JPS59107787A - Laser working machine - Google Patents
Laser working machineInfo
- Publication number
- JPS59107787A JPS59107787A JP57217701A JP21770182A JPS59107787A JP S59107787 A JPS59107787 A JP S59107787A JP 57217701 A JP57217701 A JP 57217701A JP 21770182 A JP21770182 A JP 21770182A JP S59107787 A JPS59107787 A JP S59107787A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- gas
- heated
- lens
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
- B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
- B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はレーザ加工機、特に歪みの少ない加工を行ない
得るように改良したレーザ加工機に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser processing machine, and particularly to a laser processing machine that has been improved so as to be able to perform processing with less distortion.
レーザ加工は材質の硬さに影響されない特長があるため
、対象加工物としてセラミック、ガラスなどは特(=好
適で、池の加工法に比較し。Laser processing has the advantage of not being affected by the hardness of the material, so it is particularly suitable for processing materials such as ceramics and glass, compared to Ike's processing method.
高速かつ経済的な加工が可能である。ところがこれらの
物質は熱衝撃に弱く、レーザ加工が本質的に熱加工であ
るため、加工中発生した熱歪みにより対象加工物の破壊
もしくは、脆化を生らかしめ十分子熱し、レーザ加工時
の熱衝撃を軽減するようにすればよい。Fast and economical processing is possible. However, these materials are susceptible to thermal shock, and since laser processing is essentially thermal processing, the thermal strain generated during processing can cause the target workpiece to be destroyed or embrittled, causing sufficient sub-heating to occur during laser processing. Thermal shock can be reduced.
このような観点から本発明は、加工時に対象加工物にい
わゆる補助気体を吹き付けるためのノズルに、簡単な加
熱装置を付加することにより、対象加工物の必要個所を
部分的に予熱し。From this point of view, the present invention adds a simple heating device to a nozzle for spraying so-called auxiliary gas onto the target workpiece during machining, thereby partially preheating the required parts of the target workpiece.
これにより残留歪みの少ないレーザ加工機を得ることを
目的とするものである。The purpose of this is to obtain a laser processing machine with less residual distortion.
一般にレーザ加工を行なう場合、加工部位に補助気体と
呼ばれる気体を高速で吹き付けて行なうことが多い。こ
れは加工中に発生した飛散物を加工点から速やかに除去
し、加工を促進すると同時に、気体の種類を選ぶことに
より化学反応による加工促進という副次的効果も期待で
きるからである。Generally, when performing laser processing, a gas called auxiliary gas is often blown onto the processing area at high speed. This is because scattered substances generated during machining can be quickly removed from the machining point to promote machining, and at the same time, by selecting the type of gas, it can also be expected to have the secondary effect of accelerating machining through chemical reactions.
ここで、吹き付ける補助気体を加熱すれば対象加工物を
予熱することができる。補助気体の加熱場所は気体が噴
射する直前、すなわちノズルの先端附近にするのが特に
好適である。このようにすれば加熱気体は外部に放出さ
れるため。Here, if the auxiliary gas to be blown is heated, the target workpiece can be preheated. It is particularly preferable to heat the auxiliary gas immediately before the gas is injected, that is, near the tip of the nozzle. This way, the heated gas will be released to the outside.
集光レンズなど熱せられることが望ましくない部分が加
熱されることは無い。勿論、必要な予熱を十分に行なう
ため、レーザの出射以前に気体だけ吹き付けるようにし
てもよい。Parts that are not desirable to be heated, such as the condenser lens, are not heated. Of course, in order to sufficiently perform the necessary preheating, only gas may be blown before laser emission.
さらに、ノズル先端は対象加工物にきわめて接近して配
置されているため、加熱部分からの輻射により対象加工
物が予熱される効果もある。Furthermore, since the nozzle tip is arranged very close to the target workpiece, the target workpiece is preheated by radiation from the heated portion.
この効果を加工部位附近に拡大するため加熱先端部を円
板状に広げてもよい。In order to expand this effect near the processing area, the heating tip may be expanded into a disk shape.
以下、この発明の実施例を図面を参照して詳述する。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第1図はこの発明の第一の実施例を示す。1はレーザ、
2はレーザの出力11を集光レンズ3に導くだめの反射
鏡、4は集光レンズを収納し、補助気体12をノズル7
へ導入するための容器、5は加圧補助気体源、8はノズ
ル7を加熱するための電熱ヒータ等による加熱源、6は
容器4にノズル7の熱が伝わるのを防ぐ断熱部。FIG. 1 shows a first embodiment of the invention. 1 is a laser,
2 is a reflector that guides the laser output 11 to the condensing lens 3; 4 houses the condensing lens; and auxiliary gas 12 is directed to the nozzle 7.
5 is a pressurized auxiliary gas source, 8 is a heat source such as an electric heater for heating the nozzle 7, and 6 is a heat insulating portion for preventing the heat of the nozzle 7 from being transmitted to the container 4.
9は対象加工物、10は対象加工物9の移動手段である
。9 is a target workpiece, and 10 is a means for moving the target workpiece 9.
まず、加工に先たち、気体源5より補助気体12が加圧
放出される。気体12は、加熱源8により加熱されたノ
ズル7の先端部を通過する際、加熱され対象加工物9に
吹き付けられ、これを予熱する。気体12はレンズ3附
近を通過する段階では加熱されていないから、集光レン
ズ3.容器4などの温度上昇は無く、逆にこれらを冷却
する機能を合わせ持たせることができる。First, prior to processing, the auxiliary gas 12 is released under pressure from the gas source 5. When the gas 12 passes through the tip of the nozzle 7 heated by the heat source 8, it is heated and blown onto the workpiece 9 to preheat it. Since the gas 12 is not heated when it passes near the lens 3, the gas 12 is not heated when passing near the lens 3. There is no temperature rise in the container 4, etc., and on the contrary, it can also have the function of cooling them.
ノズル7の先端部の面は図示の如く対象加工物9と平行
に拡大されており、そこからの輻射線13により加工物
9は加工点周辺部においてさらに熱せられる。As shown, the surface of the tip of the nozzle 7 is enlarged parallel to the target workpiece 9, and the workpiece 9 is further heated around the processing point by the radiation 13 from there.
このようにして加工開始点において十分予熱された後対
象加工物9にレーザ出力11が照射され加工が開始され
る。対象加工物9は移動手段10により所望の方向へ移
動することで順次加工が行なわれる。この際、いずれの
方向でもあらかじめノズル先端拡大部分により予熱が行
なわれているため、目的とする熱歪みの少ない加工を行
なうことができる。ノズル拡大部分の大きさは、必要と
する予熱温度と移動速度により決定され、移動速度が十
分小さ′ければ本実施例の如くノズル先端部を拡大する
必要もない。After being sufficiently preheated at the processing start point in this manner, the target workpiece 9 is irradiated with the laser output 11 and processing is started. The target workpiece 9 is sequentially processed by moving it in a desired direction by the moving means 10. At this time, since preheating is performed in advance by the enlarged portion of the nozzle tip in either direction, the desired processing with less thermal distortion can be performed. The size of the nozzle enlarged portion is determined by the required preheating temperature and moving speed, and if the moving speed is sufficiently small, there is no need to enlarge the nozzle tip as in this embodiment.
第2図はノズル先端部分の形状を凹面状としたものであ
る。これは、上述、した輻射効果の他。In FIG. 2, the tip of the nozzle has a concave shape. This is in addition to the radiation effect mentioned above.
加熱気体がノズル先端と対象加工物の間に封入される効
果を生むことにより、加工物を必要な範囲に渡りより効
果的に予熱できるようにしたものである。本発明は以上
のような構成に限らず、ノズル先端部を加熱するように
したレーザ加工機はすべて本発明に含まれる。By creating the effect that heated gas is sealed between the nozzle tip and the target workpiece, the workpiece can be preheated more effectively over the necessary range. The present invention is not limited to the configuration described above, and includes all laser processing machines that heat the nozzle tip.
第1図は本発明の一実施例を示す図、第2図は実施例の
特にノズル先端部分に関する池の実施例を示す。
1・・レーザ、2・・・反射鏡、3・・・集光レンズ。
4・・・集光レンズ収納容器、5・・・加圧補助気体。
6・・・断熱部、7・・・ノズル、8・・・加熱源、9
・・・対象加工物、10・・・移動手段。FIG. 1 shows an embodiment of the present invention, and FIG. 2 shows an embodiment of the invention, particularly regarding the nozzle tip portion. 1...Laser, 2...Reflector, 3...Condensing lens. 4... Condensing lens storage container, 5... Pressurized auxiliary gas. 6... Heat insulation part, 7... Nozzle, 8... Heat source, 9
...Target workpiece, 10...Transportation means.
Claims (1)
ズとの間に光通過用の細孔を有する先端を前記対象加工
物の方向に向けて設置されたノズルと、前記ノズルの細
孔を通して補助気体を前記対象加工物に吹き付ける気体
源とからなるレーザ加工機において、前記ノズルの先端
附近に加熱源を設置したことを特徴とするレーザ加工機
。[Claims] 1. A laser and a lens that focuses its output. A nozzle is installed between the target workpiece to be placed near the focal point and the condenser lens, and the tip thereof having a pore for passing light is directed toward the target workpiece, and the pore of the nozzle is A laser processing machine comprising a gas source for spraying auxiliary gas onto the target workpiece, characterized in that a heating source is installed near the tip of the nozzle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57217701A JPS59107787A (en) | 1982-12-14 | 1982-12-14 | Laser working machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57217701A JPS59107787A (en) | 1982-12-14 | 1982-12-14 | Laser working machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59107787A true JPS59107787A (en) | 1984-06-22 |
Family
ID=16708368
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57217701A Pending JPS59107787A (en) | 1982-12-14 | 1982-12-14 | Laser working machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59107787A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0312066A2 (en) * | 1987-10-15 | 1989-04-19 | Etec Systems, Inc. | A guard ring for a differentially pumped seal apparatus |
-
1982
- 1982-12-14 JP JP57217701A patent/JPS59107787A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0312066A2 (en) * | 1987-10-15 | 1989-04-19 | Etec Systems, Inc. | A guard ring for a differentially pumped seal apparatus |
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