JPS59114438A - Two-luminous flux type infrared gas analyser - Google Patents

Two-luminous flux type infrared gas analyser

Info

Publication number
JPS59114438A
JPS59114438A JP22413982A JP22413982A JPS59114438A JP S59114438 A JPS59114438 A JP S59114438A JP 22413982 A JP22413982 A JP 22413982A JP 22413982 A JP22413982 A JP 22413982A JP S59114438 A JPS59114438 A JP S59114438A
Authority
JP
Japan
Prior art keywords
infrared
chamber
light source
infrared light
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22413982A
Other languages
Japanese (ja)
Inventor
Mitsuo Kotaka
小鷹 光雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP22413982A priority Critical patent/JPS59114438A/en
Publication of JPS59114438A publication Critical patent/JPS59114438A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To reduce a zero drift and to stabilize characteristics, by a method wherein an infrared light source part, a measuring cell and two chambers each sealed with a gaseous component to be measured are provided and a detecting part for converting the pressure difference of these chambers to an electric signal is mounted. CONSTITUTION:An infrared light source part 11 has infrared ray pervious windows 12, 13 and generates infrared luminous fluxes which are made intermittent by a pulse circuit 14. In an infrared ray detecting part 15, a first chamber 16 sealed with a gaseous component to be measured receives the infrared luminous flux of a measuring cell 1 while a second chamber 17 receives infrared luminous flux. Each chamber is communicated with an electrode part 18 through communication paths 19, 20. The first chamber 16 generates pressure variation corresponding to the concn. of the gaseous component to be measured contained in gas to be measured flowing the measuring cell 1 while the second chamber 17 generates pressure corresponding to the light amount adjusted by a trimmer 10. By this mechanism, pressure difference in each chamber is detected in the electrode part 18.

Description

【発明の詳細な説明】 本発明は、零ドリフトを低減し、安定した特性を得ると
共に信頼性を高めた三光束式赤外線ガス分析計に関する
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a three-beam infrared gas analyzer that reduces zero drift, provides stable characteristics, and improves reliability.

三光束式赤外線ガス分析計としで、第1図に示すものが
従来から知られている。この赤外線ガス分析計は、被測
定ガスが連続しで流れる測定セル1と、不活性ガス、例
えばN?ガスが封入された比較セル2と、測定セル用赤
外線光源3と、比較セル用赤外線光源4と、各光源から
の光を一定の周期で断続するセクター5と、測定ガス成
分が封入されたコンデンサマイクロフォン形赤外線検出
部6と、赤外線検出部6の検出信号を増幅する増幅部7
と、指示記録部8と、測定セル1側光束の光量を調節す
るトリマー9と、比較セル2側光束の光量を調節するト
リマー10とで構成されている。
A three-beam infrared gas analyzer shown in FIG. 1 has been known for some time. This infrared gas analyzer has a measurement cell 1 through which a gas to be measured continuously flows, and an inert gas such as N? A comparison cell 2 filled with gas, an infrared light source 3 for the measurement cell, an infrared light source 4 for the comparison cell, a sector 5 for intermittent light from each light source at a constant cycle, and a capacitor filled with measurement gas components. A microphone-type infrared detection section 6 and an amplification section 7 that amplifies the detection signal of the infrared detection section 6
, an instruction recording section 8, a trimmer 9 that adjusts the amount of light on the measurement cell 1 side, and a trimmer 10 that adjusts the amount of light on the comparison cell 2 side.

このような三光束式赤外線ガス分析削は、光源の電源変
動による影響(通常、光源3と4は同一電源によって点
灯されている)や分析計の設置場所の雰囲気ガスによる
影響(比較セル2がないと空気中の水分による影響がで
る)を低減し、安定な特性が得られるという特徴を有す
る。
This kind of three-beam infrared gas analysis machining is affected by fluctuations in the power source of the light source (normally, light sources 3 and 4 are powered by the same power source) and by the atmospheric gas at the location where the analyzer is installed (comparison cell 2 is It has the characteristic of reducing the effects of moisture in the air (which would otherwise be affected by moisture in the air) and providing stable characteristics.

しかし、従来の三光束式赤外線ガス分析計にあっては、
比較セル2に不活性ガスを完全に封入するために高度な
技術が要求されるうえに、経年的には、封入ガスの汚れ
(ガス発生等)にょる零ドリフトが発生ずるという問題
・があった。又、構成要素が多いため、複雑になり、信
頼性の点においても問題があった。
However, with conventional three-beam infrared gas analyzers,
In addition to requiring advanced technology to completely fill the comparison cell 2 with inert gas, there is also the problem that zero drift occurs over time due to contamination of the filled gas (gas generation, etc.). Ta. Furthermore, since there are many constituent elements, it becomes complicated, and there are also problems in terms of reliability.

本発明は、このような点に鑑みてなされたもので、その
目的は、零ドリフトを低減し、より安定し1=特性を得
ると共に信頼性を高めるようにしIc二光束式赤外線ガ
ス分析計を提供するにある。
The present invention was made in view of these points, and its purpose is to reduce zero drift, obtain more stable 1=characteristics, and increase reliability, thereby improving the reliability of the Ic dual beam infrared gas analyzer. It is on offer.

以1・、図面を参照し本発明の詳細な説明する。1. The present invention will be described in detail with reference to the drawings.

第2図は、本発明の一実施例の三光束式赤外線ガス分析
計の構成図である。図において、第1図ど対応する部分
には同一符号を付し、その説明は省略する。図中、11
は赤外線透過窓12及び13を有した赤外線光源部で、
独立した二方向に(窓12と13の方向)断続する赤外
線光束を発生するものである。この断続は、パルス回路
14によってなされる。15はコンデンサマイクロフォ
ン形赤外線検出部である。赤外線検出部15において、
測定ガス成分が封入された第1の室(測定室と言う)1
6は、測定セル1の透過赤外線光束を受光し得るように
設置され、又、測定ガス成分が封入された第2の室(比
較室と言う)17は、赤外線光源部11の窓12から発
生される赤外線光束を直接受光するように設置されてお
り、各室は電極部18と連通路19及び2oとで連通り
”る構成となっている。しかも、赤外線検出部15の測
定室16、測定セル1、赤外線光源部13及び赤外線検
出部15の比較室17が直列的に配置され一体化されて
いる。
FIG. 2 is a configuration diagram of a three-beam infrared gas analyzer according to an embodiment of the present invention. In the figures, parts corresponding to those in FIG. 1 are designated by the same reference numerals, and their explanations will be omitted. In the figure, 11
is an infrared light source section having infrared transmission windows 12 and 13,
It generates intermittent infrared light beams in two independent directions (in the directions of windows 12 and 13). This interruption is performed by the pulse circuit 14. 15 is a condenser microphone type infrared detection section. In the infrared detection section 15,
First chamber (referred to as measurement chamber) 1 filled with measurement gas components
6 is installed to receive the transmitted infrared light flux of the measurement cell 1, and a second chamber (referred to as a comparison chamber) 17 filled with measurement gas components is provided with light emitted from the window 12 of the infrared light source section 11. Each chamber is configured to communicate with the electrode section 18 through communication paths 19 and 2o.Moreover, the measurement chamber 16 of the infrared detection section 15, The measurement cell 1, the infrared light source section 13, and the comparison chamber 17 of the infrared detection section 15 are arranged in series and integrated.

このような構成の本発明分析バ1にお番プる三光束式赤
外線ガス分析計の基本的動作は、従来のものど同一であ
る。即ち、赤外線検出部15の測定室16で受光される
測定ヒル1の透過光も、比較室17で受光される光も、
赤外線光源部11がら発生される所定の周期の断続赤外
線光束であり、測定室16は測定セル1を流れる被測定
ガスに含まれる測定ガス成分の濃度に対応しIC圧力変
動を生じ、又、比較室17はトリマー10によって調整
された光量に対応した圧力を生じる。そして、電極部1
8において、この各室における圧力差が検出され、測定
ガス成分の信号として赤外線検出部15から出力される
The basic operation of the three-beam infrared gas analyzer used in the analysis bar 1 of the present invention having such a configuration is the same as that of the conventional one. That is, both the transmitted light of the measurement hill 1 received by the measurement chamber 16 of the infrared detection section 15 and the light received by the comparison chamber 17,
The infrared light source unit 11 generates intermittent infrared light flux at a predetermined period, and the measurement chamber 16 causes IC pressure fluctuations in response to the concentration of the measurement gas component contained in the gas to be measured flowing through the measurement cell 1. The chamber 17 generates a pressure corresponding to the amount of light adjusted by the trimmer 10. And electrode part 1
At step 8, the pressure difference in each chamber is detected and outputted from the infrared detection section 15 as a signal of the gas component to be measured.

従って、上記構成によれば、三光束式赤外線ガス分析計
としての特徴が得られる上に比較光(比較室17に導か
れる光)の光路中に、経年的に特性が変化するもの(例
えば、従来例に見られる比較セル2)を有しないこと、
及び−光源で構成されるため、零ドリフトのない、より
安定した特性が得られる。しかも、セルとしては、測定
セルのみであり、赤外線検出部15の測定室16、測定
セル1、赤外線光源部11及び赤外線検出部15の比較
室17・が直列的に配置され一体化されているため、構
成が簡単になり、信頼性を高めることができる。
Therefore, according to the above configuration, the characteristics of a three-beam infrared gas analyzer can be obtained, and in addition, in the optical path of the comparison light (light guided to the comparison chamber 17), there is a light whose characteristics change over time (for example, Not having the comparison cell 2) found in the conventional example,
and - Since the light source is composed of a light source, more stable characteristics without zero drift can be obtained. Moreover, the cell is only a measurement cell, and the measurement chamber 16 of the infrared detection section 15, the measurement cell 1, the infrared light source section 11, and the comparison chamber 17 of the infrared detection section 15 are arranged in series and integrated. Therefore, the configuration can be simplified and reliability can be improved.

尚、本発明は、赤外線検出部15や赤外線光源部11を
上記実施例に限定するものでなく、例えば、熱線式赤外
線検出部やレクタ板、半導体セクタ(液晶セクタ)等に
よる光断続手段を備えた赤外線光源部であってもよい。
It should be noted that the present invention does not limit the infrared detecting section 15 and the infrared light source section 11 to the above-mentioned embodiments. It may also be an infrared light source section.

以上説明したように、本発明によれば、零ドリフトを低
減し、安定し1c特性の三光束式赤外線ガス分析計を実
現することができる。又、全体構成が簡単で、信頼性の
高い三光束式赤外線ガス分析計を実現することができる
As described above, according to the present invention, it is possible to reduce zero drift and realize a stable three-beam infrared gas analyzer with 1c characteristics. Furthermore, it is possible to realize a three-beam infrared gas analyzer with a simple overall configuration and high reliability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の三光束式赤外線ガス分析計の構成図、第
2図は本発明の一実施例による三光束式赤外線ガス分析
y(の構成図である。 1・・・測定セル    2・・・比較セル10・・・
トリマー   11・・・赤外線光源部12.13・・
・透過窓 14・・・パルス回路15・・・赤外線検出
部 16・・・測定室(第1の室)17・・・比較室(
第2の空) 18・・・電極部    19.20・・・連通路第1
図 第2図
FIG. 1 is a block diagram of a conventional three-beam infrared gas analyzer, and FIG. 2 is a block diagram of a three-beam infrared gas analyzer according to an embodiment of the present invention. 1. Measurement cell 2.・Comparison cell 10...
Trimmer 11... Infrared light source section 12.13...
・Transmission window 14...Pulse circuit 15...Infrared detection section 16...Measurement chamber (first chamber) 17...Comparison chamber (
18... Electrode part 19.20... Communication path 1st
Figure 2

Claims (1)

【特許請求の範囲】[Claims] 独立した二方向に向けて所定の周期の断続赤外線光束を
発生する赤外線光源部と、被測定ガスが室内を連続して
流れ該室内に前記赤外線光源部の一方の赤外線光束が導
かれて透過するように設置される測定セルと、測定ガス
成分が封入された第1及び第2の室を有し該2個の室に
おける圧力差を電気信号に変換する検出部であって、前
記測定セルの透過光を前記第1の室にで受け、前記赤外
線光源部の他方の赤外線光束を前記第2の室で受け、測
定ガス成分に対応する信号を検出する赤外線検出部とを
備え、前記赤外線検出部の第1及び第2の室、前記測定
セル並びに前記赤外線光源部を直列的に配置して一体化
構成したことを特徴とする三光束式赤外線ガス分析計。
An infrared light source section generates intermittent infrared light beams at a predetermined period in two independent directions, and a gas to be measured continuously flows in a room, into which one infrared light beam from the infrared light source section is guided and transmitted. The detection unit has a measurement cell installed as shown in FIG. an infrared detection section that receives transmitted light in the first chamber, receives the other infrared light flux of the infrared light source section in the second chamber, and detects a signal corresponding to a measurement gas component, the infrared detection section A three-beam infrared gas analyzer, characterized in that the first and second chambers of the section, the measurement cell, and the infrared light source section are arranged in series and integrated.
JP22413982A 1982-12-21 1982-12-21 Two-luminous flux type infrared gas analyser Pending JPS59114438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22413982A JPS59114438A (en) 1982-12-21 1982-12-21 Two-luminous flux type infrared gas analyser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22413982A JPS59114438A (en) 1982-12-21 1982-12-21 Two-luminous flux type infrared gas analyser

Publications (1)

Publication Number Publication Date
JPS59114438A true JPS59114438A (en) 1984-07-02

Family

ID=16809155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22413982A Pending JPS59114438A (en) 1982-12-21 1982-12-21 Two-luminous flux type infrared gas analyser

Country Status (1)

Country Link
JP (1) JPS59114438A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480179A (en) * 1977-12-09 1979-06-26 Yanagimoto Seisakusho Co Ltd Infrared gas analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480179A (en) * 1977-12-09 1979-06-26 Yanagimoto Seisakusho Co Ltd Infrared gas analyzer

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