JPS59100145U - Vacuum container sealing device - Google Patents

Vacuum container sealing device

Info

Publication number
JPS59100145U
JPS59100145U JP19511382U JP19511382U JPS59100145U JP S59100145 U JPS59100145 U JP S59100145U JP 19511382 U JP19511382 U JP 19511382U JP 19511382 U JP19511382 U JP 19511382U JP S59100145 U JPS59100145 U JP S59100145U
Authority
JP
Japan
Prior art keywords
vacuum container
sealing device
container sealing
flange portion
fastened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19511382U
Other languages
Japanese (ja)
Inventor
大森 順次
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP19511382U priority Critical patent/JPS59100145U/en
Publication of JPS59100145U publication Critical patent/JPS59100145U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図及び第2図は従来の真空容器のシール装置を示す
断面図、第3図は本考案の真空容器のシール装置の一実
施例を示す断面図である。 1a・・・真空容器のフランジ、1b・・・容器に接続
するフランジ、2・・・ガスケット、3・・・締付ポ、
ルト、4・・・締付ボルト、5・・・シール膜、6・・
・シール溶接。
1 and 2 are sectional views showing a conventional vacuum container sealing device, and FIG. 3 is a sectional view showing an embodiment of the vacuum container sealing device of the present invention. 1a... Flange of the vacuum container, 1b... Flange connected to the container, 2... Gasket, 3... Tightening port,
bolt, 4... tightening bolt, 5... seal membrane, 6...
・Seal welding.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器のフランジ部とこの真空容器に相対して接続す
るフランジ部との間に設けられたガスケットによりシー
ルするものにおいて、ガスケットの内側及び外側の上記
フランジ部を締結するとともに、内側のフランジ部の締
結する部材の露出部に真空シール膜を固着したことを特
徴とする真空容器のシール装置。
In a device that seals with a gasket provided between a flange portion of a vacuum container and a flange portion connected to the vacuum container, the inner and outer flange portions of the gasket are fastened, and the inner flange portion is A sealing device for a vacuum container, characterized in that a vacuum sealing film is fixed to an exposed portion of a member to be fastened.
JP19511382U 1982-12-24 1982-12-24 Vacuum container sealing device Pending JPS59100145U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19511382U JPS59100145U (en) 1982-12-24 1982-12-24 Vacuum container sealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19511382U JPS59100145U (en) 1982-12-24 1982-12-24 Vacuum container sealing device

Publications (1)

Publication Number Publication Date
JPS59100145U true JPS59100145U (en) 1984-07-06

Family

ID=30419163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19511382U Pending JPS59100145U (en) 1982-12-24 1982-12-24 Vacuum container sealing device

Country Status (1)

Country Link
JP (1) JPS59100145U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03145724A (en) * 1989-10-31 1991-06-20 Tokyo Electron Ltd Vacuum device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03145724A (en) * 1989-10-31 1991-06-20 Tokyo Electron Ltd Vacuum device

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