JPS5941749U - 真空機器における試料交換棒移動機構 - Google Patents

真空機器における試料交換棒移動機構

Info

Publication number
JPS5941749U
JPS5941749U JP13727882U JP13727882U JPS5941749U JP S5941749 U JPS5941749 U JP S5941749U JP 13727882 U JP13727882 U JP 13727882U JP 13727882 U JP13727882 U JP 13727882U JP S5941749 U JPS5941749 U JP S5941749U
Authority
JP
Japan
Prior art keywords
sample exchange
sample
exchange rod
cylindrical body
movement mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13727882U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431583Y2 (enrdf_load_stackoverflow
Inventor
上村　英助
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP13727882U priority Critical patent/JPS5941749U/ja
Publication of JPS5941749U publication Critical patent/JPS5941749U/ja
Application granted granted Critical
Publication of JPH0431583Y2 publication Critical patent/JPH0431583Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP13727882U 1982-09-09 1982-09-09 真空機器における試料交換棒移動機構 Granted JPS5941749U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13727882U JPS5941749U (ja) 1982-09-09 1982-09-09 真空機器における試料交換棒移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13727882U JPS5941749U (ja) 1982-09-09 1982-09-09 真空機器における試料交換棒移動機構

Publications (2)

Publication Number Publication Date
JPS5941749U true JPS5941749U (ja) 1984-03-17
JPH0431583Y2 JPH0431583Y2 (enrdf_load_stackoverflow) 1992-07-29

Family

ID=30308394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13727882U Granted JPS5941749U (ja) 1982-09-09 1982-09-09 真空機器における試料交換棒移動機構

Country Status (1)

Country Link
JP (1) JPS5941749U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258853U (enrdf_load_stackoverflow) * 1985-10-02 1987-04-11
JPH1130573A (ja) * 1997-05-20 1999-02-02 Jeol Ltd ホルダ保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258853U (enrdf_load_stackoverflow) * 1985-10-02 1987-04-11
JPH1130573A (ja) * 1997-05-20 1999-02-02 Jeol Ltd ホルダ保持装置

Also Published As

Publication number Publication date
JPH0431583Y2 (enrdf_load_stackoverflow) 1992-07-29

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