JPS59143247A - Electron gun - Google Patents

Abstract

PURPOSE:To eliminate the ejection of the sputtering filament material, by simply providing a cover surrounding the filament, said cover also serving as a draw electrode, and an opening made in the cover at the position facing the filament for ejecting electrons therethrough. CONSTITUTION:Since a d.c. power supply 23 is applied between the filament 11 and the cover 12 to produce an electric field between them, and the cover is grounded and acts as a draw electode, the electrons are ejected through the electron ejecting opening 13. Since the filament 11 is covered by the cover 12, the ejection of the sputtering filament material to outside the electron gun through the electron ejecting opening 13 is greatly reduced, if it is not completely suppressed, and it is also reduced for contaminants to enter inside the electron gun through the electron ejecting opening 13, if it is not completely suppressed. Since the filament is prevented from being contaminated as well as from ejection of its material, the earlier breakage of the filament is prevented from ocurring.

Description

[Detailed description of the invention] The present invention relates to an electron gun having an electron beam exit port.

In general, electron beams Vi are used in a wide range of fields taking advantage of their various effects169, such as gaseous substances5.
It is used to excite humans.

On the other hand, recently, amorphous silicon (hereinafter [a
-SiJ and recorder. ) have been considered very useful as constituent materials for solar cells, electrophotographic photoreceptors, etc. This a-8
Although i can be formed as a thin film by various methods, it is necessary to introduce hydrogen atoms into Sr to seal the dangling bonds. Hydrogen-containing a-8
i can be obtained and practical application becomes possible. Therefore, in the formation of a-8i, a method using electron beams was proposed as a method for introducing the necessary hydrogen atoms.

According to this method, hydrogen can be introduced into a-8i as follows. That is, hydrogen gas is directly introduced into a deposition tank equipped with a deposition substrate and an evaporation source, and is irradiated with an electron beam from an electron gun to activate or ionize the hydrogen. , and hydrogen is thereby introduced into a -8i.

Generally, an electron gun that emits an electron beam is composed of a filament for generating thermionic electrons and an extraction electrode for emitting the thermionic electrons generated from the filament.
At the same time as heating the filament, a positive potential Z higher than that of the filament is applied to the extraction electrode, and the thermoelectrons generated from the filament are extracted by the extraction electrode to emit an electron beam. 9. When this is used to carry out the method described above, the material of the filament of the electron gun is ejected into the vapor deposition tank, so the material of the filament mixes into the thin film formed on the vapor deposition substrate and causes the There are disadvantages such as the thin film becoming contaminated and the filament being easily broken due to the evaporation source material adhering to the filament and contaminating the filament.

Further, in addition to the above-mentioned method, in the sputtering method, for example, electron Hyy may be used for triggering, and in this case, even if Z is used, there are the same drawbacks as mentioned above.

The present invention has been made based on the above-mentioned circumstances, and an object of the present invention is to provide an electron gun that has a simple structure, can suppress emission of filament material, and has a long life.

The electron gun of the present invention is characterized by a filament,
A cover that also serves as an extraction electrode is provided to surround the filament, and the filament 1 is attached to this cover.
and an electron beam exit aperture provided at an opposing portion of the electron beam.

An embodiment of the present invention will be described below with reference to the drawings.

To this invention? As shown in FIGS. 1 and 2, a cylindrical cover 12 of stainless steel, for example, which also serves as an extraction electrode, is provided to surround the filament 11 made of, for example, tungsten. Filament 1 to be placed in this cover 12
For example, a hole having a size corresponding to the size of the filament 11 is provided in a portion facing the filament 11 to form an electron mti3 injection port 134. An insulating material 14 is fitted into the opening at the contact end of the cover 12, and a frame 15 made of stainless steel, for example, having an opening in the center is provided outside the insulating material 14. 14 and power stroke - fixed with 12. Said insulation material 1
There are lead rods 16, 16 extending through the inside of 4.
'i is buried, and both ends of the lead rods 16 and 160 are made to protrude inside the cover 12 and outside the central opening of the frame 15, respectively.

The filament 11y! is located between the inner ends of the lead rods 16, 16 which protrude into the cover 12! An alternating current or direct current filament heating power source 17 is connected between the outer ends of the lead rods 16, 16 that protrude outside the central opening of the frame 15.

A water cooling pipe 18 made of copper, for example, is spirally wound and fixed by welding or the like on the outer periphery of the cover 12 so as to be in direct contact therewith. Both ends 19 of this water cooling pipe 18
．． 20 extends downward, and its legs 21 and 22 also serve as supports for the electron gun.

The one lead rod 16 is connected to the negative terminal 1111' of the one-bar current power source 23, and the positive side of the DC power source 23 is connected to the cover 12, which is set at ground potential.

The reason for the above structure is that an electric field is formed between the filament II and the cover 12 by the DC power supply 23, so that the cover 12 is brought to the ground potential and functions as the lead-out pole. As a result, the electron beam is emitted from the electron beam exit port 13, but the filament 11 is not connected to the cover 12.
Because the filament material is shielded by the shield, even if the filament material is emitted from the electron beam exit port 13 to the outside of the electron gun, it becomes significantly smaller, and contaminants may enter the electron gun from the electron beam exit port 13. As a result, the emission of the filament material substance to the outside of the electron gun can be suppressed, and contamination of the filament can be suppressed, and early IIh radiation of the filament can be prevented.

The cover 12 also serves as an extraction electrode, and the cover 1
24i ground potential is sufficient, so cover 12'+: No insulation is required, and therefore the configuration of the electron gun is simple.
As a result, the provision of the cover 12 does not increase the size of the electron gun, and the electron gun can be made compact after all. In addition, since the cover 12 only needs to be made of metal, it can be easily molded. For example, the electron beam exit port 13 can be easily formed by punching, etc., and has relatively high heat resistance. be able to. Also cover 12
Since the electrode itself is an extraction electrode, thermionic electrons from the filament 11 are taken into the cover 12 and the cover 12 generates heat. However, if the thermionic generation output is to be increased, the above-mentioned embodiment can be used. It is preferable to provide the water cooling pipe 18 in contact with and fixed to the outer periphery of the cover 12, as shown in FIG. 2, so that the cover 12 can be prevented from overheating. Further, it is convenient to form a part of the water cooling pipe 18 into the leg portions 21 and 22 so that the leg portions 21 and 22 can also be used as a support, and there is no need to provide any other support.

As the material of the cutting filament 11, it is preferable to use a metal that has good thermoelectron generation property and has a high melting point of 2000C or more. Specifically, in addition to tungsten, molybdenum, tantalum, carbon Examples include -5 lanthanum boride. The size of the +1 sagittal beam exit port 18 is determined by the size of the filament 11, and the size of the electron beam exit port IB is, for example, a width of 0.
It is about 1 to 2 degrees, preferably about 1 to 10 degrees. The distance between the filament 11 and the electron beam exit port 1B is approximately 10 u+.

The material of the cover 12 is preferably a metal having a high melting point of 1000° C. or higher, and examples include stainless steel, copper (oxygen-free), iron, brass, and high-temperature aluminum. The material of the frame 15 is also the same as that of the cover 12.

As the filament heating power source 17, for example, an AC or DC power source with a voltage of 10 volts and a current of about 50 amperes is used. A high voltage power source with a voltage of 3 kilovolts, for example, is used as the DC power source 23, and the amount of thermoelectrons emitted from the electron beam exit port 13 is about 500 mA.

The material of the water cooling pipe 18 is preferably a metal such as copper, which has good thermal conductivity. Further, since the water cooling pipe 18 is made of metal, if it is used also as a support, the cover 12i can be easily brought to a ground potential through the water cooling pipe 18.

As explained above, according to the electron gun of the present invention, it is possible to prevent the filament material from ejecting outside the electron gun, and it is also possible to prevent the filament from being contaminated. It is particularly effective in cases where contamination caused by C or contamination of the filament becomes a problem. For example, when used as a means to ionize or ionize hydrogen by forming a-8i, or (・It is used as a trigger for the snow (vine) device.
(1-) Good thin film formation without film contamination.
I can drive a car.

As described above, the electron gun of the present invention includes a filament and an extraction electrode w-J/L provided to surround the filament Y.
This structure is characterized by comprising a flexible cover and an electron beam exit opening provided in the opposite part of the cup (-) to the pre-distributed filament. The emission χ can be suppressed, and the life can be made longer.

[Brief explanation of the drawing]

FIG. 1 and FIG. 2 are an explanatory longitudinal sectional front view and an explanatory side view, respectively, showing one embodiment of the present invention. 11...Filament 12...Crack-13
...Electron beam exit port 14...Insulating material 15...
Frame 16...Lead rod 17...Filament heating power source 18...Water cooling pipe 21.22...Legs 2
3...DC power supply

Claims (1)

[Claims] l) A filament and a cup (-) which also serves as a reference electrode surrounding the filament 0 and the 8 filament on this cover.
and an electron beam exit opening provided at a portion facing the filament. 2) The electron gun according to claim 1, characterized in that a water cooling pipe is disposed in contact with the outer periphery of the cover. 3) The electron gun according to claim 2, wherein the water cooling pipe also serves as an electron gun support.