JPS588280A - Vacuum type evacuating device - Google Patents

Abstract

PURPOSE:To enable a cryogenic pump to be regenerated by a simple operation, by a method wherein a reversely rotatably cryogenic pump is provided in a vacuum chamber, and a regeneration duct is provided which can make close contact with an evacuating port of the cryogenic pump and can be connected to an evacuating pump for regeneration provided in the exterior of the vacuum chamber. CONSTITUTION:The reversibly rotatable cryogenic pump 2 having the evacuating port 3 directed forwards is provided in the vacuum chamber 1, and the regeneration duct 13 is provided which can make close contact with the port 3 at the time of reversely rotating the pump 2 and can be connected through a vacuum valve 15 to the evacuating pump (not shown) for regeneration provided in the exterior of the vacuum chamber 1. When the evacuating capability of the pump 2 is lowered, the pump 2 is rotated reversely, the port 3 is directed backwards, the regeneration duct 13 is moved forwards tocome in close contact with the port 3, and regeneration of the cryogenic pump 2 is conducted. After the regeneration is completed, the rotation of the pump 2 is reversed again to restart the evacuating operation. Accordingly, the cryogenic pump 2 can be regenerated.

Description

[Detailed Description of the Invention] The present invention is applicable to equipment that requires evacuation of a relatively large capacity of fuel hydrogen, deuterium, tritium and helium mixed gas, etc. for a long period of time in addition to nuclear fusion snow storage. Concerning suitable vacuum evacuation equipment.

Cryopumps are conventionally known as a means of vacuum evacuation, and if a II number of cryopumps are installed, large-capacity evacuation can be performed, but generally the evacuation capacity of cryopumps decreases as the operating time passes. It is necessary to carry out regeneration treatment to gasify and exhaust the accumulated gas. Therefore, a vacuum pulp is installed on the upstream side of each cryopump to maintain the vacuum in the vacuum chamber and without interrupting the evacuation operation. In the case of nuclear fusion devices, for example, it is predicted that there will be two cases.

This invention is like this! ! The purpose of this invention is to provide a large-capacity vacuum evacuation device that is easy to use, and the specific invention is to provide a Talai-o-bump equipped with a forward-facing vacuum exhaust port in a vacuum chamber so as to be able to rotate in reverse. A regeneration duct is provided which can be brought into close contact with the vacuum exhaust port during operation and can be freely communicated with the outdoor regeneration exhaust pump via a vacuum pulp. A plurality of Talio pumps each having a port are provided so that they can be rotated in reverse, and when the reverse I is excited, they can be brought into close contact with the vacuum exhaust port, and can also be freely communicated with the outdoor regeneration exhaust pump via a vacuum pulp. Several regeneration ducts are provided, and the Talai-o-bump and the duct constitute a vacuum exhaust system, and the Talai-o-bump, whose vacuum evacuation capacity has decreased, is rotated in reverse to communicate the regeneration fluid to the pump. 〇 To explain the embodiment of the present invention device with reference to the drawings, (1) is a diameter of about s connected to the expansion vacuum chamber of the device to be fused, etc.
The vacuum chamber of O@, (2) shows a pump equipped with a forward-facing vacuum exhaust port (3), and the pump (2) is connected to the vacuum chamber (1) provided in the vacuum wall (1&) of the vacuum block (1). A lunge (4) and 11 support stands (5j) are rotatably attached to a rotary shaft (6) (6), and one of the rotary shafts (6) is connected to a transmission means (7) such as a belt. The vacuum chamber (
When rotated by the outdoor motor (8) of the pump (2), the vacuum exhaust port (3) of the pump (2) is inverted from a forward-facing state, that is, a state facing inside the vacuum chamber (υ), to a backward-facing state. In the one shown, each support stand (5 bars 5)
The inside of the vacuum chamber (1) is airtight, but the inside of the acid chamber (1) is airtight.
It consists of a hollow casing that communicates with the outside, and each support stand (5 bars, 5
), a distribution pipe (9&) for liquid helium and other refrigerants that circulates the Talaiobump (2), a distribution pipe (!b) and e for regeneration fluids such as liquid nitrogen and helium gas, and each distribution pipe (9m). (?b) and the Tatsuio pump (2) are connected through flexible hoses (10a and 10b), respectively. The fi force is a chevron baffle, and the baffle aυ is a chevron baffle (11 m) suitable for the temperature below 40 to condense hydrogen gas etc. from the vacuum exhaust port (3) of the Cteio pump (2) as shown in Figure S. A chevron baffle (tlb) in front of the Talaiobonpu (2) that has reached a concentration of 700! to 100', which condenses water and other impurities in the chamber, cools the exhaust gas, and blocks radiation from the vacuum chamber walls. However, the baffle (11b) is connected to the Talaio Bonp (2) as shown in the 5th WJ.
The punch in front of the baffle (11 teeth) may be inverted and moved together with the cryo-lamp (2). (13
is 4°m made of activated carbon, solidified argon, etc.:
When the panel a's is cooled by said refrigerant from behind, the gas in the vacuum 11(1) is
&) (1 lb), and the inside of the vacuum chamber (l) is evacuated by condensation and adhesion to the surfaces of the particles.

I is the regeneration duct installed at the rear of Taraio Bonp (2),
A4 is connected to vacuum I! via vacuum 7 tunnel (4). (1) Connection duct connected to the outside regeneration exhaust pump, a! 9 shows a small vacuum pulp interposed in the duct A4, and the regenerating duct is moved forward by a screw pestle or other moving step when the vacuum exhaust port (3) of the Kuzio Bonp (2) is in the backward direction. The exhaust port (3) is connected directly to the exhaust port (3), and a liquid helium at a higher temperature than this, for example, 1000! A regeneration fluid such as helium gas is supplied so that the hydrogen and helium gas generated from the Talaio pump (2) when regenerating the plow are sucked into the regeneration exhaust pump through the regeneration duct 0. If the vacuum II (1) has a large diameter and large capacity as described above, the rotatable Talio pump (2) and the regeneration data) as shown in Figures 3 and 4 were used. If the Talio bombs (2) installed on the vacuum wall (1a) and having a reduced evacuation capacity are sequentially reversed and subjected to the regeneration process as described above, the evacuation action in the vacuum chamber (1) will be interrupted. There is no interruption in the operation of the fusion device, etc. connected to the vacuum chamber (1). aη is a shield of radiant heat from the vacuum chamber walls.

To explain its operation, the cryopump (2), with its vacuum exhaust port (3) facing forward, condenses and adsorbs gas within a vacuum of 1 m (1) and exhausts it, but as its operating time passes, the exhaust capacity decreases. The rotating shaft (6) (6) is rotated in reverse around the center of I so that its vacuum exhaust port (3) faces backward, and at the same time, the regeneration duct I moves forward to the exhaust port (3) and comes into close contact with the exhaust port (3). The gas generated when the regeneration fluid is supplied to the pump (2) for regeneration is absorbed into the regeneration exhaust pump via the opened vacuum pulp a9, and the N production can be performed relatively easily and the regeneration can be performed. Upon completion, the vacuum pulp 4 is closed, and the cryopump (2) is rotated in the opposite direction again, with its vacuum exhaust port (3) facing forward to carry out the vacuum evacuation operation. If the vacuum chamber (1) has a large capacity and multiple sets of cryopumps (2) and regeneration ducts (Q3) are provided, only the cryopumps (2) whose exhaust capacity has decreased can be rotated sequentially and regenerated as described above. The other cryopump (2) can continue evacuation and maintain the vacuum for a long time without lowering the degree of vacuum in the vacuum chamber (1). Attach the baffle (2) to the front of each cryo pump (2) as shown in Figure 5.
If the baffle (11k) is also rotatable in reverse along with the dumper (7), the moisture condensed on the baffle (11k) can be easily regenerated)
It can be excluded via as.

In this way, according to the present invention, there is provided a cryopump that can be inverted and rotated freely in a vacuum chamber, and a cryopump that can be brought into close contact with the vacuum exhaust port of the cryopump and can be connected to an exhaust dump for regeneration outside the room. l
Since the cryopump is provided with a regenerating duct, the cryopump can be regenerated by a relatively simple operation in which the cryopump is reversely rotated and the regenerating duct is placed in close contact with the regenerating duct, and the structure is simple and can be manufactured at low cost. In this case, multiple sets of cryopumps (with freely variable rate plates and regeneration ducts) are installed, and only the cryopumps with reduced pumping capacity are rotated in reverse to regenerate them. It has the advantage of being able to maintain a vacuum over time and provide a vacuum pumping operation without the above-mentioned disadvantages, which is convenient for biofusion devices and the like.

[Brief explanation of drawings]

The 1st WJ is a cut side view of an example of the device of the present invention, the 2nd WJ is a cut side view of its operating state, the 2nd easy line is a cut side view of an example of the 2nd invention, and 4g is its ■-y line cut line Side cross-sectional side view Figure 5 is a cut-away side view of another example. 2
Figure 1 Figure 1a Figure 2 Figure 3-N Figure 4 Procedural Amendment (*Showa 5% August 94a Commissioner of the Japan Patent Office 1, Indication of the case Showa S4 Patent Application No. 104111 No. 2, Invention Name Vacuum Exhaust Device 3, Relationship with the case of the person making the amendment Patent applicant Japan Vacuum Technology Co., Ltd., Date 6, ``Detailed Description of the Invention'' and ``Simplified sharps in the drawings'' of the specification subject to the amendment Column 7, Contents of amendment (1) “Circular liquid...” on page 4, line 18 of the specification
・Correct the text from J to line 19, "Regeneration fluid for..." as follows. Circulation tube for liquid helium refrigerant (9&) and refrigerant such as liquid nitrogen and helium gas (2) On page 5, line 19 of the same page, the following sentence is written after “... becomes a vacuum.” Please note that when solidified argon is used, a separate supply piping is provided. (3) At the beginning of the 7th line of page 6 of the same page, replace ``Tube (9k) J'' with ``Tube (9a)''. ) Corrected to J. (4) In the 5th line of page 9 of the same page, the statement ``S1m is the 1st'' is changed to ``
Figure 5 has been corrected to ``No.''.

Claims (1)

[Scope of Claims] t. A cryopump equipped with a forward-facing vacuum exhaust port is provided in a vacuum chamber so as to be able to rotate freely in reverse, and when the cryopump is rotated in reverse, it can be brought into close contact with the vacuum exhaust port, and the exhaust gas for regeneration outside the room can be freely rotated. 2. A vacuum pump is provided with a regeneration data pump which is freely communicated with a pump via a vacuum pulp. Several pieces of regeneration data F are provided, which can be brought into close contact with the vacuum exhaust port when the cryopump is rotated in reverse, and which can be freely communicated with the outdoor regeneration exhaust pump via vacuum pulp. A cryopump with reduced vacuum evacuation capacity is rotated in reverse to supply regeneration fluid to the cryopump, and the regeneration duct is connected to the regeneration exhaust pump. A vacuum evacuation device/work comprising a vacuum evacuation device/work which is connected to the cryopump.Claim 1 characterized in that the vacuum evacuation port of the cryopump is provided with a double pipe baffle.
The vacuum evacuation device according to item 1 or 2.