JPS59151208U - exposure equipment - Google Patents
exposure equipmentInfo
- Publication number
- JPS59151208U JPS59151208U JP4743883U JP4743883U JPS59151208U JP S59151208 U JPS59151208 U JP S59151208U JP 4743883 U JP4743883 U JP 4743883U JP 4743883 U JP4743883 U JP 4743883U JP S59151208 U JPS59151208 U JP S59151208U
- Authority
- JP
- Japan
- Prior art keywords
- exposure equipment
- light shielding
- exposure device
- single lenses
- shielding plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来例め露光装置の断面図、第2図はその要部
の斜視図、第3図は光学部品を重ね合せた状態を示す斜
視図、第4図は本考案の一実施例の斜視図である。
1・・・・・・保護ガラス、2・・・・・・単レンズ、
3・・・・・・遮光部材、4・・・・・・光量絞り部材
、5・・・・・・視野絞り部材、6・・・・・・固定部
材、7・・・・・・押圧板。Fig. 1 is a sectional view of a conventional exposure apparatus, Fig. 2 is a perspective view of its main parts, Fig. 3 is a perspective view showing a state in which optical components are stacked, and Fig. 4 is an embodiment of the present invention. FIG. 1... Protective glass, 2... Single lens,
3... Light shielding member, 4... Light amount diaphragm member, 5... Field diaphragm member, 6... Fixing member, 7... Pressing Board.
Claims (1)
光装置において、上記単レンズ、遮光板等の両側端部を
、上面と下面に弾性材の押圧板を有する固定部材で挟持
、固定したことを特徴とする露光装置。In an exposure device in which optical components such as a plurality of single lenses and light shielding plates are stacked one on top of the other, both ends of the single lenses and light shielding plates are clamped and fixed by a fixing member having pressing plates made of elastic material on the upper and lower surfaces. An exposure device characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4743883U JPS59151208U (en) | 1983-03-30 | 1983-03-30 | exposure equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4743883U JPS59151208U (en) | 1983-03-30 | 1983-03-30 | exposure equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59151208U true JPS59151208U (en) | 1984-10-09 |
Family
ID=30177985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4743883U Pending JPS59151208U (en) | 1983-03-30 | 1983-03-30 | exposure equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59151208U (en) |
-
1983
- 1983-03-30 JP JP4743883U patent/JPS59151208U/en active Pending
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