JPS59156753U - dicing saw - Google Patents
dicing sawInfo
- Publication number
- JPS59156753U JPS59156753U JP4930483U JP4930483U JPS59156753U JP S59156753 U JPS59156753 U JP S59156753U JP 4930483 U JP4930483 U JP 4930483U JP 4930483 U JP4930483 U JP 4930483U JP S59156753 U JPS59156753 U JP S59156753U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- dicing saw
- wheels
- cut
- control signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は圧電素子の斜視図、第２図ないし第５図は本考
案のダイシングソウの実施例を示し、第２図は平面図、
第３図は第２図の正面図、第４図および第５図は他の変
形例を示す平面図である。
１０・・・ダイシングソウ、１２・・・ワーク、１８ａ
。
１８ｂ・・・カットホイール、２０ａ、２０ｂ・・・ス
ピンドル。Fig. 1 is a perspective view of a piezoelectric element, Figs. 2 to 5 show an embodiment of the dicing saw of the present invention, and Fig. 2 is a plan view.
FIG. 3 is a front view of FIG. 2, and FIGS. 4 and 5 are plan views showing other modifications. 10... Dicing saw, 12... Work, 18a
. 18b...Cut wheel, 20a, 20b...Spindle.
Claims (1)
角度回転するチャッキングテーブル上に、圧電基板など
のワークを載置固定し、制御信号によってワークに対し
遠近あるいは水平面内に移動したりするカットホイール
で加工するダイシングソウにおいて、一つのワークに対
し個々に制御あるいは連動される工具上のカットホイー
ルを配設するか、一つのワークを−または複数のカット
ホイールが加工しているときのあきスペースに別のワー
クが位置していて別の−または複数のカットホイールが
加工を行なっていることを特徴とするダイシングソウ。A cut wheel that places and fixes a workpiece such as a piezoelectric substrate on a chucking table that moves to any position in a horizontal plane or rotates at any angle based on a control signal, and moves near or far from the workpiece or within the horizontal plane based on a control signal. In a dicing saw that processes one workpiece, the cut wheels on the tool are individually controlled or interlocked, or the cut wheels are installed in the free space when one workpiece or multiple cut wheels are processing the workpiece. A dicing saw characterized in that another workpiece is positioned and another or a plurality of cutting wheels perform processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4930483U JPS59156753U (en) | 1983-04-02 | 1983-04-02 | dicing saw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4930483U JPS59156753U (en) | 1983-04-02 | 1983-04-02 | dicing saw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59156753U true JPS59156753U (en) | 1984-10-20 |
Family
ID=30179813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4930483U Pending JPS59156753U (en) | 1983-04-02 | 1983-04-02 | dicing saw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59156753U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231660A (en) * | 2001-12-17 | 2002-08-16 | Tokyo Seimitsu Co Ltd | Spindle moving mechanism of dicing apparatus |
| JP2012114196A (en) * | 2010-11-24 | 2012-06-14 | Disco Abrasive Syst Ltd | Cutting apparatus |
-
1983
- 1983-04-02 JP JP4930483U patent/JPS59156753U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231660A (en) * | 2001-12-17 | 2002-08-16 | Tokyo Seimitsu Co Ltd | Spindle moving mechanism of dicing apparatus |
| JP2012114196A (en) * | 2010-11-24 | 2012-06-14 | Disco Abrasive Syst Ltd | Cutting apparatus |
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