JPS587989A - Solid-state image pickup element and registration adjusting method using it - Google Patents

Abstract

PURPOSE:To make relative positions of two image pickup elements coincident with each other accurately to simplify the registration adjustment, by arranging two, at least, patterns, which are used for the registration adjustment, in the outside of photoelectric conversion faces of solid-state image pickup elements. CONSTITUTION:The incident light is divided into two or more by a resolving optical system having a prism block, and photoelectric conversion faces of solid- state image pickup elements are arranged in positions where respective divided incident lights are focused, thus constituting a solid-state image pickup device. A solid-state image pickup element 11 of this solid-state image pickup device is provided with a photoelectric conversion face 13 and bonding pads 12 for wiring, and two patterns 14 for registration adjustment are arranged on the peripheral outside of the photoelectric conversion face 13. A color filter array 15 is mounted on the surface of a photoelectric conversion face 13' of a solid-state image pickup element 11', and patterns 16 for registration adjustment are arranged in a part of the array 15. Intervals of picture element pitches in the longitudinal or lateral direction of patterns 14 and 16 are shifted for the optical image, thus facilitating the registration adjustment.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a solid-state +1+1 sensor used for solid-state imaging d using a plurality of solid-state imaging devices, and a registration adjustment method using the same.

Since the image pickup tube performs scanning by deflecting the electron beam, it is impossible to avoid the sound of gradual fluctuations due to the deflection characteristics.On the other hand, in the case of a solid-state imaging probe,
Since the deflection characteristics are determined by the stability of the pulse signal, a more stable image can be obtained than with the 44& picture tube. Therefore, imaging using two or more solid-state imaging devices
'#! In the case of a device, if the relative IQ 'if for the optical image of the surface of each solid M image element f can be set, the solid virtual image button () - mechanically fixed and prevented from moving, can be fixed against temperature and other fluctuations. Even cash register storage, / will not cause any misalignment.

This registration adjustment can be reduced to mechanical vertical alignment as described above, so it is observed from the entrance side of the resolving optical system using a microscope, etc., and when two or more solid-state cameras are used, the relative positions of the elements are determined. 5- A method may be used to adjust the relationship to a predetermined value and fix it mechanically. However, when adjusting this relative position to a certain predetermined relationship, it is difficult to do so while observing the photoelectric conversion surface of the solid-state image sensor because the shape of the photoelectric conversion surface is very complicated. It is difficult if In particular, if a mosaic or striped color filter is adhered to the surface of the photoelectric conversion surface, the image becomes even more unclear, making this method impractical.

The purpose of the present invention is to eliminate these drawbacks and furthermore to not only match the relative positions of two or more solid-state D&image elements, but also to
Integer value of pixel interval or 1/2, 1/3 of pixel interval
It is an object of the present invention to provide a solid-state imaging element that can easily be shifted to an interval of 1/equal integer, and a registration adjustment method using this element.

This will be explained in detail below with reference to the drawings.

FIG. 1 is a diagram showing one example of the configuration of the registration adjustment method of the present invention. Figure 1 μ shows the case of a so-called two-plate color imaging device, in which the resolving optical system 2 separates the green light transmitted through the die 2212 surface 5 and the die 221
The light is reflected at the second surface 5 and separated into red light and blue light. The resolving optical system 2 consists of prism lenses 3 and 4. The two-split light V is dazzled in the directions of the arrows, and images are formed on the photoelectric conversion surfaces of the solid-state sensors 6 and 8 of the solid-state sensor 1. A color filter is provided on the surface of the solid-state image sensor 8 to separate red light and blue light for each pixel.
The array is glued. In order to obtain color signals with two VC solid-state image sensors as in this example, it is necessary to ensure that the output signals of the two solid-state image sensors 6.8 are spatially matched and obtained at the same time. . This operation is called total registration John adjustment. To do this, two solid-state cameras are usually used to capture the images formed on the photoelectric conversion surfaces of the probes 6 and 80, and the two solid-state cameras 91! It is necessary to match the relative positions of elements 6 and 8.

Conventionally, the adjustment method for matching the relative positions of the two solid-state mm transducers 6.8 was to observe the output signals of the two solid-state imaging probes using a gold monitor, etc.
In order to match the images of the two solid-state image sensors, a method is used in which the position of one solid-state image sensor is used as a reference, and the relative position of the other solid-state image sensor is adjusted so that the images match. Solid-state l1li image element. :i As mentioned above, unlike the m-body tube, register-john adjustment involves mechanically adjusting the relative position.

If registration adjustment is reduced to mechanical relative position adjustment in this way, it is possible to control the incidence of the resolving optical system 2 without having to reproduce the image on the monitor using the output signals of two solid-state imaging probes as in the conventional method. A microscope 1 is installed on the side, and registration adjustment is performed using this microscope 1 by adjusting the relative positions of the photoelectric conversion surfaces of the two solid-state image sensors 6 and 8 to match or to have a certain fixed relationship. is possible.

Registration style using this method! In the armpit, the photoelectric conversion surface of the solid-state image sensor is directly observed, and because the photoelectric conversion surface has a very complex shape, it is unclear whether the relative positions of the two solid-state image sensors match. However, if a color filter is attached to the surface of one of the solid-state image sensors, the image becomes even more unclear. Therefore, getting used to it is a necessary condition, and it cannot be said to be a very easy method.

In such a case, if it is possible to attach a shape of some kind of cedar on the outside of the photoelectric conversion surface, relatively close to it, in a shape that makes it very easy to perform so-called registration adjustment, registration-john adjustment can be done while observing the shape. , can be done very easily.

FIG. 2 shows a solid-state image sensing device as one example. The solid-state imaging cable 11 has a photoelectric conversion surface 13 and a bonding pad 12 for wiring. At least two registration adjustment figures 14 are attached to the outside of this photoelectric conversion surface 13. The registration adjustment figure 14 can be formed of an aluminum layer or formed without the aluminum layer. Alternatively, the aluminum layer can be formed by intentionally making it uneven. Although other methods are possible, they are clearly within the scope of the present invention.

FIG. 3 shows a solid-state image sensor according to another embodiment. That is, the color filter array 15 is glued to the surface of the photoelectric conversion surface 13' of the solid element 11', and a registration adjustment figure 16 is formed in a part of the color filter array 15. This is the case of a solid-state image sensor. As shown in Figure 3, when a color filter array is bonded or vapor-deposited on the surface of the photoelectric conversion surface of a solid-state imaging element, the registration adjustment figure is not on the color filter array but on the solid-state imaging element. It goes without saying that the embodiment shown in FIG. 2 will be used in the case of .

FIG. 4 shows an example of the registration-john adjustment figure 14 or 16 shown in FIG. 2 or 3. FIG. That is, in FIG. 4, the interval p1 represents one pitch of a pixel column in the horizontal direction, and the interval p2 represents one pitch of a pixel column in the vertical direction.

Also, as shown in the figure, there is p between the line width q1 and the interval pI.
The relationship is +≧91.

FIG. 5 shows one method of performing registration adjustment using the registration adjustment graphic metal illustrated in FIG. , by adjusting the relative positions of each of the registration adjustment figures 14, i5, and 16 shown in FIG. 2 or 3 so that they have the 10- relationship shown in FIG. , 5th
As shown in Figure VC, the optical array of the two solid-state image sensors is spaced horizontally at an interval of half the pixel interval p+, and vertically at the pixel uJl.
At intervals of l'4d p t, in the ZuB ic state, 11
￥tt, t. Figure 5 - (,
4 (i- without staggered between the rectangular planes, l) Only in the horizontal direction, -b squared, the so-called space l
[kl surishi method (vlj eha wa television - wo journal 1
In the example of the method called FIG. 5) in ``Method of 3cc'D color camera'' in July 1997-4PP516-522, if jL is changed to ``small completion ψ'', it becomes simple to non-A'. The two diagrams in FIG. 5 are separated by an incoming line and a dotted line, but the solid line and the dotted line are respectively J and two different solid-state image sensors are shown in the figure J.

Figure 4 shows a small 1c figure, where the horizontal direction VC is a picture, one-half of the 6-column interval p1, and even one pixel can be easily r. It can be easily seen from the shape of the figure that the column spacing p2Q can be easily shifted by 2 strokes or 3 pixels.

FIG. 6 shows an embodiment of a graphic pond for registration adjustment. The four bar patterns 21.22.degree. 23.24 are arranged at intervals of pixels in the horizontal direction. Using such a figure, another solid-state image sensor bar pattern 2
1 is placed exactly between the bar patterns 21 and 22 in FIG.
, the leaves are shifted in the horizontal direction by an interval of two-thirds of the pixel row interval. When the -[- pattern 22 of yet another solid-state image sensor is placed exactly between the bar patterns 22 and 23 in Fig. 6, the relative positional interval between the two solid-state image sensors is 3 minutes of the horizontal pixel row interval This means that it has been shifted by an interval of 1. That is, it is suitable for the color solid-state imaging device disclosed in Japanese Patent Application Laid-Open No. 50-128918. Similarly, if the bar pattern 23 of another solid-state image sensor is placed exactly between the bar patterns 23 and 24 of the 61'A, there will be 4 spaces in the horizontal direction in FIG. I! There is no need to explain that the same effect as 11 element shift can be obtained.
it is obvious.

Next, by using the registration adjustment figure shown in FIG. 7, the registration adjustment is performed so that the pixel column spacing (plTI) is shifted by 1/202 in both the horizontal and vertical directions. I can do this. In other words, so that one of the four window chairs 11 includes the entire cross section of the other solid-state image sensor 7]),
If you adjust it so that it is in the center position, you can achieve the first objective mentioned above. This is patent application No. 5O-43576 (Japanese Patent Application No. 5 O-43576
1-117821) both horizontally and vertically 2
A method of shifting spatial pixels by one-tenth of a pitch can be easily performed. Of course, it is also possible to adjust V in FIG. 7 v'C to shift only one direction (either horizontally or vertically). Then, not only V4p+ or 1/2 of p2 between pixel columns, but also 1 pixel, 1.
It can be easily understood from the shape of the figure that it is also possible to shift by 5 pixels or 2 pixels.

The four pieces in Figure 8148 show an example of the registration adjustment method for the purchased color imaging device shown in Figure 1.i'MA*Mirror image? show. This figure shows that 13-2 solid-state image sensing devices 11 and 11' can be observed overlappingly as the same image. Of the two solid-state image sensors, the one to which the color filter array 15 is glued has the registration adjustment figure 16 only on the color filter A1/I 15-F, and is not on the solid-state image sensor chip. shall be. An example will be shown in which there is no registration adjustment figure on the solid-state imaging device 11 to which one color filter 7 ray is not bonded. One end of the registration adjustment figure 16 on the color filter array 15 is bonded so as to coincide with the opening end of the pixel at the end of the effective 1rlII element read out as a video signal of the solid-state image sensor. The microscope is modified so that the base tIfi line indicated by line 25 in FIG. 8 is observed in the microscope image. The solid-state image sensor 11' is attached to this reference line 25.
Adjust the position of the solid-state image sensor 1/ so that one end of the resistion-joist adjustment figure is in contact with the end of the photoelectric conversion surface 13 that is effectively photoelectrically converted as a video signal of the solid-state image sensor 11. Similarly, if the positions of the solid-state image sensors 11 and 11' are made to coincide with the reference line 25, the relative positional relationship in the horizontal direction with respect to the optical image of the solid-state image sensors 11 and 11' will be completely matched, and the horizontal direction You can adjust the registration.

As explained above, when a solid-state image sensor is attached with a figure for registration adjustment, when performing registration adjustment as a color image sensor, the output 1g of the solid-state image sensor is Shooting i'1! When the elements are mechanically fixed, for example, in a plurality of resolving optical systems, this can be easily done by using a microscope.

Regarding the registration adjustment figures, see Figures 4 and 6.
It is clear from 1 that the present invention is not limited to the embodiments shown in FIGS. Also included in the range is 7Jh.

As for the solid-state image sensor, C is a CCD type, MOS type, CID type, or any other type.
It's obvious.

In addition, the number of solid-state image sensing devices is not limited to two as shown in Figure 1, but is also three, and when using four or more, the registration adjustment figure should be similarly adapted to each case (camera method). It is easy to understand that this allows easy registration adjustment in each case. In this case, a reference solid-state image sensor is determined, and registration adjustment is performed on the other solid-state image sensors in order with respect to that solid-state image sensor, and the relative positions of all solid-state image sensors with respect to the optical image are determined by t! The method is to set and fix the relationship to be Ii constant.

If there is a registration-john adjustment pattern on the chip of the solid-state image sensor as in the embodiment shown in FIG. There is no particular need for a registration adjustment figure on the color filter 7 ray on the surface, and the registration adjustment figure of the solid-state camera chip 5 is made to shine through the pond filter array. It is clear that the same effect can be obtained.

The position of the registration adjustment figure is not limited to the position shown in FIGS. 2 and 3, but is
It is sufficient that they are located outside the t-transform plane and relatively close to each other, and that the number thereof is at least two. It goes without saying that these two figures may be placed anywhere on the table iz6 of the solid-state image sensor as long as they are as far apart as possible.

In addition, in the above explanation, the total registration of two solid-state image sensors l1Ii! Relative position if'fr with respect to the optical image using IE graphics: When aligning by sliding a predetermined interval, we have explained using the entire center, but of course, the complete IC relative position #
It is clear that the method of the present invention can be used even if it is difficult to combine the following.

[Brief explanation of the drawing]

The first disadvantage is the configuration diagram of an embodiment of the camera system of the present invention.
Fig. 2 and Fig. 3 are front views of the solid-state imaging device of the civil engineering invention, Fig. 4, Fig. 6, and Fig. 7 J respectively show the solid-state imaging device of the present invention (of the registration adjustment figure carved in the rectangular element). Figure 5 shows the relative position in the case of registration adjustment where spatial pixel shift is performed. Figure 8 shows the reference line inside the microscope of two solid-state image sensors. A diagram showing the registration adjustment method for IC alignment is shown. Color filter array, 11, 11/
is a solid-state image sensor, 12.12' is a honda pad,
13.13' is a photoelectric conversion surface, 14.16 is a resiston.
John adjustment figure, 15 is the filter 71/a, 17
．． 17'Harare registration style conventional figure, 21, 2
2.23, 24 are bar patterns, and 25 is a reference line within the W1 fine coin. 2) So Sai 1 Figure Sai 3 Mouth t 2 Figure Sai 4 Figure O 5 Figure Sai 6 Figure 21 Z/ Zzu
2nd grade 77 Illustrations 8 Illustrations

Claims (1)

[Claims] 1. A solid state of 2III81 or higher, in which the incident light is divided into two or more parts by a resolving optical system, and a photoelectric conversion surface of a 1r11-body virtual image element is placed in a device in which each incident light forms an image. When using a solid-state imaging device using an imaging device, there are at least two pixels outside the self-effective light-receiving pixels that photoelectrically change the image value. A solid i characterized by having 11 shapes used for registration adjustment of
H image element. 2. Divide the incident light into two or more parts using a decomposition optical system, and place the photoelectric conversion surface of the solid-state IM system in the vertical direction where each incident light corresponds to M1. In the solid-state imaging device used for solid-state imaging, at least one of the 1IJ1 imaging devices has a
The self-solid Gokin integrates a color filter array in which filter elements with different wavelength transmission characteristics are arranged in a mosaic or stripe pattern on the photoelectric conversion surface of Puko, and is an effective light-receiving pixel that photoelectrically converts it into a video signal. A solid-state imaging probe characterized in that at least two graphics used for registration adjustment are written on the outside of the color filter 7 ray. 3. A shape capable of fixing the solid-state image pickup device by shifting the shape used for the registration adjustment by a predetermined interval relative to the optical image in at least one of the vertical and horizontal directions with respect to the pixel pitch. A solid-state imaging bundle according to claims 1 and 2. 4. An aperture of a light-receiving pixel at an end of an effective light-receiving element that photoelectrically converts one end of a figure used for tone adjustment written/studyed on the f* color recording filter array into a video signal of the solid-state image sensor. A solid-state image element according to claim zJi4pζ, in which the ends thereof coincide with each other in a predetermined relationship. 5. Decompose the solid-state imaging probe corresponding to the optical image formed by the two or more lights that have passed through the decomposition optical system that divides the incident light into two or more lights Δ1j. An optical device capable of observing the surface of the image sensor is installed on the personnel side of the optical system, and this optical device is used to observe the surface of two or more of the solid-state image sensors or the filter array according to claim 2. Observe the shapes used for registration adjustment above and find out the relative positions of those shapes? The two or more F
A registration adjustment method characterized by fixing a solid-state image sensor C. 6. At least one of the solid-state imaging elements disposed corresponding to the optical image formed by the two or more elements that is suitable for the separation optical system that separates the incident light into two or more lights is a color filter array The two types of solid-state imaging devices are all installed on the incident side of the resolving optical system, and optical equipment capable of observing the surface of the element is installed.
Color filter - Color filter for a solid-state image sensor having 7Vif - LK - One end of a figure used for registration adjustment and the color filter photoelectrically converts it into a video signal for a solid-state image sensor that does not have an array. A registration adjustment method characterized in that the edges of the light-receiving pixels are aligned with the aperture ends of the light-receiving pixels in a predetermined relationship. 7. In the optical device installed on the incident side of the optical system, an optical element is installed so that the reference line can be observed within the image frame observing the surface of the solid-state imaging probe of the second complement. Align one end of the figure used for registration adjustment on the self-filter array of the solid-state image sensor having the front HU two-color filter 7 array with this reference line, and then align the other solid body without the color filter array with this reference line. The light-receiving pixel at the end of the active light-receiving pixel that photoelectrically converts into the image signal of the imaging probe ii! I
The first aspect of the present invention is characterized in that the relative positions of two or more solid-state imaging cables with respect to the optical images of the photoelectric conversion surfaces are made to coincide with each other in a predetermined relationship by aligning the opening ends of the two or more with the reference line. Registration adjustment method described in section.