JPS5896214A - Electrostatic capacity type displacement converter - Google Patents

Abstract

PURPOSE:To lead out a signal, related to a change in electrostatic capacity between electrode bodies, as a signal corresponding to a displacement amount, by constituting a device such that opposing areas of a first and a second electrode body, which can relatively displace and are positioned facing and opposite to each other, is made to vary with a given function characteristic corresponding to a displacement amount. CONSTITUTION:A cut part 22 of a fixed shield plate 20 is formed such that a cut length in a direction of a diameter along a turning direction varies with a given function characteristic, and an electrode sheet 32 of a rotary electrode part 30 is formed in a rectangle. An electrostatic capacity between upper and lower electrode sheet 32 is positioned facing and opposite to a part except the cut part 22. With the rotation, in a clockwise direction, of the electrode sheet 32, the electrostatic capacity between the upper and lower electrode parts 10 and 40 starts to reduce from a state that a side (a) of the electrode sheet 32 makes contact with one end A of the cut part 22, and is minimized under a condition that the side (a) makes contact with the other end B. The rotary angle of the electrode sheet 32 is not limited to maximum 180 deg., but an angle being sufficiently wider than 180 deg. can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement transducer of the Du and Zeng type, in which the displacement transducer-II provides a device that corresponds to a desired O-temporal characteristic with respect to the amount of displacement. ) is ◎ Honey level conversion tmo
- The opposing areas of the nine electrode bodies arranged opposite each other are changed according to the amount of displacement to change the capacitance between the electrode bodies, and the amount of displacement to be measured is detected from the amount of change in capacitance. There are nine capacitive displacement transformers configured to do this.

FIG. 1 is a configuration explanatory diagram showing an example of a conventional ζ0 to 51 scissors arrangement, and shows an example of an angular displacement converter. #11
In the figure, 10 is a lower fixed electrode section, 20 is a fixed middle section, 30 is a rotating electrode section, and 40 is an upper fixed electrode section.

Fixed electrodes @ 10.40 each have a circular O electrode 11
41 is formed, and a rotating electrode part 3011 is formed in the center.
C is provided and the round shaft 31 is inserted through the ninth O through hole 12.42
are provided, and furthermore, O mounting holes 13 to 16 and 43 to 46 are provided near the corners for stacking and assembling the fins into one piece. The middle plate 20 is formed of a conductive layer and has a lower side electrode part 1o1c overlapping and fixed, and has an O through hole in the center for inserting the shaft 31 provided in the rotating electrode part 30. 21, a substantially semicircular cutout 22 is formed concentrically with the through hole 21 in a part of the plane part, and whip holes 23 to 26 are provided near the corners. II@Electric 1i1130 has 11 parts that rotate according to the amount of displacement to be measured, and is composed of a rotating shaft 31) and an electrode [32] that is approximately centrally circular and concentric with the rotating shaft 31. has been done.

These components are as follows: lower electrode section 10→shield plate 20→
Rotating electrode part 30 in the order of rotating electrode part 30 → upper electric W part 40
are rotatably placed on top of each other and integrated.

Note that support plates are superimposed on the lower surface of the electrode section 10C and the upper surface of the electrode section 400, but these are not shown.

However, according to such a configuration, the angle at which the capacitance changes by rotating the electrode section 300 times is 180 degrees at most, and it is impossible to detect an angle of 180 degrees or more.

The present invention solves these drawbacks, and includes a ninth electrode body and a twentieth electrode body that are relatively displaceable and arranged to face each other, and the opposing areas of these electrode bodies are displaceable. It is characterized in that it is formed so as to change with a predetermined functional characteristic depending on the amount of displacement, and is configured to extract a good signal related to the change in capacitance between these electrode bodies as a signal corresponding to the amount of displacement. It is.

FIG. 2 is a configuration explanatory diagram showing one embodiment of the present invention, and parts equivalent to those in FIG. 1 are given the same reference numerals. In the field shown in Fig. 2, the cutout portion 22 of the fixed medium plate 20 is formed so that the cutout length in the radial direction changes with a predetermined number characteristic along the rounding direction with the through hole 21 as the center. ing.

(9) The rotating electrode section 30C1 electrode plate 32 is formed in a rectangular shape.

These components in FIG. 2 are sequentially stacked and integrated so that the rotating electrode s30 can rotate, as in FIG. 1.

The operation of the apparatus O constructed in this way will be explained.

Changes in capacitance between the upper and lower electrode parts 10.40 - If we pay attention to the change in capacitance between the upper and lower electrode parts 10 and 40, we can see that the entire part of the electrode plate 32 is facing the part other than the cutout part 22 of the inner part 20. It reaches a maximum value and remains constant unless a part of the electrode plate 32 faces the cutout 22. Here, the electrode plate 32 is
In the case of this embodiment, 4hC rotating clockwise,
Since the cutout portion 22 is formed by FCS so that the cutout length in the radial direction increases along the rotational direction of the electrode plate 32, the area of the cutout s22 facing the electrode plate 32 increases in the clockwise direction. become. Therefore, the upper and lower electrode parts 10.
The capacitance between the electrode plate 32C) and the cutout part 22
starts decreasing from a good state when it touches one end A, and reaches its minimum when side a touches the other end 1. The rotation angle 0@ of the electrode plate 320 exhibiting such a capacitance change is not limited to a maximum of 180 degrees as in the apparatus shown in FIG. 1, but a sufficiently wider angle than 180 degrees can be obtained.

In addition, in the embodiment shown in FIG. It may also be formed like the pattern of the cutouts 22 of the inner wall plate 20. According to such a configuration, it is possible to omit the intermediate section @20.

In addition, the pattern of the cutout s22 of the interior @20 is not limited to the example, but may be shaped to correspond to various functional characteristics depending on the application.
The shape of the electrode plate 32 does not necessarily have to be rectangular, but may be a fan shape with an inner angle p% smaller than the first @ cow shape.

Further, in the above embodiment, an example of an angular displacement transducer has been described, but a linear displacement transducer can also be realized as shown in FIG. In FIG. 3, 50 is a lower electrode part, 60 is a movable electrode part, and 70 is an upper electrode part. The movable electrode section 60 is disposed between the upper and lower electrode sections 50 and 70 so as to be movable along the longitudinal direction, and moves according to the amount of displacement to be measured. In such a configuration, the upper electrode portion 7
0 and the movable electrode section 60 is the movable electrode section eoo
The upper and lower electrode portions 50 of p1 change depending on the amount of movement.
．． The capacitance between 70 and 70 is changed according to the amount of movement of the movable electrode part eoo. In this case, it may be possible to obtain a functional output by changing the oblique side 71 of the upper electrode part 70 as shown by the broken line.

Further, in the above embodiments, an example is shown in which the electrode portion 1 having a large area is fixed and the electrode portion tS having a small area is moved, but the reverse combination may be used.

As described above, according to the present invention, it is possible to realize a capacitive displacement transducer in which the displacement conversion signal corresponds to the amount of displacement with desired functional characteristics, and the practical effectiveness is great.

[Brief explanation of drawings]

FIG. 1 is a structural explanatory diagram showing an example of a conventional device, FIG. 2 is a structural explanatory diagram showing a first embodiment of the present invention, and FIG. S is a structural explanatory diagram showing another embodiment of the present invention. 10, 40.50.70... Fixed electrode part, 20...
Fixed inner plate, 30.60...Movable electrode part.

Claims (1)

[Claims] 9, which are relatively displaceable and are arranged to face
0 electrode body and a second electrode body, and the opposing area of these electrode bodies O changes with a predetermined a number characteristic according to the amount of displacement, and the 0@ capacitance between these electrode bodies is reduced. A capacitance*displacement converter characterized in that it is configured to output a large signal as a signal corresponding to the amount of displacement.