JPS59112254A - Heating and cooling device for sample - Google Patents

Heating and cooling device for sample

Info

Publication number
JPS59112254A
JPS59112254A JP22335482A JP22335482A JPS59112254A JP S59112254 A JPS59112254 A JP S59112254A JP 22335482 A JP22335482 A JP 22335482A JP 22335482 A JP22335482 A JP 22335482A JP S59112254 A JPS59112254 A JP S59112254A
Authority
JP
Japan
Prior art keywords
sample
jacket
cooling medium
heater
sample storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22335482A
Other languages
Japanese (ja)
Inventor
Isakata Mori
森 勇鋼
Tetsuo Iketani
池谷 哲男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd filed Critical Komatsu Electronic Metals Co Ltd
Priority to JP22335482A priority Critical patent/JPS59112254A/en
Publication of JPS59112254A publication Critical patent/JPS59112254A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00Heating or cooling apparatus; Heat insulating devices

Landscapes

  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

PURPOSE:To heat and cool easily a sample by arranging a flow passage for a cooling medium and a heater at a sample storage part, and supplying the cooling medium and powering on the heater alternately. CONSTITUTION:The sample storage part 1 is equipped with a heat insulating case 3 having a lid body 2 on it and a jacket 4 provided in the heat insulating case 3. The jacket 4 is cylindrical and has a sample storage hole 5 at its center part and numbers of grooves 6 at the outer circumference. The cooling medium is supplied from a pipe 9 to those grooves 6 and discharged from a pipe 10. Plural heaters 11 and sensors 12 which detect the temperature of the jacket 4 are embedded along the sample storage hole 5 between the hole 5 and grooves 6. The supply of the cooling medium and the power supply to the heaters 11 are carried out alternately by a timer and an operator heats and cools extremely easily the sample.

Description

【発明の詳細な説明】 本発明は、半導体材料、ウランペット等の試料の素性研
究に使用する加熱冷却装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a heating and cooling device used for researching the origins of samples such as semiconductor materials and uranium petals.

半導体材料、ウランペット等の材料の温度的な素性を解
析するため、従来より上記試料を周期的に加熱、冷却さ
せることが実施されている。
In order to analyze the thermal properties of materials such as semiconductor materials and uranium petals, it has been conventionally practiced to periodically heat and cool the above-mentioned samples.

しかるに従来は、離間b1〜設置された加熱源と冷却源
間において上記試料を人為的に往復移動させ1もって上
記試料の加熱冷却を交互に行なうよ5に亡〆ため、きわ
めて手間を要しかつ加熱冷却の周期が変動して上記素性
解析を精度良く行なえない等の不都合を生じていた。
However, in the past, the sample had to be artificially moved back and forth between the heating source and the cooling source installed at a distance b1 to alternately heat and cool the sample, which was extremely time-consuming and time consuming. The heating/cooling period fluctuates, resulting in inconveniences such as the inability to perform the above-mentioned feature analysis with high accuracy.

本発明はかかる状況に鑑み、試料を移動させないで該試
料の加熱冷却を反復して行なうことができる試料の加熱
冷却装置を提供しようとするものである。
In view of this situation, the present invention seeks to provide a sample heating and cooling device that can repeatedly heat and cool a sample without moving the sample.

そのため本発明においては、冷却媒体の流通路とヒータ
とを配設した試料の収納部を設け、さらに上記冷却媒体
の供給と上記ヒータへの電源の供給とを交互に行なわせ
る手段を設けている。
Therefore, in the present invention, a sample storage section is provided in which a cooling medium flow path and a heater are arranged, and a means for alternately supplying the cooling medium and supplying power to the heater is provided. .

以下、図示する実施例を参照しながら本発明の詳細な説
明する。
Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

第1図は本発明に係る加熱冷却装置の本体部分の一実施
例を示し、第2図はこの実施例の装置の全体構成音回路
図で示したものである。
FIG. 1 shows an embodiment of the main body portion of a heating and cooling device according to the present invention, and FIG. 2 is a sound circuit diagram showing the overall configuration of the device of this embodiment.

第1図において、符号lは図示していない試料の収納部
乞示し、この収納部1は蓋体2を上方に嵌着した断熱ケ
ース3と、この断熱ケース3内に嵌挿したジャケット4
とを備えている。
In FIG. 1, the reference numeral 1 indicates a sample storage section (not shown), and this storage section 1 consists of a heat insulating case 3 with a lid 2 fitted above it, and a jacket 4 fitted into the heat insulating case 3.
It is equipped with

上記ジャケット4は第3図に示すように円筒状をなし、
その中央部に試料の収納孔5を、またその外周面に周方
向に沿う多数条の溝6を形成し、さらに外周部の左右対
称位置に上記溝6を縦断する溝7および8を各々形成し
である。
The jacket 4 has a cylindrical shape as shown in FIG.
A sample storage hole 5 is formed in the center, and multiple grooves 6 are formed along the circumferential direction on the outer circumferential surface, and grooves 7 and 8 are formed longitudinally through the grooves 6 at symmetrical positions on the outer circumference. It is.

上記溝7は、上部が閉止されその下端部には冷却媒体を
導入するためのパイプ9(第1図参照)の先端を臨ませ
である。また上記溝8は、その上下部とも開口しており
、その内部には上記冷却媒体を排出するためのパイプ1
0(第1図参照)が配設されている。なお上記パイプ1
oは、上記溝8の上端よりも若干下方に開口している。
The groove 7 is closed at the top and has a lower end that exposes the tip of a pipe 9 (see FIG. 1) for introducing the cooling medium. Further, the groove 8 is open at both its upper and lower parts, and a pipe 1 for discharging the cooling medium is provided inside the groove 8.
0 (see Figure 1). Note that the above pipe 1
o opens slightly below the upper end of the groove 8.

さらに上記ジャケットφには、第1図に示すよ5に1上
記試料収納孔5と溝6間に位置する部分に上記孔5に沿
う態様で複数本のヒータ11を埋設し、また同部分にジ
ャケット1の温度乞検出するセンサ12を埋設しである
Further, in the jacket φ, as shown in FIG. A sensor 12 for detecting the temperature of the jacket 1 is embedded.

第2図に示すよう忙、上記パイプ9は電磁切換弁13.
コック14sよびポンプ157a’介して冷却媒体16
(たとえばシリコンオイル)を貯留させたタンク17に
連結され、一方、上記パイプ10は混合器18’&介し
て上記タンク17に連結されている。そして上記ポンプ
15と混合器18間は、コック19を介して互いに連結
されている。
As shown in FIG. 2, the pipe 9 is connected to the electromagnetic switching valve 13.
Coolant 16 via cock 14s and pump 157a'
The pipe 10 is connected to the tank 17 in which oil (for example, silicone oil) is stored, and the pipe 10 is connected to the tank 17 via a mixer 18'. The pump 15 and mixer 18 are connected to each other via a cock 19.

同図に示すタイマ20は、上記ヒータ11および電磁切
換弁13”a一時間制御するものであり、第4図に示し
た時間t1だけヒータ作動信号S1を出力し、時間t、
たけ電磁切換弁駆動信号StV出力する。ヒータ制御回
路21は、上記ジャケット4の温度が予設定値TI、Q
 (たとえば200 C)に到達したことをセンサ12
の出力信号から判断し、上記温度’rh\に到達したさ
いには上記信号S1が出力されている場合でもヒータJ
1への′電力供給を断つ作用をなす。
The timer 20 shown in FIG. 4 controls the heater 11 and the electromagnetic switching valve 13''a for one hour, and outputs the heater operation signal S1 for the time t1 shown in FIG.
Outputs the solenoid switching valve drive signal StV. The heater control circuit 21 controls the temperature of the jacket 4 to preset values TI, Q.
(for example, 200 C) is detected by the sensor 12.
Judging from the output signal of , when the above temperature 'rh\ is reached, even if the above signal S1 is output, the heater J
It acts to cut off the power supply to 1.

上記タンク17は冷凍機22内に配置されておす、タン
ク内の冷却媒体16はこの冷凍機によって常時冷却され
る。
The tank 17 is placed in a refrigerator 22, and the cooling medium 16 in the tank is constantly cooled by this refrigerator.

な8前記断熱ケース3およびその蓋体2は、各々その内
部に断熱材23を充填しである。
8. The heat insulating case 3 and its lid 2 are each filled with a heat insulating material 23 inside thereof.

この実施例の装置の作用は次のとおりである。The operation of the device of this embodiment is as follows.

まず装置を作動させる前に上記蓋体2を外して上記試料
収納孔5内にベレットに入れたウランベット等の試料(
図示せず)を入れ、再び蓋体2を装着する。なお上記蓋
体2はその下面にキャップ24を有し、該蓋体2を装着
すると同時にこのキャップ24が上記試料収納孔5の開
口部に装着される。
First, before operating the device, remove the lid 2 and place a sample such as uranium bed in a pellet in the sample storage hole 5 (
(not shown) and attach the lid 2 again. Note that the lid body 2 has a cap 24 on its lower surface, and at the same time as the lid body 2 is attached, this cap 24 is attached to the opening of the sample storage hole 5.

上記試料の収納後、上記タイマ20より信号S1が出力
されると、上記ヒータ11に電力が供給され、これに伴
って上記ジャケットの温度が第4図に例示した態様で上
昇する。上記ジャケット4の温度す一前記予設定温度T
h□Dまで上昇すると、ヒータ11への電力供給が断た
れるので上昇度上昇が停止し、そして上記信号S1が出
力された時点より時間1.&経過した時点で該信号S1
に代えで信号S2がタイマ20より出力される。
After the sample is stored, when the timer 20 outputs the signal S1, power is supplied to the heater 11, and the temperature of the jacket rises in the manner illustrated in FIG. 4. The temperature of the jacket 4 is the preset temperature T.
When it rises to h□D, the power supply to the heater 11 is cut off, so the rise rate stops increasing, and from the time when the signal S1 is output, the time 1. & When the signal S1
Instead, a signal S2 is output from the timer 20.

上記信号S、は前記電磁弁130ソレノイド乞付勢させ
て該弁を切換えるので、ポンプ15より吐出された冷却
媒体16が前記パイプ9を介して前記ジャケット4の溝
7下方より流入し、流入した媒体16は上記溝6を通っ
てジャケット局面を回流しなから゛上方に移動する。そ
して溝6を通過した冷却媒体16は、前記縦溝8を介し
て前記パイプ10の上端より流入しく第3図参照)該パ
イプlOおよび上記混合器18乞介してタンク17に戻
る。そして冷凍機22によって冷却されたのち再びポン
プ15によってジャケット4内に送り込まれる。
The signal S energizes the solenoid of the solenoid valve 130 to switch the valve, so that the cooling medium 16 discharged from the pump 15 flows from below the groove 7 of the jacket 4 through the pipe 9. The medium 16 moves upwardly through the groove 6 without circulating around the jacket surface. The cooling medium 16 that has passed through the groove 6 flows into the upper end of the pipe 10 through the vertical groove 8 (see FIG. 3) and returns to the tank 17 via the pipe IO and the mixer 18. After being cooled by the refrigerator 22, it is sent into the jacket 4 again by the pump 15.

この結果1、上記ヒータl 1 :’(よって加熱され
たジャケット4が急速に冷却され、これによって該ジャ
ケットの温度は第4図に例示す態様で温度TOまで降下
する。なお温度Tcは冷凍機22による冷却媒体16の
冷却温度によって決定される。
As a result 1, the heated jacket 4 is rapidly cooled, and the temperature of the jacket drops to the temperature TO in the manner illustrated in FIG. 4. Note that the temperature Tc is 22 is determined by the cooling temperature of the cooling medium 16.

かくして、上記タイマ2oより信号S、、S、が周期的
に出力される毎に第4図に示した態様でジャケットの温
度が上昇、下降され、これに伴って試料収納孔5内の試
料も周期的に加熱冷却される。
Thus, each time the timer 2o outputs the signals S, , S, periodically, the temperature of the jacket rises and falls in the manner shown in FIG. It is heated and cooled periodically.

なお加熱冷却の繰り返し回数はタイマの出力信号S1ま
たはs、4図示していないカウンタで計数することによ
りチェックすることができる。
The number of repetitions of heating and cooling can be checked by counting the output signal S1 or s, 4 of the timer with a counter (not shown).

ところで、上記ジャケット4を通ってパイプl。By the way, the pipe l passes through the jacket 4.

に流入する高温の冷却媒体16を直接タンク17に戻す
と該媒体を円滑に冷却することができなくなる虞れがあ
る。そこでこの実施例では、ポンプl5より吐出された
冷却媒体16の一部をコック197介して混合器18に
流入させ、ここで上記パイプlOを通過した媒体16と
混合するようにしである。かくすればタンク17内の媒
体16の上置が急に上昇することがないので、冷凍機2
2による媒体16の冷却がより円滑に行なわれる。
If the high temperature cooling medium 16 flowing into the tank 17 is directly returned to the tank 17, there is a possibility that the medium cannot be cooled smoothly. Therefore, in this embodiment, a part of the cooling medium 16 discharged from the pump 15 is made to flow into the mixer 18 via the cock 197, where it is mixed with the medium 16 that has passed through the pipe 1O. In this way, the top of the medium 16 in the tank 17 will not rise suddenly, so the refrigerator 2
The medium 16 is cooled more smoothly by the cooling medium 16.

第4図に示した時間t1は、上記ヒータ制御回路21に
付設した電力調整器(図示していない)によってヒータ
11に対する供給電力を調整すること【より適宜変化さ
せることができる。また同図に示す時間t2は、コック
14によって上記冷却媒体の流量を調整することによっ
て変化しうる。
The time t1 shown in FIG. 4 can be changed as appropriate by adjusting the power supplied to the heater 11 using a power regulator (not shown) attached to the heater control circuit 21. Further, the time t2 shown in the figure can be changed by adjusting the flow rate of the cooling medium using the cock 14.

さらに上記実施例では、温度Tcを冷却媒体16の冷却
能力に基づいて定めているが、ヒータ11の場合と同様
に温度センナの出力信号乞利用して該温度TC乞選択設
定するように構成することも当然可能である。もちろん
、冷凍機22の冷凍温度調節器によって上記温度Tc4
定めることも可能である。
Further, in the above embodiment, the temperature Tc is determined based on the cooling capacity of the cooling medium 16, but as in the case of the heater 11, the configuration is such that the output signal of the temperature sensor is used to select and set the temperature Tc. Of course, this is also possible. Of course, the temperature Tc4 is controlled by the freezing temperature controller of the refrigerator 22.
It is also possible to specify

さらにまた上記実施例では、タイマ2oによりて加熱時
間と冷却時間を管理するようにしているが、温度センサ
の出力信号を利用してジャケット1度がThx 4’ま
で上昇した時点で電磁切換弁13を付勢させ、該温度が
Tcまで下降した時点でヒータl1g作動させるよ5に
してもよい。
Furthermore, in the above embodiment, the heating time and the cooling time are managed by the timer 2o, but when the jacket temperature rises to Thx 4' using the output signal of the temperature sensor, the electromagnetic switching valve 13 5, the heater l1g may be activated when the temperature drops to Tc.

本発明によれば、試料を移動させることなく該試料の加
熱冷却装置なうことができるので、オペレータによる操
作がきわめて容易であり、また加熱、冷却を交互に行な
わせる手段を備えているので、試料に対する加熱、冷却
を精度よ(実施することができる。
According to the present invention, it is possible to operate a heating and cooling device for a sample without moving the sample, so operation by an operator is extremely easy, and since a means for alternately heating and cooling is provided, Heating and cooling of samples can be performed with precision.

【図面の簡単な説明】[Brief explanation of the drawing]

゛第1図は本発明に係る加熱冷却装置の本体部分の一実
施例を部分的に断面して示した側面図、第2図は本発明
に係る装置の全体構成を示した回路図、第3図はジャケ
ットの構成を示した斜視図、第4図はジャケットの温度
変化の態様を例示した図である。 l・・・試料収納部、2・・・蓋体、3・・・断熱ケー
ス、4・・・ジャケット、5・・・試料収納孔、6,7
.8・・・溝、9、lO・・・パイプ、11・・・ヒー
タ、12・・・温度センサ、13・・・電磁切換弁、1
5・・・ポンプ、16・・・冷却媒体、17・・・タン
ク、18・・・混合器、2o・・・タイマ、21・・・
ヒータ制御回路。 −31′ 第2図 第3図 第4図 詩 間
゛ Fig. 1 is a partially sectional side view of an embodiment of the main body of the heating/cooling device according to the present invention, Fig. 2 is a circuit diagram showing the overall configuration of the device according to the present invention, FIG. 3 is a perspective view showing the structure of the jacket, and FIG. 4 is a diagram illustrating the mode of temperature change in the jacket. l... Sample storage section, 2... Lid, 3... Heat insulation case, 4... Jacket, 5... Sample storage hole, 6, 7
.. 8... Groove, 9, lO... Pipe, 11... Heater, 12... Temperature sensor, 13... Solenoid switching valve, 1
5...Pump, 16...Cooling medium, 17...Tank, 18...Mixer, 2o...Timer, 21...
Heater control circuit. -31' Figure 2 Figure 3 Figure 4 Poem

Claims (1)

【特許請求の範囲】[Claims] 冷却媒体の流通路とヒータとを配設した試料の収納部と
、上記流通路への上記冷却媒体の供給と上記ヒータへの
電源の供給とを交互に行なわせる手段とを備えてなる試
料の加熱冷却装置。
A sample storage section comprising a sample storage section in which a cooling medium flow path and a heater are arranged, and means for alternately supplying the cooling medium to the flow path and supplying power to the heater. Heating and cooling equipment.
JP22335482A 1982-12-20 1982-12-20 Heating and cooling device for sample Pending JPS59112254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22335482A JPS59112254A (en) 1982-12-20 1982-12-20 Heating and cooling device for sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22335482A JPS59112254A (en) 1982-12-20 1982-12-20 Heating and cooling device for sample

Publications (1)

Publication Number Publication Date
JPS59112254A true JPS59112254A (en) 1984-06-28

Family

ID=16796840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22335482A Pending JPS59112254A (en) 1982-12-20 1982-12-20 Heating and cooling device for sample

Country Status (1)

Country Link
JP (1) JPS59112254A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116744A (en) * 1988-10-26 1990-05-01 Seiko Instr Inc Cooler for heating furnace section of heat analyzer
JPH02218949A (en) * 1989-02-20 1990-08-31 Rigaku Corp Apparatus for heating and cooling thermally analyzing sample
EP0776967A3 (en) * 1986-02-25 1997-09-10 Perkin Elmer Corp Heat exchanger for use in a temperature cycling instrument

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS456157Y1 (en) * 1965-12-27 1970-03-26
JPS56151346A (en) * 1980-04-25 1981-11-24 Toshiba Corp Rapid changing device for fluid temperature

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS456157Y1 (en) * 1965-12-27 1970-03-26
JPS56151346A (en) * 1980-04-25 1981-11-24 Toshiba Corp Rapid changing device for fluid temperature

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0776967A3 (en) * 1986-02-25 1997-09-10 Perkin Elmer Corp Heat exchanger for use in a temperature cycling instrument
JPH02116744A (en) * 1988-10-26 1990-05-01 Seiko Instr Inc Cooler for heating furnace section of heat analyzer
JPH02218949A (en) * 1989-02-20 1990-08-31 Rigaku Corp Apparatus for heating and cooling thermally analyzing sample

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