JPS59191587A - レ−ザ加工装置 - Google Patents
レ−ザ加工装置Info
- Publication number
- JPS59191587A JPS59191587A JP58063793A JP6379383A JPS59191587A JP S59191587 A JPS59191587 A JP S59191587A JP 58063793 A JP58063793 A JP 58063793A JP 6379383 A JP6379383 A JP 6379383A JP S59191587 A JPS59191587 A JP S59191587A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- halogen
- laser processing
- laser
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 29
- 150000002367 halogens Chemical class 0.000 claims abstract description 29
- 239000002245 particle Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 14
- 230000006837 decompression Effects 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 150000002366 halogen compounds Chemical class 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- -1 freon is supplied Chemical class 0.000 description 1
- 229910052811 halogen oxide Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K10/00—Welding or cutting by means of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
- B23K26/348—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding in combination with arc heating, e.g. TIG [tungsten inert gas], MIG [metal inert gas] or plasma welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K28/00—Welding or cutting not covered by any of the preceding groups, e.g. electrolytic welding
- B23K28/02—Combined welding or cutting procedures or apparatus
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Laser Beam Processing (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58063793A JPS59191587A (ja) | 1983-04-13 | 1983-04-13 | レ−ザ加工装置 |
PCT/JP1983/000441 WO1984002296A1 (en) | 1982-12-17 | 1983-12-17 | Laser machining apparatus |
EP19840900108 EP0129603A4 (en) | 1982-12-17 | 1983-12-17 | CUTTING DEVICE WITH LASER. |
US06/641,979 US4689467A (en) | 1982-12-17 | 1983-12-17 | Laser machining apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58063793A JPS59191587A (ja) | 1983-04-13 | 1983-04-13 | レ−ザ加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59191587A true JPS59191587A (ja) | 1984-10-30 |
JPH0323274B2 JPH0323274B2 (enrdf_load_stackoverflow) | 1991-03-28 |
Family
ID=13239606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58063793A Granted JPS59191587A (ja) | 1982-12-17 | 1983-04-13 | レ−ザ加工装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59191587A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6040683A (ja) * | 1983-08-15 | 1985-03-04 | Semiconductor Energy Lab Co Ltd | レ−ザ加工方法 |
JPS6250098A (ja) * | 1985-08-29 | 1987-03-04 | Agency Of Ind Science & Technol | 金属化合物の粉末冶金装置 |
JP2015229195A (ja) * | 2014-06-06 | 2015-12-21 | トルンプフ レーザー ゲゼルシャフト ミット ベシュレンクテル ハフツングTRUMPF Laser GmbH | 入射光学装置、レーザ溶接ヘッド、真空チャンバを備えたレーザ溶接装置 |
WO2018211176A1 (en) * | 2017-05-19 | 2018-11-22 | Primoceler Oy | Method and apparatus for producing a hermetic vacuum joint at low temperature |
-
1983
- 1983-04-13 JP JP58063793A patent/JPS59191587A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6040683A (ja) * | 1983-08-15 | 1985-03-04 | Semiconductor Energy Lab Co Ltd | レ−ザ加工方法 |
JPS6250098A (ja) * | 1985-08-29 | 1987-03-04 | Agency Of Ind Science & Technol | 金属化合物の粉末冶金装置 |
JP2015229195A (ja) * | 2014-06-06 | 2015-12-21 | トルンプフ レーザー ゲゼルシャフト ミット ベシュレンクテル ハフツングTRUMPF Laser GmbH | 入射光学装置、レーザ溶接ヘッド、真空チャンバを備えたレーザ溶接装置 |
WO2018211176A1 (en) * | 2017-05-19 | 2018-11-22 | Primoceler Oy | Method and apparatus for producing a hermetic vacuum joint at low temperature |
US11529701B2 (en) | 2017-05-19 | 2022-12-20 | Schott Primoceler Oy | Method and apparatus for producing a hermetic vacuum joint at low temperature |
Also Published As
Publication number | Publication date |
---|---|
JPH0323274B2 (enrdf_load_stackoverflow) | 1991-03-28 |
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