JPS59185857A - Exhaust feedback amount control method for internal- combustion engine - Google Patents

Abstract

PURPOSE:To have sure and proper compensative operation at the time of abnormality by sensing any abnormal condition in the valve degree-of-opening control system for the exhaust feedback valve certainly, in controlling the exhaust feedback amount in an internal-combustion engine. CONSTITUTION:In controlling the exhaust feedback amount in an internal-combustion engine, a valve degree-of-opening sensor 24 is installed to sense the degree of opening of an exhaust feedback valve 19 provided on the way of exhaust feedback line 18 which connects the exhaust passage 13 of the engine 1 with its suction passage 2. The deviation of this actually sensed degree of opening of the valve from a valve opening target value for said exhaust feedback valve 19, which is in correspondence to the required amount of exhaust feedback, is determined, and a valve operating means for this valve 19 is controlled so as to set this deviation to zero. If the condition in which the absolute value of this deviation is over a specific level has lasted for a certain specified period of time, it shall be judged that the valve degree-of- opening control system incl. sensor 24 is in abnormal state, and the valve 19 is shut fully at the same time. If the pressure difference or pressure ratio of those applied to the two sides of a pressure response member 19b of the valve 19 lies within a specific range, the abnormality judgement for the valve degree-of-opening control system shall be omitted.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for controlling the amount of exhaust gas recirculation in an internal combustion engine, and in particular, detecting an abnormality in a valve opening I11 control system of a trap air recirculation valve and preferably performing an abnormality compensation operation at the same time. This invention relates to an exhaust gas recirculation amount control method.

A part of the exhaust gas of the internal combustion engine is returned to the intake passage,
Methods of reducing nitrogen oxides, which are one of the harmful gases emitted from engines, are widely used. In addition, in order to adjust the amount of exhaust gas recirculated to this intake passage to an appropriate amount depending on the engine operating condition, the valve opening degree of the exhaust recirculation valve installed in the middle of the exhaust recirculation path is detected, and the exhaust gas recirculation valve is There is a known method for controlling the exhaust gas recirculation valve so that the actual valve opening value of the exhaust gas recirculation valve becomes the valve opening target value at which the exhaust gas recirculation amount becomes an appropriate amount.

In such an exhaust gas recirculation amount control method, if the valve opening control system including the valve opening sensor that detects the valve opening becomes abnormal due to a disconnection or the like, it is obvious that the exhaust gas recirculation amount cannot be controlled accurately. Depending on the engine operating conditions, exhaust gas recirculation may occur even though exhaust gas recirculation is not necessary, resulting in a significant deterioration of operating performance. For this reason, there is a known device that detects that the ratio or deviation between the actual valve opening value and the valve opening target value from the valve opening sensor exceeds a permissible range, and issues an alarm ( JP-A No. 55-423345).

However, if a differential pressure-responsive operating means that uses fluid pressure is used as the operating means for opening and closing the exhaust gas recirculation valve, the time constant of the operating means is Therefore, there is a time delay for the actual valve opening to reach the target value, and if this time delay is not taken into account when determining an abnormality in the valve opening control system described above, an abnormality may be detected even though the valve opening control system is operating normally. Misdiagnosis may occur.

In addition, if the amount by which the valve opening of the exhaust recirculation control valve should change based on the new valve opening target value is very small, that is, the deviation between the valve opening target value and the actual valve opening value is the valve opening. When the value is equal to or less than the dead band value of the sensor, the deviation between the target valve opening value and the actual valve opening value does not become zero no matter how much time passes.

Furthermore, 1. For example, since atmospheric pressure decreases at high altitudes, the pressure is obtained from the differential pressure acting on both sides of the differential pressure responsive member of the differential pressure responsive actuating means, that is, the atmospheric pressure and the pressure at any position within the intake pipe. , the differential pressure between the two becomes small, and the actuating means cannot operate even if a control signal corresponding to the valve opening target value is input to the actuating means. Even in such a case, if abnormality is determined based on the ratio or deviation between the target valve opening value and the actual valve opening value, the valve opening control system will be misdiagnosed as abnormal even though there is no abnormality.

The present invention has been made to solve this problem, and the present invention has been made in such a way that the absolute value of the deviation between the target valve opening value and the actual valve opening value of the exhaust recirculation valve remains at a predetermined value or more for a predetermined period of time. If this continues, the valve opening control system including the valve opening sensor determines that there is an abnormality, and when this abnormality is detected, the exhaust gas recirculation valve is fully closed, for example, to ensure compensation for the abnormality. The present invention provides a method for detecting and compensating for an abnormality in an exhaust gas recirculation valve opening control system for an internal combustion engine.

Furthermore, when the pressure difference or pressure ratio acting on both sides of the pressure-responsive member of the exhaust gas recirculation valve is within a predetermined range, abnormality determination of the valve opening control system is not executed, thereby avoiding misdiagnosis of abnormality detection. The present invention provides a method for detecting and compensating for an abnormality in an engine exhaust recirculation valve opening control system.

Hereinafter, the method of the present invention will be explained with reference to the drawings.

FIG. 1 is an overall configuration diagram of an exhaust gas recirculation amount control device to which the method of the present invention is applied. Reference numeral 1 indicates, for example, a four-cylinder internal combustion engine, and an intake pipe 2 is connected to the engine 1. A throttle valve 3 is provided in the middle of the valve 2. A throttle valve opening sensor 4 is connected to the throttle valve 3 to convert the opening of the throttle valve into an electrical signal and send it to an electronic control unit (hereinafter referred to as rECUJ) 5.

On the other hand, an absolute pressure sensor (Ps sensor) 8 is provided immediately downstream of the throttle valve 3 via a pipe 7, and an absolute pressure signal converted into an electrical signal by this supply pressure sensor 8 is sent to the ECU 3. .

The engine body 1 is provided with an engine water temperature sensor 1o, which is made of a thermistor or the like, and is inserted into the circumferential wall of the engine cylinder filled with cooling water, and supplies a detected water temperature signal to the ECU 3.

An engine rotation angle position sensor 11 is installed around the camshaft or crankshaft (not shown) of the engine,
Sensor f1 is the TDC signal, i.e. 1 of the engine crankshaft.
One pulse is output at a predetermined crank angle position every 80° rotation, and this pulse is sent to the ECU 3.

A three-way catalyst 14 is disposed in the exhaust pipe 13 of the engine 1, and performs the action of purifying HC, CO, NOx, and other components in the exhaust gas. An 02 sensor 15 is inserted into the exhaust pipe 13 upstream of the three-way catalyst 14, and this sensor 15 detects the oxygen concentration in the exhaust gas and supplies the detected value signal to the ECU 3.

Furthermore, a sensor 16 for detecting atmospheric pressure and an engine ignition switch 17 are connected to the ECU 3, and the ECU 3 is supplied with a detection value signal from the sensor 16 and an on/off state signal of the ignition switch.

The exhaust pipe 13 is connected to the intake pipe 2, and the air recirculation passage 18 is opened.
An exhaust recirculation valve 19 is provided at the end of this 1llll passage 18. This exhaust gas recirculation valve 19 is a negative pressure responsive valve, and is mainly connected to a valve body 19a arranged to be able to open and close the passage 18, and to the valve body, and is selected and introduced by electromagnetic control valves 21 and 22, which will be described later. It consists of a diaphragm 19b that is operated by atmospheric pressure or negative pressure, and a spring 19c that biases the diaphragm 19b in the valve closing direction. A communication passage 2° is connected to the negative pressure chamber 19cl defined by the diaphragm, and the absolute pressure inside the intake pipe 2 is controlled by a normally closed electromagnetic control valve 22 (hereinafter referred to as “ 5O
The atmospheric chamber 19e communicates with the atmosphere.

Furthermore, an atmosphere communication path 23 is connected to the communication path 2o on the downstream side of the solenoid B22, and a normally closed electromagnetic control valve 21 (hereinafter referred to as "sOL-A") is provided in the middle of the communication path 23. )
Atmospheric pressure is introduced into the communication path 2o and then into the negative pressure chamber.

The 5oL-A21 and 5OL-B22 are both connected to the ECU 3, and operate together or only one of them in response to a signal from the ECU 3 to control the lift operation and speed of the valve body of the exhaust recirculation valve 9.

The exhaust gas recirculation valve 19 is provided with a lift sensor 24 that detects the operating position of the valve body of the valve 19 and sends a detected value signal to the ECU 3.

As will be described later, the ECU 3 determines whether or not there is an abnormality in the output signal value from the lift sensor 24, and also checks the various sensors mentioned above, namely, the throttle valve opening sensor 4, the intake pipe absolute pressure sensor 8, and the engine water temperature sensor. 10. Engine rotation angle position sensor 11.02 Determine the engine operating state according to the engine parameter signals from the sensor 15, the atmospheric pressure sensor 16, and the ignition switch 17,
A valve opening degree target value LCMD for exhaust gas recirculation #19 is set according to the determined operating state.

Various methods can be considered for calculating the valve opening target value LCMI. For example, the engine speed and intake pipe absolute pressure are calculated from multiple groups of valve opening target values stored in advance according to the engine operating state. A valve opening degree target value corresponding to the value may be calculated.

The valve opening target value LCMD obtained in this way is compared with the actual valve opening value LACT detected by the lift sensor 24, and Sot, -A is set so that the absolute value of the deviation becomes zero.
The lift correction operation of the exhaust gas recirculation valve is controlled by operating both So.21 and So.B22 together, or by operating only one of them to control the lift correction operation of the exhaust recirculation valve, so that a predetermined valve opening degree is obtained.

When 5QL-B22 is energized and the communication passage 20 is opened, the negative pressure PB in the intake pipe downstream of the throttle valve 3 is applied to the exhaust recirculation valve 1.
The differential pressure introduced into the negative pressure chamber 19d of No. 9 and acting on both sides of the diaphragm 19 increases, causing the diaphragm 19 to become a spring],
9c, and the valve opening degree of the valve body 19a increases. Conversely, when SQL A21 is energized, atmospheric pressure is introduced into the negative pressure chamber 19d, displacing the valve body 19a toward the closing side.

Note that the negative pressure introduced into the negative pressure chamber 19d of the exhaust recirculation valve 19 is supplied to the venturi section 9 provided with an opening 9a in the venturi section 9 provided upstream of the throttle valve 3, instead of the above-mentioned negative pressure PB downstream of the throttle valve 3. 9 may be introduced into the negative pressure chamber 19d from the opening 9a, and the pressure Pv generated in the intake pipe 9 may be introduced into the negative pressure chamber 19d from the opening 9a. The intake pipe internal pressure Pc may be introduced from an opening 6 formed in the intake pipe wall on the upstream side and downstream of the throttle valve 3 when the throttle valve 3 reaches a predetermined opening degree.

Further, the intake pipe internal pressure P2 upstream of the venturi 9 may be introduced into the atmospheric pressure chamber +9e of the exhaust gas recirculation valve 19 instead of the atmospheric pressure. Applying this pressure P2 to the atmospheric chamber 1.9e is effective, particularly in an internal combustion engine equipped with a supercharger, when the intake air is pressurized by the supercharger.

FIG. 2 shows a determination procedure executed in the ECTJS to determine whether the output of the lift sensor 24 is abnormal.

First, the output value LACT of the lift sensor 24 is read (step 1 in FIG. 2). Next, the difference between the atmospheric pressure PA from the atmospheric pressure sensor 16 and the intake pipe absolute pressure Ps is set to a predetermined value PFSE.
It is determined whether the value is larger than that (step 2). If the determination result is negative (No, PA-PB<PFSE), the program is terminated without executing the determinations from step 3 onwards. This is due to the valve opening command from ECU3.
2 is energized and the PB pressure is introduced into the negative pressure chamber 19d, if the difference in pressure acting on both sides of the diaphragm 1.9b of the exhaust gas recirculation valve 19 is less than the predetermined value PP5E, the diaphragm resists the spring 19c. 19b cannot be displaced in the opening direction, if the abnormality determination in steps 3 and below, which will be described later, is performed, it will be misdiagnosed that there is an abnormality in the output of the lift sensor 24. To avoid this, the determination in step 2 is performed. is provided.

If the determination result in step 2 is affirmative (Yes).

In steps 3 and 5, the actual valve opening LACT and the valve opening target value L
It is determined whether the absolute value of the CMD deviation is larger than a predetermined dead zone value QFs. This dead band value QFs is a value corresponding to a limit value of a minute valve opening control amount that cannot be determined by the actual valve opening value of the foot sensor 24 due to the difference in the actual valve opening of the exhaust gas recirculation valve 19. Both steps 3 and 5 are negative (N
In case o), i.e. l LACT-LCIII
If D I <QFS, this program is terminated as there is no abnormality in the valve opening control system. If the determination result in either step 3 or 5 is affirmative (Yes), step 4
Or in step 6, it is determined whether the state in which the absolute value of the deviation is greater than the dead zone value QFs continues for a predetermined period of time, for example, 5 seconds.

This means that the absolute value of the deviation is greater than or equal to the dead band value QFS, and if there is no abnormality in the valve opening control system including the lift sensor 24, the absolute value of the deviation will be the dead band value QFs. If this change does not occur within 5 seconds, it is diagnosed that there is an abnormality in the valve opening control system.

If the determination result in step 4 or 6 is affirmative (Yes), that is, the predetermined time of 5 seconds has elapsed, the process proceeds to step 7, and a failure compensation operation in the event of an abnormality in the valve opening control system is executed. As this failure compensation operation, preferably, the exhaust gas recirculation valve 19 is fully closed to stop exhaust gas recirculation.

FIG. 3 shows the configuration of the exhaust gas recirculation amount control circuit including the abnormality determination circuit of the valve opening control system in the ECUS.

First, the input side of the constant voltage power supply 520 is connected to the battery 522 via the ignition switch 17 shown in FIG. 1, and the output side is connected to a series circuit of a resistor R3 and a capacitor C3. A diode D3 is connected in parallel to the resistor R3.
The connection point J3 between the resistor R3 and the capacitor C3 is the inverter 5.
21 to the reset terminal of the RS flip-flop circuit 512.

When the ignition switch 17 is closed when starting the engine, a constant voltage VCC is applied from the battery 522 via the constant voltage power supply 520 to the series circuit of the resistor R3 and the capacitor C3. The voltage at the junction J3 is the voltage across the resistor R3 and the capacitor C3.
The threshold voltage is reached after a predetermined time determined by the time constant of
During the period from when the ignition switch 17 is closed until the voltage at the node J3 reaches this threshold voltage, the inverter 521 outputs a high level signal=1, that is, the initial reset signal IR, and the RS flip-flop circuit 5
Reset 12. Since this IR double signal is generated only when the ignition switch 17 is closed, the RS flip-flop circuit 512 is reset only at this time.

The reset RS flip-flop circuit 512 outputs a high level signal = 1 from its 6 output terminal, and the AND circuit 5
13 is opened. An exhaust recirculation valve control circuit 517 is connected to the input terminal of this AND circuit 513, and the control amount WI
The input side of I517 includes LACT register 508 and LC.
An MD register 509 is connected. The output signal LACT from the lift sensor 24 in FIG. 1 is converted into a digital signal by an A/D converter (not shown) and stored in the LACT register 508. The LCMD register 509 stores the valve opening target value CMD of the exhaust gas recirculation valve 19 that recirculates the required amount of exhaust gas according to the engine operating state described above. The exhaust recirculation valve control circuit 517 controls the LACT value of the LACT register 508 and the LCMD register 509.
A control signal for controlling 5oL-A21 and 5OL-B22 is supplied to the drive circuit 514 via the AND circuit 513 so that the l-A CT value approaches the LCMD value based on the LCMD value.

The drive circuit 514 executes SQL/A21 based on the control signal.
and 5QL-822 to each solenoid.

Next, the atmospheric pressure PA from the atmospheric pressure sensor 16 is converted into a digital signal and stored in the PA register 501, and this stored value is supplied to the input terminal 503a of the subtraction circuit 503 as the value M1.

The intake pipe absolute pressure Pe is stored in the PB register 502, and this stored value is input to the input terminal 50 of the subtraction circuit 503.
3b as the value N1.

The subtraction circuit 503 calculates (MIN1) and supplies the calculated value to the input terminal 504a of the comparison circuit 504 as the value A1. The input terminal 504b of the comparator circuit 504 has P
Predetermined value PFSE stored in FSE value memory 505
is supplied as the value B1, and the comparator circuit 504
, that is, when PA −PB≧PFSE (when the determination result in step 2 in FIG. 2 is Yes), a high level = 1 is output from the output terminal 504C, while
When A + < B, t t that is P 8-P B
< P F S E, a low level = 0 is output from the output terminal 504C and the AND circuit 506 is closed, thereby preventing execution of abnormality determination of the valve opening control system, which will be described later (step 2 in FIG. 2). (if the determination result is No).

An input terminal 510a of the subtraction circuit 510 is supplied with the actual valve opening value LACT from the LACT register 508 as the value M2, and an input terminal 510b is supplied with the valve opening target value LCMD from the LCMD register 509 as the value N2. , the subtraction circuit 510 calculates the absolute value ABS(N
2 N2) and supplies the calculated value to the input terminal 515a of the comparison circuit 515 as the value A2. Comparison circuit 5
QFS value memory 516 is connected to input terminal 515b of 15.
The stored predetermined dead zone value Qps is supplied as the value B2, and the comparator circuit 515 compares the value A2 and the value B2, and when A 2 > B 2, that is, the actual valve opening value LACT and the valve When the absolute value of the deviation of the opening target value LCMII is larger than the predetermined dead band value Qrs, the output terminal 515
High level = 1 is output from C.

When the outputs of both comparison circuits 504 and 515 become high level, the AND circuit 506 outputs a high level = 1 to its output side, and this high level signal turns the AND circuit 5]1 into an open state and also connects the capacitor CI + resistor. It is input to a differentiating circuit composed of R1 and diode D1 to generate a high level pulse signal, which triggers monostable multivibrator 507. This monostable multivibrator 507 has a reset terminal R that is reset when a low level signal = 0 is applied, and this terminal R to the resetter 1 is connected to the output side of the AND circuit 506. Therefore, when the output of the AND circuit 506 continues to be a high level signal, the monostable multivibrator 507 is not reset and outputs a high level signal for a predetermined period of time, for example, 5 seconds. Monostable multivibrator 507 output side 1 power supply +V
cc is connected through a series circuit of a capacitor C2 and a resistor R2, and a diode D2 is connected in parallel to the resistor R2. When the monostable multivibrator 507 inverts its output from a high level to a low level after the predetermined time has elapsed, the connection point between the resistor R2 and the capacitor C2 becomes a low level=0 for a short time. This low level 20 is inverted to a high level and supplied to the other input terminal of the AND circuit 511 in the open state, and the AND circuit 511 outputs a high level=1 for a short time. This high level signal is input to the set terminal S of the RS flip-flop circuit 512, and the circuit 51
Step 2: Invert the output of the output terminal. AND circuit 513
The drive circuit 514 is closed by an inverted low level signal from the output terminal, and the exhaust recirculation valve control circuit 517 is connected to the drive circuit 514.
The solenoid control signal from the drive circuit 514 is no longer supplied, and the drive circuit 514 stops outputting the drive signal.

Since the normally open electromagnetic control valve 5oL-A21 is no longer energized, atmospheric pressure acts on the negative pressure chamber 19d of the exhaust gas recirculation valve 19 in FIG. 1, and the valve body 19a is fully opened. If the output of either one of the comparison circuits 504 and 515 is inverted from high level to low level before the predetermined time elapses, A
The output of the ND circuit 506 becomes low level = O, and this inverted low level signal is sent to the monostable multivibrator 507.
The RS flip-flop circuit 512 is not set because it is inputted to the reset terminal R of , to reset the monostable multivibrator 507, and also inputted to the A N D circuit 511 to open the circuit 511.

Incidentally, once it is determined that the valve opening control system is abnormal and a set signal is input to the RS flip-flop circuit 512, the RS remains unchanged until the IR multiplied signal generated when the ignition switch 17 is opened is input to the reset terminal R. The output of the Q output terminal of the flip-flop circuit 512 is held at a low level of 20, and therefore the exhaust gas recirculation valve 19 is held fully open.

Further, in the above embodiment, the two electromagnetic valves 21 and 22 are used to control the negative pressure acting on the negative pressure chamber 19d of the exhaust gas recirculation valve 19.

Either one of the electromagnetic control valves 21 and 22 may be replaced with an orifice having an optimal opening surface.

As detailed above, according to the exhaust gas recirculation amount control device for an internal combustion engine of the present invention, the absolute value of the deviation between the target valve opening value and the actual valve opening value of the exhaust recirculation valve is less than or equal to a predetermined value. If the condition continues for a predetermined period of time, it is determined that the valve opening control system including the valve opening sensor is abnormal, and preferably the exhaust recirculation valve is fully closed at the same time, and the exhaust recirculation Since the abnormality determination of the valve opening control system is not executed when the pressure difference or pressure ratio acting on both sides of the pressure responsive member of the valve is within a predetermined range, there is no possibility of misdiagnosing the detection of an abnormality in the valve opening control system. It is possible to reliably detect and perform compensation operations in the event of an abnormality.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing the overall configuration of an exhaust gas recirculation amount control device to which the method of the present invention is applied, and FIG.
A flowchart showing the procedure for determining whether the output voltage of the lift sensor of the exhaust recirculation valve is abnormal or not, and FIG. 3 are EC
It is a circuit block diagram in U. 1... Internal combustion engine, 2... Intake passage, 3 Throttle valve, 5... Electronic control unit (ECU),
8...Intake pipe absolute pressure sensor, 9...Venturi, 1
3... Exhaust passage, 16... Atmospheric pressure sensor, 18... Exhaust recirculation path, 19... Exhaust recirculation valve, ], 9 b... Pressure responsive member (diaphragm), 2], 22... Electromagnetic control Valve, 24...Valve training sensor (lift sensor), 503
・Subtraction circuit, 504... Comparison circuit, 507... Monostable multi-bi break, 510 ・Subtraction circuit, 512...
RS flip-flop circuit, 515...comparison circuit. Applicant Honda Motor Co., Ltd. Agent Patent Attorney Toshihiko Watanabe

Claims (1)

[Claims] 1. The valve opening of an exhaust recirculation valve disposed in the middle of an exhaust recirculation passage connecting an exhaust passage and an intake passage of an internal combustion engine is detected by a valve opening sensor; The deviation between the actual valve opening value detected by and the target valve opening value of the exhaust recirculation valve corresponding to the required exhaust recirculation amount is determined, and the opening and closing of the exhaust recirculation valve is adjusted so that this deviation becomes zero. In an exhaust gas recirculation amount control method that controls a valve operating means for operating, when the absolute value of the deviation continues for a predetermined period of time, the valve opening control system including the valve opening sensor A method for controlling an exhaust gas recirculation amount for an internal combustion engine, characterized in that an abnormality is determined. 2. The predetermined value is a value corresponding to a limit value of the minute valve opening control amount such that the difference in the actual valve opening of the exhaust gas recirculation valve cannot be determined by the actual valve opening value of the valve opening sensor. An exhaust gas recirculation amount control method for an internal combustion engine according to claim 1, characterized in that: 3. The valve operating means has a pressure responsive member connected to the exhaust gas recirculation valve, and is a differential pressure responsive operating means that operates the exhaust gas recirculation valve in response to a pressure difference acting on both sides of the pressure responsive member. The internal combustion engine according to claim 1, wherein abnormality determination of the valve opening control system is not performed when a pressure difference or a pressure ratio acting on both surfaces of the pressure responsive member is within a predetermined range. Exhaust recirculation amount control method. 4. Atmospheric pressure is applied to one surface of the pressure-responsive member, and the other surface is applied to either the venturi portion in the intake passage, slightly upstream from the fully closed position of the throttle valve, or downstream of the throttle valve. 4. A method for controlling the amount of exhaust gas recirculation in an internal combustion engine according to claim 3, characterized in that a pressure in one of the exhaust gases is applied. 5. The internal combustion engine includes a supercharger, the intake pressure pressurized by the supercharger acts on one surface of the pressure-responsive member, and the venturi portion in the intake passage acts on the other surface; 4. The method of controlling the amount of exhaust gas recirculation for an internal combustion engine according to claim 3, characterized in that pressure is applied at either one of a position slightly upstream from a fully open position of the throttle valve and a pressure slightly downstream of the throttle valve. 6. A valve opening sensor detects the valve opening of an exhaust recirculation valve disposed in the middle of an exhaust recirculation passage connecting an exhaust passage and an intake passage of the internal combustion engine, and the actual valve opening detected by the valve opening sensor Valve operation means that calculates a deviation between an opening value and a target valve opening value of the exhaust recirculation valve corresponding to a required amount of exhaust gas recirculation, and opens and closes the exhaust recirculation valve so that this deviation becomes zero. In the exhaust gas recirculation amount control method, when the absolute value of the deviation continues to be equal to or greater than a predetermined value for a predetermined period of time, it is determined that the valve opening control system including the valve opening sensor is abnormal. A method for controlling the amount of exhaust gas recirculation for an internal combustion engine, further comprising fully opening the exhaust gas recirculation valve. 7. The predetermined value is a value corresponding to a limit value of the minute valve opening control amount such that the difference in the actual valve opening of the exhaust gas recirculation valve cannot be determined by the actual valve opening value of the valve opening sensor. An exhaust gas recirculation amount control method for an internal combustion engine according to claim 6, characterized in that: 8. The valve operating means has a pressure responsive member connected to the exhaust gas recirculation valve, and is differential pressure responsive operating means that operates the exhaust gas recirculation valve in response to a pressure difference acting on both sides of the pressure responsive member. 7. The internal combustion engine according to claim 6, wherein abnormality determination of the valve opening control system is not performed when a pressure difference or a pressure ratio acting on both surfaces of the pressure responsive member is within a predetermined range. Exhaust recirculation amount control method. 9. Atmospheric pressure is applied to one surface of the pressure-responsive member, and the other surface is applied to a venturi portion in the intake passage, a portion slightly upstream from a fully open position of the throttle valve, and a portion downstream of the throttle valve. 9. The method for controlling the amount of exhaust gas recirculation in an internal combustion engine according to claim 8, characterized in that pressure is applied at both ends of the exhaust gas recirculation amount. 10. The internal combustion engine includes a supercharger, the intake pressure pressurized by the supercharger acts on one surface of the pressure-responsive member, and the venturi portion in the intake passage acts on the other surface; 9. The method of controlling the amount of exhaust gas recirculation for an internal combustion engine according to claim 8, characterized in that pressure is applied at either one of a position slightly upstream from a fully open position of the throttle valve and a pressure slightly downstream of the throttle valve.