JPS59141178U - 真空破壊弁を内蔵する真空ポンプ - Google Patents

真空破壊弁を内蔵する真空ポンプ

Info

Publication number
JPS59141178U
JPS59141178U JP3346483U JP3346483U JPS59141178U JP S59141178 U JPS59141178 U JP S59141178U JP 3346483 U JP3346483 U JP 3346483U JP 3346483 U JP3346483 U JP 3346483U JP S59141178 U JPS59141178 U JP S59141178U
Authority
JP
Japan
Prior art keywords
vacuum
built
vacuum pump
breaker valve
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3346483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332792Y2 (enrdf_load_html_response
Inventor
島津　浄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP3346483U priority Critical patent/JPS59141178U/ja
Publication of JPS59141178U publication Critical patent/JPS59141178U/ja
Application granted granted Critical
Publication of JPH0332792Y2 publication Critical patent/JPH0332792Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP3346483U 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ Granted JPS59141178U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3346483U JPS59141178U (ja) 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3346483U JPS59141178U (ja) 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ

Publications (2)

Publication Number Publication Date
JPS59141178U true JPS59141178U (ja) 1984-09-20
JPH0332792Y2 JPH0332792Y2 (enrdf_load_html_response) 1991-07-11

Family

ID=30164255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3346483U Granted JPS59141178U (ja) 1983-03-10 1983-03-10 真空破壊弁を内蔵する真空ポンプ

Country Status (1)

Country Link
JP (1) JPS59141178U (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176618A (ja) * 1974-12-13 1976-07-02 Hitachi Ltd Shinkuhonpusoonteigenkiko

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176618A (ja) * 1974-12-13 1976-07-02 Hitachi Ltd Shinkuhonpusoonteigenkiko

Also Published As

Publication number Publication date
JPH0332792Y2 (enrdf_load_html_response) 1991-07-11

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