JPS59125725A - Photopolymerizable resin composition - Google Patents

Photopolymerizable resin composition

Info

Publication number
JPS59125725A
JPS59125725A JP68583A JP68583A JPS59125725A JP S59125725 A JPS59125725 A JP S59125725A JP 68583 A JP68583 A JP 68583A JP 68583 A JP68583 A JP 68583A JP S59125725 A JPS59125725 A JP S59125725A
Authority
JP
Japan
Prior art keywords
compound
photoresist
resin composition
composition
photopolymerizable resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP68583A
Other languages
Japanese (ja)
Other versions
JPH047498B2 (en
Inventor
Hiroyuki Uchida
内田 広幸
Jun Nakauchi
純 中内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Rayon Co Ltd
Original Assignee
Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Rayon Co Ltd filed Critical Mitsubishi Rayon Co Ltd
Priority to JP68583A priority Critical patent/JPS59125725A/en
Publication of JPS59125725A publication Critical patent/JPS59125725A/en
Publication of JPH047498B2 publication Critical patent/JPH047498B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask

Landscapes

  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To improve the adhesive strength of a photopolymerizable resin composition to a metallic surface by adding a very small amount of a specified compound to the composition which is used to form a photoresist for a printed wiring board. CONSTITUTION:This photopolymerizable resin composition consists of a thermoplastic polymer for a binder, a cross-linkable monomer having an ethylenic unsatd. group in the molecule, a photopolymn. initiator, and a compound represented by the formula (where R is H or 1-4C alkyl). The compound is a very effective component for improving the adhesive strength of a photoresist to a metallic plate, and the especially preferred compound is rhodanine, 3-methylrhodanine, 3-ethylrhodanine or 3-propylrhodanine. The amount of the compound contained in the composition depends on the components of the photoresist, the ratio among the components and the hardness of the photoresist after photosetting, and the preferred amount is 0.001-1wt% so as to produce a significant adhesive effect. More than the upper limit of the compound reduces the sensitivity, and less than the lower limit of the compound is liable to cause throwing during solder plating.

Description

【発明の詳細な説明】 本発明は、金属表面への@着が改善された。[Detailed description of the invention] The present invention has improved adhesion to metal surfaces.

特にプリント配線板用のフォトレジストの形成に用いら
れる光重合性樹脂組成物に関する。
In particular, the present invention relates to a photopolymerizable resin composition used for forming photoresists for printed wiring boards.

フォトレジストを用いたプリント配線板の製造は一般に
次の工程よりなる。(11ガラス・エポキシ銅張積層板
等の基板にフォトレジストを積層スル。(2)パターン
マスクフィルムを通して画像形成できるように活性光線
を照射する。(3)適当な現像液でフォトレジストの未
硬化部分を選択的に浴解除去し、銅面をN出させると共
にレジストパターンを形成する。(4)N出鋼面上に電
気銅メッキした後、電気ハフダメツキを行なう。
The production of printed wiring boards using photoresists generally consists of the following steps. (11 Layer the photoresist on a substrate such as a glass/epoxy copper clad laminate. (2) Irradiate actinic rays through the pattern mask film to form an image. (3) Uncure the photoresist with an appropriate developer. A portion is selectively removed by bath solution to expose the copper surface and form a resist pattern. (4) After electrolytic copper plating is performed on the exposed copper surface, electroplating is performed.

(5)硬化レジストを適当な溶媒で剥離し、銅面を露出
させる。(6)ハンダメッキ層をレジストとして露出銅
面を適当な溶媒でエツチングし、/Xンダコートした部
分が配線部となるプリント配線板を得る。
(5) Peel off the cured resist with a suitable solvent to expose the copper surface. (6) Using the solder plating layer as a resist, the exposed copper surface is etched with a suitable solvent to obtain a printed wiring board in which the /X solder-coated portion becomes the wiring section.

これらの製造工程において、フォトレジストに対する特
にN要な要求性能は、フォトレジストがメッキ液等の液
体に侵されず、フォトレジストに被覆された基材を十分
に保護できることである。特にハイスローハンダメッキ
時に生じる硬化レジストの剥離は、硬化レジストと銅面
間へのメッキ液の浸み込みとなって2回路部以外にもハ
ンダがメッキされ、導線間の短絡、導線幅の拡大、導線
周辺部の形状の乱れ等の問題を生じていた。
In these manufacturing processes, a particularly important performance requirement for the photoresist is that the photoresist is not attacked by a liquid such as a plating solution, and that the base material coated with the photoresist can be sufficiently protected. In particular, peeling of the hardened resist that occurs during high-slow solder plating causes the plating solution to seep between the hardened resist and the copper surface, causing solder to be plated on areas other than the two circuits, resulting in short circuits between conductors and expansion of the conductor width. , problems such as irregularities in the shape of the peripheral portion of the conductor occurred.

これらの問題は硬化レジストと銅面の密着力の不足によ
るものであり、このため密着促進剤の研究開発が行なわ
れ、米国特許第3,622,334号明細書に記載され
るようなベンゾトリアゾール、べ/ズイミダゾールのよ
うな複素環式窒素含有化合物を光重合性樹脂組成物に添
加づ−ること等が提案されている。
These problems are due to the lack of adhesion between the cured resist and the copper surface, and research and development into adhesion promoters has been conducted, including benzotriazole as described in U.S. Pat. No. 3,622,334. It has been proposed to add a heterocyclic nitrogen-containing compound such as be/zimidazole to a photopolymerizable resin composition.

しかしながら、近年の高密度、高精度化によるライン幅
の狭い配線を用いたプリント配線板を製造するには、上
記複素環式窒素含有化合物の添加量を増加しなげれば高
精度パターンが得られず、このことが新たな問題を引き
おこす原因となっている。すなわちベンゾトリアゾール
However, in order to manufacture printed wiring boards using wiring with narrow line width due to recent advances in high density and high precision, it is necessary to increase the amount of the above-mentioned heterocyclic nitrogen-containing compound to obtain a high precision pattern. However, this is causing new problems. i.e. benzotriazole.

ベンズイミダゾールの増加は従来から、フォトレジスト
のパターン形状確認のため必須な染料を退色したり、フ
ォトレジストの感度を低下させる。一方感度向上のため
光重合開始剤の添加量を増すと解像されたパターン断面
が逆台形となり、解像度の低下を生じる。また分子量の
小さい添加剤の量を増F!]すると、多くの工程で硬化
レジスト層の溶解を促進し、レジスト膜の耐性の低下を
きたす点から好ましくない。
Increasing the amount of benzimidazole has conventionally caused discoloration of dyes that are essential for confirming the pattern shape of photoresists and reduced the sensitivity of photoresists. On the other hand, if the amount of photopolymerization initiator added is increased to improve sensitivity, the cross section of the resolved pattern becomes an inverted trapezoid, resulting in a decrease in resolution. Also, increase the amount of additives with small molecular weight! ] This is undesirable because it promotes dissolution of the cured resist layer in many steps and reduces the resistance of the resist film.

本発明者らは、上記したような従来からある問題点を克
服すべく鋭意検討した結果、光重合性樹脂組成物に、特
定の化合物を極めて少量添加することにより、金属面へ
の密着性が改善できることを見い出し本発明を完成した
As a result of intensive studies to overcome the conventional problems described above, the inventors of the present invention have found that by adding an extremely small amount of a specific compound to a photopolymerizable resin composition, the adhesion to metal surfaces can be improved. They found that it could be improved and completed the present invention.

すなわち2本発明の要旨とするところは。In other words, there are two main points of the present invention.

(at  バインダー用熱可塑性重合体(bl  分子
中に少なくとも1個のエチレン性不飽和基を有する架橋
性単量体 (J  光重合開始剤 および (dl  次の一般式 (式中、RはHまたは1〜4個の炭素原子を有するアル
キル基である)で示される化合物よりなる光重合性樹脂
組成物にある。
(at thermoplastic polymer for binder (bl crosslinkable monomer having at least one ethylenically unsaturated group in the molecule) (J photoinitiator and (dl) following general formula (wherein R is H or A photopolymerizable resin composition comprising a compound represented by (which is an alkyl group having 1 to 4 carbon atoms).

本発明の光重合性樹脂組成物の特徴は、前記の一般式〔
I〕で示される化合物を含有しているため、フォトレジ
ストと銅板との密着性が優れンジスト剥離、メッキもぐ
9等の現象を全く引ぎ起さず微細パターンのプリント配
線板の製造に適していることである。
The photopolymerizable resin composition of the present invention is characterized by the general formula [
Because it contains the compound shown in I], it has excellent adhesion between the photoresist and the copper plate, and does not cause any phenomena such as peeling of the resist or plating 9, making it suitable for manufacturing printed wiring boards with fine patterns. It is that you are.

本発明の組成物を構成するバインダー用熱可塑性重合体
は、使用する現像液に可溶であるかまたは膨潤するもの
であれば程々のものが使用できる。具体例としては、 
 1,1.1 )リクロロエクンを現像液とするフォト
レジストの場合、ポリメタクリル酸メチルまたはメタク
リル酸メチルを主成分とする共重合体が用いられる。メ
タクリル酸メチルと共重合するのに使用される単量体の
具体例としてハ、(メタ)アクリル酸メチル(アクリル
酸メチルまたはメタクリル酸メチルの意、以下同様)、
(メタ)アクリル酸エチル、(メタ)アクリル酸n−プ
ロピル、(メタ)アクリル酸イングロビル、(メタ)ア
クリル酸n−ブチル、(メタ)アクリル酸イソブチル、
(メタ)アクリル酸t−ブチル、(メタ)アクリル酸2
−エチルヘキシル、(メタ)アクリル酸ラウリル、(メ
タ)アクリル酸2−ヒドロキシエチル、(メタ)アクリ
ル22−ヒ)−0キシプロピル等の(メタ)アクリル酸
エステル。
As the thermoplastic polymer for the binder constituting the composition of the present invention, any suitable thermoplastic polymer can be used as long as it is soluble or swells in the developer used. As a specific example,
1,1.1) In the case of a photoresist using lichloroecune as a developer, polymethyl methacrylate or a copolymer containing methyl methacrylate as a main component is used. Specific examples of monomers used for copolymerization with methyl methacrylate include (c) methyl (meth)acrylate (meaning methyl acrylate or methyl methacrylate, hereinafter the same);
(meth)ethyl acrylate, n-propyl (meth)acrylate, inglovir (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate,
(meth)acrylic acid t-butyl, (meth)acrylic acid 2
- (Meth)acrylic acid esters such as ethylhexyl, lauryl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, and (meth)acrylic 22-hy)-0xypropyl.

スチレンなどがあげられる。Examples include styrene.

一方、炭酸ナトリウム等のアルカリ希薄溶液を現像液と
するフォトレジストの場合は、前記の(メタ)アクリル
酸エステルまたはスチレン等とアタリル酸、メタクリル
酸、イタコン酸。
On the other hand, in the case of a photoresist using a dilute alkaline solution such as sodium carbonate as a developer, the above-mentioned (meth)acrylic ester or styrene is used with atarylic acid, methacrylic acid, or itaconic acid.

フマル酸、マレイノ酸等のカルボン酸との共重合体があ
げられる。
Examples include copolymers with carboxylic acids such as fumaric acid and maleinoic acid.

本発明のバインダー用熱可塑性樹脂は、使用目的によっ
て分子量、共重合体の組成を一概に決められないが1分
子量の範囲としては現像または皮膜特性の点から20,
000〜200,000がよい。
The molecular weight and composition of the copolymer of the thermoplastic resin for the binder of the present invention cannot be determined unconditionally depending on the purpose of use, but the molecular weight range is 20,
000 to 200,000 is good.

本発明の組成物を構成する分子中に少なくとも1個のエ
チレン性不飽和基を有する架橋性単量体としては、ポリ
エチレングリコールジアクリレ−1・、ペンタエリスリ
トールジアクリレート、ペンタエリスリトールトリアク
リレート。
Examples of the crosslinkable monomer having at least one ethylenically unsaturated group in the molecule constituting the composition of the present invention include polyethylene glycol diacrylate-1, pentaerythritol diacrylate, and pentaerythritol triacrylate.

ペンタエリスリトールテトラアクリレート、トリメチロ
ールプロパントリアクリレート等のポリエステルアクリ
レートやエポキシアクリレート、ウレタンアクリレート
等があげられ、これらに1種またはそれ以上併用して1
組成物中25〜50重量係の範囲で使用されろ。架橋性
単量体の使用量が25重量係未満では硬化皮膜の強度が
十分でなく、また50重量係を越えると7オトンジスト
が軟゛かくなりすぎてコールドフローを起しゃ丁い。
Examples include polyester acrylates such as pentaerythritol tetraacrylate and trimethylolpropane triacrylate, epoxy acrylates, and urethane acrylates.
It should be used in the composition in an amount of 25 to 50% by weight. If the amount of the crosslinkable monomer used is less than 25 parts by weight, the strength of the cured film will not be sufficient, and if it exceeds 50 parts by weight, the 7-otonist will become too soft and cause cold flow.

本発明の組成物を構成する光重合開始剤は公知の例えば
、ベンゾフェノン、シヒラーズケトン、  4.4’−
ビヌ(ジエチルアミノ)ベンゾフェ/7.t−7−チル
アントラキノン、2−二チルアントラキノン、チオキサ
ントン類、ベンゾインアルキルエーテル類、ベンジルケ
タール類等があげられ、これらは1種または2種以上を
併用できる。組成物中の光重合開始剤の使用量はコスト
、パターンの仕上り具合、あるいは解像度等の点から0
.5〜5 FIL it %である。
The photopolymerization initiator constituting the composition of the present invention is known, for example, benzophenone, Schichler's ketone, 4.4'-
Binu(diethylamino)benzofe/7. Examples include t-7-thylanthraquinone, 2-dithylanthraquinone, thioxanthones, benzoin alkyl ethers, and benzyl ketals, and these can be used alone or in combination of two or more. The amount of photopolymerization initiator used in the composition is determined from the viewpoint of cost, pattern finish, resolution, etc.
.. 5-5 FILit%.

また本発明において使用する一般弐mで示される化合物
に27オトレジストの金属板への密着性を改良するため
の極めて有効な成分であって、特に好ましい化合物とし
てローダニン。
In addition, among the compounds represented by general 2m used in the present invention, rhodanine is an extremely effective component for improving the adhesion of 27 otoresist to metal plates, and a particularly preferred compound is rhodanine.

3−メーF−ルロータニン、3−エチルローダニン。3-MeF-Rurotanine, 3-Ethylrhodanine.

3−プロピルローダニンがあげられる。これらの化合物
の組成物への添加量は、フォトレジストの組成成分と組
成比、および光硬化後の7オトレジストの硬さによって
一概に決められないが、有効な密着効果を得るための量
は組成物中0.001〜1重量係、好ましくは0.01
〜0.5重量係の範囲である。多すぎると感度が低下し
3-propyl rhodanine is mentioned. The amount of these compounds added to the composition cannot be determined unconditionally depending on the composition components and composition ratio of the photoresist, and the hardness of the photoresist after photocuring, but the amount to obtain an effective adhesion effect depends on the composition. 0.001 to 1 weight ratio in the product, preferably 0.01
It is in the range of ~0.5 weight factor. If there is too much, the sensitivity will decrease.

少な丁ぎるとノ・ンダメツキ時にメッキもぐりを起しゃ
丁い。
If it is too small, it will cause the plating to peel off when it is damaged.

本発明の組成物は、希釈剤の不存在で使用可であるがベ
ース樹脂を溶解させ、かつ沸点のあまり高くない溶剤9
例えばメチルエチルケトン。
The composition of the present invention can be used in the absence of a diluent, but it can be used in a solvent 9 that dissolves the base resin and that does not have a very high boiling point.
For example, methyl ethyl ketone.

メチレンクロリド、塩化メチレン/メチルアルコールの
混合物、またはイソプロピルアルコール等を併用した方
が好ましい結果が得られろ。
Preferable results may be obtained by using methylene chloride, a mixture of methylene chloride/methyl alcohol, or isopropyl alcohol in combination.

溶剤の使用量は組成物に対して2oos量%以下、好ま
しくは100〜20ON量係である。
The amount of the solvent to be used is 200% or less, preferably 100 to 20ON, based on the composition.

本発明の組成物は、必要に応じて可塑剤、熱重合禁止剤
、充填剤等を添加することもでざる。
The composition of the present invention may contain a plasticizer, a thermal polymerization inhibitor, a filler, etc., if necessary.

以上のべたような成分組成からなる本発明の光重合性樹
脂組成物は、金属面2例えば銅、ニッケル、クロム好ま
しくは銅の上にラミネートして用いられろ。使用法とし
ては液状のレジストとして金属面に塗布し、乾燥後、保
護フィルムを被覆して用いるか、またはドライフィルム
フォトレジストとしてそれを金属面にラミネートしたも
のとして用いられる。フォトレジスト層の厚みは用途に
よって異なるが、乾燥後の厚みで5〜100μm程度で
ある。
The photopolymerizable resin composition of the present invention having the above-described component composition is used by laminating it on a metal surface 2 such as copper, nickel, chromium, preferably copper. It is used either by applying it as a liquid resist to a metal surface, and then covering it with a protective film after drying, or by laminating it onto a metal surface as a dry film photoresist. The thickness of the photoresist layer varies depending on the application, but the thickness after drying is about 5 to 100 μm.

液状レジストとした時の保護フィルムとしてはポリエチ
レン、ポリプロピレンのような不活性なポリオレフィン
フィルムが好ましく用いられる。ドライフィルムフォト
レジストはポリエステルの支持フィルム上に光重合性樹
脂組成物を塗布し、乾燥後、ポリオレフィンの保護フィ
ルムを積層して作られる。
As a protective film when used as a liquid resist, an inert polyolefin film such as polyethylene or polypropylene is preferably used. Dry film photoresists are made by coating a photopolymerizable resin composition on a polyester support film, and after drying, laminating a polyolefin protective film.

矢にアートワークと呼ばれるネガまた(・エボジマスク
パター/フィルムを通して活性光線を照射する。活性光
線としてはカーボンアーク灯。
Actinic rays are irradiated through a negative film (evojimask putter/film) called artwork on the arrow.The active rays are carbon arc lamps.

超高圧水銀灯、高圧水銀灯、キセノンランプ等の紫外線
を有効に放射するものが用いられる。
A device that effectively emits ultraviolet rays, such as an ultra-high-pressure mercury lamp, a high-pressure mercury lamp, or a xenon lamp, is used.

露光量は、−概に決められないが300mJ/cr/L
2以下、好ましくは50〜200 rrlJ/crtt
2である。
The exposure amount is -300mJ/cr/L, although it cannot be determined generally.
2 or less, preferably 50 to 200 rrlJ/crtt
It is 2.

活性光線露光後、適当な現像液を用いて未露光部分を洗
浄除去することにより硬化部分のレジストパターンを得
る。
After exposure to actinic light, the unexposed portions are washed and removed using a suitable developer to obtain a resist pattern of the cured portions.

現像液は、安全で安定である必要がある。しかし特にN
要な点に現像の操作性、すなわちフォトレジストの硬化
部と未硬化部の溶解速度差が極めて大ぎく、未硬化部の
溶解速度が適度に速いような溶媒を現像液として選択す
ることである。一般溶剤現像型の:フォトレジストでは
Developer solutions need to be safe and stable. But especially N
The important point is the operability of development, that is, the difference in dissolution rate between the cured and uncured parts of the photoresist is extremely large, and it is important to select a solvent as the developer that allows the dissolution rate of the uncured part to be appropriately fast. . General solvent-developed type: photoresist.

1.1.1 ) !Jジクロロタン、アルカリ現像型の
フォトレジストで(・工炭酸ナトリウムの希薄溶液等が
好ましく用いられる。
1.1.1)! J dichlorothane, an alkali-developable photoresist, and a dilute solution of sodium carbonate are preferably used.

現像の方法は、デツプ方式、パドル方式、スプレ一方式
等があるが、高圧スプレ一方式が解像度向上には最も適
している。
There are various developing methods such as a dip method, a paddle method, and a spray method, but the high-pressure spray method is most suitable for improving resolution.

現像後に行なわれる電気鋼メッキは、硫酸銅メッキ、ビ
ロリン酸鋼メッキが用いられ、ハンダメッキにはハイス
ローハンダメッキが多く用いられている。
Electrical steel plating performed after development uses copper sulfate plating or birophosphate steel plating, and high-slow solder plating is often used for solder plating.

本発明の光重合性樹脂組成物は、金属積層板龜 の配線加工、特にプリント配線板に使用されろ銅張り積
層板の配線711]工に対して、極めてすぐれたレジス
ト性能を有するため、高精度、高密度化が要求される配
線加工に適したものである。
The photopolymerizable resin composition of the present invention has extremely excellent resist performance for wiring processing of metal laminate boards, particularly for wiring processing of copper-clad laminates used in printed wiring boards, and therefore has a high level of resistivity. It is suitable for wiring processing that requires precision and high density.

以下、実施例により本発明をさらに詳細に説明するが、
実施例中の部は重量部を表わす。
Hereinafter, the present invention will be explained in more detail with reference to Examples.
Parts in the examples represent parts by weight.

実施例1〜6.比較例1 ガラス・エポキシ銅張積層版上に、下記の組成からなる
感光性樹脂組成物 ポリメタクリル酸メチル       100  部(
分子量(MN) = 60,000 )ペンタエリスリ
トールトリアクリレート50〃ベンゾフエノ/    
         1  〃シヒラーズケトy    
         O,2〃ハイドロキノン     
         0,05 〃マカライトグリーン 
          0,1〃メチルエチルケトン  
       150〃3−エチルローダニン    
    変更量をドクターナイフで塗布し、乾燥してメ
チルエチルケトンを放散させてフォトレジストの厚みを
50μmとした。この上に25μm厚のポリエチレン製
フィルムを保護膜として積層し、さらにこの上にアート
ワークを密着して超高圧水銀灯で露光した。アートワー
クは50μm、60μm、80μm、lQQμmのライ
ンアンドスペイスパターンを用いた。露光に使用した超
高圧水銀灯はウシオ電機(株)製、USH−102Dで
80 mJ/crrt2照射した。この際の露光強度は
Examples 1-6. Comparative Example 1 100 parts of a photosensitive resin composition polymethyl methacrylate (
Molecular weight (MN) = 60,000) Pentaerythritol triacrylate 50〃Benzopheno/
1 Shichler's Ketoy
O,2〃Hydroquinone
0,05 Macalite green
0,1〃Methyl ethyl ketone
150〃3-ethylrhodanine
Varying amounts were applied with a doctor knife and dried to diffuse the methyl ethyl ketone to a photoresist thickness of 50 μm. A 25 μm thick polyethylene film was laminated on top of this as a protective film, and the artwork was adhered onto this and exposed to light using an ultra-high pressure mercury lamp. The artwork used line and space patterns of 50 μm, 60 μm, 80 μm, and 1QQ μm. The ultra-high pressure mercury lamp used for exposure was USH-102D manufactured by Ushio Inc. and irradiated with 80 mJ/crrt2. What is the exposure intensity at this time?

ウシオ電機(株)製、紫外線強度計U I T−100
に受光器UVD−365P  を取付けて測定し2mw
/(、L2 一定とした。
Manufactured by Ushio Inc., UV intensity meter UI T-100
Attach the receiver UVD-365P to the
/(, L2 was set constant.

露光後、20分間放置して、保護フィルムを剥離し、 
 1,1.1 )リクロロエタンを入れたデュポン社製
、デュポンゝC”プロセッサー 中で現像した。温度は
18〜20℃に保ち2通過速度は200 cyn1分で
、スプレー圧力に1.4 kP/Cm2に調節した。
After exposure, leave it for 20 minutes and peel off the protective film.
1,1.1) Developed in a DuPont C" processor made by DuPont containing dichloroethane. The temperature was kept at 18-20°C. 2 Passing speed was 200 cyns per minute, and the spray pressure was 1.4 kP/min. Adjusted to Cm2.

次いで現像処理したものを中性洗剤水溶液中に室温で約
1分間浸漬し、脱脂後、オーバフロータンクでスプレー
水洗を約1分間行ない2次いで約2ON量チ濃度の過硫
酸アンモニウム水溶液中に1分間浸漬した。引続き再び
スプレー水洗洗浄を約1分間行なった後、約15係の硫
酸水溶液浴に1分間浸漬し、再びスプレー水洗を1分間
行なった。
The developed product was then immersed in a neutral detergent aqueous solution at room temperature for about 1 minute, and after degreasing, it was spray washed with water in an overflow tank for about 1 minute, and then immersed in an ammonium persulfate aqueous solution with a concentration of about 2ON for 1 minute. . Subsequently, spray washing was performed again for about 1 minute, and then immersed in a sulfuric acid aqueous solution bath of about 15% for 1 minute, and spray washing was performed again for 1 minute.

次いでビロリン酸銅メッキ槽(PH=8.2〜8.4.
温度50±2℃)に入れて45分間2,7A/ dm2
  でメッキを行なった。
Next, a birophosphate copper plating tank (PH=8.2-8.4.
2.7A/dm2 for 45 minutes at a temperature of 50±2℃)
The plating was done with

メッキ終了後、直ちに水洗し、15%硼フン酸水溶液に
浸漬し2次いで下記の組成 錫       15  jP(ハンダメッキ液11当
り量)鉛        10  F  ()遊離面フ
ッ酸 400  y  () 遊離硼酸    21.6y  () ペプトン    5.2J’() を有するハイスローハンダメッキ浴中で、室温にて1.
5 A/ dm2でハンダメッキを行なった。メッキ終
了後、水洗を行ない乾燥した。メッキ製品のもぐり現像
を観察するため、試料を切り出し、レジスト断面を光学
顕微鏡で観察した。結果を表1に示す。
Immediately after plating, it was washed with water, immersed in a 15% boric acid aqueous solution, and then the composition was as follows: Tin 15 jP (amount per 11 solder plating solution) Lead 10 F () Free surface hydrofluoric acid 400 y () Free boric acid 21. 6y () Peptone 5.2J'() at room temperature in a high-slow solder plating bath with 1.
Solder plating was performed at 5 A/dm2. After plating, it was washed with water and dried. In order to observe the development of the plating product, a sample was cut out and the cross section of the resist was observed using an optical microscope. The results are shown in Table 1.

実施例7〜8 添770 剤3−エチルローダニンをローダニンまたは
3−メチルローダニンに変えてほかは実施例1と同様な
方法を<9返してメッキを行ないその性能を評価した。
Examples 7-8 Additive 770 Plating was performed in the same manner as in Example 1 except that 3-ethylrhodanine was replaced with rhodanine or 3-methylrhodanine, repeating <9 times, and its performance was evaluated.

得られた結果を表1に示す。The results obtained are shown in Table 1.

比較例2〜8 添加剤3−エチルローダニンをベンゾトリアゾールに変
え、かつその使用量および露光量を表1に示すようにし
た以外は実施例1と同様な方法をくり返してメッキを行
ないその性能を評価した。得られた結果を表1に示す。
Comparative Examples 2 to 8 Plating was performed by repeating the same method as in Example 1, except that the additive 3-ethylrhodanine was changed to benzotriazole, and the usage amount and exposure amount were as shown in Table 1. was evaluated. The results obtained are shown in Table 1.

手続補正書(自発) 昭和sg年ぢ月2 日 特許庁長官  若杉和夫 殿 ■、小事件表示 特願昭!;g−AHk号 2、兜り」の名称 光倶合性榴脂組成物 3、補正をする者 事件との関係   特許出願人 東京都中央区京橋二丁百3番19号 (603)三菱レイヨン株式会社 取締役社長 金 澤 脩 三 4、代理人 東京都中央区京橋二丁目3番19号 三菱レイヨン株式会社 内 (6949]ブf選士吉沢敏夫 5、補正命令の日付 自発補正 龜 (1)  明細書箱を頁第−行〜S行記載の「(メタ)
アクリル酸メチル(・・・・・・す、(メタ)アクリル
酸エチル、」ヲ[アクリル?flメチル、(メタ〕アク
リル殿エチル(アクリル酸エチルまたはメタクリル岐エ
チルの4区、以下同様)、]ニ袖正する。
Procedural amendment (voluntary) Mr. Kazuo Wakasugi, Commissioner of the Japan Patent Office, dated February 2, 1948, special request for small case indication! ;g-AHk No. 2, Kabutori's name Photo-combining shiso composition 3, relationship with the amended case Patent applicant: Mitsubishi Rayon, 2-103-19 Kyobashi, Chuo-ku, Tokyo (603) President Osamu Kanazawa, 34, Agent, Mitsubishi Rayon Co., Ltd., 2-3-19 Kyobashi, Chuo-ku, Tokyo (6949), Toshio Yoshizawa, 5, Toshio Yoshizawa, Selector, Date of Amendment Order (1) Details ``(Meta)'' written in the bookcase from the -th line to the S line of the page.
Methyl acrylate (...su, (meth)ethyl acrylate, ヲ[acrylic? fl methyl, (meth)ethyl acrylate (4 groups of ethyl acrylate or methacrylic branched ethyl, hereinafter the same),] Correct your sleeves.

(、り  明細書箱S頁第ン行目記載の1シヒラーズケ
トンJを「ミヒラーズケトン」に補正する。
(1) Schichler's Ketone J on page S, line N of the Specification Box is corrected to "Michael's Ketone."

(3)  明細書箱7.2頁第//行目記載の「シヒラ
ーズケトン」を1ミヒラーズケトンJ K f+k T
hする。
(3) 1 Michler's Ketone J K f+k T
h.

(ダ) 明1iJii臀第1コ頁第73行目記載の「マ
ラカトグリーン」を[マラカイトグリーン−IVC補正
する。
(Da) "Malachite Green" described on page 1, line 73 of Meijii Buttocks is [Malachite Green-IVC corrected.

(S)  明治11祉第1A頁表1 を別紙のように全
文訂正する。
(S) Correct the entire text of Table 1 on page 1A of the Meiji 11 Public Policy as shown in the attached sheet.

S 節付沓娘の目怨S: Grudge of a knotty shoe girl

Claims (1)

【特許請求の範囲】 1、(a)  バインダー用熱可塑性重合体(b)  
分子中に少なくとも1個のエチレン性不飽和基を有する
架橋性単量体 (c)  光重合開始剤 および (dl  次の一般式 ] (式中、RはHまたは1〜4個の炭素原子を有するアル
キル基である)で示される化金物 よりなる光重合性樹脂組成物。
[Claims] 1. (a) Thermoplastic polymer for binder (b)
A crosslinkable monomer (c) having at least one ethylenically unsaturated group in the molecule, a photopolymerization initiator, and (dl) the following general formula] (wherein R is H or 1 to 4 carbon atoms A photopolymerizable resin composition comprising a metal compound having an alkyl group.
JP68583A 1983-01-06 1983-01-06 Photopolymerizable resin composition Granted JPS59125725A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP68583A JPS59125725A (en) 1983-01-06 1983-01-06 Photopolymerizable resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP68583A JPS59125725A (en) 1983-01-06 1983-01-06 Photopolymerizable resin composition

Publications (2)

Publication Number Publication Date
JPS59125725A true JPS59125725A (en) 1984-07-20
JPH047498B2 JPH047498B2 (en) 1992-02-12

Family

ID=11480610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP68583A Granted JPS59125725A (en) 1983-01-06 1983-01-06 Photopolymerizable resin composition

Country Status (1)

Country Link
JP (1) JPS59125725A (en)

Also Published As

Publication number Publication date
JPH047498B2 (en) 1992-02-12

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