JPS5881423A - Purification of sealing gas - Google Patents

Abstract

PURPOSE:To reduce the consumption of a sealing gas, by forcedly recirculating the gas in a chamber through an adsorbing cylinder to keep the purity of the sealing gas in the chamber high. CONSTITUTION:The sealing gas in a chamber 18 filled with said sealing gas from a gas supply pipe 19 is forcedly recirculated through a recirculation pipe 20 by a fan 21 and passed through an adsorbing cylinder 22 filled with an adsorbent and a dehumidifying agent 23 to remove impurities in the gas. Gas sealing parts are introduced into the chamber 18 from a replacing chamber 14 replaced with a sealing gas atmosphere along with a supply jig 13 and assembled by a product. The sealing gas containing impurities such as dust or an org. gas generated during assembling is sucked from an exhaust pipe 27 by an exhaust pump 28 to be discharged into the recirculation pipe 20 and again returned to the chamber 18 to be reutilized while dust or the org. gas is removed by the adsorbing cylinder 22.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for cleaning a containment gas in a chamber for assembling gas containment components.

Fig. 1 is a cross-sectional view showing the schematic structure of an apparatus for carrying out a conventional method for purifying gas for filling, in which 1 is a supply jig for parts for gas filling, 2 is a replacement chamber for gas for filling, and 3 is a replacement chamber. 2 is a gas supply pipe for supplying the filling gas, 4 is an exhaust pipe for exhausting the inside of the displacement chamber 2, 5 is a chamber filled with a constant atmosphere of the filling gas containing a mixed gas, and 6 is a chamber 5
7 is an assembly machine provided in the chamber 5; 8 is an exhaust pipe for exhausting impurities during assembly; 9 is an exhaust pipe provided in the exhaust pipe 8 10 is a circulation pipe for circulating the gas in the chamber 5, 11 is a circulation pump provided in the circulation vibrator 10, and 12 is a filter provided in the middle of the vibrator 10. Note that the filter 12 is a cylinder filled with glass wool, etc. When assembling gas filling parts as a product, this device
First, the gas filling parts are put into the replacement chamber 2 together with the supply jig 1, and the filling gas is supplied from the gas supply pipe 3, and then the gas is exhausted by the exhaust pipe 4. The impure atmosphere in the replacement chamber 2, which is contained together with the encapsulating parts, is replaced with a constant atmosphere of the encapsulating gas, and then the encapsulating gas supplied through the gas supply pipe 6 maintains a constant atmosphere.

The gas filling parts are transported into the chamber 5 together with the supply jig 1, and the gas in the chamber 5 including the replacement chamber 2 is passed through the filter 12 from one end of the circulation pipe 10 by the circulation pump 11. While maintaining the atmosphere in the chamber 5 by returning it from the other end of the circulation pipe 10 into the chamber 5, the gas filling parts are assembled as a product by the assembly machine 7 in the chamber 5, and the gas filling parts are assembled into a product during this assembly. Impurities are exhausted to the outside via an exhaust pipe 8 by an exhaust pump 9.

In this way, the conventional filling gas cleaning method cleans the wax body in the chamber including the replacement chamber by passing it through a filter using a circulation pump, and also removes impurities during assembly from the outside of the chamber using an exhaust pump. However, since the replacement with the filling gas in the replacement chamber is incomplete, there is a drawback that impurities enter the filling gas in the chamber and deteriorate the characteristics of the gas filling parts. In addition, since filters are used for cleaning, only dust-related impurities can be removed, and organic gases generated from equipment such as chambers cannot be removed. Since impurities are discharged to the outside during assembly, there is also the drawback that the amount of gas used for sealing is large.

The present invention aims to solve these drawbacks, and therefore uses an adsorption cylinder filled with a gas adsorbent and a dehumidifying agent, and uses a fan to forcefully circulate the gas in the six chambers, including the exchange chamber. It is characterized by passing through the cylinder to remove impurities other than necessary components.

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 2 is a cross-sectional view schematically showing the construction of an apparatus for carrying out the filling gas cleaning method according to the present invention, in which numeral 13 is a supply jig for gas filling parts, 14 is a replacement chamber for filling gas; The chamber 14 has a structure that can be independently sealed to maintain a pressure higher than the external pressure. 15 is replacement room 14
16 is an exhaust pipe for evacuating the displacement chamber 14; 17 is a vacuum pump installed in the exhaust pipe 16;
When the inside of 4 reaches a specified degree of vacuum, the gas supply pipe 15
A solenoid valve provided in the replacement chamber 14 is opened to supply filling gas into the replacement chamber 14.

Reference numeral 18 denotes a chamber filled with a constant atmosphere of a sealing gas containing a mixed gas, and has a structure that is highly airtight and free from dust, organic gas, and rust. 19 is a gas supply pipe for supplying sealing gas into the chamber 18; 20 is a circulation pipe whose end is placed inside the chamber 17; 21 is a fan located at one end of the circulation pipe 20; 22 is for circulation. This adsorption cylinder is installed in the middle of a pipe 20, and the adsorption cylinder 22 is filled with gas adsorbent and dehumidifier 23 to the extent that the gas for sealing can pass through. A fine filter 23 is provided. 25 is t
An assembly machine disposed in the Yamba 18, 26 a transport jig that automatically transports the gas filling parts together with the supply jig 13 to the assembly machine 25, 27 an exhaust pipe, and 28 an intermediate part of the exhaust pipe 27. One end of the exhaust pipe 27 is located near the assembly machine 25, and the other end is located near the fan 21.
When assembling gas filling parts into a product, this device first moves the gas filling parts together with the supply jig 13 into the replacement chamber 14.
After making the inside of the exchange chamber 14 a specified vacuum state through the exhaust pipe 16 with the vacuum pump 17, the gas supply pipe 15 is
By supplying the filling gas from the inside of the replacement chamber 14, the inside of the replacement chamber 14 is replaced with a constant atmosphere of the filling gas. Then, by forcibly circulating the gas in the chamber 18 filled with the sealing gas supplied from the gas supply pipe 18 via the circulation pipe 20 by the fan 21, the gas passes through the adsorption cylinder 21. Impurities other than the necessary components are removed, and the gas filling parts are placed together with the supply jig 13 from the replacement chamber 14 into the chamber 18 where a constant atmosphere is maintained in this way, and the assembly machine 25 is moved by the transport jig 26. The assembly machine 25 assembles the gas filling parts into a product. The filling gas near the assembly machine 25 containing dust, organic gas, and other impurities generated during this assembly is sucked in from one end of the exhaust pipe 2T by the exhaust pump 28 and circulated from the other end of the exhaust pipe 27. After the dust, organic gas, and other impurities are removed by being discharged into the chamber 20 and sent to the adsorption tube 22 by the fan 21, the zero or more particles are returned to the chamber 17 and reused. In this way, the filling gas in the chamber 17 is purified.In addition, in the embodiment described above, the adsorption cylinder 22 has partition shelves 29 arranged at predetermined intervals inside the adsorption cylinder 22, as shown in FIG. A plurality of gas adsorbents and dehumidifiers 2 are arranged between each partition shelf 29.
3, or as shown in FIG. 3(b), the partition plates 30 are arranged alternately inside, and the gas adsorbent and dehumidifier 23 are filled between each partition plate 30, and the enclosing gas is pass in a meandering manner as shown by an arrow, or
As shown in Figure (c), it is possible to wrap the gas adsorbent and dehumidifier 23 in a rod shape with a wire mesh or the like and fill it inside like a nest of peaks, but the gas adsorbent and dehumidifier 23 can be replaced. In consideration of efficient work, etc., the structure shown in FIG. 3(C) is desirable.

In addition, the gas adsorbent and dehumidifier 2 filled in the adsorption cylinder 22 are
As the gas adsorbent in step 3, synthetic zeolite, activated carbon, etc. may be used, and as the wetting agent, silica gel, activated alumina, activated clay, etc. may be used.

As explained above, the present invention provides a replacement chamber and a chamber with a highly airtight structure, and after exhausting the impurity surrounding air including air in the replacement chamber with a vacuum pump, replaces it with a constant atmosphere using a sealing gas, and The gas inside is passed through the adsorption cylinder by forced circulation by a fan, and the gas adsorbent and dehumidification filled in this adsorption cylinder remove dust and organic gases other than the necessary components. Since the impurities are removed, it is possible to prevent impurities from entering the chamber, and the purity of the filling gas in the chamber can be maintained at a high level, thereby suppressing deterioration of the characteristics of the gas filling parts.

In addition, since the filling gas containing impurities such as organic gas discharged by the exhaust pump during assembly is returned to the chamber after being purified through the adsorption cylinder, the consumption of the filling gas can be reduced. .

In addition, since an adsorption column filled with gas adsorbent and dehumidifier is used, it is possible to remove specific components from the gas enclosed in the chamber including the replacement chamber, and to confirm the components and amounts of removed impurities. This allows for the necessary filling gas components,
Purity etc. can be adjusted arbitrarily, and it can also be used for qualitative and quantitative determination of brought-in components, generated components, etc. other than the gas for sealing.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing a schematic structure of an apparatus for carrying out a conventional method for purifying gas for sealing, and FIG. 2 shows a schematic structure for a device for carrying out a method for cleaning gas for sealing according to an embodiment of the present invention. Cross-sectional views and FIGS. 3(b) and 3(c) are enlarged cross-sectional views showing respective structural examples of the adsorption cylinder used in the present invention. 13... Supply jig 14... Replacement chamber 15. ...Gas supply pipe 16...Exhaust pipe 17...Vacuum pump
18...Chamber 19...Gas supply pipe 20...
・Circulation pipe 21...Fan 22...Adsorption tube 23...Gas adsorbent and dehumidifier 24'...Filter 25...Assembling equipment 26...Transportation jig 27
Exhaust pipe 28... Exhaust pump 29... Partition shelf
30... Partition error patent Applicant: Oki Electric Industry Co., Ltd. Agent Patent attorney: Takashi Kanakura 23- (b)

Claims (1)

[Claims] 1. Using an adsorption cylinder filled with a gas adsorbent and a dehumidifying agent, a circulation pipe in which the adsorption cylinder is placed in the middle, and a fan located at one end of the circulation pipe, the fan Impurities other than necessary components are removed by the gas adsorbent and dehumidifier by forcedly circulating the gas in the chamber including the displacement chamber filled with the inclusion gas containing the mixed gas and passing it through the adsorption column. A method for purifying gas for sealing, characterized by: 2. The method for purifying an expander gas according to claim 1, characterized in that synthetic zeolite and activated carbon are used as gas adsorbents, and silica gel, activated aluminum, and activated clay are used as dehumidifiers. 0