JPS59192932A - Two-dimensional pressure-sensitive sensor - Google Patents

Abstract

PURPOSE:To obtain highly precisely the pressure distribution at multi-points by driving light emitting elements one by one in order, and obtaining optical output electric signals from plural photodetecting elements existing at almost equal distances from the light emitting element driven at every driving of the each light emitting element. CONSTITUTION:A protecting layer 10 is made of a thin film such as polyester, and is in contact with a soft part 20. The rear surface of the layer 10, namely the surface of the opposite side of the surface receiving pressure directly is the light reflecting surface, and a metal is vapor-deposited thereon and so on. The soft part is made of silicone rubber, etc. and has >=90% transmissivity with respect to the light of a source of a light emitting part 40. A photodetecting part 30 is constituted by arranging plural detecting elements in plane state, and light transparent windows for transmitting the light from the part 40 are provided for every detecting element. The light irradiated from the part 40 passes through the part 20 from the light transparent windows, reflects at the reflecting surface of the layer 10, returns to the part 20 again, and receives the reflected light at the part 30.

Description

[Detailed Description of the Invention] (1i Technique Field 1) The present invention relates to a two-dimensional pressure-sensitive sensor K, which is capable of controlling the distribution of pressure applied to a plane in a taK direction with n* good accuracy. Technology related to self-contained secondary yt pressure-sensitive sensors 7 A typical conventional planar pressure-sensitive sensor is one using pressurized rubber. From κ, 4t
Metal particles touch each other or have almost electric K.
It becomes a state of contact, and the pressure of the sheet is 11 am and the resistance of the back of the sheet is insulating state 11 (more than 1 OMN) or 6 states all (below 100 J? Qt). 11
jllL Nine also 6F Shimajima-Shi-shi, ζ's-〇1-pressure rumors dA #I1-@κ Thin 1111e K pressure to fist and the view of the mow staff 1kK home ^41# chi-sex He did not put any pressure on himself. Dan & Yari Rumor Denpu^ Hankai belonging axis Senbu #dAK111f? &4Na6.1AO$1
Sexual power #11NL. One pressure k depends on ξ4fillllK when the time is up, the force O flaws μ-99 Warm *%/%l^O, judge the elastic force, measure the amount by which Pum is compressed by using optical means K″C, #test KF
F. 4ξ7κ, which is the power of K-change.9. %K4
ν! The position of the 咎Chi ticket is a contributing factor to the false armor k. % or less J
IIIKII To clarify● (-The throat and the composition 2wa are the gardens showing the 10th example of the base of the base, and in the Okazu K, 10 company insurance ■butsu. s1-3
●&! All expenses. 46m one party s. H island with SOA army Ikkuru
Giichito 11) Cod. Analogy #4III 2^! Le etc. ON-fu 4h▲ from p, prefecture soft lI 鵞O to monogo V# Shimajima Iha!
From the external force (ll # is the ninth 4, so 6 is the pressure K
I'lLte #1 Prefecture - ■ Goose O and Okaji《Elasticity Ho. The pus layer to01111%, that is, the pressure receiving pressure that directly receives the pressure, and the tL vs. gAOIl is the same as that of Masaka. For example, Kuwasuke Kazutoshi O has a characteristic #i for Hikari K of &l Tsunzu ^ to 飜p, 斃允鶴 400 允騨 (Matto Kage 101 or more》● Hoshimitsu-30, In order to pass the light from 11140 to 11140 by arranging the number of light-receiving wheels on the sides in a garden-like manner, the number of light-receiving wheels is arranged in a garden-like manner. Being kicked ● Ichiman 10 is also irradiated and passes through the prefecture soft S20 from the Jiuguang Yanman m excess. 4M discipline layer 1
0K was set up and reflected at Nine Reflections, Souichi Kuwa again! OKil
Receive luru●ζam radiation with 1 light song 30, - light 1140
fd, number O
- You can place Hikarisha Sen to Ichiaki κ! It will be done. IK air path 118 OK is the drive path of the umbrella, the amplification of the output of the light receiving main body.
In order to explain the principle of two-dimensional pressure sensing as an example of IIA, it is OI1llllI garden ●, Kanchuden iKXMII
8G#i is omitted●Here is the pressure sensitive example of Hontora ＊8 of t
Book-Mall311Kazuh? I? JllKa reveals. Kibutsu 41}. K was set up - 42m of light. 41k.
42-, one of the -optical elements. N.J.L.
One meter of light emitted from the party element 42 is. Hatokai K, to which no IE force is applied, is made of non-transparent material Os with light reduction.
w31 upper K @ cut light transmission layer 60-) then pass through the transparent O prefecture SZO and lower the protection layer 10-C mulberry soft part 2
It is reflected by G and 10 reflections.
After passing the 8th plate 3L, the Fengko car PN32m. 32L32m
--Kl@athgE The light path of a pigeon that is not receiving any force is shown with a kakuchu yotei》●eXk. 12 pressure from 111'%Fl10 to SaO κ, the result is $11110kP. and asstoo elastic force wz
When pressure is applied to the protection II10'6 position t & palm shown by jlllllls10 in the dotting, the optical path of the light from K is Wwaml (indicated by broken in It). S, since the light opening line #l to the light receiving element 32-,... changes, that is, the light receiving plate changes κ, the electric signal output of the light receiving element changes. The target κ is the change in ζ converted to a pressure of 111 K. 4th
In 81, 9 shows a configuration in which the OWa light emitted to the light-receiving tubes of Kikumurako 32@ and 32- decreases when pressure is applied. that's all,
Although I have described the 424KllllL photoresist element, the same applies to other Ikkou Kassenko. 11E4@ has a receiving vote of 32●, 32k*32$% party 1glI4Wl60m,
601.60#. A showing the approximate engraving of II 兔子 42●, 42&, 42a viewed from the top II (direction of applying pressure)
It is m (Sen■en). Part SIi distributes each element in M411 on a two-dimensional plane at equal intervals κ, and the two circles indicated by 1 are the κ directly below the light-receiving element 32. Imperial command L
Sp
9. The outside 116 yen is under pressure and it is -1% M dove. The maximum pressure inside the inner circle is the maximum pressure (this example) Ichitamacho Nokankai Pressure School was applied to the pigeon shelter am shooting 1111'e6. Maroko of the party - the l1 state of the party layer, the person in charge of the spear rope - κ large
Ik call and Kyūichi Koshin Ksea shooting - JII Kaimaro K
＃-で●●● Koichi lI #1 Maroko Kapl'1 & Pottery - 94M' that shines through the haze! -And ^ is also ●Oka ■ Tsumugi, as an example, Ikkou Shoko 4! & Kara - Sera BL hot mmsoit suke L? jl*lI
so meeting 41 full E shooting meeting IKAl [shooting party vote child 31sff? Is it a waste 4? Because of that. 114
6mKk-1, 9 tai of Tomiichi's circular layer reception Maro?
&L%11 party Satoko 31 and 3 deceased. The center is the intersection point of the outer circumference H7 of the outer circumference H7 of the center. QCtma*gouc
Points M and N are points on #bell PQ, and PH-"t.PiN-T is set to alLf. - 9″c one pigeon house k
In this case, the outer cup of the light beam range is set at AM 1, and the pigeon meeting κ, which has a large pressure, is set up with a k beam so that it passes through point N of #@outer area. P3elKIlk0411tlA child Hm. 324
．． 32*Irflph is 4 or more and aa* is the same. And Ichiman vote 4,. Meeting I-, 1?1. . k*ia*? s
=sth child electronic *-mtJf-1eats#Ha. IIg
．． 01. S-ku or 6*i. The above eight former JIIF-kais are the same, and the four receiving umbrellas have a dark output.
Two, tall. Mototora--no! -Deathly heat to Nine Turtles F-2; I gave praise to -F1 Kusu horizontal line one and two shafts. n
One after another on the 1st stage of Keyaki; It is only necessary to obtain the Dali output of the quantity 9 votes t in the R- of the 19 votes. If Y-v>1x, move the axis #t4. The relationship between the 1-trix arrangement of the 1-legged light-receiving tag crlIJφ0 mark》 and the 1-trick arrangement of the axis 9-wheel mark《-width●mark》 is the following: (*-1) ILII Between the 1st corner and the (duck 1) row, the same number of Kikuhonko are distributed. 11iH, a former 1 mouth 4 eyes which damaged 4lll 31.
ll'l has only a light receiving element and does not have a 1900 yen. In this 11th edition, we have used a single optical element one after another, and used the four-point output of the precious ytIA child to drive it. 11 kujL (1.1
)'s Kamemaru Motoko-L? 9}9k x (1, 2), 12.
1),1m,l),(!,3)tr%ltJlatlAfter passing the force, next K-F}'jtas1! ,3) Ichiman's vote child-L,? v}IJ#x(1, 31, (ffi.!)
, (3, 31, (2, 4)).
,s-1),13,! ), (3,3),,13,s-1
),",lm-1.2). For that reason.So-A▲Chart 11 shows 1111K.Next IA111mllK&ttJe
llfial! i0wo519111 and Meng101
MKJ! I'm going to have a good time. 9th Kindergarten Electricity 15Issno
ePoo e1m'Clas<-room control 1,110t
jlll Kufuko! Toritasuru, 12o is - Kansaiko Mal
J Yu Atill Kōichi I1.130 Yūichi Party 1 Child Matritas Nlljllllmll. 140H'1 Hikarisha ▼｝ri Isu Zheng, ■oU 豐'R. Car Ichiko Matri Isu Ichigo - Zheng. 1
6o is the name of the pre-lt. l? OtJjllgII. ll
lotjA/Dff supply. 111G Regisu. 200
eye cover fagu}. ! Is “to” a cry? free
t) Control God, 220tj^/D ResponsibilityImllllllOf
illll1M. am@t! &z Ji 30
G is a seven-pin ν one power register % 310 digits 冫pu Confucian output terminal, 320 digits Senna output Shingo Fuzi @
00's matrices I and P part Kml are 11
1111111K boss @Boo is Thai ζ冫〆konto-
Le Zheng, 31G,! 120m each
l. 511,812 companies 8 count 1*v} input Shingo bell.
613,514 is Count I system am%530,540 is -
Row and column side decoders for Matritus. 531,5
32nd decoder manual number 1. 533, 534 is the decoder output enable number assls30, 560 is the 4th point of the research element 1 trix 111&me mID row Kakuno I Nanamu-1 Count 1, l$81. ss2*j#un#-ichigo,
570, Row side decoder for ti receiving cable matrices, S7
1 is a decoder with human power. S12 is a decoder output enable signal. Biased signal training, M control, etc. are simplified and listed in 4. Kamiki Touro-500 with the top-speed Kazunari Ippa-500 ~ HakukurullIIIt, and when a command is issued via the 200. p4t Megukunto OichikII300
-4. j》■C Tomi. 1》is-brass1re, *ey#I1@,
s16KIN delivery - h for ((l し - 嬬行, j cod ga k to respond 1● next κ cow ν-1110, S! Oe internal purchase is lII phrase #831, H snow through 1 cow ν-sso , sso to even yari-h, 餉II ku y1S80, s60K?Stored-re nine complexes,
861-the-tyrw4-sioof/
/h et abbreviated 1*9ylS&OFi-11. The above-mentioned work was finished at Saki point, and the price was 33.834 yen, I$72K! tjf
l-#Sm0,640,s70am Kadato opens h,
111 m Ill snow 0, 130 and 1110 for the same reason Kokuichi MIn - made 'C - nine tris corner 110's corresponding m Yuriko and #k, Kikyu Koko Matrita!
The corresponding line for f5 is activated. on the other hand. Count 1 @ 600
Output embroidery 210 single play evening! 16G input R selection #K4
11, set the light receiving element Matritas 1400P1 to nIR-
I'm looking forward to it. Multiplex v#t output is amplified at
F O″e is amplified and control-2200#i (y/my number ^
/D trade restriction 110κte de4di Ik*K*Wa*hftW
k, 14 @ 230f) 14 (//tall 9v Jis $ 11! IOK storage 1 ● 1 photo-receiving element Hatake Curley Itto 39 ● Le rating - 16 and. Kogo IIIS @ @ # 4
Output r from 11114@Is (Regimeta Yukikai OI via y7yl00) contents end?-3set21 output 2 and co-Kaede; data ψ pull signal to outside 11 via Ichiko 310
Select 1IIs. Next, Kalanta lI80Th41 size 4
．． and j1g1IItylHO -IL? }. Ki to Ikki no u-saku +175. Time chart of ialF Steel S1;
Received points. If the T output is one. Next is Kalanta 820
We had a meeting φ1《-. As HA (1.3), the output of the Shikoh vehicle is traversed using the IN-like procedure. In this way, all baggage light elements S in IR8 row n are held in IIIlIII and each light-receiving card output is sent. tI u/ta Isle ni r2J
When the housing is set, the counter Isle is set to #I by φ1 and t<
,7)-w(&2), repeating the operation of Ichikaba ((,
7)■《藺-14-1) The w1 work of this Sen ψ is completed at the moment the movement of the breath meeting is completed. As above 1k1111. In the first example, Pressure 6: From now on, the m-brass between Ichiku Shoko and Hikou Hako has become idle.
Illness formation 111 that uses the light @k conversion to the Doko element to perform pressure training. The light-emitting IAI can be marked one by one, and the first work can be done with each of the nineteen votes.
I'm following the rumors of Kuhonko Suga's output of 4 points.゜e
, Noble pressure dllll: Difference in applied pressure direction 1: More resistance I
Even if the angle Fa゛ of #41 changes with respect to the incident light, jl
Complete the 4-point data of 19?1 and calculate the phase ζ ratio IS! 1: It is possible to correct the fluctuation of the output spear due to the slope of the pressure being received from 1. Also. % light reception - When no pressure is applied to the vagina, 3/4 of the candy area is irradiated, and when I and large pressure is applied, about 174 of the candy area is irradiated.
Senna Yokosei q1 element C, for example, Uke 9 elements, etc.]. Due to the difference in the pressure direction mentioned above, it is acceptable to have a certain degree of irradiation area. That is, point 6-1; M point《N
point) can be tolerated up to a deviation of about eclipse v/2, and if the deviation is this m
If it is within the range, you can check the change in pressure within the initial setting pressure range. for example. -Nine cumulative f-1}Tux (4.7) light 1
glI1:. On the other hand, it is sufficient to use the summation (1.7) of Sonooka - 4 points of IAf's Yuden f conversion 7Jm * (&.J). This shrine. vC4,j》 is expressed by the following formula. V(1.7)mwf(-1.7)l*((J-1)**
(441J1+豐(4J+l) Note.llil IIS
The pigeon house of the actual example has a one-tooth configuration of III rows and II columns. Ukeku Element (@) 1m-4) Steel, Kamemitsu Shoko at C@
I Kazutomi) w (*-2) IP4m neighbor 1; The outputs of the four light receiving elements in the V4 area are detected by moving the Kabuto optical elements point by point. The number of tatami mats and nine votes are arranged in the same way (for example, one row and one column). Matrix (1.1), (1, N, (a
, 1), (●.&》) If you move the light emitting element at the point 7, the output from the light receiving plate at the 2 points will be reversed. For example, for (1, 1'J, 1.2) and (2.1)).For other 1 or 1st row.1 or kf13m light emitting elements, try to obtain the light receiving element output of the aWAS point, and similarly for the points other than @, the output of the light receiving element is 4 points. However, in order to obtain the above-mentioned addition bell data, it is necessary to make the addition export Qin ambiguous with the addition steel number. The receiving end was circular, but it is multi-shaped.Light shape◆Receiving light of any shape■
It can be done as follows. History-;． Ukeichi "lt Honko O Kai? 11
S-axis? moy}jkuxlllaam. II.
Participating in the lecture 8; Output electricity from each carefully selected ticket office.
&9 may be used, and both pots will make a loud sound. In addition. @Note 111e"jE For example, 6 tatami mats are arranged in 31 bits, and the V Tsukune rubber steepness is used as a tatamiichiki soft shrine. On the other hand, ^/DK-Chin 4 ~ No. 4 bit disassembly t 允一屹 t t grasping is q ﾨ● 《Ichinari OMl《 Hon- narration is overwhelming'' Jannaka 6; The discussion becomes a value & Yokozou is 6'c # Rikatsuse O Yuzu mv stage - dimension about a; - Kei - ^
Is it possible to be impoverished in the state? Jf with many points in Ken Takanawa
●l You can explore Rikibu City! However, in the present invention, the threat of electricity is #! I haven't m.f. Il bundle-like electricity ◆ Deterioration of the elastic force of the metal powder due to S2 caused by
@Female●1 Because there is no C. The tsuba tank degree is heading towards L.

[Brief explanation of the drawing]

IIIS- is a graph that breaks down the pressure-wind resistance characteristics of the pressure-sensitive sensor on the east axis. Legs showing the 7yψO#4 relatives of m*Ikkomoto Ichimeiichi*@-. Copper 1m 1M steel mm 6 * y + 6m made for the purpose of making easts. Hagane 4- is the uke-kyuko of Doji ψ of Hagane 3-. @
1. A diagram showing the general shape of the 1tl Aflk and Yunbei trend. The first one is Heiichi, who arranged the shelf 4110 Todoroki Kazuhata to the second.
Chinsew is uke*. Il II * 4 job compensation mI
Koji for f1, 1st - is Hontora bag example's set ν 豐O uke - Yunko distribution koji -, w4@- is tatami - 9 votes na's III! l
lI Thai ＾ te ya }. 1111- and 餉10迿is the Tsunyku that accepts the electricity 11#IFIl of Hontora. Key 31-1》Tsuki (4) is an example of the arrangement of the shoulders of Tatami-Nine. 10.10'tlajll. ll...Hanmanji. mo・
...Paranoid part. sO... Light receiving part. 40...Ikushima. 3
1.41...J&K, SO...Electricity Division. 3 snow●
～－・．． Receiving element. ４３●－－・・・－Kuzoko. ●0
●～Q...Light trend. 100... Part of the thorn. 11G・
...Ichiman at. Maxx Club, Lazy O...llI Hikariko 1t Tsux Overthrow lM Part. 130...gIh light plate, Masix steel steel--part, 140...1? ．． Jll
Iko Masix Club. 160...Ut#F Matotsukunu.
Row side llll1ro. 160... Malt pleku leaf, 1
70... Masanobuzen. 180...^/D conversion I'1.1
90...Regime! ．． 200...Output power
．． 210, 110, ISOJ40・mill one tightening. 30
0... Sen ψ - input terminal. 11 @ - 豐冫pulling output terminal, 320...7 yψ output signal terminal. See...
・Thailand Telephone Guco/｝0-ru part. ! ! 10... line @ kakunta, s20... punishment 1 kakunta. 611J1 Snow...
Input No. A cotton, 613, ISl4-#9/? Mk tighten. 33
0...19 elements q+99fitifllAf2-f.
sao・va'lts child 1 tosoku column side decoder. ! $
31431...Depuda human power signal cotton. BS3.1$34
...Decoder output enable status. aSO...Fukuko element row 1 Ka9 no Yu, S(i0...Kiku & child y4@Korikunota.H1.Hl...Counter mill@1.870
... Light-receiving Yuko ma} Tsukume line steel! Boo F. 87m...
Decoder human power signal generator. s72...Decoder output enable stitch φ -144- -6-146-

Claims (1)

[Claims] ...Pressure receiving surface. Light-emitting surface. A flexible plate-like part that combines nine permeability. The N9 part that writes the bag light lA+ of the am figure, the light receiving part that does what do the scattered Giyuan honshi, and the Moeki l? ! Nine M Arrogance Ill
Electricity that drives the destination county - 1 Anbu and low, and. /
N+k! - The light emitted from the light MA passes through the Sokiji deadboard plate-like part, is reflected from the #1 first reflection d[142], passes through the flexible plate-like part, and is lent at the light receiving part. It's a two-dimensional pressure-sensitive sevent that feels like it's being nine, and it's JI one by one with Kuki from @Ki! Hook, for each jlyt element's drive I. 1! A secondary pressure-sensitive sensor that outputs light from the first photoreceptor element equidistant from the first actuated source element and outputs an electric signal. (21+iii) The patent claim is based on detecting the pressure change by adding the light output of the light-receiving panel's light output electricity at n1 to n1. 《3》Sonoki is also a light-emitting cape to the light-receiving Kurumiko Fukuichi l!llll
K. In the event that great pressure is exerted on Shoichi Ekihiro, Yun will impose the prescribed yoke of the Ekihoku Party,
-Received pressure-K'Ktj/111 where no force is applied
1' Predetermined IIIv! The two-dimensional pressure-sensitive seven medicines described in Section 1 of Tokusu Sabagyu's Hankaisho, which is characterized by A and ζ, in which the nine hits the place of the penetrating standard, which is different from A.