JPS59146005U - liquid separation device - Google Patents
liquid separation deviceInfo
- Publication number
- JPS59146005U JPS59146005U JP3884183U JP3884183U JPS59146005U JP S59146005 U JPS59146005 U JP S59146005U JP 3884183 U JP3884183 U JP 3884183U JP 3884183 U JP3884183 U JP 3884183U JP S59146005 U JPS59146005 U JP S59146005U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- separation device
- liquid separation
- mixed liquid
- specific gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案の背景となる半導体製造装置の排ガス
処理システムの概略構成図である。第２図はこの考案の
一実施例である３液の混合液の液分離装置の断面図であ
る。
２１．２８・・・・・・混合液供給槽、２２．２９・・
・・・・開口、２３． ３０． ３５・・・・・・分離
槽、２４．２７゜３１．３４・・・・・・溢流壁、２５
．３２・・・・・・排液槽、２６、 ３３． ３６・・
・・・・排液管、３７・・・・・・混合液、３Ｂ・・・
・・・比重が最大の液（トリクレン）、３９・・・・・
・比重が中位の液（水）、４０・・・・・・比重が最小
の液（キシレン）。FIG. 1 is a schematic diagram of an exhaust gas treatment system for semiconductor manufacturing equipment, which is the background of this invention. FIG. 2 is a sectional view of a liquid separation device for a three-liquid mixture, which is an embodiment of this invention. 21.28...Mixed liquid supply tank, 22.29...
...Aperture, 23. 30. 35... Separation tank, 24.27° 31.34... Overflow wall, 25
．． 32...Drainage tank, 26, 33. 36...
...Drain pipe, 37...Mixed liquid, 3B...
...Liquid with the highest specific gravity (triclene), 39...
・Liquid with medium specific gravity (water), 40...liquid with minimum specific gravity (xylene).
Claims (1)
液が溢流する溢流壁を有する混合液供給槽と、この混合
液供給槽と底部において連通し前記溢流壁よりも低い溢
流壁を有する比重の大きい液の分離槽とを有する液分離
装置。A mixed liquid supply tank that is supplied with a mixed liquid of different types of liquids having different specific gravities and has an overflow wall through which a liquid with a small specific gravity overflows, and an overflow that communicates with the mixed liquid supply tank at the bottom and is lower than the overflow wall. A liquid separation device having a separation tank for liquid having a high specific gravity and having a wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3884183U JPS59146005U (en) | 1983-03-17 | 1983-03-17 | liquid separation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3884183U JPS59146005U (en) | 1983-03-17 | 1983-03-17 | liquid separation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59146005U true JPS59146005U (en) | 1984-09-29 |
Family
ID=30169507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3884183U Pending JPS59146005U (en) | 1983-03-17 | 1983-03-17 | liquid separation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59146005U (en) |
-
1983
- 1983-03-17 JP JP3884183U patent/JPS59146005U/en active Pending
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