JPS59158011U - Microhole dimension measuring device - Google Patents
Microhole dimension measuring deviceInfo
- Publication number
- JPS59158011U JPS59158011U JP5294383U JP5294383U JPS59158011U JP S59158011 U JPS59158011 U JP S59158011U JP 5294383 U JP5294383 U JP 5294383U JP 5294383 U JP5294383 U JP 5294383U JP S59158011 U JPS59158011 U JP S59158011U
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- hole
- receiving element
- microhole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第３図は本考案の第１実施例を示すもので、
第１図は全体の機械的配置関係を示す図、第２図は電気
的構成を示すブロック図、第３図は受光素子の出力波形
図である。また、第４図は本考案の第２実施例を示ず第
１図相当図である。
図中、１は光源、５．２７は制御光学系、６はステップ
モータ（移動手段）、９はフォトトランジスタ（受光素
子）Ｊ１２ａは被測定孔、２３は制御回路（演算手段）
である。1 to 3 show the first embodiment of the present invention,
FIG. 1 is a diagram showing the overall mechanical arrangement, FIG. 2 is a block diagram showing the electrical configuration, and FIG. 3 is an output waveform diagram of the light receiving element. Further, FIG. 4 does not show the second embodiment of the present invention, but is a diagram equivalent to FIG. 1. In the figure, 1 is a light source, 5.27 is a control optical system, 6 is a step motor (moving means), 9 is a phototransistor (light receiving element), J12a is a hole to be measured, and 23 is a control circuit (calculating means).
It is.
Claims (1)
配置されその入射状態時に受光信号を出力する受光素子
と、この受光素子を前記被測定孔の径方向に沿うように
移動させる移動手段と、前記被測定孔を通過した照射光
が前記受光素子の移動軌跡に対して該被測定孔の形状に
合致した状態゛ で投射されるように制御する光学
系と、前記受光゛素子が前記受光信号を出力する期間に
おける該受光素子の移動量を演算する演算手段とを具備
して成る微小孔の寸法測定装置。a light-receiving element arranged so that the irradiated light from the light source is incident through the hole to be measured and outputting a light-receiving signal when the light is in the incident state; and a moving means for moving the light-receiving element along the radial direction of the hole to be measured. , an optical system that controls the irradiation light that has passed through the hole to be measured so that it is projected onto the movement locus of the light receiving element in a state that matches the shape of the hole to be measured; A microhole dimension measuring device comprising a calculation means for calculating the amount of movement of the light receiving element during a period of outputting a signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5294383U JPS59158011U (en) | 1983-04-08 | 1983-04-08 | Microhole dimension measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5294383U JPS59158011U (en) | 1983-04-08 | 1983-04-08 | Microhole dimension measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59158011U true JPS59158011U (en) | 1984-10-23 |
Family
ID=30183288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5294383U Pending JPS59158011U (en) | 1983-04-08 | 1983-04-08 | Microhole dimension measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59158011U (en) |
-
1983
- 1983-04-08 JP JP5294383U patent/JPS59158011U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS614617U (en) | Guide device for the blind | |
| JPS59158011U (en) | Microhole dimension measuring device | |
| JPS62127129U (en) | ||
| JPS6080838U (en) | optical copying device | |
| JPS6027971U (en) | Pachinko machine non-use time measurement display device | |
| JPS5954871U (en) | detection device | |
| JPS59144517U (en) | optical scale reader | |
| JPS59139435U (en) | Vehicle warning device | |
| JPS5842669U (en) | electronic device with a motor | |
| JPS6399322U (en) | ||
| JPS59113898U (en) | Intermittent measuring instrument | |
| JPS61145344U (en) | ||
| JPS60118764U (en) | pulse generator | |
| JPS59121656U (en) | Resist automatic development equipment | |
| JPS5971138U (en) | Wire measuring device | |
| JPS6059912U (en) | rotation detection device | |
| JPS6387609U (en) | ||
| JPS5944061U (en) | Laser irradiation device | |
| JPS59168460U (en) | Multilevel parking device operation panel | |
| JPS63182098U (en) | ||
| JPS59157791U (en) | Light concentrator positioning device | |
| JPS5984502U (en) | auto focus device | |
| JPS59161635U (en) | Adjustment device for circuit components | |
| JPS59152413U (en) | Servo recording device | |
| JPS5990270U (en) | Rotating state detection device for rotating body |