JPS5918429A - Output correcting device for semiconductor pressure converter - Google Patents

Abstract

PURPOSE:To take out a signal for only pressure components, by adjusting the amplitude and phase of an acceleration sensor, which is provided on a body to which semiconductor pressure converters are attached, and cancelling the acceleration components included in the output signals of said converters. CONSTITUTION:To the same vibrating body, n pieces of semiconductor type pressure converters 10-1-10-n are attached at a specified interval. The signals therefrom are amplified by amplifiers 11-1-11-n and supplied to the (+) inputs of differential amplifiers 12-1-12-n. Meanwhile, an acceleration sensor 13 is attached to the same vibrating body, to which the converters 10-1-10-n are attached, and the acceleration of the vibrating body is detected. The amplitude of the output signal of the sensor 13 is adjusted by the volume control in a divider 14. Then the result is distributed and supplied to phase shifters 15-1-15-n, which correspond to the converters 10-1-10-n. In this constitution, required computation is performed in the differential amplifiers 12-1-12-n, and only the pressure components of the converters 10-1-10-n can be taken out.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an output correction device for a semiconductor pressure transducer.

Semiconductor pressure transducers, which are being used frequently these days, have advantages over conventional strain gauge pressure transducers in that they have superior sensitivity and frequency characteristics. However, when this semiconductor pressure transducer is mounted on a vibrating object or the like, there is a drawback that the acceleration component of the vibrating object is also detected, making it impossible to obtain an output signal of only the pressure component.

The present invention has been made in view of these drawbacks, and its object is to provide an output correction device for a semiconductor pressure transducer that is capable of extracting an output signal of only the pressure component.

The present invention provides an acceleration sensor that detects the acceleration of an object mounted with a semiconductor pressure transducer, and adjusts the amplitude and phase of the output signal of this acceleration sensor to cancel the acceleration component included in the output signal of the semiconductor pressure transducer. It is configured to do so.

Hereinafter, the present invention will be described in detail based on illustrated embodiments.

FIG. 1 is a block diagram showing an embodiment of the present invention,
Here, a case is shown in which the output signals of n pressure transducers are corrected using one acceleration sensor.

In FIG. 1, n semiconductor pressure transducers 10-1
~10-n are placed on the same vibrating object at a predetermined interval.
The output signals thereof are amplified by amplifiers 11-1 to 11-n, respectively, and then supplied to the inputs of differential amplifiers 12-1 to 12-n. On the other hand, the acceleration sensor 13 is connected to semiconductor pressure transducers 10-1 to 10-1.
It is attached to the same object to be photographed as 0-n, and detects the acceleration α of this vibrating object. After the amplitude of the output signal of the acceleration sensor 13 is adjusted by a volume in the divider 14, it is distributed and supplied to phase shifters 15-1 to 15-n corresponding to each semiconductor pressure transducer 10-1 to 10-n. Ru.

The phase shifters 15-1 to 15-n are, for example, known phase shift circuits comprising an input buffer amplifier BAI, an output buffer amplifier BA2, variable resistors VR1 to VR4, and capacitors 01 to C4, as shown in FIG. The phase of the input signal can be adjusted by adjusting the variable resistors VR1 to VR4.
It can be adjusted by 180°.

The output signal of the acceleration sensor 13 whose phase has been adjusted by the phase shifters 15-1 to 15-n is output to the differential amplifier 12-1.
~12-n is supplied to the (-) input.

Here, the pressure component signal detected by the pressure transducer 10-1 is Pl, the acceleration component signal is αPl, and the divider 1
4, the acceleration signal detected by the acceleration sensor 13 is α, and the phase shift characteristic of the phase shifter 1φ15-1 is e.
The gain and the phase characteristic e-1φ are adjusted so that the output signal α·-1φ becomes -1φ− αe −αP1 (1).

As a result, in the differential amplifier 12-1, p,=
(p, 10αPt)− is not subjected to the calculation shown by αe−1φ−−−−−(2+), but it is possible to extract the signal P1 of only the pressure component. The same applies to the output signals Pg-Pn of the converters 10-2 to 10-n.

In this embodiment, a case has been described in which the output signals of n semiconductor pressure transducers are corrected, but it goes without saying that in the case of only one semiconductor pressure transducer, the Tevider 14 can be omitted.

As is clear from the above description, in the present invention, an acceleration component signal is extracted by an acceleration sensor, and the amplitude and phase of this signal are adjusted to make it equivalent to the acceleration component signal included in the output signal of the semiconductor pressure transducer. form a signal,
Since this signal is configured to cancel the acceleration component signal, it is possible to output a pressure component signal only. Therefore, it is extremely convenient when the semiconductor pressure transducer is attached to a turbine blade, for example, and only the pressure of the fluid acting on the blade is to be measured.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing one embodiment of the present invention, and FIG. 2 is a circuit diagram showing a specific example of a phase shifter. 10-1 to 10-n...Pressure transducer, 12.Fist...
Differential amplifier, 13・e... Acceleration sensor, 15-1~1
5-n...phase shifter. Patent applicant Mitsui Engineering & Shipbuilding Co., Ltd. Agent Masaki Yamakawa (#υ) 1 person)

Claims (1)

[Claims] An acceleration sensor that detects the acceleration of an object equipped with a semiconductor pressure transducer, and a phase shifter that shifts the amplitude and phase of the output signal of this acceleration sensor in accordance with the amplitude and phase of the acceleration component included in the output signal of the semiconductor pressure transducer. The output of a semiconductor pressure transducer consists of a phase shifter that outputs a differential signal between the output signal of the phase shifter and the output signal of the semiconductor pressure transducer, and a differential amplifier that extracts the difference signal between the output signal of the phase shifter and the output signal of the semiconductor pressure transducer and outputs it as a signal containing only the pressure component. correction device.