JPS59166355U - Sample heating device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of the configuration of a conventional device, FIG. 2 is a graph for explaining the conventional device, and FIG. 3 is a schematic diagram of a device according to an embodiment of the present invention. 1: Sample, 2: Electron beam, 3: Sample holder, 4: Heater, 5: Heating control power supply, 6: Ammeter, 7: Thermocouple, 8: Amplifier, 9: Comparison circuit, 10: Temperature setting circuit, 11 : Memory circuit, 12: Selector switch.

Claims (1)

[Scope of utility model registration request] A heating element for heating the sample incorporated in a sample holder that holds the sample, a heating control power source for supplying heating current to the heating element, and a temperature setting for setting the heating element to an arbitrary temperature. means, a detection means for detecting the sample temperature, and a signal from the temperature detection means;
a comparison means for comparing signals from the temperature setting means; a memory circuit for storing instantaneous values or average values within a certain time of output signals of the comparison means; a signal from the memory circuit and a signal from the comparison circuit; 1. A sample heating apparatus comprising: switching means for switching and supplying a control signal to the heating control power source.