JPS5911445U - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5911445U
JPS5911445U JP10692482U JP10692482U JPS5911445U JP S5911445 U JPS5911445 U JP S5911445U JP 10692482 U JP10692482 U JP 10692482U JP 10692482 U JP10692482 U JP 10692482U JP S5911445 U JPS5911445 U JP S5911445U
Authority
JP
Japan
Prior art keywords
wafer
valve plate
semiconductor manufacturing
sealing
airtight container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10692482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233320Y2 (enExample
Inventor
古門　竜彦
茂 武田
鈴木　増雄
尾野　正治
黒河　治重
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP10692482U priority Critical patent/JPS5911445U/ja
Publication of JPS5911445U publication Critical patent/JPS5911445U/ja
Application granted granted Critical
Publication of JPS6233320Y2 publication Critical patent/JPS6233320Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP10692482U 1982-07-14 1982-07-14 半導体製造装置 Granted JPS5911445U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10692482U JPS5911445U (ja) 1982-07-14 1982-07-14 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10692482U JPS5911445U (ja) 1982-07-14 1982-07-14 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5911445U true JPS5911445U (ja) 1984-01-24
JPS6233320Y2 JPS6233320Y2 (enExample) 1987-08-26

Family

ID=30250025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10692482U Granted JPS5911445U (ja) 1982-07-14 1982-07-14 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5911445U (enExample)

Also Published As

Publication number Publication date
JPS6233320Y2 (enExample) 1987-08-26

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