JPS59185631U - piezoelectric device - Google Patents
piezoelectric deviceInfo
- Publication number
- JPS59185631U JPS59185631U JP8089983U JP8089983U JPS59185631U JP S59185631 U JPS59185631 U JP S59185631U JP 8089983 U JP8089983 U JP 8089983U JP 8089983 U JP8089983 U JP 8089983U JP S59185631 U JPS59185631 U JP S59185631U
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- piezoelectric device
- solid substrate
- thin film
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案の実施例による圧電装置の一例を示す
概略的な斜視図、第２図は第１図のＡ−Ａ線に沿う断面
図、第３図は第２図のＢ−Ｂ線に沿う断面図、第４図は
従来の圧電装置の一例を示す斜視図である。
１・・・・・・固体基板、２・・・・・・主面、３，３
ａ〜３ｎ・・・・・・振動片、６・・・・・・圧電体薄
膜、７，８・・・・・・対向電極。FIG. 1 is a schematic perspective view showing an example of a piezoelectric device according to an embodiment of the invention, FIG. 2 is a sectional view taken along line A-A in FIG. 1, and FIG. 3 is a B-B in FIG. 4 is a perspective view showing an example of a conventional piezoelectric device. 1...Solid substrate, 2...Main surface, 3, 3
a to 3n... vibrating piece, 6... piezoelectric thin film, 7, 8... counter electrode.
Claims (1)
数の振動片と、各振動片に設定された圧電体薄膜と、こ
の圧電体薄膜の両面に形成された対向電極とからなる圧
電装置において、上記振動片の長さを異ならせるととも
に、この振動片の長手方向と直交する方向における上記
固体基板の厚４ みを短寸の振動片側から長寸の振動
片側に向かって連続的もしくは断続的に増大させたこと
を特徴とする圧電装置。Consists of a solid substrate, a plurality of vibrating pieces arranged in parallel on the main surface of the solid substrate, a piezoelectric thin film set on each vibrating piece, and counter electrodes formed on both sides of the piezoelectric thin film. In a piezoelectric device, the lengths of the vibrating pieces are made to be different, and the thickness of the solid substrate in a direction perpendicular to the longitudinal direction of the vibrating pieces is continuously changed from one side of the short vibrating side to one side of the long vibrating side. Or a piezoelectric device characterized by being intermittently increased.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8089983U JPS59185631U (en) | 1983-05-27 | 1983-05-27 | piezoelectric device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8089983U JPS59185631U (en) | 1983-05-27 | 1983-05-27 | piezoelectric device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59185631U true JPS59185631U (en) | 1984-12-10 |
Family
ID=30210876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8089983U Pending JPS59185631U (en) | 1983-05-27 | 1983-05-27 | piezoelectric device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59185631U (en) |
-
1983
- 1983-05-27 JP JP8089983U patent/JPS59185631U/en active Pending
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