JPS59175125U - Mass flowmeter with self-diagnosis function - Google Patents

Mass flowmeter with self-diagnosis function

Info

Publication number
JPS59175125U
JPS59175125U JP7007783U JP7007783U JPS59175125U JP S59175125 U JPS59175125 U JP S59175125U JP 7007783 U JP7007783 U JP 7007783U JP 7007783 U JP7007783 U JP 7007783U JP S59175125 U JPS59175125 U JP S59175125U
Authority
JP
Japan
Prior art keywords
sensor
mass flow
flow rate
self
diagnosis function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7007783U
Other languages
Japanese (ja)
Other versions
JPH0140014Y2 (en
Inventor
柳田 祥男
博 三平
Original Assignee
株式会社エステック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エステック filed Critical 株式会社エステック
Priority to JP7007783U priority Critical patent/JPS59175125U/en
Publication of JPS59175125U publication Critical patent/JPS59175125U/en
Application granted granted Critical
Publication of JPH0140014Y2 publication Critical patent/JPH0140014Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の質量流量計を示す図、第2図は本考案の
一実施例を示す図、第3図はマスフローセンサーの構成
を示す図、第4図は本考案の他の一実施例を示す図であ
る。 10・・・ガス流量測定用マスフローセンサー、11・
・・ガス流路、12・・・チェック用マスフローセンサ
ー。
Fig. 1 shows a conventional mass flow meter, Fig. 2 shows an embodiment of the present invention, Fig. 3 shows the configuration of a mass flow sensor, and Fig. 4 shows another embodiment of the invention. It is a figure which shows an example. 10... Mass flow sensor for measuring gas flow rate, 11.
...Gas flow path, 12...Mass flow sensor for checking.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)ガス流路に並列に設けたガス流量測定用のマスフ
ローセンサーと、このセンサーと並列に設けられ、かつ
該センサーより内径の大きなチェック用マスフローセン
サーと、両センサーの出力信号量を比較し、ガス流量測
定用のマスフローセンサーの異常の有無を確認する比較
器とから構成されてなる自己診断機能付質量流量計。
(1) Compare the output signal amount of a mass flow sensor for measuring gas flow rate installed in parallel with the gas flow path and a mass flow sensor for checking that is installed in parallel with this sensor and having a larger inner diameter than the sensor. A mass flow meter with a self-diagnosis function, which consists of a comparator that checks whether there is an abnormality in the mass flow sensor for measuring gas flow rate.
(2)  前記チェック用マスフローセンサーにハ流量
”° 制限素子が設けられて、他方のセンサーと同一の
ガス流量を流すようにしであることを特徴とする実用新
案登録請求の範囲第(1)項に記載の質量流量計。
(2) Utility model registration claim (1) characterized in that the checking mass flow sensor is provided with a flow rate limiting element so as to flow the same gas flow rate as the other sensor. The mass flow meter described in .
(3)前記流量制限素子はチェック用マスフローセンサ
ーの内径と同−或いはそれ以上の径をもった流量制限素
子を用いていることを特徴とする実用新案登録請求の範
囲第(2)項に記載の質量流量計。
(3) The utility model registration claim (2) is characterized in that the flow rate limiting element is a flow rate limiting element having a diameter equal to or larger than the inner diameter of the checking mass flow sensor. mass flow meter.
JP7007783U 1983-05-10 1983-05-10 Mass flowmeter with self-diagnosis function Granted JPS59175125U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7007783U JPS59175125U (en) 1983-05-10 1983-05-10 Mass flowmeter with self-diagnosis function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7007783U JPS59175125U (en) 1983-05-10 1983-05-10 Mass flowmeter with self-diagnosis function

Publications (2)

Publication Number Publication Date
JPS59175125U true JPS59175125U (en) 1984-11-22
JPH0140014Y2 JPH0140014Y2 (en) 1989-12-01

Family

ID=30200227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7007783U Granted JPS59175125U (en) 1983-05-10 1983-05-10 Mass flowmeter with self-diagnosis function

Country Status (1)

Country Link
JP (1) JPS59175125U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0342522A (en) * 1989-07-11 1991-02-22 Nissan Motor Co Ltd Air intake measuring instrument for internal combustion engine
JP2017156943A (en) * 2016-03-01 2017-09-07 ローム株式会社 Sensor node, sensor network system, and fault recovery method for the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0342522A (en) * 1989-07-11 1991-02-22 Nissan Motor Co Ltd Air intake measuring instrument for internal combustion engine
JP2017156943A (en) * 2016-03-01 2017-09-07 ローム株式会社 Sensor node, sensor network system, and fault recovery method for the same

Also Published As

Publication number Publication date
JPH0140014Y2 (en) 1989-12-01

Similar Documents

Publication Publication Date Title
JPS59175125U (en) Mass flowmeter with self-diagnosis function
JPS58141817U (en) Turbine flow meter
JPS6128061U (en) gas flow meter
JPS5832427U (en) Flowmeter
JPS58154459U (en) Air fuel ratio control device
JPS6144556U (en) Coal-water slurry density measuring device
JPS6031658U (en) gas detection device
JPS6029233U (en) flow rate display device
JPS6056226U (en) fuel consumption meter
JPS5898437U (en) Fan belt abnormality alarm device
JPS60116340U (en) Droplet detection device for natural drip drip device
JPS5949912U (en) float type flowmeter
JPS5963789U (en) Life cessation detection device
JPS5817565U (en) bridge circuit
JPS6079120U (en) Digestion tank gas generation measurement device
JPS60104744U (en) Temperature compensation circuit for semiconductor pressure sensor
JPS6074026U (en) temperature sensor
JPS6081217U (en) Engine oil consumption measuring device
JPS5810188U (en) gas leak alarm
JPS6042955U (en) Exhaust oxygen concentration detection device
JPS59188682U (en) Fuel cell gas control device
JPS6126126U (en) electromagnetic flow meter
JPS6065638U (en) Ultrasonic transducer mounting base
JPS59188377U (en) Flow meter type valve opening indicator
JPS58162245U (en) Internal combustion engine knock control device