JPS59149307A - Adjusting device of optical axis - Google Patents

Abstract

PURPOSE:To adjust the optical axis with a low cost and a high precision by fixing a connecting part, which is attached to the entrance/exit end of external optical system constituting parts with the same axis as the axis of a beam, and a sample supporting part, which is provided on the extension of the axis of the connecting part, with a pole brace provided with an aperture window. CONSTITUTION:An optical axis adjusting device 21 is attached to an exit end 5 of a laser beam guide tube 3, and an object to be irradiated which fumes, fires, colors, and emits light by irradiation of a laser beam is provided in the sample supporting part, and the object to be irradiated is irradiated with a laser beam 2 from a laser oscillator 1, and the laser beam guide tube 3 is moved while observing the irradiation position, and thus, the optical axis of the laser beam is made coincident with the axis of constituting parts within a range of + or -0.1mm.. A supporting part 23 for the object to be irradiated and a connecting part 22 are fixed by a pole brace provided with a viewing window 24, and fume and dust generated at the laser beam irradiation time are dispersed from the viewing window 24, and the optical axis is adjusted while detecting the laser beam position without dirtying external optical system constituting parts.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is a method for adjusting the optical axis of an invisible laser beam emitted from a carbon dioxide laser or YA (laser device) to match the central axis of external optical system components.

The present invention relates to an optical axis adjustment device to be installed.

Conventional configuration and its problems A carbon dioxide laser that oscillates at a wavelength in the non-city visual range.

Alternatively, the YAG laser has a strong power, and using this power, the laser beam launched from the laser device is applied to the liquid using an external optical system installed outside the oscillation device.The beam is applied to the object for surface heat treatment and scribing.

Cutting 2: All laser processing such as trimming can be performed. FIG. 1a shows a typical laser oscillator and external optical system. Is 1 carbon dioxide here? 1 is a YAG laser oscillation device, 2 is a laser beam emitted from the laser oscillation device, and 3 is a laser beam guide tube to prevent dust in the air from entering the external optical system and to prevent the human body from coming into contact with the laser beam. , 4.6 are the inlet end and outlet end of the guide tube, respectively. Normally, in order to guide the laser beam at the processing irradiation position trench, a reflector holder 7 containing a reflector 6 is used to bend the laser beam in all appropriate directions. Here 8.
Reference numeral 9 designates the reflector holster - the front end and the exit end.The laser beam guide tube 1o passes through the entrance end 11 and the exit end 12 to condense the light and guide it to the condensing lens holder 14 containing the lens 13. Here, reference numeral 15 denotes an open end of the condensing lens holder 14, through which a nozzle 16 passes and irradiates a workpiece 17 with a laser beam for processing.

Normally, the optical axis of the laser beam is aligned with the guiding tube 31 reflecting mirror 6. Guide tube 10. Condensing lens 13. In order to match each central axis of the nozzle 16, each component is adjusted by translating or tilting, but in this case, the spot focused on the workpiece 17 must have less aberration to improve machining accuracy. Must be.

Conventionally, in order to adjust the external optical system, a visible laser beam such as HI3-Ne is prepared, which is superimposed so that it has the same axial direction as the invisible laser beam emitted from the laser oscillator. A laser beam scattering plate 18 like the one shown in FIG. 1 was installed inside or at one of the entrances and exits of the external optical system components to allow only the visible laser beam to pass through completely, and the optical axis was visualized and adjusted. However, in order to superimpose a visible light He-Ne laser, a precise superposition device is required.
In addition, a management procedure is required to regularly check the superposition of both beams, and even if only one optical adjustment is performed using a substitute beam, there are disadvantages such as increasing the cost of the entire processing system. In addition, the first laser beam can be
A laser beam scattering plate 18 made of paper or acrylic as shown in the figure is attached to each external optical system component at 3.7, 10, 1.
When aligning the optical axis by irradiating with a non-visible laser beam at the entrance/exit end of 4, the drawback is that smoke dust flies up as it ignites, contaminating the reflector and condensing lens and damaging the external optical system. There is also.

OBJECTS OF THE INVENTION The present invention solves the above objects and enables highly accurate optical axis adjustment at low cost.

Structure of the Invention The present invention achieves all of the above objects, and includes a coupling part attached to the exit end of an external optical system component coaxially with the beam center axis, and a coupling part provided on an extension of the central axis of the coupling part. The present invention provides an optical axis adjustment device comprising: a sample support portion that removably holds an irradiated object; and the coupling portion and the sample support portion are fixed by a column having an opening window.

DESCRIPTION OF EMBODIMENTS FIG. 2 is an external view of an optical axis adjustment device which is an embodiment of the present invention.

In the figure, 22 denotes each outlet end 5. of the components of the external optical system of FIG. 1a. 9. 12. 16, and the optical axis adjusting device 21 of this embodiment is attached to each of the optical axis adjusting devices 21 of this embodiment with their center line axes aligned with each other, and a hole through which the laser beam 2 passes is provided in the center.

The coupling portion 22 shown in the figure is shown as a convex screw.

An embodiment in which the optical axis detection device is attached and detached using a concave screw or screw fixing method may also be used.

In the typical laser device shown in FIG. 1a, when adjusting the optical axis between the laser oscillation device 1 and the external optical system,
This is done by attaching the present optical axis adjustment device 21 to the exit end of each component via a coupling portion 22, for example. If the fitting structure of the coupling portion 22 and the structure of the entrance/exit end shown in FIG.

Specifically, in the VRC, an optical axis adjustment device 21 is attached to an external optical system component, for example, an exit end 5 of a laser beam guiding tube 3, and smoke 2 is ignited by irradiation with a laser beam.

Coloring 9 Place an object to be irradiated that emits light on the sample support, irradiate the object with the laser beam 2 from the laser oscillation device 1, and move the laser beam guide tube 3 while observing the irradiation position.
By moving the laser beam, the optical axis of the laser beam and the center axis of the component can be aligned within a range of ±0.1.

The irradiated object support part 23 and the coupling part 22 are fixed by a support 26 having a viewing window 24, and as in this embodiment,
By adopting the viewing window structure, the optical axis can be adjusted while detecting the position of the laser beam without contaminating the external optical system components by diffusing the dust generated during laser beam irradiation and the viewing window 24.

The adjustment of the entire external optical system is completed by sequentially performing the same procedure for the other components.

This device is attached to each inlet end 4, 8, 11° 16 of FIG. It is also possible to align the optical axis at the entrance of the external optical system components by irradiating the irradiated object at 26.

Figure 3 shows other embodiments of the present invention; the one in figure a has a concave screw 32 at the joint, and the one in figure b has a structure in which the joint part 41 is fitted and then fastened with a screw 42. There is. In the embodiment shown in FIG. 0, the number of columns is not necessarily four, but one column 66 that connects the central axis of the connecting portion 62 and the support portion 53 of the object to be irradiated.
It is fixed in a state where the center axis of 66 is aligned.

In either case, the optical axis of the external optical system can be aligned with high precision without causing dust due to smoke to adhere to the external optical system.

Effects of the Invention As described above, the present invention includes a coupling portion whose central axis coincides with the laser beam optical axis at the exit end of an external optical system component that transmits, guides, reflects, and focuses a carbon dioxide laser or YAG laser beam; It has a support part that can attach and detach an irradiated object that emits smoke, 9 ignites, 9 colors, and 2 emits light when the laser beam is fully irradiated, and is equipped with a peephole through which the laser beam irradiation position on the irradiated object can be visually observed. The central axis of the system and the optical axis of the laser beam can be aligned using the laser beam itself for invisible light processing, allowing smoke and dust generated from the laser beam irradiation position to be diffused into the atmosphere through the viewing window without having to completely cure the external optical system. This has the advantage that the optical axis can be adjusted with high precision.

[Brief explanation of the drawing]

Fig. 1a is a perspective view of a conventional processing device in which a laser oscillation device and an external optical system are connected, and Fig. 1 is a perspective view of a laser beam scattering plate used for adjusting the optical axis of the processing device. , FIG. 2 is a perspective view of an optical axis adjustment device which is an embodiment of the present invention, and FIG. 3 a. b and c are front views of an optical axis adjustment device according to another embodiment. 1... Laser oscillation device, 3... Laser guide tube, 7... Reflector holder, 10...
... Laser guide tube, 13 ... Condensing lens, 14
...Condensing lens holder, 21...Optical axis adjustment device, 22...Joining section, 23...
・Sample support part, 24... Peephole, 25...
...Strut. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
Figure jI 3 3?

Claims (1)

[Claims] a coupling part attached to the exit end of the external optical system component coaxially with the beam center axis; a sample support part provided on an extension of the central axis of the coupling part and detachably holding the irradiated object; An optical axis adjustment device, characterized in that the coupling part and the sample support part are integrally fixed by a support having an opening window.