an example of a conventional magnetoresistive element, FIGS. 3(a) and (b) are schematic diagrams showing an embodiment of the present invention, and FIG. is an example equivalent circuit diagram,
FIG. 5 is a diagram of the output waveform, and FIG. 6(a). (b) is a schematic diagram showing another practical HLQ column of the present invention, FIG. 7 is an equivalent circuit diagram of 7, and FIG. 8 is a schematic diagram showing another embodiment of the present invention.
FIG. A-H... Magnetoresistive element unit, PA" pi.
... Broken line pattern, 0tJT1 to 01JT4... Output terminal, ■... Voltage application terminal, G... Ground terminal. Figure 1 - 387 - Figure 4 Figure 5 (0) Figure 6 (b) Figure 8 Procedural amendment (method) 1. Indication of the case 1982 Patent Application No. 153043 2. Name of the invention Element 3. Relationship with the case of the person making the amendment Patent applicant address name (21B) Sony Corporation 4, agent address 105 Address Shiba 3-chome Building, 3-2-14 Shiba, Minato-ku, Tokyo November 1980 30 days (shipment date) Explanation 1 The brief explanation column of drawing 1 and (87 Drawing 7, contents of amendment (as per IJ appendix (2+ +, as in page 5, line 1 J, 1 of the specification of application 8A)) 11 Ibid., page 7, line 2 Y, “Schematic diagram showing Relin, No.
The figure is an output waveform diagram of the embodiment of FIG. 6. ”. (3) Add attached Figure 9. 389-
Claims (4)
れ、かつ各ユニット内で折線パターンに形成された強磁
性金属薄膜磁気抵抗素子から成り、各ユニット間の隣接
する磁気抵抗素子の折線パターンが所定角度ケ以て配列
されたことを特徴とする感磁素子。(1) Consists of a ferromagnetic metal thin film magnetoresistive element divided into a plurality of M-symmetric or point-symmetric units and formed in a broken line pattern within each unit, and the broken line pattern of adjacent magnetoresistive elements between each unit is A magnetic sensing element characterized in that it is arranged at a predetermined angle.
ていることン特徴とする特許請求の範囲第1項記載の感
磁素子。(2) The magnetic sensing element according to claim 1, wherein the output of each unit is configured as a bridge.
がガ及び60’であることを特徴とする特許請求の範囲
第1項記載の感磁素子。(3) The magnetically sensitive element according to claim 1, wherein the element is equally divided into 8 units, and the angle is 60'.
が45°であることン特徴とする特許請求の範囲第1項
記載の感磁素子。(4) The magnetic sensing element according to claim 1, wherein the element is equally divided into eight units, and the angle is 45 degrees.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57153043A JPS5941882A (en) | 1982-09-01 | 1982-09-01 | Magnetism sensitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57153043A JPS5941882A (en) | 1982-09-01 | 1982-09-01 | Magnetism sensitive element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5941882A true JPS5941882A (en) | 1984-03-08 |
Family
ID=15553717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57153043A Pending JPS5941882A (en) | 1982-09-01 | 1982-09-01 | Magnetism sensitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5941882A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6397502A (en) * | 1986-10-14 | 1988-04-28 | 富士車輌株式会社 | Controller for garbage wagon |
JPS63213382A (en) * | 1987-03-02 | 1988-09-06 | Mitsubishi Kasei Corp | Magnetoresistance element |
US5602471A (en) * | 1994-03-10 | 1997-02-11 | U.S. Philips Corporation | Angle sensor including angularly spaced sensor units |
EP1006341A1 (en) * | 1998-12-01 | 2000-06-07 | Ford Motor Company | Rotary position sensor with redundant sensing |
EP1116935A2 (en) * | 2000-01-11 | 2001-07-18 | Robert Bosch Gmbh | Method and device for evaluating angle signals |
US6486656B1 (en) * | 1999-10-06 | 2002-11-26 | Delphi Technologies, Inc. | Magnetoresistive die and position sensor |
US8037639B2 (en) | 2005-10-13 | 2011-10-18 | Mitsu Kinzoku Act Corporation | Door opening/closing device |
JP2013065738A (en) * | 2011-09-19 | 2013-04-11 | Denso Corp | Magnetic sensor |
-
1982
- 1982-09-01 JP JP57153043A patent/JPS5941882A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6397502A (en) * | 1986-10-14 | 1988-04-28 | 富士車輌株式会社 | Controller for garbage wagon |
JPH0451443B2 (en) * | 1986-10-14 | 1992-08-19 | Fuji Car Mfg | |
JPS63213382A (en) * | 1987-03-02 | 1988-09-06 | Mitsubishi Kasei Corp | Magnetoresistance element |
US5602471A (en) * | 1994-03-10 | 1997-02-11 | U.S. Philips Corporation | Angle sensor including angularly spaced sensor units |
EP1006341A1 (en) * | 1998-12-01 | 2000-06-07 | Ford Motor Company | Rotary position sensor with redundant sensing |
US6191579B1 (en) | 1998-12-01 | 2001-02-20 | Visteon Global Technologies, Inc. | Rotary position sensor with redundant sensing |
US6486656B1 (en) * | 1999-10-06 | 2002-11-26 | Delphi Technologies, Inc. | Magnetoresistive die and position sensor |
EP1116935A2 (en) * | 2000-01-11 | 2001-07-18 | Robert Bosch Gmbh | Method and device for evaluating angle signals |
EP1116935A3 (en) * | 2000-01-11 | 2002-08-07 | Robert Bosch Gmbh | Method and device for evaluating angle signals |
US8037639B2 (en) | 2005-10-13 | 2011-10-18 | Mitsu Kinzoku Act Corporation | Door opening/closing device |
JP2013065738A (en) * | 2011-09-19 | 2013-04-11 | Denso Corp | Magnetic sensor |
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