JPS59152736U - Electronic annealing device - Google Patents
Electronic annealing deviceInfo
- Publication number
- JPS59152736U JPS59152736U JP4796283U JP4796283U JPS59152736U JP S59152736 U JPS59152736 U JP S59152736U JP 4796283 U JP4796283 U JP 4796283U JP 4796283 U JP4796283 U JP 4796283U JP S59152736 U JPS59152736 U JP S59152736U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- annealing device
- polycrystalline material
- electronic
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は電子線アニール装置の概略図、第２図は従来の
電子銃の概略図、第３図は本考案の要旨の一実施例とし
て示した電子銃の概略図、第４図は該電子銃からの電子
線の強度分布を示したものである。
１：衝撃型電子銃、２． ２’ ：陰極、３ニゲリツ
ド、４ニアノード、５：フィラメント、６：多結晶シリ
コン、７：集束レンズ、ａ ：偏向器。FIG. 1 is a schematic diagram of an electron beam annealing device, FIG. 2 is a schematic diagram of a conventional electron gun, FIG. 3 is a schematic diagram of an electron gun shown as an embodiment of the gist of the present invention, and FIG. This shows the intensity distribution of the electron beam from the electron gun. 1: Impact type electron gun, 2. 2': cathode, 3 nigeride, 4 near node, 5: filament, 6: polycrystalline silicon, 7: focusing lens, a: deflector.
Claims (1)
晶物質上で走査し、該多結晶物質の結晶粒子径を増大化
或いは該多結晶物質を単結晶化する様になした装置にお
いて、前記陰極電子線放出面の中央部分を胸囲の部分に
対し窪ませたことを特徴とする電子線アニール装置。In an apparatus in which an electron beam emitted from a cathode electron beam emission surface of an electron gun is scanned over a polycrystalline material to increase the crystal grain size of the polycrystalline material or to make the polycrystalline material into a single crystal. . An electron beam annealing device, characterized in that the central portion of the cathode electron beam emitting surface is depressed relative to the chest circumference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4796283U JPS59152736U (en) | 1983-03-31 | 1983-03-31 | Electronic annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4796283U JPS59152736U (en) | 1983-03-31 | 1983-03-31 | Electronic annealing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59152736U true JPS59152736U (en) | 1984-10-13 |
Family
ID=30178502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4796283U Pending JPS59152736U (en) | 1983-03-31 | 1983-03-31 | Electronic annealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59152736U (en) |
-
1983
- 1983-03-31 JP JP4796283U patent/JPS59152736U/en active Pending
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