JPS59177883A - Heater - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention is utilized in an apparatus for uniformly heating a flat object to be heated.

BACKGROUND ART Conventionally, as shown in FIG. 1(a), a line heater (not shown) and an infrared rays were attached to the focal point (F) of a reflecting mirror (1) having a trough shape and a parabolic curved surface as a reflecting surface. For example, in a configuration in which halogen lamps are distributed, the light emitted from the line heater is divided into curved light (L) and reflected light (L2), but the light reflected from the reflector (L2) ) is well known to be parallel.And the above curved light (
The reflected light (L) and reflected light (L2) are uniformly distributed in the longitudinal direction of the linear heater, but they are evenly distributed within the cross section intersecting the longitudinal direction, for example, the /IN
7i: as shown in the graph shown in (b). By the way, by knowing the zth amount of light, the graph shown in z[1(b) can be obtained and the non-uniformity of the light irradiation distribution can be known.

That is, first, in FIG. 1 (-), cut i! The line segment (3) of the illuminated irradiation surface (3) is divided into equal intervals, and the position h' of the partition in the right half is (po, P,...P
...), and at 1 mfull of reflection, ("0%"
□・・・Pyu...)
',...P word...). -19, P oP
x = 100 tp 2-P 2P 3-...-1 to PI3
”n-... becomes Kap.P(, //PIP child//
P2 country〃..., but the position of (PO) is the focal point CP)
Line segment from +3') Let it be the foot of the perpendicular line lowered by K. and,
The position of each partition, for example (pop), (PIF2)
In order to express the amount of light irradiated between, etc., the amount proportional to this, for example, between the irradiation sections (PoP work), (PIF
2) Using the radiation angle of the light ray from the light source (F) including the interval, .

That is, in the case between (pop□), the irradiation light is direct light (L□)
and the reflected light (L2), but the radiation angle (θ, ) of the direct light (L) including the point between (PoP) is P. It is ppe,
The reflected light (L, ) is emitted, etc. and (1), 4
Since the irradiation light between p5) is only direct light (L□), P4pP5 (irradiation light amount) p4p5 =/θ0× jgo(%)
Tonase says that if the equation of the cross-sectional parabola of the reflector (1) and the distance (j7) between the reflector (1) and the line segment (3)7 are resolved, then
The amount of light to be irradiated is determined.

For example, in FIG. 1(a), the equation of the cross-sectional parabola of the reflecting mirror +112 is y=F7x, i=Jθn'+
m.

When flush = j mm, the radiation angle (θ, ) of the direct light (L construction) irradiating each partition on the line segment (3), the radiation angle (θ2) of the reflected light (L2), And the amount of irradiated light is calculated as follows.
, 2. F%, between (P1p2) e, = t, s°, 1y
2=37° (irradiation scene) plp2= /,,2. /%
Similarly, (irradiation light amount) P, P3 = 2♂%, (irradiation scene)
P3P4 = 5.3%, (irradiation light amount) P4PF,
=i, s%, (IK (Insight Eclipse) P5P6= /, 3%
, (Irradiation amount) P6P7-Otsu2%, (Terujakohan) P
7P8 =y, o%, (irradiation light amount) PgP.

=02%, (irradiation light amount) P gP 10-0.7%. From these lines, the 6th position of line segment (3) is
(P.

P□,...) on the horizontal axis, each vJ position li! The distribution of the irradiated light is expressed using the irradiated light amount between 1' as the vertical axis.
The graph shown in Figure (b) is obtained. As is known from this graph, the irradiation light M is (P) on the line segment (3).
Since the heat is concentrated near point o), the seven reflecting mirrors (1) and the liner cannot uniformly heat the entire surface of the line segment (3).

Here, as shown in Fig. 2(a), a 21-piece reflector (
A) If one end of (B) is shared and the line segment is made by each of the -1 reflecting mirror (A) and (B), the distribution of the light irradiated to Sl is like a drop, and the distribution of light to Sl is 2 to 2. However, the reflector (A)
The irradiation light amount according to (B) is synthesized and expressed in a graph as shown in Section 2, Section 1 (C). That is, two reflecting mirrors (A)
Even when (B) are integrated in parallel, the light is irradiated near the foot of the perpendicular line segment (3)K below from each focal point of the reflecting mirrors (A) and (B), as shown in Figure 2 (0). Light gathers.

In addition, as shown in Figure 3, five reflecting mirrors (P) (Q,
)' (R) (S) (T) are arranged side by side, the irradiation scene on the line segment (31) is unevenly distributed as in the above two examples.

Therefore, in cases where uniform heating is required over the entire flat surface, for example, when a semiconductor wafer is annealed by infrared rays, the conclusion is that ideal uniform irradiation cannot be achieved even if the above-mentioned reflective annealing is used. Rather, the irradiation distribution will always be biased.

C6 Object of the Invention The object of the present invention is to provide a heating device comprising a reflecting mirror which is directed toward a surface to be heated and has a reflecting surface having a parabolic cross-section, and a line-shaped heater disposed at the focal point of the parabola. The goal is to make the distribution of light irradiated on the surface uniform.

21 Structure of the Invention The structure of the present invention consists of two gutter-shaped reflecting mirrors each having a parabolic cross section.
Prepare the parabola individually, rotate it by a predetermined angle along the cross section around the focal point of the parabola, cut off the part that deviates from the original position parallel to the ridge line passing through the apex of the parabola, and make it into the same shape. Then, two partial reflecting mirrors including the apex of the parabola are integrated with their focal points coincident to form a reflecting mirror with a single, single-shaped cross section, facing the surface to be heated, and the focal point is It is characterized by the provision of line-shaped heaters in the lower floors.

As shown in Fig. 2, two bar-shaped partial reflecting mirrors tl [51 with parabolic cross-sections] and their respective focal points (f) are used.
(f) are aligned and integrated to form a mirror-shaped reflector (6) having a substantially -1 horizontal plane, and a line-shaped heater (h) is arranged at the focal position 1k ()=). Heating device (7) consisting of
As shown in Figure 4 (al), the plane (3
). Here, partial reflector +4+
+5+ is a trough-like reflection theory with a parabolic cross section as shown in Figure 7, fA, which is rotated by a predetermined angle (1) around the focal point (f) (f) and returned to its original position. The part that deviates from the parabola should be cut parallel to the calibration line passing through the vertex of the parabola.
This is the remaining portion including the apex of the parabola, that is, the portion indicated by the solid line in FIG.

The heating device (7) having the above configuration is mounted on the moving surface perpendicular to the direction of the hook force of the line heater (h>) in FIG.
As shown in a), the plane (3) is irradiated with direct light (L) and reflected light (L2)', but in the cross-sectional view of Fig. 4 (a), the plane (3) is The distribution of light is shown in the $1 diagram (
It will look like the graph shown in b).

That is, the reflected light (L2) is divided into parallel light rays reflected from the partial reflection mirror (4) and parallel light rays reflected from the partial reflection mirror (6), and each reflected light is internal to the reflection mirror (6). It's slanted towards. In a conventional reflecting mirror with a parabolic cross section, the amount of light irradiated onto the plane (3) by the reflected light (XJ2) is the foot CP of the perpendicular line drawn from the focal point to the plane (3). ) The light decreases as it moves away from the position of (θ2>θ4>θ6>θ8, Fig. 1 (&) (b) ). If irradiated, a plane (3) created by direct light (L) and reflected light (L2)
The above combined irradiation light amount is evenly distributed over a wider area on the plane (3) than in the past. Then, as before, the plane (3) is arranged at equal intervals (Po, P, P2,...Q,...
ct2, Q3, -・-)
F j mms 'glS minute reflexes are dull! 4N51 has the equation of the cross-sectional parabola as y==-x2, and 62j? In addition, when the cutting is performed by shifting the angle t=/J0, the amount of irradiation light between each partition or position is as follows: (irradiation light ftk, ) P□P 1 = / , 2 .7
%, (irradiation light amount) P, P2= //, j;'%, (f!
4.1 Irradiated light) F2P3=/, 2g%, (irradiated light amount) P
3P4=/, 7%, (irradiation light @) P4P5=/, da%
, (irradiation light amount) P5P6=/, J'%, ... (irradiation light @
) P□Q: h = y, 2.7%, (irradiation light t)
P11199=//, 2%, CM<1 amount of light) Q2Q3
=/, ;rg%, (irradiation light amount) Q3q4= /, 5'
%.

(Amount of irradiated light) Q4Q5 = Otsu %, (Amount of irradiated light) Q
, 5ch6=y, i%... From this, if the distribution of light irradiated onto the plane (3) is shown in the cross-sectional view of FIG. 4(a), the graph of FIG. 4(b) can be obtained. That is, as shown in FIG. 4(b), the irradiated light beams are concentrated between the partition positions CP3Q3) on the plane (3),
Traditional reflector.

Compared to the ill case, the area where the irradiation light gathers is wider.

As shown in FIG. 2 (&), when the reflecting mirrors (A), (B), (0), and (D) of the present invention having a substantially sea-like cross section are arranged side by side, the irradiation is performed on the plane (3). The light emitted is shown in Figure 2 (
As shown in b), reflection m (A) on plane (3)
(B) (0) Gathers almost uniformly on the surface facing (D). Moreover, as shown in FIG. 2(a), the reflecting mirror (A) (E) (0) (D) (K) (
F) If (G) are arranged side by side and the distribution of the irradiated light on the plane (3) is determined, the graph shown in Fig. 2 (b) will be obtained. Compared to the graphs in FIGS. 2(C) and 3 obtained by the above method, when the reflecting mirrors (6) according to the present invention are arranged side by side, a more uniform distribution of the irradiated light is obtained.At this time, Figure 2 (a), Figure 2 (
In the embodiment shown in a) in which a plurality of reflecting mirrors 1 are arranged side by side,
If the dimensions of each reflecting mirror are small, the area irradiated on the flat surface of the heated surface by the direct light from each reflecting mirror increases, and the curved light that reaches the irradiated area by other reflecting mirrors will not affect that irradiated area. . Since the reflective mirror located at the center receives more of the chromatic tube, the amount of irradiated light increases somewhat at the center 1M', and the distribution graph curves into an arc. Therefore, in an embodiment in which a plurality of reflecting mirrors are arranged side by side, the dimensions of each reflecting mirror must be set to an appropriate size so that the distribution of irradiated light is uniform.

Next, as shown in Fig. 7(a), a reflective mirror (A) (E) ( 0) (D) and (P) (Q)
(R) (S) When heating from the front and back by (T), the distribution of light irradiated to the front and back of the object to be heated (3) is
As shown in the graph of Figure (b), a uniform light distribution is obtained as in each of the above embodiments, and moreover, the amount of irradiated light is almost double that of single-sided irradiation, and the amount of heating is significantly increased.

Here, in each of the above embodiments according to the present invention, the reflected lights from the partial reflecting mirrors (4) and (6) face each other and are inclined inward, so that the inclination angle (1) in FIG. is too large, or when the distance (1) between the reflecting mirror (6) and the plane (3) shown in FIG. 4 (-) is too large, the reflected light (L
2) is irradiated with large separation on the plane (3), making it impossible to obtain a predetermined uniform distribution of irradiated light. Furthermore, when the above inclination angle (1) and distance R4m (1) are of a certain size,
The direct light (L□) and the reflected light (L2) interfere with each other on the plane (3), causing the irradiated light to become striped, and a uniform distribution of the irradiated light may not be obtained.

Sokuchi, No. J lfl (b), % 7 (b), '3
g II ('b), In order to obtain the uniform distribution of irradiated light shown in Figure (b), the above inclination angle (1) and distance flJ
, x (J!') must be set to appropriate sizes.

As shown in Fig. 70(a), the distribution of the amount of irradiated light when the distance l between the inclined reflecting mirror (6) and the plane (3) is 7 mm is shown in Fig. 10(b). The graph shown is obtained.

According to the present invention, two horizontal partial reflecting mirrors each having a parabolic shape and a gutter-like shape are integrated by aligning their focal points to form a spot-like reflecting mirror having a substantially horizontal concave surface. The inclination angle of the partially reflecting mirror is (1),
By appropriately setting the distance between the planar heated surface and the trough-like reflecting mirror and the dimensions of the reflecting mirror, the uniform distribution area of the irradiated light on the planar heated surface can be made wider than in the past. Therefore, uniform heating of the plane can be achieved by arranging the reflective sharps according to the present invention, each of which has a substantially approximate cross section and facing the plane surface to be heated, and by arranging a line heater at each focal point. Good results can be obtained if the material is used, for example, when annealing by uniform irradiation with infrared rays is required, such as in the case of semiconductors such as Quano. Furthermore, since the uniform distribution area of the irradiated light is wider than in the past, it is more efficient to use the area for uniform heating over the entire area, and the reflector is used more efficiently.

[Brief explanation of drawings]

Figure 7(a) is a cross-sectional view of a conventional gutter-shaped reflector with a parabolic horizontal concave surface, a flat heated surface, and irradiated light;
) is a graph showing the distribution of the irradiated light in the cross section of the planar heated surface, Figure 2 (-) is the surface effect when two conventional reflecting mirrors are juxtaposed, and Figure 2 (b ) is a graph showing the distribution of irradiated light from each reflecting mirror, and Fig.
Fig. 27, third diagram showing the distribution of the combined irradiation light of each irradiation light in b).
The figure is a cross-sectional view when conventional reflecting mirrors are arranged side by side and a graph showing the distribution of combined irradiation light. Fig. 7 is a cross-sectional view of a partial reflecting mirror according to the present invention and an integrated reflecting mirror. Fig. 6 6(-) is a perspective view of a partial reflecting mirror according to the present invention, FIG. b) is a graph showing the distribution of the irradiated light in the cross section of the planar heated surface; FIG. 2(a) is the I! In the T-view, Figure @2 (b) is a graph showing the distribution of the combined irradiation light.
Fig. 4(a) is a cross-sectional view when reflecting mirrors according to the present invention are arranged side by side, Fig. 4(b) is a graph showing the distribution of the combined irradiation light, and Fig. 2(a) is a thin planar view. A cross-sectional view when reflective mirrors according to the present invention are placed side by side on the front and back surfaces of the irradiated surface,
FIG. 7(b) is a graph showing the distribution of the combined irradiation light, FIG. 1θ(a) is an example of another design of the reflecting mirror according to the present invention, and FIG. This is a graph showing the distribution of . +3+ t3i... Heated surface, +4+! 51... Partial reflecting mirror, (6), 9 reflecting mirror, (7)... Heating device, (F)
... Focal position where the line heater is arranged, (h)...
Line heater. , 7 Hide Ehara 1
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11::N :': :: N :J: l l 1 810 Figure (a-n-sha, small-fired procedural amendment document, July 22, 1971, Patent Office tt-g-ayo husband beating 1, Display of the case Showa Str Year Patent Face No. J G2 Dag No. 2, Name of the invention Heating device 3, Person making the amendment Relationship to the case Wait, f Applicant 4, Embed A 855゜Address Osaka City, Osaka Prefecture 1-15-26 Edobori, Nishi-ku, 1936/Z month ♂ day (') Drawings, Figures 7 to ``Figures and Attachment 0'' Masaru Shiura'
f1''da Brief explanation of the drawing @/The cross section of the figure is !Iil: Distribution diagram of the irradiated light to the planar wave focal plane by the trough-shaped reflector with the cedar-shaped end, Fig. 2 1. Straightness t'Lfc, distribution diagram of the irradiated light and its combined irradiation light on a planar thermal surface by two, . FIG. 7 is a distribution diagram of the combined irradiation light by the reflecting mirror of the present invention,
And the prayer song diagram and fiJ diagram of the integrated reflector are provided by Kiyoshi:
The part related to 3FI is a perspective view of the reflecting mirror, and FIG. 3 is a distribution diagram of light irradiated onto a planar curved surface by the horizontal 4f knee 6-bell-shaped prong 4vc- according to the present invention. A distribution diagram of the combined irradiation light by the reflecting mirror in the example of 9 pieces of Qi rearranged,
Figure 2 is a U-view of the combined irradiation light from the parallel reflectors according to the present invention, and the outside view shows the front and back of the thin planar wave layer projection surface.
The distribution map of the irradiated light from the reflecting mirrors according to the juxtaposed misfires, and the distribution map of the irradiated light according to the anti-A theory shown in the present invention, where the brown/θ cause is given by another hard dt. It is. ” Miss 71 Day 3 Pu; 1 η 7 Ryuuki 1 ff 2 (Shi) Mobun, τ Katana Soi 11 Down 6 Mei < Kakkiri Moi Kan 7 Zu Kasumi 9 Diagram A β 02 , No? QR5, 31,! Curse ′←! "H=: : nu-kasumi i:::::ii2(tijjil,l:',lM,,setting(%)il:
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l 瞠 3θ In Figure 4;::N: r Cor ← Procedural amendment ■, Indication of the case 1982 Patent Application No. 5474-4 2, Name of the invention Heating device 3, Person making the amendment Related Patent Applicant Name Nichiden Kikai Co., Ltd. 4, Agent [
550 Address 1-15-26-5 Edobori, Nishi-ku, Osaka-shi, Osaka Prefecture
Specification to be amended: 1, page 1, line 20, page 4, line 7, "Fig. 1 (eA) J" is amended to read "Fig. 1". 2, page 2, lines 10-11, page 4, line 12, line 5
Correct "Fig. 1(b)" in the 4th to 5th lines of the page to "Fig. 1". 3. Page 2, lines 11-12, and 17 “Figure 1 (a
)” is corrected to “Figure 1, Section 1”. 4. Correct "Fig. 1 (b)" in the 14th line of page 2 to "Fig. 1 side j." 5. Correct "each cut" in the third line of page 5 to "-each pressure cut". 6. On page 5, line 10, "Fig. 2 (a)" is corrected to "Fig. 2." 7. On page 5, line 13, "Fig. 2 (b)" is corrected to [Fig. 2, 9-]. 8, Page 5, lines 14 and 16, “Figure 2 (C)” is corrected to “Figure 2, p animals J.” 9, Page 7, lines 10, lines 20-8, page 8 1st row, 9th
Correct "Figure 6 (a)" on the 9th line of the page to "Figure 6". 10, page 8, line 3, page 9, lines 10-11, line 11
Line [Figure 6(b) j is corrected as "Figure 6". 11, page 8, line 11, ``Correct Figure 1 (a), (b) J to ``Figure 1''. 12. On page 9, line 16, "Fig. 7 (a)" is corrected to "Fig. 7." 13. On page 9, line 18, "Fig. 7(b)" is corrected to "Fig. 7." 14. Correct “Figure 8 (a)” in the first line of page 10 to “Figure 8.” 15. On page 10, line 3, "Fig. 8(b)" is corrected to "Fig. 8." 16. On page 10, line 6, ``Figure 2 (C)'' is corrected to ``Figure 2 ■Sat''. 17, page 10, lines 8 to 9, "Fig. 7 (a), Fig. 8 (a)" are corrected to "Fig. 7, Fig. 8". 18, page 11, first line, "Fig. 9 (a)" is corrected to "Fig. 9". 19, page 11, line 5, ``Figure 9(b)'' is corrected to ``Figure 1-9''. 20. Page 11, line 12 [Figure 6 (a) J is corrected as "Figure 6". 21, page 11, line 20 to page 12, line 1 [Figure 6(b)
), FIG. 7(b), FIG. 8(b), and FIG. 9(b)" are corrected to "FIG. 6, FIG. 7, FIG. 8, and FIG. 9." 22, page 12, line 4, "Fig. 10 (a)" is corrected to "Fig. 10". 23, page 12, line 7, "Figure 10 (b)" is corrected to "Figure 10".

Claims (1)

[Claims] +1 A trough-shaped reflector with a parabolic cross section is fixed to a cross section around the focal point of the parabola using 2f1, and the part that deviates from the original position by rotating by a predetermined angle is a parabola. Two partially reflecting mirrors are cut parallel to the ridge line passing through the apex of the can (9) and have the same shape and include the apex of the parabola, and are integrated by aligning their focal points, so that the cross section is approximately bell-shaped. 1. A heated drawing characterized in that a reflecting mirror is formed to face the surface to be heated, and a line-shaped heater (f) is disposed at the focal position.