JPS5884400U - diffusion type pump - Google Patents

diffusion type pump

Info

Publication number
JPS5884400U
JPS5884400U JP18071681U JP18071681U JPS5884400U JP S5884400 U JPS5884400 U JP S5884400U JP 18071681 U JP18071681 U JP 18071681U JP 18071681 U JP18071681 U JP 18071681U JP S5884400 U JPS5884400 U JP S5884400U
Authority
JP
Japan
Prior art keywords
diffusion type
type pump
working fluid
cylindrical container
auxiliary vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18071681U
Other languages
Japanese (ja)
Inventor
洋 菊地
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to JP18071681U priority Critical patent/JPS5884400U/en
Publication of JPS5884400U publication Critical patent/JPS5884400U/en
Pending legal-status Critical Current

Links

Landscapes

  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の拡散型ポンプを示す断面図、第２図第３
図及び第４図は、各々本考案の異なった実施例を示す拡
散型ポンプの断面図である。 １・・・筒形容器、２・・・冷却水管、３・・・ヒータ
ー、４・・・作動液、５・・・バッフル板、６・・・吸
入ガス、７・・・排気ガス、８・・・冷却水管、９・・
・冷却水ジャケット。Figure 1 is a sectional view showing a conventional diffusion pump, Figure 2, Figure 3.
FIG. 4 is a sectional view of a diffusion type pump showing different embodiments of the present invention. DESCRIPTION OF SYMBOLS 1... Cylindrical container, 2... Cooling water pipe, 3... Heater, 4... Working fluid, 5... Baffle plate, 6... Intake gas, 7... Exhaust gas, 8 ...Cooling water pipe, 9...
・Cooling water jacket.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 補助真空ポンプによっである程度真空にされた筒形容器
の中で作動液を加熱して蒸発させ、その蒸気の噴流で気
体分子を補助真空側へ運んでポンプ作用を行なわせるよ
うにした拡散型ポンプにおいて、作動液加熱手段を筒形
容器に対し着脱自在にしたことを特徴とする拡散型ポン
プ。A diffusion type in which the working fluid is heated and evaporated in a cylindrical container that is evacuated to some extent by an auxiliary vacuum pump, and the resulting vapor jet transports gas molecules to the auxiliary vacuum side for pumping action. A diffusion type pump characterized in that a working fluid heating means is detachably attached to a cylindrical container.
JP18071681U 1981-12-04 1981-12-04 diffusion type pump Pending JPS5884400U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18071681U JPS5884400U (en) 1981-12-04 1981-12-04 diffusion type pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18071681U JPS5884400U (en) 1981-12-04 1981-12-04 diffusion type pump

Publications (1)

Publication Number Publication Date
JPS5884400U true JPS5884400U (en) 1983-06-08

Family

ID=29977551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18071681U Pending JPS5884400U (en) 1981-12-04 1981-12-04 diffusion type pump

Country Status (1)

Country Link
JP (1) JPS5884400U (en)

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