JPS59169046U - adsorption device - Google Patents

adsorption device

Info

Publication number
JPS59169046U
JPS59169046U JP6455283U JP6455283U JPS59169046U JP S59169046 U JPS59169046 U JP S59169046U JP 6455283 U JP6455283 U JP 6455283U JP 6455283 U JP6455283 U JP 6455283U JP S59169046 U JPS59169046 U JP S59169046U
Authority
JP
Japan
Prior art keywords
adsorption device
attracted
plate
sucks
vacuum suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6455283U
Other languages
Japanese (ja)
Inventor
安藤　幸師
Original Assignee
シャープ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Priority to JP6455283U priority Critical patent/JPS59169046U/en
Publication of JPS59169046U publication Critical patent/JPS59169046U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図Ａ、　Ｂ及び第２図は本考案の１実施例を示す吸
着器の斜視図である。第３図は上記吸着器に適用される
保持具の１実施例を示す斜視図である。 １・・・本体、２・・・プレート、３・・・凹部、４・
・・環状枠、５・・・溝、６．７・・・真空吸引孔、８
・・・貫通孔。FIGS. 1A and 1B and FIG. 2 are perspective views of an adsorption device showing one embodiment of the present invention. FIG. 3 is a perspective view showing one embodiment of a holder applied to the suction device. 1... Main body, 2... Plate, 3... Recess, 4...
...Annular frame, 5...Groove, 6.7...Vacuum suction hole, 8
...Through hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被吸着体を吸引する第１の真空吸引部と前記被吸着体と
接触するプレートを吸引する第２の真空−吸引部とを本
体に有し、前記プレートを介して前記被吸着体を着脱す
ることを特徴とする吸着器。The main body includes a first vacuum suction section that sucks an object to be attracted, and a second vacuum suction section that sucks a plate that is in contact with the object to be attracted, and the object to be attracted is attached and detached via the plate. An adsorption device characterized by:
JP6455283U 1983-04-26 1983-04-26 adsorption device Pending JPS59169046U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6455283U JPS59169046U (en) 1983-04-26 1983-04-26 adsorption device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6455283U JPS59169046U (en) 1983-04-26 1983-04-26 adsorption device

Publications (1)

Publication Number Publication Date
JPS59169046U true JPS59169046U (en) 1984-11-12

Family

ID=30194737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6455283U Pending JPS59169046U (en) 1983-04-26 1983-04-26 adsorption device

Country Status (1)

Country Link
JP (1) JPS59169046U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571077U (en) * 1980-05-30 1982-01-06
JPS5830128A (en) * 1981-08-17 1983-02-22 Hitachi Ltd Waffer chuck device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571077U (en) * 1980-05-30 1982-01-06
JPS5830128A (en) * 1981-08-17 1983-02-22 Hitachi Ltd Waffer chuck device

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