JPS5941859U - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS5941859U
JPS5941859U JP13254682U JP13254682U JPS5941859U JP S5941859 U JPS5941859 U JP S5941859U JP 13254682 U JP13254682 U JP 13254682U JP 13254682 U JP13254682 U JP 13254682U JP S5941859 U JPS5941859 U JP S5941859U
Authority
JP
Japan
Prior art keywords
microwave
light source
source device
discharge light
microwave cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13254682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638009Y2 (https=
Inventor
児玉　仁史
勲 正田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13254682U priority Critical patent/JPS5941859U/ja
Publication of JPS5941859U publication Critical patent/JPS5941859U/ja
Application granted granted Critical
Publication of JPS638009Y2 publication Critical patent/JPS638009Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamps And Accessories Thereof (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
JP13254682U 1982-09-01 1982-09-01 マイクロ波放電光源装置 Granted JPS5941859U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13254682U JPS5941859U (ja) 1982-09-01 1982-09-01 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13254682U JPS5941859U (ja) 1982-09-01 1982-09-01 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS5941859U true JPS5941859U (ja) 1984-03-17
JPS638009Y2 JPS638009Y2 (https=) 1988-03-09

Family

ID=30299285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13254682U Granted JPS5941859U (ja) 1982-09-01 1982-09-01 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS5941859U (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014127425A (ja) * 2012-12-27 2014-07-07 Asc:Kk 無電極照明装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014127425A (ja) * 2012-12-27 2014-07-07 Asc:Kk 無電極照明装置

Also Published As

Publication number Publication date
JPS638009Y2 (https=) 1988-03-09

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