JPS59112933U - aperture - Google Patents
apertureInfo
- Publication number
- JPS59112933U JPS59112933U JP19787583U JP19787583U JPS59112933U JP S59112933 U JPS59112933 U JP S59112933U JP 19787583 U JP19787583 U JP 19787583U JP 19787583 U JP19787583 U JP 19787583U JP S59112933 U JPS59112933 U JP S59112933U
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- knife
- window
- rectangular
- pentagon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案の一実施例に用いる第1の平板の上面図
a及び断面図b、第2図は同実施例に用いる第2の平板
の上面図a及び断面図b1第3図は本考案の一実施の上
面図a及び断面図b1第4図はアパーチャ取り付は構造
断面図である。
図に於て1はシリコン基板、2はナイフ・エツジ状の辺
、3は正方形窓、4は第1の平板、5は矩形窓、6は第
2の平板、7は二酸化シリコン、8は五角形窓、9はア
パーチャ取り付は枠、10はアパーチャ固定爪、11は
アパーチャ固定爪締め付けねじ、を表わす。FIG. 1 is a top view a and a cross-sectional view b of a first flat plate used in an embodiment of the present invention, FIG. 2 is a top view a and a cross-sectional view b of a second flat plate used in the same embodiment, and FIG. A top view (a) and a cross-sectional view (b1) of an embodiment of the present invention are shown in FIG. In the figure, 1 is a silicon substrate, 2 is a knife-edge shaped side, 3 is a square window, 4 is a first flat plate, 5 is a rectangular window, 6 is a second flat plate, 7 is silicon dioxide, and 8 is a pentagon. 9 represents a frame for attaching the aperture, 10 represents an aperture fixing claw, and 11 represents an aperture fixing claw tightening screw.
Claims (1)
られた二枚の平板が、該矩形窓の組合せにより五角形以
上の多角形窓が形成されるように該ナイフ・エツジを有
する面同士が接触した状態で重ね合わせられて成ること
を特徴とするアパーチャ。Two flat plates each provided with a rectangular window having a knife-edge shaped periphery, the surfaces having the knife edges touching each other such that a polygonal window of pentagon or more is formed by the combination of the rectangular windows. An aperture characterized by being formed by being superimposed on each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19787583U JPS59112933U (en) | 1983-12-22 | 1983-12-22 | aperture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19787583U JPS59112933U (en) | 1983-12-22 | 1983-12-22 | aperture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59112933U true JPS59112933U (en) | 1984-07-30 |
Family
ID=30423401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19787583U Pending JPS59112933U (en) | 1983-12-22 | 1983-12-22 | aperture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59112933U (en) |
-
1983
- 1983-12-22 JP JP19787583U patent/JPS59112933U/en active Pending
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