JPS5934171A - Calibrating method of high frequency electric power measuring system - Google Patents

Abstract

PURPOSE:To make a calibrating method exact, and also to execute easily an operation, by installing a standard sample consisting of a passive element to a measuring jig, measuring an output level in case when an input level is adjusted, and comparing the result with a standard value. CONSTITUTION:That which bridges an input terminal 14 and an output terminal 15 of a package 13 by, for instance, a gold ribbon 16 is used a standard sample 11, and the standard sample 11 is installed to measuring jig 2. Subsequently, an input level is adjusted so that an output of an input side measuring system 3 becomes a prescribed level. The input level is measured by a monitor 4 for monitoring an input level, which is connected to a monitoring terminal B of the input side measuring system 3. Subsequently, an output level of an output side measuring system 5 in case when the input level is adjusted is measured. Subsequently, this output level is compared with a standard value and whether a high frequency electric power measuring system is normal or not is decided.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to an improvement in a method for calibrating a high frequency power measurement system for measuring high frequency power characteristics of a semiconductor device.

(bl) Prior Art and Problems The conventional calibration method for high-frequency power measurement systems uses a semiconductor device, which is an active element, as a standard sample during calibration, so there are problems with reproducibility and simplicity, and there are also problems with handling errors. There are problems such as destroying the semiconductor device for calibration, which is a standard sample.Furthermore, removing the connector causes fluctuations in the standing wave ratio, which causes loss that cannot be calibrated, and reduces the reliability of measurement. This is causing a decline.

FIG. 1 is a block diagram showing the system configuration of a high frequency power measurement system 1. Calibration of this measurement system 1 is generally performed according to the following procedure.

■ Remove measurement jig 2 and connect output terminal A of input side measurement system 3.
The input level at which the output of the input side measurement system 3 reaches a predetermined level is measured by the input level monitoring monitor 4 connected to the monitoring terminal of the input side measurement system 3. Understand the correlation between the input level and output level of system 3. This makes it possible to know the level of human power required to bring the output of the input side measurement system 3 to a predetermined level. However, the human power level obtained here is not the actual input level to the input side measurement system 3, but the high frequency power level at the monitoring end B (three-terminal coupler in the actual measurement system), and is the human power level of the input side measurement system. This is a monitor value that relatively indicates the level.

■ Connect the input end C of the output side measurement system 5 to the output end of the input side measurement system 3, adjust the human power level of the input side measurement system 3, and apply the specified level of human power to the output side measurement system 5 (i.e. The output at the output end of the output side measurement system 5 when the output of the input side measurement system 3 is added is measured with a power needle. From the relationship between the input and output of the output side measurement system 5 obtained here, the output side measurement system 5
The loss is known.

■ Separate the input side measurement system 3 and the cutting edge side measurement system 5, and connect the measurement jig 2 between them to configure the high frequency power measurement system 1. Attach the standard sample consisting of the device.

(2) Apply a predetermined DC bias to the standard sample, apply a specified input to point A, and measure the output power at point D. Is the level of manpower required to add the above specified inputs the same as the supervision required earlier? Calculate using the correlation between the monitor value at J[lB and the output of the input end measurement system 3.

(2) Calculate the output power at point C from the output power at point D obtained by 1υ in the above 0 term and the I low heat of the output side measurement system 5 obtained in the 0 term.

(2) It is determined whether the high frequency power measurement system 1 is normal by comparing the appearance of the C point obtained in the above 0 term with the standard value.

■ Measurement of the test sample is started only after it is determined to be normal in item 0 above.

The above-described conventional method for calibrating a high-frequency power measurement system requires the following operations: in sections 0 to 0, the connector is removed to separate the measurement system, and finally the connector is tightened again to assemble the measurement system. Therefore, the standing wave ratio between the connectors is not necessarily constant, resulting in loss that cannot be calibrated.

Therefore, there is no means to maintain the calibration integrity of the entire measurement system, and there is a problem in the reliability of the measurement of high frequency power characteristics.

In addition, since the same type of active element as the test sample is used as a standard sample, there is a risk of deterioration of the characteristics of the ff1ll sample itself, and since electric power is applied during calibration, temperature rise due to heat generation of the element is avoided. Temperature errors may appear in the results.

Furthermore, since the standard sample is an active element, there is a risk that the standard sample may be destroyed due to a slight handling error.

As described above, the conventional method for calibrating a high-frequency power measurement system has many problems, and its operation is complicated and requires a large amount of man-hours.

Note that 6 is an oscillator, 7 is a high frequency power amplifier, and 4°8 is a power meter.

(C1 Purpose of the Invention The purpose of the present invention is to solve the above-mentioned problems and provide a method for calibrating a frequency power measurement system that is accurate and easy to operate.

(d) Structure of the Invention The features of the present invention include a measurement jig to which a test sample is attached, an input side measurement system that supplies predetermined high-frequency power to the measurement jig,
Before measuring the high frequency power characteristics of the test sample using a high frequency power measurement system comprising an output side measurement thread having a predetermined amount of loss and transmitting the tooth blade from the measurement jig to the outside, Attach a standard sample consisting of a passive element to the measurement jig,
m7 By measuring the output level of the output side measurement system when the input level is adjusted so that the output of the input end measurement system is at a predetermined level, and comparing the output level of the output side measurement system with the standard value. The object of the present invention is to determine whether or not the high frequency power measurement system is normal.

(e) Examples of the invention The invention will now be explained with reference to examples.

FIG. 2 is a plan view without the standard sample Mll made of passive elements used in one embodiment of the present invention, and the plan view of FIG. 3 shows a conventional standard sample 12 made of active elements for comparison. .

In this embodiment, as shown in FIG. 2, the standard sample 11 is the same as the package 13 of the active element used as the conventional standard sample 12, and the input end 14 and output end 15 are ) Use one bridged with ribbon 17. Note that 17 is a semiconductor element.

The high frequency power measuring system 1 used in this embodiment is no different from the conventional high frequency power measuring system 1 shown in FIG.

In addition, the correlation between the input power monitor value at the monitoring end B of the input side measurement system 3 and the output level at the output iA, and the loss between the input end C and the output end of the output side measurement system 5 were measured in advance. The schedule is also the same as before.

However, in this embodiment, this measurement is performed only once at the beginning when the high-frequency power measurement thread 1 shown in FIG. do not have. This point is different from the conventional method, and conventionally, when measuring the high frequency power characteristics of a semiconductor device, it was necessary to perform the above measurement in advance each time. This is because in the conventional calibration method using active elements, active elements]
Because there are temperature errors due to lunar fluctuations or heat generation, it is necessary to calibrate at least the portions composed of passive elements every time.

Next, the high frequency power ? prior to measuring the high frequency power characteristics of the semiconductor device in this example? The method for calibrating lll fixed thread 1 will be explained.

The standard sample 11 shown in FIG. 2 is attached to the measuring jig 2, the input is adjusted using the monitoring monitor 4 so that the power at point A is at a predetermined level, and the output level at point D is measured using the wattmeter 8. Measure with. If this output level does not differ from the specified value, it is determined that the high frequency power measurement system 1 is normal,
Measurement of the test sample may be started immediately.

As described above, in this embodiment, the calibration of the high frequency power measurement system 1 prior to measurement of the test sample is extremely simple. Moreover, since the operation of removing and tightening the connector is not required, the standing wave ratio does not fluctuate, and there is no possibility that uncalibrated loss will occur. Therefore, the calibration of the high frequency power measurement system 1 is performed accurately, and the reliability of the measurement of high frequency power characteristics is greatly improved.

As mentioned above, according to this embodiment, the calibration of the ITf + frequency power measurement system 1 is extremely simplified, but this is done by using the standard sample 11 used in this embodiment, inductance (L), capacitance (C) , resistance (because it is a passive element consisting of an acid component, there is no risk of characteristic deterioration or destruction, etc.), and by using a passive element as the standard sample 11, the high-frequency power measurement system 11 during calibration is completely passive. This is because the reproducibility is good because it is composed only of elements.

(f) According to the present invention, as described in detail, the high frequency power measurement system 1
The calibration becomes accurate and easy, and its operation is greatly simplified, and the number of times required for calibration is greatly reduced.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing the system configuration of a high frequency power measurement system, and FIGS. 2 and 3 are plan views showing a standard sample used in an embodiment of the present invention and a conventional standard sample, respectively.

Claims (1)

[Claims] A measurement jig on which a test sample is mounted, an input side measurement system that supplies predetermined high frequency power to the measurement shift, and an output side measurement system that has a predetermined amount of loss and transmits the output from the measurement jig to the outside. Before measuring the high frequency power characteristics of the test sample using the high frequency power measurement system, a standard sample consisting of a passive element is mounted on the measurement jig, and the output of the input side measurement system is at a predetermined level. The high frequency power measurement system is stopped by measuring the output level of the output side measurement system when the input level is adjusted as follows, and comparing the output level of the output side measurement system with a value. 1. A method for calibrating a high frequency power measurement system, the method comprising determining whether or not.