JPS5896295U - magnetic shield - Google Patents
magnetic shieldInfo
- Publication number
- JPS5896295U JPS5896295U JP19108981U JP19108981U JPS5896295U JP S5896295 U JPS5896295 U JP S5896295U JP 19108981 U JP19108981 U JP 19108981U JP 19108981 U JP19108981 U JP 19108981U JP S5896295 U JPS5896295 U JP S5896295U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- plate
- magnetic shield
- soft iron
- magnetic flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来及び本考案の一実施例の磁気シールドの共
通な部分を水子外観斜視図、第２図は第１図の■−■線
に沿う従来の場合の矢視断面図、第３図及び第４図はそ
れぞれ異なる本考案の磁気シールドの実施例を示す断面
図で従来の第２図に相当する部分を示したものである。
１・・・外側シールド、２・・・内側シールド、３゜１
４・！・磁性板、３ａ・・・外側電磁軟鉄板、３ｂ・・
・内側電磁軟鉄板。Fig. 1 is a perspective view of the common parts of the magnetic shields of the conventional and one embodiment of the present invention; Fig. 2 is a sectional view taken along the line ■-■ of Fig. 1; 3 and 4 are sectional views showing different embodiments of the magnetic shield of the present invention, respectively, and show portions corresponding to the conventional FIG. 2. 1...Outer shield, 2...Inner shield, 3゜1
4.!・Magnetic plate, 3a... Outer electromagnetic soft iron plate, 3b...
-Inner electromagnetic soft iron plate.
Claims (1)
び磁束流出面の少なくとも一方の磁性板を１枚板とし、
側面の磁束通過部の磁性板を複数枚の電磁軟鉄板を重ね
合せたものとしたことを特徴とする磁気シールド。 （２）側面の磁束通過部の磁性板は、外側の電磁軟鉄板
を内側の電磁軟鉄板より厚くしたことを特徴とする実用
新案登録請求の範囲第１項記載の磁気シールド。[Claims for Utility Model Registration] (1) In a box-shaped magnetic shield, at least one of the magnetic flux inflow surface and the magnetic flux outflow surface is a single magnetic plate,
A magnetic shield characterized in that the magnetic plate in the magnetic flux passing portion on the side surface is made of a plurality of electromagnetic soft iron plates stacked one on top of the other. (2) The magnetic shield according to claim 1, wherein the magnetic plate of the magnetic flux passage portion on the side surface has an outer electromagnetic soft iron plate thicker than an inner electromagnetic soft iron plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19108981U JPS5896295U (en) | 1981-12-23 | 1981-12-23 | magnetic shield |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19108981U JPS5896295U (en) | 1981-12-23 | 1981-12-23 | magnetic shield |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5896295U true JPS5896295U (en) | 1983-06-30 |
Family
ID=30104572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19108981U Pending JPS5896295U (en) | 1981-12-23 | 1981-12-23 | magnetic shield |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5896295U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020148796A1 (en) * | 2019-01-15 | 2020-07-23 | 株式会社日立ハイテク | Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment |
| JP2023178188A (en) * | 2022-06-02 | 2023-12-14 | 恭胤 高藤 | Shielding vessel |
-
1981
- 1981-12-23 JP JP19108981U patent/JPS5896295U/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020148796A1 (en) * | 2019-01-15 | 2020-07-23 | 株式会社日立ハイテク | Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment |
| JPWO2020148796A1 (en) * | 2019-01-15 | 2021-10-14 | 株式会社日立ハイテク | Electromagnetic field shielding plate, its manufacturing method, electromagnetic field shielding structure, and semiconductor manufacturing environment |
| US20220007556A1 (en) | 2019-01-15 | 2022-01-06 | Hitachi High-Tech Corporation | Electromagnetic Field Shielding Plate, Method for Manufacturing Same, Electromagnetic Field Shielding Structure, and Semiconductor Manufacturing Environment |
| US11690208B2 (en) | 2019-01-15 | 2023-06-27 | Hitachi High-Tech Corporation | Electromagnetic field shielding plate, method for manufacturing same, electromagnetic field shielding structure, and semiconductor manufacturing environment |
| JP2023178188A (en) * | 2022-06-02 | 2023-12-14 | 恭胤 高藤 | Shielding vessel |
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