JPS59169039U - Coaxial cylindrical plasma CVD equipment - Google Patents

Coaxial cylindrical plasma CVD equipment

Info

Publication number
JPS59169039U
JPS59169039U JP6352483U JP6352483U JPS59169039U JP S59169039 U JPS59169039 U JP S59169039U JP 6352483 U JP6352483 U JP 6352483U JP 6352483 U JP6352483 U JP 6352483U JP S59169039 U JPS59169039 U JP S59169039U
Authority
JP
Japan
Prior art keywords
plasma cvd
coaxial cylindrical
cylindrical plasma
cvd equipment
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6352483U
Other languages
Japanese (ja)
Inventor
孝二 森
Original Assignee
株式会社リコー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社リコー filed Critical 株式会社リコー
Priority to JP6352483U priority Critical patent/JPS59169039U/en
Publication of JPS59169039U publication Critical patent/JPS59169039U/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図、第３図はそれぞれ従来のＣＶＤ装置を
示す概略図、第４図は本考案−実施例のＣＶＤ装置を示
す概略図である。 １、・・・陰極、２・・・グランド、３・・・基板、４
川磁界、５・・・電界、８・・・導体。FIGS. 1, 2, and 3 are schematic diagrams showing conventional CVD equipment, respectively, and FIG. 4 is a schematic diagram showing a CVD equipment according to an embodiment of the present invention. 1,...Cathode, 2...Ground, 3...Substrate, 4
River magnetic field, 5... electric field, 8... conductor.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 同軸円筒型プラズマＣＶＤ装置において、中心軸の方向
に電流を流す手段を備え、これにより円周方向の磁界を
生じさせることを特徴とする同軸円筒型プラズマＣＶＤ
装置。A coaxial cylindrical plasma CVD apparatus characterized by comprising means for flowing a current in the direction of the central axis, thereby generating a circumferential magnetic field.
Device.
JP6352483U 1983-04-27 1983-04-27 Coaxial cylindrical plasma CVD equipment Pending JPS59169039U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6352483U JPS59169039U (en) 1983-04-27 1983-04-27 Coaxial cylindrical plasma CVD equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6352483U JPS59169039U (en) 1983-04-27 1983-04-27 Coaxial cylindrical plasma CVD equipment

Publications (1)

Publication Number Publication Date
JPS59169039U true JPS59169039U (en) 1984-11-12

Family

ID=30193708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6352483U Pending JPS59169039U (en) 1983-04-27 1983-04-27 Coaxial cylindrical plasma CVD equipment

Country Status (1)

Country Link
JP (1) JPS59169039U (en)

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