JPS59151644U - Substrate supply device - Google Patents

Substrate supply device

Info

Publication number
JPS59151644U
JPS59151644U JP4734283U JP4734283U JPS59151644U JP S59151644 U JPS59151644 U JP S59151644U JP 4734283 U JP4734283 U JP 4734283U JP 4734283 U JP4734283 U JP 4734283U JP S59151644 U JPS59151644 U JP S59151644U
Authority
JP
Japan
Prior art keywords
substrate
supply device
substrate supply
sensor
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4734283U
Other languages
Japanese (ja)
Inventor
一朗 小林
塚田　恭吾
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP4734283U priority Critical patent/JPS59151644U/en
Publication of JPS59151644U publication Critical patent/JPS59151644U/en
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案による基板供給装置の実施例を示すもので、
第１図は正面図、第２図は側面図、第３図は第２図の■
−■断面図、第４図は２枚取り防止部の拡大側面図であ
る。 図において、Ｍｌ、　Ｍ２はモータ、７はテーブル、８
は送りネジ、１２．２６はセンサ、１５はスライダ、１
６は押えピン、１７は傾斜面、２１は回転軸、２２はハ
ンドラー、２３はエアシリンダをそれぞれ示す。 ノThe figure shows an embodiment of the substrate supply device according to the present invention.
Figure 1 is a front view, Figure 2 is a side view, Figure 3 is the same as Figure 2.
-■ sectional view, and FIG. 4 is an enlarged side view of the double-sheet removal prevention part. In the figure, Ml and M2 are motors, 7 is a table, and 8
is a feed screw, 12.26 is a sensor, 15 is a slider, 1
6 is a presser pin, 17 is an inclined surface, 21 is a rotating shaft, 22 is a handler, and 23 is an air cylinder. of

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を載置して上昇するテーブル、テーブル上の基板の
レベルを検出するセンサ、このセンサからの信号に基づ
いてテーブルを上昇させるテーブル駆動源、一定の高さ
の位置において、テーブルが停止している際に２枚目の
基板を側面から押圧する加圧手段をそれぞれ備えている
ことを特徴とする基板供給装置。A table that lifts with a substrate placed on it, a sensor that detects the level of the substrate on the table, a table drive source that raises the table based on the signal from this sensor, and a table that stops at a certain height. A substrate supply device characterized in that each substrate supply device is provided with pressing means for pressing the second substrate from the side when the second substrate is being placed.
JP4734283U 1983-03-31 1983-03-31 Substrate supply device Pending JPS59151644U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4734283U JPS59151644U (en) 1983-03-31 1983-03-31 Substrate supply device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4734283U JPS59151644U (en) 1983-03-31 1983-03-31 Substrate supply device

Publications (1)

Publication Number Publication Date
JPS59151644U true JPS59151644U (en) 1984-10-11

Family

ID=30177890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4734283U Pending JPS59151644U (en) 1983-03-31 1983-03-31 Substrate supply device

Country Status (1)

Country Link
JP (1) JPS59151644U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5240894A (en) * 1975-09-26 1977-03-30 Ryusuke Uno Drilling machine
JPS545512U (en) * 1977-06-13 1979-01-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5240894A (en) * 1975-09-26 1977-03-30 Ryusuke Uno Drilling machine
JPS545512U (en) * 1977-06-13 1979-01-13

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