JPS5916786U - Automatic focus laser processing machine - Google Patents
Automatic focus laser processing machineInfo
- Publication number
- JPS5916786U JPS5916786U JP1982110668U JP11066882U JPS5916786U JP S5916786 U JPS5916786 U JP S5916786U JP 1982110668 U JP1982110668 U JP 1982110668U JP 11066882 U JP11066882 U JP 11066882U JP S5916786 U JPS5916786 U JP S5916786U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- processing
- images
- detection
- processing machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の自動焦点レーザ加工機の一実施例の模
式的構成説明図、第２図は第１図に示す装置における光
強度検出素子の出力特性図、第３図は第１図に示す装置
における差動増巾器の出力特性図、第４図は第１図に示
す装置の動作を説明するための要部斜視図である。
３・・・レーザビーム、３ａ・・・加工ビーム、３ｂ・
・・検出ビーム、３Ｃ・・・減衰された検出ビーム、３
ｄ・・・反射光、３ｅ・・・加工ビームの反射光、４・
・・スプリットミラー、５・・・集光レンズ、６・・・
被加工物、７．８・・・被加工物保持ステージ、９・・
・加工ビームの集光点、１０・・・レーザパワー制御手
段、１１゜１２・・・全反射ミラー、１３・・・ビーム
スプリッタ、１４・・・検出ビームの集光点、１５・・
・結像レンズ、１６・・・ビームスプリッタ、１７．１
８・・・検出ビームの反射光の結像位置、１９．２０・
・・光強度検出素子、２１．２２・・・ピンホール、２
３・・・差動増巾器、２４・・・移動制御部、３０・・
・自動焦点レーザ加工機。
・６炸゛ １
． Ａｆ″：、、Ｉ
枝°：に、水工の水力
目 、 。
５
第４図
Ｃ３ａFig. 1 is a schematic structural explanatory diagram of an embodiment of an automatic focusing laser processing machine of the present invention, Fig. 2 is an output characteristic diagram of the light intensity detection element in the device shown in Fig. 1, and Fig. 3 is a diagram similar to that shown in Fig. 1. FIG. 4 is a perspective view of a main part for explaining the operation of the device shown in FIG. 1. 3... Laser beam, 3a... Processing beam, 3b.
...detection beam, 3C...attenuated detection beam, 3
d...Reflected light, 3e...Reflected light of processing beam, 4.
...Split mirror, 5...Condensing lens, 6...
Workpiece, 7.8... Workpiece holding stage, 9...
- Focusing point of processing beam, 10... Laser power control means, 11° 12... Total reflection mirror, 13... Beam splitter, 14... Focusing point of detection beam, 15...
・Imaging lens, 16... Beam splitter, 17.1
8... Image formation position of the reflected light of the detection beam, 19.20.
...Light intensity detection element, 21.22...Pinhole, 2
3... Differential amplifier, 24... Movement control unit, 30...
・Auto-focus laser processing machine.・6 explosions 1. Af'':,, I Branch °:, Hydraulic power of water engineering, . 5 Fig. 4 C3a
Claims (1)
ーム分割手段、前記加工ビームを所定位置に集光させる
集光レンズ、前記検出ビームのエネルギを小さくするパ
ワー制御手段、エネルギを小さくした検出ビームを前記
集光レンズに前記加工ビームとわずかに異る方向から入
射させて前記所定位置とわずかに異る位置に集光させる
光学系、被加工物を前記所定位置近傍にかつ加工ビーム
の光軸方向及び光軸と垂直方向に相対移動可能に保持す
る被加工物保持ステージ、被加工物上に入射した検出ビ
ームの反射光を集光すると共に２つに・ 分割し２
つの像に結像させる結像光学系、被加工物が前記所定位
置にある場合の前記２つの像の一方の位置よりわずかに
前方の位置と他方の位置よりわずかに後方の位置とに各
々配設される２つの光強度検出素子、それら２つの光強
度検出素子の出力の差を出力する差動増巾器およびその
差動増幅器の出力に応じて前記被加工物保持ステージの
前記相対移動を制御する移動制御手段を具備し、これに
より自動的に被加工物の位置を加工ビームの集光位置に
保ちうるようにしてなる自動焦点レーザ加工機。a beam splitting means for splitting the laser beam into a processing beam and a detection beam; a condensing lens for focusing the processing beam on a predetermined position; a power control means for reducing the energy of the detection beam; an optical system that causes the beam to enter the condenser lens from a direction slightly different from that of the processing beam and converges the beam at a position slightly different from the predetermined position; A workpiece holding stage that holds the workpiece so that it can move relative to the optical axis in a direction perpendicular to the optical axis, collects the reflected light of the detection beam incident on the workpiece, and divides it into two.
an imaging optical system for forming two images, respectively disposed at a position slightly forward of one position of the two images and at a position slightly rearward of the other position of the two images when the workpiece is at the predetermined position; two light intensity detection elements provided, a differential amplifier that outputs the difference in the output of the two light intensity detection elements, and the relative movement of the workpiece holding stage according to the output of the differential amplifier. An automatic focus laser processing machine comprising a movement control means that automatically maintains the position of a workpiece at a convergence position of a processing beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982110668U JPS5916786U (en) | 1982-07-20 | 1982-07-20 | Automatic focus laser processing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982110668U JPS5916786U (en) | 1982-07-20 | 1982-07-20 | Automatic focus laser processing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5916786U true JPS5916786U (en) | 1984-02-01 |
| JPS6138774Y2 JPS6138774Y2 (en) | 1986-11-07 |
Family
ID=30257275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982110668U Granted JPS5916786U (en) | 1982-07-20 | 1982-07-20 | Automatic focus laser processing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5916786U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0362577A (en) * | 1990-07-24 | 1991-03-18 | Sanyo Electric Co Ltd | Manufacture of solar battery apparatus |
| JP2002307176A (en) * | 2001-04-12 | 2002-10-22 | Kanagawa Acad Of Sci & Technol | Micro machining device |
| JP2010029906A (en) * | 2008-07-29 | 2010-02-12 | Disco Abrasive Syst Ltd | Laser beam machining apparatus |
-
1982
- 1982-07-20 JP JP1982110668U patent/JPS5916786U/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0362577A (en) * | 1990-07-24 | 1991-03-18 | Sanyo Electric Co Ltd | Manufacture of solar battery apparatus |
| JP2002307176A (en) * | 2001-04-12 | 2002-10-22 | Kanagawa Acad Of Sci & Technol | Micro machining device |
| JP4519352B2 (en) * | 2001-04-12 | 2010-08-04 | 財団法人神奈川科学技術アカデミー | Fine processing equipment |
| JP2010029906A (en) * | 2008-07-29 | 2010-02-12 | Disco Abrasive Syst Ltd | Laser beam machining apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138774Y2 (en) | 1986-11-07 |
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