JPS5941691U - mechanical booster pump - Google Patents

mechanical booster pump

Info

Publication number
JPS5941691U
JPS5941691U JP13813682U JP13813682U JPS5941691U JP S5941691 U JPS5941691 U JP S5941691U JP 13813682 U JP13813682 U JP 13813682U JP 13813682 U JP13813682 U JP 13813682U JP S5941691 U JPS5941691 U JP S5941691U
Authority
JP
Japan
Prior art keywords
drive motor
booster pump
current value
mechanical booster
inverter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13813682U
Other languages
Japanese (ja)
Other versions
JPS641512Y2 (en
Inventor
恵一 吉田
大河内　茂
Original Assignee
株式会社大阪真空機器製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社大阪真空機器製作所 filed Critical 株式会社大阪真空機器製作所
Priority to JP13813682U priority Critical patent/JPS5941691U/en
Publication of JPS5941691U publication Critical patent/JPS5941691U/en
Application granted granted Critical
Publication of JPS641512Y2 publication Critical patent/JPS641512Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本実施例を示す概略係統図。第２図はポンプの
圧力と排気速度との関係を示す性能曲線図。 １・・・・・・ブースタポンプ、３・・・・・・駆動用
電動機、５・・・・・・インバータ。FIG. 1 is a schematic diagram showing this embodiment. FIG. 2 is a performance curve diagram showing the relationship between pump pressure and pumping speed. 1... Booster pump, 3... Drive electric motor, 5... Inverter.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 駆動用電動機容量を越える負荷のかかる低真空領域に於
いて使用されるメカニカルブースタポンプに於いて、駆
動用電動機にフィードバック回路を有するインバータを
接続し、前記駆動用電動機容量を越える負荷が生じた際
、駆動用電動機の電流値をフィードバック回路にて検出
して、該電流値が所定の電流値以下となる様にインバー
タにより駆動用電動機の回転数を低下させる構成にして
なることを特徴とするメカニカルブースタポンプ。In a mechanical booster pump used in a low vacuum area where the load exceeds the drive motor capacity, when an inverter with a feedback circuit is connected to the drive motor and the load exceeds the drive motor capacity. , a mechanical device characterized in that the current value of the drive motor is detected by a feedback circuit, and the rotation speed of the drive motor is reduced by an inverter so that the current value becomes equal to or less than a predetermined current value. booster pump.
JP13813682U 1982-09-11 1982-09-11 mechanical booster pump Granted JPS5941691U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13813682U JPS5941691U (en) 1982-09-11 1982-09-11 mechanical booster pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13813682U JPS5941691U (en) 1982-09-11 1982-09-11 mechanical booster pump

Publications (2)

Publication Number Publication Date
JPS5941691U true JPS5941691U (en) 1984-03-17
JPS641512Y2 JPS641512Y2 (en) 1989-01-13

Family

ID=30310042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13813682U Granted JPS5941691U (en) 1982-09-11 1982-09-11 mechanical booster pump

Country Status (1)

Country Link
JP (1) JPS5941691U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543281A (en) * 1978-09-21 1980-03-27 Matsushita Electric Ind Co Ltd Performance controller of compressor
JPS55164792A (en) * 1979-06-11 1980-12-22 Mayekawa Mfg Co Ltd Driving mechanism for screw compressor
JPS5641192U (en) * 1979-09-07 1981-04-16

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524460A (en) * 1978-08-11 1980-02-21 Hitachi Ltd Semiconductor laser system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543281A (en) * 1978-09-21 1980-03-27 Matsushita Electric Ind Co Ltd Performance controller of compressor
JPS55164792A (en) * 1979-06-11 1980-12-22 Mayekawa Mfg Co Ltd Driving mechanism for screw compressor
JPS5641192U (en) * 1979-09-07 1981-04-16

Also Published As

Publication number Publication date
JPS641512Y2 (en) 1989-01-13

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