JPS59103769U - Molecular beam source cell - Google Patents
Molecular beam source cellInfo
- Publication number
- JPS59103769U JPS59103769U JP19539482U JP19539482U JPS59103769U JP S59103769 U JPS59103769 U JP S59103769U JP 19539482 U JP19539482 U JP 19539482U JP 19539482 U JP19539482 U JP 19539482U JP S59103769 U JPS59103769 U JP S59103769U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- source cell
- beam source
- source material
- cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は分子線結晶成長装置におけるセルと基板との配
置を示す概略図であり、第２図は従来の下向き分子線源
セルの一実施例を示す概略断面図であり、第３図及び第
４図はそれぞれ本考案に係る実施例を示す概略断面図で
ある。
ｌａ、 ｌｂ・・・セル、２・・・基板、３ａ、
３ｂ・・・開口部、４・・・外側セル、５・・・内側セ
ル、６・・・ソース材料、７・・・分子線、８・・・ヒ
ータ、９・・・外側セル、１０・・・内側セル、ｌｌａ
、ｌｌｂ・・・開口部、１２・・・ガリウム源（ソース
材料）、１３・・・嵌合部、１４・・・ヒータ、１５・
・・分子線、１６・・・仕切り板。FIG. 1 is a schematic diagram showing the arrangement of a cell and a substrate in a molecular beam crystal growth apparatus, FIG. 2 is a schematic cross-sectional view showing an example of a conventional downward molecular beam source cell, and FIGS. FIG. 4 is a schematic sectional view showing an embodiment according to the present invention. la, lb...cell, 2...substrate, 3a,
3b... Opening, 4... Outer cell, 5... Inner cell, 6... Source material, 7... Molecular beam, 8... Heater, 9... Outer cell, 10... ...inner cell, lla
, llb...Opening part, 12...Gallium source (source material), 13...Fitting part, 14...Heater, 15...
...Molecular beam, 16...Partition plate.
Claims (1)
つのソース材料収納容器とを含んでなり前記開口部を下
方に該ソース材料収納容器内に収納されたソース材料の
収納が維持きれるようにしたことを特徴とする分子線源
セル。at least one opening for molecular beam flight and at least one
1. A molecular beam source cell comprising: a source material storage container, and the source material stored in the source material storage container can be maintained with the opening downwardly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19539482U JPS59103769U (en) | 1982-12-27 | 1982-12-27 | Molecular beam source cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19539482U JPS59103769U (en) | 1982-12-27 | 1982-12-27 | Molecular beam source cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59103769U true JPS59103769U (en) | 1984-07-12 |
Family
ID=30419663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19539482U Pending JPS59103769U (en) | 1982-12-27 | 1982-12-27 | Molecular beam source cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59103769U (en) |
-
1982
- 1982-12-27 JP JP19539482U patent/JPS59103769U/en active Pending
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