JPS59188147U - 半導体ウエハ−の保持部材 - Google Patents

半導体ウエハ−の保持部材

Info

Publication number
JPS59188147U
JPS59188147U JP1983081302U JP8130283U JPS59188147U JP S59188147 U JPS59188147 U JP S59188147U JP 1983081302 U JP1983081302 U JP 1983081302U JP 8130283 U JP8130283 U JP 8130283U JP S59188147 U JPS59188147 U JP S59188147U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
film
wafer holding
adhesive
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983081302U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216278Y2 (enrdf_load_stackoverflow
Inventor
浩 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Artience Co Ltd
Original Assignee
Toyo Ink Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Ink Mfg Co Ltd filed Critical Toyo Ink Mfg Co Ltd
Priority to JP1983081302U priority Critical patent/JPS59188147U/ja
Publication of JPS59188147U publication Critical patent/JPS59188147U/ja
Application granted granted Critical
Publication of JPS6216278Y2 publication Critical patent/JPS6216278Y2/ja
Granted legal-status Critical Current

Links

JP1983081302U 1983-05-31 1983-05-31 半導体ウエハ−の保持部材 Granted JPS59188147U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983081302U JPS59188147U (ja) 1983-05-31 1983-05-31 半導体ウエハ−の保持部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983081302U JPS59188147U (ja) 1983-05-31 1983-05-31 半導体ウエハ−の保持部材

Publications (2)

Publication Number Publication Date
JPS59188147U true JPS59188147U (ja) 1984-12-13
JPS6216278Y2 JPS6216278Y2 (enrdf_load_stackoverflow) 1987-04-24

Family

ID=30211270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983081302U Granted JPS59188147U (ja) 1983-05-31 1983-05-31 半導体ウエハ−の保持部材

Country Status (1)

Country Link
JP (1) JPS59188147U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007069295A (ja) * 2005-09-06 2007-03-22 Nitta Haas Inc 被研磨物保持具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007069295A (ja) * 2005-09-06 2007-03-22 Nitta Haas Inc 被研磨物保持具

Also Published As

Publication number Publication date
JPS6216278Y2 (enrdf_load_stackoverflow) 1987-04-24

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