JPS5888240U - Spin cage device - Google Patents

Spin cage device

Info

Publication number
JPS5888240U
JPS5888240U JP18004481U JP18004481U JPS5888240U JP S5888240 U JPS5888240 U JP S5888240U JP 18004481 U JP18004481 U JP 18004481U JP 18004481 U JP18004481 U JP 18004481U JP S5888240 U JPS5888240 U JP S5888240U
Authority
JP
Japan
Prior art keywords
spin
motor
cage device
cage
spin cage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18004481U
Other languages
Japanese (ja)
Inventor
関　一寿
研一 高橋
幸治 大垣
Original Assignee
富士写真光機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士写真光機株式会社 filed Critical 富士写真光機株式会社
Priority to JP18004481U priority Critical patent/JPS5888240U/en
Publication of JPS5888240U publication Critical patent/JPS5888240U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す斜視図、第２図は本案
装置−を水洗槽に装着した状態を示す断面図である。 １・・・・・・モータ、２・・・・・・モータ取付板、
４・・・・・・回転軸、５・・・・・・スピンケージ、
６・・・・・・円板、７・・・・・・軸、８・・・・・
・キャップ、９・・・・・・ウェハケージ、１２・・・
・・・係合溝、１４・・・・・・回転支持部、２３・・
・・・・ガラス基板、３０・・・・・・水洗槽、３３・
・・・・・回転軸、３５・・・・・・ノズル 水FIG. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a sectional view showing the present device installed in a washing tank. 1...Motor, 2...Motor mounting plate,
4...Rotation axis, 5...Spin cage,
6... Disk, 7... Axis, 8...
・Cap, 9...Wafer cage, 12...
...Engagement groove, 14...Rotation support part, 23...
... Glass substrate, 30 ... Washing tank, 33.
... Rotating axis, 35 ... Nozzle water

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）モータと、このモータを取り付けたモータ取付板
と、一端部に前記モータの出力軸が連結され、他端部に
回転支持部が形成されており、内部にウェハーケージを
出し入れ自在龜収納するスピンケージとからなることを
特徴とするスピンケージ装置。(1) A motor, a motor mounting plate to which the motor is attached, one end of which is connected to the output shaft of the motor, and the other end of which is formed with a rotation support part, and a wafer cage can be freely taken out and stored inside. A spin cage device comprising a spin cage. （２）前記スピンケージは、モータの出力軸に連結され
た円板と、この円板の外周に等間隔で植設、　　　され
た複数本の軸と、これらの軸に着脱自在に嵌合する円板
状のキャップとからなることを特徴とする実用新案登録
請求の範囲第１項記載のスピンケージ装置。(2) The spin cage includes a disc connected to the output shaft of the motor, a plurality of shafts planted at equal intervals on the outer periphery of the disc, and removably fitted to these shafts. The spin cage device according to claim 1, characterized in that the spin cage device comprises a disk-shaped cap. （３）前記軸の先端部に保合溝が形成されており、前記
キャップには軸の先端が挿入される大きな穴と、この穴
に連通しており、前記係合溝に係“合する長孔とが形成
されていることを特徴とする実用新案登録請求の範囲第
２項記載のスピンケージ装置。　　　２(3) A retaining groove is formed at the tip of the shaft, and the cap communicates with a large hole into which the tip of the shaft is inserted, and is engaged with the engaging groove. The spin cage device according to claim 2 of the utility model registration, characterized in that a long hole is formed.
JP18004481U 1981-12-04 1981-12-04 Spin cage device Pending JPS5888240U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18004481U JPS5888240U (en) 1981-12-04 1981-12-04 Spin cage device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18004481U JPS5888240U (en) 1981-12-04 1981-12-04 Spin cage device

Publications (1)

Publication Number Publication Date
JPS5888240U true JPS5888240U (en) 1983-06-15

Family

ID=29976286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18004481U Pending JPS5888240U (en) 1981-12-04 1981-12-04 Spin cage device

Country Status (1)

Country Link
JP (1) JPS5888240U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925928A (en) * 1972-06-10 1974-03-07
JPS54155838A (en) * 1978-05-23 1979-12-08 Fsi Corp Method of and device for developing positive picture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925928A (en) * 1972-06-10 1974-03-07
JPS54155838A (en) * 1978-05-23 1979-12-08 Fsi Corp Method of and device for developing positive picture

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