JPS5883088U

JPS5883088U - Drying centrifuge

Info

Publication number: JPS5883088U
Application number: JP17814581U
Authority: JP
Inventors: 小林　吉一
Original assignee: 株式会社トミ−精工
Priority date: 1981-11-30
Filing date: 1981-11-30
Publication date: 1983-06-04

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図ａ、　ｂおよび第２−図は、従来の乾燥用達、　
心機を示し、第１図ａおよび第２図は概念断面図、第１
図すは第１図ａの平面図である。第３図は本　　゛考案
による乾燥用遠心機の一実施例を示す概念断面図、第４
図は第３図のロータを示す平面図、第５図は第４図のＡ
−Ａ線断面図、第６図は第４図のＢ−Ｂ線断面図である
。８・・・チャンバー、８ａ・・・Ｍ、９＊ｅｅロータ、
１０・・・シャフト、１１．１１’・・・支持具、１２
・・・シリコンウェハー、１３・・・凹部、１４・・・
段部、１５・・・長孔、１６・・・ボルト、１７・・・
目盛、２０．２２・・・マグネット、２′１・・・駆動
モータ、２３・・・遮蔽板。第２図第３図Figures 1a, b and 2-2 show conventional drying methods,
Figures 1a and 2 are conceptual sectional views;
The figure is a plan view of FIG. 1a. Figure 3 is a conceptual sectional view showing an embodiment of the drying centrifuge according to the present invention;
The figure is a plan view showing the rotor in Figure 3, and Figure 5 is A in Figure 4.
6 is a sectional view taken along line B-B in FIG. 4. 8...chamber, 8a...M, 9*ee rotor,
10...Shaft, 11.11'...Support, 12
... silicon wafer, 13 ... recess, 14 ...
Stepped portion, 15... Long hole, 16... Bolt, 17...
Scale, 20.22... Magnet, 2'1... Drive motor, 23... Shielding plate. Figure 2 Figure 3

Claims

[Scope of utility model registration request]

(1) A rotor that is driven to rotate and a plate surface of this rotor,
A plurality of supports are provided so as to be movable in the radial direction of the rotor and have support portions facing the rotational axis of the rotor, and the supports are moved toward and away from each other to move the material to be dried to the support portions. A drying centrifuge characterized in that the rotor is supported at a central position.

(2) The drying centrifuge according to paragraph (1) of the utility model registration claim, wherein the support portion is formed so that the material to be dried is spaced from the plate surface of the rotor.