JPS5892286A - Power source for gas discharge laser - Google Patents
Power source for gas discharge laserInfo
- Publication number
- JPS5892286A JPS5892286A JP19147581A JP19147581A JPS5892286A JP S5892286 A JPS5892286 A JP S5892286A JP 19147581 A JP19147581 A JP 19147581A JP 19147581 A JP19147581 A JP 19147581A JP S5892286 A JPS5892286 A JP S5892286A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- power source
- point
- power supply
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】 本発明はガス放電レーザの電源に関するものである。[Detailed description of the invention] The present invention relates to a power source for a gas discharge laser.
従来のガスレーザ電源は第１図に示すように構成されて
いる。この構成による電気的動作を第２図に示す。第１
図において、直流電源１は抵抗２を経てガス放電レーザ
管３に接続されている。この構成において、電源１の端
子電圧を■。、抵抗２の値をＲとし、放電管３の動作特
性をＴとすれ□ば、これらの動作特性は第２図の電圧電
流特性で直線Ｒと曲線Ｔで示される。第２図において、
横軸は放電電流を、縦軸は放電電圧を示す。曲線Ｔの電
流ゼロの点の電圧ｖｓは放電開始電圧であり、曲線Ｔと
直線Ｒの交点Ｐが実際の動作点である。A conventional gas laser power supply is configured as shown in FIG. The electrical operation of this configuration is shown in FIG. 1st
In the figure, a DC power source 1 is connected to a gas discharge laser tube 3 via a resistor 2. In this configuration, the terminal voltage of power supply 1 is ■. , the value of the resistor 2 is R, and the operating characteristics of the discharge tube 3 are T, these operating characteristics are shown by the straight line R and the curve T in the voltage-current characteristics of FIG. In Figure 2,
The horizontal axis shows the discharge current, and the vertical axis shows the discharge voltage. The voltage vs at the point of zero current on the curve T is the discharge starting voltage, and the intersection P between the curve T and the straight line R is the actual operating point.
点Ｐの電圧ＶＴは放電を維持するだめの放電せの端子電
圧、電流ＩＴはそのときの放電電流である。The voltage VT at point P is the terminal voltage for maintaining the discharge, and the current IT is the discharge current at that time.
レーザ管３の特性は第２図に示すように動作電圧Ｖｒよ
り放電開始電圧ＶＳの方が高いので、放電を開始させそ
のま、動作点Ｐまで移行させるためには抵抗２と電源１
とは以下の条件を満足しなければならない。すなわち、
（１１Ｖ（）はＶｓ より高いこと。As shown in FIG. 2, the characteristic of the laser tube 3 is that the discharge starting voltage VS is higher than the operating voltage Vr. Therefore, in order to start the discharge and continue to move it to the operating point P, a resistor 2 and a power source 1 are required.
must satisfy the following conditions. That is, (11V() is higher than Vs.
（２）Ｐ点においてＲとＴは交わること。(2) R and T intersect at point P.
Ｇ３）ｖＯからＰ点までの範囲でＲ直線は１曲線より上
方にあること。G3) The R straight line must be above one curve in the range from vO to point P.
の３つが最低条件である。These three are the minimum requirements.
しかし、これらを満足させるためには、動作電圧■Ｔよ
りかなり高い電圧Ｖｏの電源１が必要であり、さらにそ
の電圧差に対応する電力、す々わち（Ｖｏ −Ｖ Ｔ）
Ｘ Ｉ Ｔの無効電力を抵抗２が熱消費するので、著
しく効率の悪い電源となってしまう。However, in order to satisfy these requirements, a power supply 1 with a voltage Vo considerably higher than the operating voltage ■T is required, and in addition, the power corresponding to the voltage difference, i.e. (Vo −V T), is required.
Since the resistor 2 consumes heat from the reactive power of the XIT, the power supply becomes extremely inefficient.
本発明はこのような欠点を解消した高能率のガス放電レ
ーザの駆動電源を提供するものであり、以下図面を用い
てその一実施例を詳細に説明する。The present invention provides a highly efficient driving power source for a gas discharge laser that eliminates these drawbacks, and one embodiment thereof will be described in detail below with reference to the drawings.
第３図は本発明の一実施例におけるガス放電レーザ管の
電源装置を示し、図中第１図と同一部分には同一符号を
付して説明を省略する。本実施例の構成は直流電源１（
電圧Ｖ○）に直列に抵抗２（抵抗値Ｒ）とダイオード４
を設け、これにガス放電レーザ管３を接続する。さらに
ダイオード４に並列に、交流電源５（尖頭電圧ｖＯ″）
と抵抗２′（抵抗Ｒ’）の直列回路を接続する。交流電
源６の入力は図では省略しであるが商用電源又は交流発
振器に接続する。FIG. 3 shows a power supply device for a gas discharge laser tube according to an embodiment of the present invention, and the same parts as in FIG. The configuration of this embodiment is the DC power supply 1 (
Resistor 2 (resistance value R) and diode 4 in series with voltage V○)
A gas discharge laser tube 3 is connected to this. Furthermore, in parallel with the diode 4, an AC power supply 5 (peak voltage vO'')
A series circuit of resistor 2' (resistance R') is connected. Although not shown in the figure, the input of the AC power supply 6 is connected to a commercial power supply or an AC oscillator.
第４図は第３図の回路構成の動作説明図である。FIG. 4 is an explanatory diagram of the operation of the circuit configuration of FIG. 3.
図中、第２図と同一部分には同一符号を付して説明を省
略する。Ｒ′は抵抗２′の特性直線、点Ｑは直線ＲとＲ
′の交点である。なお、直流電源１の電圧Ｖ（）はガス
放電レーザ管３の放電開始電圧ｖｓより低くてよい。In the figure, the same parts as in FIG. 2 are given the same reference numerals, and their explanation will be omitted. R' is the characteristic line of resistance 2', and point Q is the line R and R.
′ is the intersection point. Note that the voltage V() of the DC power supply 1 may be lower than the discharge starting voltage vs of the gas discharge laser tube 3.
第３図において、交流電源６の電圧が０のときは、第１
図の従来例と同一の動作をする。交流電源６より電圧ｖ
ｏ“を印加すると、直流電源１の電圧ｖｏに交流電源６
によ４電圧ｖＯ″が重畳されてｖｓ より高い電圧ｖｏ
＋７．／／ が印加できる。したがって、ガス放電レー
ザ管３は放電を開始する。In FIG. 3, when the voltage of the AC power supply 6 is 0, the first
The operation is the same as the conventional example shown in the figure. Voltage v from AC power supply 6
o'' is applied, the voltage vo of the DC power supply 1 is changed to the AC power supply 6.
4 voltage vO'' is superimposed on VS higher voltage vo
+7. // can be applied. Therefore, the gas discharge laser tube 3 starts discharging.
放電の経過は、（Ｖ□ ＋ Ｖ□″）を起点として抵抗
Ｒ′の直線をとおり、点Ｑを経て抵抗Ｈの直線上を移動
し曲線ＴとＲとの交点Ｐで安定放電する。この動作が行
なわれるためには
（１） Ｖ（） ＋ Ｖ（）“がｖｓ より高い。The discharge progresses from (V□ + V□'') as the starting point, passing along the straight line of resistance R', passing through point Q, moving on the straight line of resistance H, and stably discharging at the intersection P of curves T and R. In order for the operation to take place, (1) V() + V()" is higher than vs.
（２）点Ｑは１曲線より上方にある。(2) Point Q is above the first curve.
（３）Ｒ直線は１曲線と交点Ｐをもつ。(3) The R straight line has an intersection point P with one curve.
（４）線分（Ｖ□ ＋ Ｖ□ ’ ） ＱとＱＰとは曲
線Ｔの上方にある。(4) Line segment (V□ + V□') Q and QP are above the curve T.
ことが条件で、これを満足するように電源電圧゛５゜Ｖ
ｏ”、抵抗値Ｒ，Ｒ’を設定すればよい。In order to satisfy this condition, the power supply voltage should be set to 5゜V.
o'' and the resistance values R and R' may be set.
第３図の回路構成によれば無効電力を大巾に減少させる
ことができる。すなわち、無効電力としては、点Ｑの電
圧および電流をそれぞれＶ□ 、 Ｉ ０とすると、
（■ｏ＋ｖｏ″）×ＩＱ＋（ＩＴ−ＩＱ）（ｖＱ−ｖＴ
）となり、第２図の無効電力（Ｖｏ −Ｖ Ｔ） ｘ
ＩＴに比して明らかに小さくなっている。According to the circuit configuration shown in FIG. 3, reactive power can be greatly reduced. That is, as reactive power, if the voltage and current at point Q are V□ and I0, respectively, (■o+vo'')×IQ+(IT-IQ)(vQ-vT
), and the reactive power (Vo -V T) x in Fig. 2 is obtained.
It is clearly smaller than IT.
第６図は本発明の他の実施例を示す。この実施例の第３
図との相違点は交流電源６（電圧ｖｏ′）がガス放電レ
ーザ管−３に並列に接続されていることである。したが
って、この実施例では両室源１゜６の電圧が重畳される
ことはなく、各々がガス放電レーザ３に印加される。こ
こで、電源電圧Ｖ□およびｖｏ′としては、ｖ、’＞Ｖ
ｏなるように選び、更に、ｖｏ′〉ｖｓなるように選ぶ
。このようにすると、放電開始は電源６によって行なわ
れ、その後動作は第３図の場合と同様に行なわれる。す
なわち第６図の動作特性図において、ｖｏ′で放電を開
始し、その後Ｖ。′−直線Ｒり上一点Ｑ−直線Ｒ上一点
ＰとなりＰ点にて安定放電する。このためには、前述と
同様に
（１） Ｖｏ’はｖｓより高い。FIG. 6 shows another embodiment of the invention. The third example of this example
The difference from the figure is that an AC power source 6 (voltage vo') is connected in parallel to the gas discharge laser tube 3. Therefore, in this embodiment the voltages of the two chamber sources 1.6 are not superimposed, but are each applied to the gas discharge laser 3. Here, as the power supply voltages V□ and vo', v,'>V
Select so that o, and further select such that vo′〉vs. In this way, the discharge is started by the power source 6, and thereafter the operation is performed in the same manner as in the case of FIG. That is, in the operating characteristic diagram of FIG. 6, discharge starts at vo', and then V. ' - One point Q on the straight line R - One point P on the straight line R, and a stable discharge occurs at the P point. For this purpose, as described above, (1) Vo' is higher than vs.
（２）Ｑは１曲線より上方にある。(2) Q is above the 1st curve.
（３）Ｒ直線は１曲線と交点Ｐをもつ。(3) The R straight line has an intersection point P with one curve.
（４）線分ｖ（、’ｏとＱＰとは曲線Ｔの上方にある。(4) The line segment v(,'o and QP are above the curve T.
ように電源電圧ｖｏ′、抵抗Ｒ，Ｒ／を設定すればよい
。この実施例においても無効電力は略（Ｖｏ／ＸＩＱ）
＋（ＩＴ−ＩＱ）（ｖＱ−ＶＴ）となり、従来例に比し
て大巾に減少する。The power supply voltage vo' and the resistances R and R/ may be set as follows. In this example as well, reactive power is omitted (Vo/XIQ)
+(IT-IQ)(vQ-VT), which is significantly reduced compared to the conventional example.
以上のように、本発明はガス放電レーザ管の放電電極に
直流放電電圧を供給する直流電源と、これに直列または
並列に交流電圧を印加供給する交流電源を接続したレー
ザ装置であり、直流電圧と交流電圧の和または交流電圧
により放電を開始させ、各電源の出力インピーダンスで
定まる放電特性を経て安定放電を行なわせるようにした
ものであり、無効電力の少ない高い電源効率のレーザ装
置を得ることができる。As described above, the present invention is a laser device in which a DC power supply that supplies a DC discharge voltage to the discharge electrode of a gas discharge laser tube and an AC power supply that applies and supplies an AC voltage in series or parallel to this are connected. Discharge is started by the sum of and AC voltage or by AC voltage, and stable discharge is achieved through discharge characteristics determined by the output impedance of each power source, thereby obtaining a laser device with high power source efficiency and low reactive power. I can do it.
第１図は従来のガス放電レーザの電源装置の結線図、第
２図はその動作説明図、第３図は本発明の一実施例にお
けるガス放電レーザの電源装置の結線図、第４図はその
動作説明図、第６図は本発明の他の実施例の結線図、第
６図はその動作説明図である。
１・・・・・・直流電源、２，２′・・・・・・抵抗、
３・・・・・・放電管、４・・・・・・ダイオード、６
・・・・・・交流電源。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第３
図
２゛
第５図
第６図Fig. 1 is a wiring diagram of a conventional gas discharge laser power supply device, Fig. 2 is an explanatory diagram of its operation, Fig. 3 is a wiring diagram of a gas discharge laser power supply device according to an embodiment of the present invention, and Fig. 4 is a wiring diagram of a gas discharge laser power supply device according to an embodiment of the present invention. FIG. 6 is a wiring diagram of another embodiment of the present invention, and FIG. 6 is an explanatory diagram of the operation. 1...DC power supply, 2, 2'...Resistance,
3...Discharge tube, 4...Diode, 6
······AC source. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 3
Figure 2゛Figure 5Figure 6
Claims (1)
給する直流電源を備え、上記直列電源と直列まだは並列
に交流電圧を供給する交流電源を接続したことを特徴と
するガス放電レーザの電源装置。 ２）交流電源が商用交流電源である特許請求の範囲第１
項記載のガス放電レーザの電源装置。[Scope of Claims] 11) A gas comprising a DC power supply that supplies a DC voltage to a discharge electrode of a gas discharge laser, and an AC power supply that supplies an AC voltage connected in series or in parallel with the series power supply. Discharge laser power supply. 2) Claim 1 in which the AC power source is a commercial AC power source
Power supply device for the gas discharge laser described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19147581A JPS5892286A (en) | 1981-11-27 | 1981-11-27 | Power source for gas discharge laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19147581A JPS5892286A (en) | 1981-11-27 | 1981-11-27 | Power source for gas discharge laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5892286A true JPS5892286A (en) | 1983-06-01 |
Family
ID=16275268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19147581A Pending JPS5892286A (en) | 1981-11-27 | 1981-11-27 | Power source for gas discharge laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5892286A (en) |
-
1981
- 1981-11-27 JP JP19147581A patent/JPS5892286A/en active Pending
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