JPS59161591U - Recording master clamp device - Google Patents

Recording master clamp device

Info

Publication number
JPS59161591U
JPS59161591U JP5267583U JP5267583U JPS59161591U JP S59161591 U JPS59161591 U JP S59161591U JP 5267583 U JP5267583 U JP 5267583U JP 5267583 U JP5267583 U JP 5267583U JP S59161591 U JPS59161591 U JP S59161591U
Authority
JP
Japan
Prior art keywords
recording master
turntable
clamp device
center
master clamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5267583U
Other languages
Japanese (ja)
Inventor
一彦 佐野
Original Assignee
松下電器産業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 松下電器産業株式会社 filed Critical 松下電器産業株式会社
Priority to JP5267583U priority Critical patent/JPS59161591U/en
Publication of JPS59161591U publication Critical patent/JPS59161591U/en
Pending legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、従来の中心穴なし記録原盤のクランプ装置の
断面図、第２図は、本考案の一実施例の断面図、第３図
は、同センタリング動作の説明図である。 ６・・・・・・記録原盤、７・・・・・・円錐状凹部、
８・・・・・・ターンテーブル、１０・・・・・・ばね
、１１・・・・・・センタリング部材、１２・・・・・
・ストッパー、１３・・・・・・バキュームチャック用
オリフィス、１４・・・・・・空気の通路。FIG. 1 is a sectional view of a conventional clamping device for a recording master disc without a center hole, FIG. 2 is a sectional view of an embodiment of the present invention, and FIG. 3 is an explanatory diagram of the centering operation. 6... Recording master, 7... Conical recess,
8... Turntable, 10... Spring, 11... Centering member, 12...
- Stopper, 13... Orifice for vacuum chuck, 14... Air passage.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一方の主面にフォトレジストが塗布された後、°　光ビ
ーム露光によって信号が記録される記録原盤のクランプ
装置において、前記記録原盤の他方の主面の中心に形設
された円錐状の凹部と、前記記録原盤を載置するターン
テーブルと、該ターンテーブルの表面に設けられた複数
個のバキュームチャック用オリフィスと、半球状の表面
を有し上方にはね付勢され、前記記録原盤の円錐状凹部
と係合するように、前記ターンテーブルの中心に摺動自
在に設けられた中心位置出し部材とからなることを特徴
とする記録原盤クランプ装置。After a photoresist is applied to one main surface, a conical recess formed at the center of the other main surface of the recording master is used in a recording master clamping device in which signals are recorded by light beam exposure. , a turntable on which the recording master is placed; a plurality of vacuum chuck orifices provided on the surface of the turntable; A recording master disk clamping device comprising: a center positioning member slidably provided at the center of the turntable so as to engage with the shaped recess.
JP5267583U 1983-04-11 1983-04-11 Recording master clamp device Pending JPS59161591U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5267583U JPS59161591U (en) 1983-04-11 1983-04-11 Recording master clamp device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5267583U JPS59161591U (en) 1983-04-11 1983-04-11 Recording master clamp device

Publications (1)

Publication Number Publication Date
JPS59161591U true JPS59161591U (en) 1984-10-29

Family

ID=30183022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5267583U Pending JPS59161591U (en) 1983-04-11 1983-04-11 Recording master clamp device

Country Status (1)

Country Link
JP (1) JPS59161591U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214272A (en) * 1985-03-20 1986-09-24 Matsushita Electric Ind Co Ltd Rotation driving device for disc-shaped recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61214272A (en) * 1985-03-20 1986-09-24 Matsushita Electric Ind Co Ltd Rotation driving device for disc-shaped recording medium

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