JPS59138198A - Highly elastic diaphragm for speaker - Google Patents
Highly elastic diaphragm for speakerInfo
- Publication number
- JPS59138198A JPS59138198A JP1192183A JP1192183A JPS59138198A JP S59138198 A JPS59138198 A JP S59138198A JP 1192183 A JP1192183 A JP 1192183A JP 1192183 A JP1192183 A JP 1192183A JP S59138198 A JPS59138198 A JP S59138198A
- Authority
- JP
- Japan
- Prior art keywords
- film
- aluminum
- nitride film
- aluminum nitride
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Abstract
Description
【発明の詳細な説明】 本発明はスピーカ用高弾性振動板に関する。[Detailed description of the invention] The present invention relates to a high elasticity diaphragm for speakers.
スピーカ用高弾性振動板材料としては、理論的に密度ρ
(KO/m 3)が小さい程、また音速C(m /se
c )が大きい程優れていることはよく知られている。Theoretically, as a high-elastic diaphragm material for speakers, the density ρ is
(KO/m3) is smaller, and the speed of sound C(m/se
It is well known that the larger the c), the better.
ρが小さく、かつCが大きい高弾性率材料としては、ベ
リリウム(Be )やボロン(B)があり、これらの材
料を用いた高弾性撮動板は、例えば、アルミニウム(A
ρ)のような軽い金属基板の片面または両面にベリリウ
ム(Be )やボロン(B)のような高弾性の金属また
はその化合物の膜を形成してなるものがあった。Examples of high elastic modulus materials with small ρ and large C include beryllium (Be) and boron (B).
There is one in which a film of a highly elastic metal such as beryllium (Be) or boron (B) or a compound thereof is formed on one or both sides of a light metal substrate such as ρ).
しかし、このような高弾性振動板は、ベリリウム(Be
)やボロン(B)という材料が高価であるばかりか、
金属基板の上に形成する方法が難しく、しかも、Be膜
、B膜のAρ基板との接着力が弱いという欠点があった
。However, such high-elasticity diaphragms are made of beryllium (Be
) and boron (B) are not only expensive, but
It is difficult to form the film on a metal substrate, and the adhesion of the Be film and B film to the Aρ substrate is weak.
また、プラスチック基板にアルミニウム(Aρ)を蒸着
し、このAN蒸着膜の上に、チタン(Ti )の窒化物
(Ti N)または炭化物(Ti C)を形成するよう
にしだ高弾性撮動板もあった。このような振動板は、プ
ラスチック基板にTiN膜またはTiC膜を形成する方
法が複雑であり、また、プラスチック膜と高弾性膜(T
i N膜、TiC膜)との熱膨張係数が合わないため、
膜形成時に特殊な治具を必要とし、形成後も内部歪をも
ち、クラックが生じ易いという欠点があった。In addition, we have also developed a high-modulus imaging plate in which aluminum (Aρ) is vapor-deposited on a plastic substrate, and titanium (Ti) nitride (TiN) or carbide (TiC) is formed on top of this AN vapor-deposited film. there were. For such diaphragms, the method of forming a TiN film or TiC film on a plastic substrate is complicated, and the method of forming a TiN film or TiC film on a plastic substrate is complicated.
i N film, TiC film) because the thermal expansion coefficients do not match.
The disadvantages are that a special jig is required when forming the film, and even after the film is formed, it retains internal strain and is prone to cracking.
本発明は、上述した従来のスピーカ用高弾性振動板の欠
点をことごとく除去したもので、スピーカ用振動板材料
としてまったく新規な窒化アルミ(AρN)の膜を用い
ることにより、周波数特性が良く、電気音響能率が高い
にもかかわらず、量産的で低価格のスピーカ用高弾性振
動板を実現できるようにしたものである。The present invention eliminates all the drawbacks of the conventional high-elasticity diaphragms for speakers as described above. By using a completely new aluminum nitride (AρN) film as the material for the speaker diaphragm, it has good frequency characteristics and Despite its high acoustic efficiency, it is possible to realize a mass-produced, low-cost high-elasticity diaphragm for speakers.
本発明は、第1図に示すように、アルミニウム(Aρ)
などの軽い金属基板1の片面上に直接窒化アルミ(Aρ
N)の膜2を形成して、高弾性振動板を構成したもので
ある。AμN1fj2の形成は、アルミニウム金属をタ
ーゲットとし、これに対向の雰囲気で直流または高周波
スパッタリング法により、AりN膜2をA11基板1上
に直接付着させて量産的に行うことができる。As shown in FIG. 1, the present invention utilizes aluminum (Aρ)
Aluminum nitride (Aρ
A high-elasticity diaphragm is constructed by forming the film 2 of N). AμN1fj2 can be formed in mass production by using aluminum metal as a target and directly depositing the AlN film 2 on the A11 substrate 1 by direct current or high frequency sputtering in an atmosphere opposite the target.
このような量産的方法で/l基板1上に直接付着させた
Aj2N膜2は、密度ρが3.05(K(1/m3)、
音速Cが11.5 (ffl/ SeC)のものが得ら
れた。従来より知られている高弾性材料、例えば、Aρ
、Ti、Be、Bの密度ρおよび音速Cは表1に示すと
おりであり、この表から、本発明で用いるAρNは、高
弾性材料として最高のBe、Bにほぼ匹敵する特性を示
していることがわかる。The Aj2N film 2 deposited directly on the /l substrate 1 by such a mass-produced method has a density ρ of 3.05 (K(1/m3),
A material with a sound velocity C of 11.5 (ffl/SeC) was obtained. Conventionally known high modulus materials, such as Aρ
The density ρ and sound velocity C of , Ti, Be, and B are as shown in Table 1, and from this table, AρN used in the present invention exhibits properties almost comparable to Be and B, which are the highest as high elastic materials. I understand that.
表、1
また、本発明による高弾性振動板は、Aρ基板1どA
、Q N膜2の熱膨張係数に違いがないので、内部歪が
なく、AρN膜2の接着力も強力なものになる。しかも
、アルミニウムは安いので、低価格で工業的価値の大き
な振動板が得られる。さらに、AρN、膜2の密度ρが
小さく、音速Cが大きいので、周波数特性が良く、電気
音響能率の高い高弾性振動板が得られる。Table 1 Furthermore, the high elasticity diaphragm according to the present invention has an Aρ substrate 1 and a
, Q Since there is no difference in the coefficient of thermal expansion of the N film 2, there is no internal strain and the adhesive force of the AρN film 2 is strong. Moreover, since aluminum is cheap, a diaphragm with great industrial value can be obtained at a low price. Furthermore, since AρN, the density ρ of the membrane 2 is small, and the sound velocity C is large, a highly elastic diaphragm with good frequency characteristics and high electroacoustic efficiency can be obtained.
第2図は伯の実施例を示し、ドーム状に成型されたA1
基板1の周縁部1aを残してドーム部のみにAρN膜2
を形成し、その周縁部1aに切線方向コルゲーションを
施したものである。この実施例によれば、Aρ基板1の
ドーム部のみが高弾性振動板となり、コルゲーション部
はへ!基板自身であるから、軟いコルゲーションとなり
、良好な周波数特性を簡単に作ることができる。Figure 2 shows an example of Haku, A1 molded into a dome shape.
AρN film 2 is applied only to the dome part, leaving the peripheral part 1a of the substrate 1.
, and the peripheral edge 1a thereof is corrugated in the tangential direction. According to this embodiment, only the dome portion of the Aρ substrate 1 becomes a high-elastic diaphragm, and the corrugation portion becomes a high-elastic diaphragm. Since it is the substrate itself, it becomes a soft corrugation and can easily create good frequency characteristics.
図示した各実施例はへρ基板の片面にのみAρtill
を形成するようにしているが、本発明によれ。Each of the illustrated embodiments has Aρtill on only one side of the substrate.
However, according to the present invention.
ば、AQ基板の両面ともにAρN膜を形成するようにし
てもよく、また、そのAρN膜の形成はスパッタリング
法に限らず、CVD法、イオンブレーティング法などを
用いてもよい。For example, an AρN film may be formed on both surfaces of the AQ substrate, and the formation of the AρN film is not limited to the sputtering method, but a CVD method, an ion blasting method, or the like may be used.
第1図は本発明による高弾性振動板の実施例を示す断面
図、第2図(a)および(b)はそれぞれ他の実施例を
示す平面図および断面図である。
1は/l基板、2はAρN膜である。
特 許 出 願 人
株式会社村田製作所
第1図
一FIG. 1 is a sectional view showing an embodiment of a high elasticity diaphragm according to the present invention, and FIGS. 2(a) and 2(b) are a plan view and a sectional view showing other embodiments, respectively. 1 is a /l substrate, and 2 is an AρN film. Patent applicant Murata Manufacturing Co., Ltd. Figure 1
Claims (1)
なることを特徴とするスピーカ用高弾性振動板。A high-elasticity diaphragm for a speaker, characterized in that an ARN film is formed on the entire surface or a part of a metal substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1192183A JPS59138198A (en) | 1983-01-26 | 1983-01-26 | Highly elastic diaphragm for speaker |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1192183A JPS59138198A (en) | 1983-01-26 | 1983-01-26 | Highly elastic diaphragm for speaker |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59138198A true JPS59138198A (en) | 1984-08-08 |
Family
ID=11791148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1192183A Pending JPS59138198A (en) | 1983-01-26 | 1983-01-26 | Highly elastic diaphragm for speaker |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59138198A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6173500A (en) * | 1984-09-19 | 1986-04-15 | Onkyo Corp | Diaphragm for speaker |
EP1246502A1 (en) * | 2001-03-30 | 2002-10-02 | Phone-Or Ltd | Microphone |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421088A (en) * | 1977-07-18 | 1979-02-16 | Bonin Pete J Jun | Towing machine |
-
1983
- 1983-01-26 JP JP1192183A patent/JPS59138198A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5421088A (en) * | 1977-07-18 | 1979-02-16 | Bonin Pete J Jun | Towing machine |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6173500A (en) * | 1984-09-19 | 1986-04-15 | Onkyo Corp | Diaphragm for speaker |
EP1246502A1 (en) * | 2001-03-30 | 2002-10-02 | Phone-Or Ltd | Microphone |
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